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    • 1. 发明授权
    • Electron beam apparatus
    • 电子束装置
    • US07960697B2
    • 2011-06-14
    • US12257304
    • 2008-10-23
    • Zhongwei ChenWeiming RenJoe WangXuedong LiuJuying DouFumin HeFeng CaoYan RenXiaoli GuoWei HeQingpo Xi
    • Zhongwei ChenWeiming RenJoe WangXuedong LiuJuying DouFumin HeFeng CaoYan RenXiaoli GuoWei HeQingpo Xi
    • H01J49/44
    • H01J37/073H01J37/244H01J37/28H01J2237/06341H01J2237/24592
    • The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.
    • 本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。 本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案,在阴极和阳极之间的地电位上施加大的加速电压,将光束极限孔定位在聚光透镜之前,利用聚光透镜激发电流 优化图像分辨率,应用高管偏压缩短电子行进时间,采用和修正SORIL物镜,以改善大视野和电漂移下的像差,并减少水冷物镜在操作材料分析时的紧迫性。 本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。
    • 2. 发明申请
    • 3-DIMENSION NON-BIAS ELECTRETS MULTI-TOUCH DEVICE
    • 三维非偏置电极多触点装置
    • US20100309145A1
    • 2010-12-09
    • US12553008
    • 2009-09-02
    • DAR-MING CHIANGJen-luan ChenShu-ru LinYan-ren Chen
    • DAR-MING CHIANGJen-luan ChenShu-ru LinYan-ren Chen
    • G06F3/041
    • G06F3/046G06F3/047
    • Disclosed is a 3-dimension non-bias electrets multi-touch device, comprising a first electrets thin film providing a first bias electric charge to form an electrostatic field, a first electrode, a second electrode and a controller. The first electrode is attached to the first electrets thin film and outputs a first signal when the electrostatic field is changed by a deformation of the first electrets thin film due to contact pressures of external forces. The second electrode outputs a second signal when the electrostatic field is changed. The first and second electrodes transmit the first and second signals to the controller. The controller is capable to detect and analyze positions where the contact pressures of the external forces are applied and normal vector shifts of the first electrets thin film at the positions.
    • 公开了一种三维非偏置驻极体多点触摸装置,包括提供第一偏置电荷以形成静电场的第一驻极体薄膜,第一电极,第二电极和控制器。 当由于外力的接触压力而使静电场由于第一驻极体薄膜的变形而变化时,第一电极附接到第一驻极体薄膜并输出第一信号。 当静电场改变时,第二电极输出第二信号。 第一和第二电极将第一和第二信号传输到控制器。 控制器能够检测和分析施加外力的接触压力的位置,以及在位置处的第一驻极体薄膜的法向矢量位移。
    • 10. 发明授权
    • Electrostatic electroacoustic transducers
    • 静电电声换能器
    • US08559660B2
    • 2013-10-15
    • US11776555
    • 2007-07-12
    • Dar-Ming ChiangYan-Ren ChenLong-Cheng ChengI-Chen Lee
    • Dar-Ming ChiangYan-Ren ChenLong-Cheng ChengI-Chen Lee
    • H04R25/00
    • H04R19/01
    • An electrostatic electroacoustic device comprising a first electrode configured to receive an audio signal, a second electrode configured to receive the audio signal, a first electret between the first electrode and the second electrode, the first electret including at least one dielectric layer containing electrostatic charges, a second electret between the first electrode and the second electrode, the second electret including at least one dielectric layer containing electrostatic charges, and a conductive layer sandwiched between the first electret and the second electret, the conductive layer, the first electret and the second electret being capable of vibratory motion relative to the first electrode and the second electrode based on the audio signal.
    • 一种静电电声装置,包括被配置为接收音频信号的第一电极,被配置为接收音频信号的第二电极,第一电极和第二电极之间的第一驻极体,所述第一驻极体包括至少一个包含静电电荷的电介质层, 在所述第一电极和所述第二电极之间的第二驻极体,所述第二驻极体包括至少一个包含静电电荷的电介质层,以及夹在所述第一驻极体和所述第二驻极体之间的导电层,所述导电层,所述第一驻极体和所述第二驻极体 能够基于音频信号相对于第一电极和第二电极进行振动运动。