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    • 9. 发明申请
    • MEMORY ARRAY WITH DIODE DRIVER AND METHOD FOR FABRICATING THE SAME
    • 具有二极管驱动器的存储器阵列及其制造方法
    • US20090242865A1
    • 2009-10-01
    • US12060075
    • 2008-03-31
    • Hsiang-Lan LungMin YangThomas D. HappBipin Rajendran
    • Hsiang-Lan LungMin YangThomas D. HappBipin Rajendran
    • H01L47/00H01L21/00
    • H01L27/24
    • A method of fabricating a memory array. The method begins with a structure, generally composed of dielectric fill material and having conductive lines formed at its lower portion, and a sacrificial layer formed on its upper surface. Diodes are formed in the fill material, each diode having a lightly-doped first layer of the same conductivity type as the conductive lines; a heavily doped second layer of opposite conductivity type; and a conductive cap. Self-aligned vias are formed over the diodes. Self-aligned, and self-centered spacers in the self-aligned vias define pores that expose the conductive cap. Memory material is deposited within the pores, the memory material making contact with the conductive cap. A top electrode is formed in contact with the memory material.
    • 一种制造存储器阵列的方法。 该方法由通常由介电填充材料构成并且在其下部形成有导电线的结构和在其上表面上形成的牺牲层开始。 在填充材料中形成二极管,每个二极管具有与导电线相同的导电类型的轻掺杂的第一层; 相反导电类型的重掺杂第二层; 和导电帽。 在二极管上形成自对准的通孔。 自对准和自对准的自对准通孔中的间隔物限定暴露导电盖的孔。 记忆材料沉积在孔内,记忆材料与导电帽接触。 形成与记忆材料接触的顶部电极。