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1. 发明授权

US09673193B2 Manufacturing method for reverse conducting insulated gate bipolar transistor 有权
公开(公告)号：US09673193B2
公开(公告)日：2017-06-06
申请号：US14902519
申请日：2014-08-19
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Shuo Zhang , Qiang Rui , Genyi Wang , Xiaoshe Deng
IPC分类号： H01L27/06 , H01L29/66 , H01L29/739 , H01L21/3065 , H01L21/265 , H01L21/304 , H01L29/10 , H01L29/06
CPC分类号： H01L27/0664 , H01L21/263 , H01L21/26513 , H01L21/304 , H01L21/3065 , H01L29/0638 , H01L29/0834 , H01L29/1095 , H01L29/66333 , H01L29/7395
摘要： A manufacturing method for reverse conducting insulated gate bipolar transistor, the manufacturing method is characterized by the use of polysilicon for filling in grooves on the back of a reverse conducting insulated gate bipolar transistor. The parameters of reverse conducting diodes on the back of the reverse conducting insulated gate bipolar transistor can be controlled simply by controlling the doping concentration of the polysilicon accurately, indicating relatively low requirements for process control. The reverse conducting insulated gate bipolar transistor manufacturing method is relatively low in requirements for process control and relatively small in manufacturing difficulty.

2. 发明授权

US09583587B2 Method for manufacturing injection-enhanced insulated-gate bipolar transistor 有权
标题翻译：制造注入增强绝缘栅双极晶体管的方法
公开(公告)号：US09583587B2
公开(公告)日：2017-02-28
申请号：US14902220
申请日：2014-07-23
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Wanli Wang , Xiaoshe Deng , Genyi Wang , Xuan Huang
IPC分类号： H01L21/33 , H01L21/22 , H01L21/38 , H01L29/66 , H01L29/739 , H01L29/10 , H01L29/06 , H01L21/265 , H01L21/266 , H01L21/225 , H01L21/324
CPC分类号： H01L29/66348 , H01L21/2253 , H01L21/26513 , H01L21/266 , H01L21/324 , H01L29/063 , H01L29/1095 , H01L29/7397
摘要： A method for manufacturing an injection-enhanced insulated-gate bipolar transistor, comprising the following steps: an n-type substrate (12) is provided; a p-type doped layer (14) is formed on the n-type substrate (12); a hard layer (20) is formed on the p-type doped layer (14); a groove (40) extending to the n-type substrate (12) is formed by etching on the p-type doped layer (14); an n-type doped layer (50) is formed on the sidewalls and bottom of the groove (40); the hard layer (20) is removed; p-type impurities of the p-type doped layer (14) and n-type impurities of the n-type doped layer (50) are driven in together, where the p-type impurities are diffused to form a p-type base region (60), and the n-type impurities are diffused to form an n-type buffer layer (70); a gated oxide dielectric layer (80) is formed on the surface of the groove (40); and, a polysilicon layer (90) is deposited in the groove having formed therein the gate oxide dielectric layer (80). In the method for manufacturing the injection-enhanced insulated-gate bipolar transistor, the p-type doped layer (14) and the n-type doped layer (50) are driven in together to form the p-type base region (60) and the n-type buffer layer (70), as only one drive-in process is required, production cycle is shortened in comparison with a conventional method for manufacturing the injection-enhanced insulated-gate bipolar transistor.
摘要翻译：一种用于制造注射增强绝缘栅双极晶体管的方法，包括以下步骤：提供n型衬底（12）; 在n型衬底（12）上形成p型掺杂层（14）。在p型掺杂层（14）上形成硬质层（20）。通过蚀刻在p型掺杂层（14）上形成延伸到n型衬底（12）的沟槽（40）。在凹槽（40）的侧壁和底部上形成n型掺杂层（50）; 去除硬层（20）; p型掺杂层（14）的p型杂质和n型掺杂层（50）的n型杂质一起被驱动，其中p型杂质被扩散以形成p型基极区域（60），并且n型杂质扩散以形成n型缓冲层（70）; 在凹槽（40）的表面上形成栅极氧化物介电层（80）; 并且在其中形成有栅极氧化物介电层（80）的沟槽中沉积多晶硅层（90）。在注入增强型绝缘栅双极晶体管的制造方法中，p型掺杂层（14）和n型掺杂层（50）一起被驱动以形成p型基极区（60）和 n型缓冲层（70）仅需要一个驱动工艺，与用于制造注射增强型绝缘栅双极晶体管的传统方法相比，生产周期缩短。

3. 发明申请

US20160380048A1 METHOD FOR MANUFACTURING INSULATED GATE BIPOLAR TRANSISTOR 有权
标题翻译：制造绝缘栅双极晶体管的方法
公开(公告)号：US20160380048A1
公开(公告)日：2016-12-29
申请号：US14902432
申请日：2014-08-25
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Shengrong Zhong , Dongfei Zhou , Xiaoshe Deng , Genyi Wang
IPC分类号： H01L29/06 , H01L29/739 , H01L29/10 , H01L21/761 , H01L29/16 , H01L29/20 , H01L29/161 , H01L29/04 , H01L29/66 , H01L29/40
CPC分类号： H01L29/0623 , H01L21/761 , H01L29/045 , H01L29/0619 , H01L29/1095 , H01L29/16 , H01L29/1608 , H01L29/161 , H01L29/20 , H01L29/401 , H01L29/407 , H01L29/408 , H01L29/66333 , H01L29/6634 , H01L29/7395 , H01L29/7396
摘要： A method for manufacturing an insulated gate bipolar transistor (100) comprises: providing a substrate (10), forming a field oxide layer (20) on a front surface of the substrate (10), and forming a terminal protection ring (23); performing photoetching and etching on the active region field oxide layer (20) by using an active region photomask, introducing N-type ions into the substrate (10) by using a photoresist as a mask film; depositing and forming a polysilicon gate (31) on the etched substrate (10) of the field oxide layer (20), and forming a protection layer on the polysilicon gate (31); performing junction pushing on an introduction region of the N-type ions, and then forming a carrier enhancement region (41); performing photoetching by using a P well photomask, introducing P-type ions into the carrier enhancement region (41), and performing junction pushing and then forming a P-body region; performing, by means of the polysilicon gate, self-alignment introduction of N-type ions into the P-body region, and performing junction pushing and then forming an N-type heavily doped region; forming sidewalls on two sides of the polysilicon gate, introducing P-type ions into the N-type heavily doped region, and performing junction pushing and then forming a P-type heavily doped region; and removing the protection layer, and then performing introduction and doping of the polysilicon gate. The method reduces a forward voltage drop disposing the carrier enhancement region.
摘要翻译：一种用于制造绝缘栅双极晶体管（100）的方法，包括：提供衬底（10），在衬底（10）的前表面上形成场氧化物层（20），并形成端子保护环（23）; 通过使用有源区光掩模对有源区域氧化物层（20）进行光刻和蚀刻，通过使用光致抗蚀剂作为掩模膜将N型离子引入到衬底（10）中; 在所述场氧化物层（20）的蚀刻衬底（10）上沉积和形成多晶硅栅极（31），并在所述多晶硅栅极（31）上形成保护层; 在N型离子的导入区域上进行接合，然后形成载流子增强区域（41）。通过使用P阱光掩模进行光蚀刻，将P型离子引入载体增强区域（41）中，并执行连接推动然后形成P体区域; 通过多晶硅栅极进行N型离子的自对准引入到P体区域中，并进行结压并形成N型重掺杂区域; 在所述多晶硅栅极的两侧形成侧壁，将P型离子引入所述N型重掺杂区域中，并执行结推进，然后形成P型重掺杂区域; 并去除保护层，然后进行多晶硅栅极的引入和掺杂。该方法减少了设置载流子增强区域的正向压降。

4. 发明授权

US09954074B2 Insulated gate bipolar transistor and manufacturing method therefor 有权
公开(公告)号：US09954074B2
公开(公告)日：2018-04-24
申请号：US14902517
申请日：2014-07-22
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Shengrong Zhong , Xiaoshe Deng , Genyi Wang , Dongfei Zhou
IPC分类号： H01L29/66 , H01L29/40 , H01L29/739 , H01L29/06 , H01L29/10 , H01L21/02 , H01L21/265
CPC分类号： H01L29/66333 , H01L21/02233 , H01L21/26513 , H01L29/0619 , H01L29/1095 , H01L29/402 , H01L29/404 , H01L29/7395
摘要： An insulated gate bipolar transistor and a manufacturing method therefor. The insulated gate bipolar transistor comprises a semiconductor substrate (1) of a first conductive type, which is provided with a first major surface (1S1) and a second major surface (1S2), wherein the semiconductor substrate (1) comprises a primitive cell area (2) and a terminal protection area (4) which is located outside the primitive cell area; a first semiconductor layer (5) of a first conductive type which is formed at the side of the first major surface of the semiconductor substrate (1), wherein the doping concentration of the first semiconductor layer (5) is higher than the doping concentration of the semiconductor substrate (1); and an insulated gate transistor unit which is formed at the side of the first major surface of the first semiconductor layer (5) in the primitive cell area, wherein the insulated gate transistor unit is conducted, a channel of a first conductive type is formed. Compared with the prior art, the present invention not only can improve the voltage resistance reliability of the insulted gate bipolar transistor, but also can reduce the forward conductive voltage drop of the insulated gate bipolar transistor.

5. 发明授权

US09666682B2 Reverse conduction insulated gate bipolar transistor (IGBT) manufacturing method 有权
公开(公告)号：US09666682B2
公开(公告)日：2017-05-30
申请号：US14902302
申请日：2014-09-02
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Wanli Wang , Xiaoshe Deng , Genyi Wang , Qiang Rui
IPC分类号： H01L29/66 , H01L29/739 , H01L29/06 , H01L21/268 , H01L21/324 , H01L29/417 , H01L29/08 , H01L21/265 , H01L21/308
CPC分类号： H01L29/66333 , H01L21/26513 , H01L21/268 , H01L21/308 , H01L21/3247 , H01L29/0657 , H01L29/0696 , H01L29/0834 , H01L29/41716 , H01L29/7395
摘要： A reverse conducting insulated gate bipolar transistor (IGBT) manufacturing method, comprising the following steps: providing a substrate having an IGBT structure formed on the front surface thereof; implanting P+ ions onto the back surface of the substrate; forming a channel on the back surface of the substrate through photolithography and etching processes; planarizing the back surface of the substrate through a laser scanning process to form P-type and N-type interval structures; and forming a back surface collector by conducting a back metalizing process on the back surface of the substrate. Laser scanning process can process only the back surface structure requiring annealing, thus solve the problem of the front surface structure of the reverse conducting IGBT restricting back surface annealing to a low temperature, improving the P-type and N-type impurity activation efficiency in the back surface structure of the reverse conducting IGBT, and enhancing the performance of the reverse conducting IGBT.

6. 发明授权

US09620615B2 IGBT manufacturing method 有权
公开(公告)号：US09620615B2
公开(公告)日：2017-04-11
申请号：US14902516
申请日：2014-07-29
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Xiaoshe Deng , Qiang Rui , Shuo Zhang , Genyi Wang
IPC分类号： H01L21/00 , H01L29/66 , H01L29/739 , H01L21/265 , H01L21/311 , H01L29/06
CPC分类号： H01L29/66333 , H01L21/26513 , H01L21/31111 , H01L29/0611 , H01L29/7395
摘要： An insulated gate bipolar transistor (IGBT) manufacturing method comprises the following steps: providing a semiconductor substrate of a first conducting type, the semiconductor substrate having a first major surface and a second major surface (100); forming a field-stop layer of a second conducting type on the first major surface of the semiconductor substrate (200); growing an oxide layer on the field-stop layer (300); removing the oxide layer from the field-stop layer (400); forming an epitaxial layer on the field-stop layer from which the oxide layer has been removed; and then manufacturing an IGBT on the epitaxial layer (600). Before regular manufacturing of an IGBT, the surface defects of a substrate material are eliminated as many as possible before epitaxy is formed, and the quality of an epitaxial layer is improved, thereby improving the quality of the whole IGBT.

7. 发明申请

US20160372573A1 METHOD FOR MANUFACTURING INJECTION-ENHANCED INSULATED-GATE BIPOLAR TRANSISTOR 有权
标题翻译：制造注射增强型绝缘栅双极晶体管的方法
公开(公告)号：US20160372573A1
公开(公告)日：2016-12-22
申请号：US14902220
申请日：2014-07-23
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Wanli Wang , Xiaoshe Deng , Genyi Wang , Xuan Huang
IPC分类号： H01L29/66 , H01L29/10 , H01L21/324 , H01L21/265 , H01L21/266 , H01L21/225 , H01L29/739 , H01L29/06
CPC分类号： H01L29/66348 , H01L21/2253 , H01L21/26513 , H01L21/266 , H01L21/324 , H01L29/063 , H01L29/1095 , H01L29/7397
摘要： A method for manufacturing an injection-enhanced insulated-gate bipolar transistor, comprising the following steps: an n-type substrate (12) is provided; a p-type doped layer (14) is formed on the n-type substrate (12); a hard layer (20) is formed on the p-type doped layer (14); a groove (40) extending to the n-type substrate (12) is formed by etching on the p-type doped layer (14); an n-type doped layer (50) is formed on the sidewalls and bottom of the groove (40); the hard layer (20) is removed; p-type impurities of the p-type doped layer (14) and n-type impurities of the n-type doped layer (50) are driven in together, where the p-type impurities are diffused to form a p-type base region (60), and the n-type impurities are diffused to form an n-type buffer layer (70); a gated oxide dielectric layer (80) is formed on the surface of the groove (40); and, a polysilicon layer (90) is deposited in the groove having formed therein the gate oxide dielectric layer (80). In the method for manufacturing the injection-enhanced insulated-gate bipolar transistor, the p-type doped layer (14) and the n-type doped layer (50) are driven in together to form the p-type base region (60) and the n-type buffer layer (70), as only one drive-in process is required, production cycle is shortened in comparison with a conventional method for manufacturing the injection-enhanced insulated-gate bipolar transistor.
摘要翻译：一种用于制造注射增强型绝缘栅双极晶体管的方法，包括以下步骤：提供n型衬底（12）; 在n型衬底（12）上形成p型掺杂层（14）。在p型掺杂层（14）上形成硬质层（20）。通过蚀刻在p型掺杂层（14）上形成延伸到n型衬底（12）的凹槽（40）。在凹槽（40）的侧壁和底部上形成n型掺杂层（50）; 去除硬层（20）; p型掺杂层（14）的p型杂质和n型掺杂层（50）的n型杂质一起被驱动，其中p型杂质被扩散以形成p型基极区域（60），并且n型杂质扩散以形成n型缓冲层（70）; 在凹槽（40）的表面上形成栅极氧化物介电层（80）; 并且在其中形成有栅极氧化物介电层（80）的沟槽中沉积多晶硅层（90）。在注入增强型绝缘栅双极晶体管的制造方法中，p型掺杂层（14）和n型掺杂层（50）一起被驱动以形成p型基极区（60）和 n型缓冲层（70）仅需要一个驱动工艺，与用于制造注射增强型绝缘栅双极晶体管的传统方法相比，生产周期缩短。

8. 发明申请

US20160307995A1 INSULATED GATE BIPOLAR TRANSISTOR AND MANUFACTURING METHOD THEREFOR 有权
标题翻译：绝缘栅双极晶体管及其制造方法
公开(公告)号：US20160307995A1
公开(公告)日：2016-10-20
申请号：US14902284
申请日：2014-08-25
申请人： CSMC Technologies Fab1 Co., Ltd.
发明人： Shengrong Zhong , Dongfei Zhou , Xiaoshe Deng , Genyi Wang
IPC分类号： H01L29/06 , H01L29/10 , H01L29/16 , H01L29/66 , H01L29/20 , H01L29/04 , H01L21/761 , H01L29/739 , H01L29/161
CPC分类号： H01L29/0623 , H01L21/761 , H01L29/045 , H01L29/0619 , H01L29/1095 , H01L29/16 , H01L29/1608 , H01L29/161 , H01L29/20 , H01L29/66333 , H01L29/6634 , H01L29/7395 , H01L29/7396
摘要： An insulated gate bipolar transistor (100) is provided. A substrate (10) of the insulated gate bipolar transistor (100) is of an N type. A P-type region (16) is disposed on a back of the N-type substrate. A back metal structure (18) is disposed on a back of the P-type region (16). A terminal protection ring is disposed in a terminal structure. A polysilicon gate (31) is disposed on a front surface of the substrate (10) in an active region. Sidewalls (72) are disposed at two sides of the polysilicon gate (31) on the substrate (10). An interlayer medium (81) covered with the polysilicon gate (31) and the sidewalls (72) is disposed on the substrate (10). The interlayer medium (81) is covered with a metal lead wire layer (91). An N-type carrier enhancement region (41) is disposed in the substrate (10) in the active region. A P-type body region (51) is disposed in the carrier enhancement region (41). An N-type heavily doped region (61) is disposed in the P-type body region (51). A P-type heavily doped region (71) is disposed in the N-type heavily doped region (61). An inward recessed shallow pit (62) with a depth of 0.15 to 0.3 micrometers is formed on a surface of the P-type heavily doped region (71). By disposing the carrier enhancement region (41), the carrier concentration of a channel can be increased and a forward voltage drop can be reduced; in addition, the shallow pit (62) can make a device obtain good impurity distribution and a large metal contact area, thereby improving the performance of the device.
摘要翻译：提供绝缘栅双极晶体管（100）。绝缘栅双极型晶体管（100）的基板（10）为N型。 P型区域（16）设置在N型基板的背面。背面金属结构（18）设置在P型区域（16）的背面。端子保护环设置在端子结构中。在活性区域中的多晶硅栅极（31）设置在基板（10）的前表面上。侧壁（72）设置在基板（10）上的多晶硅栅极（31）的两侧。覆盖有多晶硅栅极（31）和侧壁（72）的层间介质（81）设置在基板（10）上。层间介质（81）被金属引线层（91）覆盖。在有源区域中的衬底（10）中设置有N型载流子增强区（41）。 P型体区域（51）设置在载体增强区域（41）中。 N型重掺杂区域（61）设置在P型体区域（51）中。 P型重掺杂区域（71）设置在N型重掺杂区域（61）中。在P型重掺杂区域（71）的表面上形成深度为0.15至0.3微米的向内凹入的浅凹坑（62）。通过设置载流子增强区域（41），可以增加沟道的载流子浓度并且可以减小正向压降; 此外，浅坑（62）可以使器件获得良好的杂质分布和大的金属接触面积，从而提高器件的性能。

9. 发明授权

US10084036B2 Insulated gate bipolar transistor and manufacturing method therefor 有权
公开(公告)号：US10084036B2
公开(公告)日：2018-09-25
申请号：US15840791
申请日：2017-12-13
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Shengrong Zhong , Dongfei Zhou , Xiaoshe Deng , Genyi Wang
IPC分类号： H01L21/338 , H01L21/336 , H01L29/06 , H01L29/16 , H01L21/761 , H01L29/04 , H01L29/161 , H01L29/20 , H01L29/10 , H01L29/739 , H01L29/66
CPC分类号： H01L29/0623 , H01L21/761 , H01L29/045 , H01L29/0619 , H01L29/1095 , H01L29/16 , H01L29/1608 , H01L29/161 , H01L29/20 , H01L29/66333 , H01L29/6634 , H01L29/7395 , H01L29/7396
摘要： An insulated gate bipolar transistor (100) is provided. A substrate (10) of the insulated gate bipolar transistor (100) is of an N type. A P-type region (16) is disposed on a back of the N-type substrate. A back metal structure (18) is disposed on a back of the P-type region (16). A terminal protection ring is disposed in a terminal structure. A polysilicon gate (31) is disposed on a front surface of the substrate (10) in an active region. Sidewalls (72) are disposed at two sides of the polysilicon gate (31) on the substrate (10). An interlayer medium (81) covered with the polysilicon gate (31) and the sidewalls (72) is disposed on the substrate (10). The interlayer medium (81) is covered with a metal lead wire layer (91). An N-type carrier enhancement region (41) is disposed in the substrate (10) in the active region. A P-type body region (51) is disposed in the carrier enhancement region (41). An N-type heavily doped region (61) is disposed in the P-type body region (51). A P-type heavily doped region (71) is disposed in the N-type heavily doped region (61). An inward recessed shallow pit (62) with a depth of 0.15 to 0.3 micrometers is formed on a surface of the P-type heavily doped region (71). By disposing the carrier enhancement region (41), the carrier concentration of a channel can be increased and a forward voltage drop can be reduced; in addition, the shallow pit (62) can make a device obtain good impurity distribution and a large metal contact area, thereby improving the performance of the device.

10. 发明授权

US09881994B2 Insulated gate bipolar transistor and manufacturing method therefor 有权
公开(公告)号：US09881994B2
公开(公告)日：2018-01-30
申请号：US14902284
申请日：2014-08-25
申请人： CSMC TECHNOLOGIES FAB1 CO., LTD.
发明人： Shengrong Zhong , Dongfei Zhou , Xiaoshe Deng , Genyi Wang
IPC分类号： H01L21/332 , H01L29/06 , H01L29/66 , H01L29/739 , H01L29/10 , H01L21/761 , H01L29/04 , H01L29/16 , H01L29/161 , H01L29/20
CPC分类号： H01L29/0623 , H01L21/761 , H01L29/045 , H01L29/0619 , H01L29/1095 , H01L29/16 , H01L29/1608 , H01L29/161 , H01L29/20 , H01L29/66333 , H01L29/6634 , H01L29/7395 , H01L29/7396
摘要： An insulated gate bipolar transistor (100) is provided. A substrate (10) of the insulated gate bipolar transistor (100) is of an N type. A P-type region (16) is disposed on a back of the N-type substrate. A back metal structure (18) is disposed on a back of the P-type region (16). A terminal protection ring is disposed in a terminal structure. A polysilicon gate (31) is disposed on a front surface of the substrate (10) in an active region. Sidewalls (72) are disposed at two sides of the polysilicon gate (31) on the substrate (10). An interlayer medium (81) covered with the polysilicon gate (31) and the sidewalls (72) is disposed on the substrate (10). The interlayer medium (81) is covered with a metal lead wire layer (91). An N-type carrier enhancement region (41) is disposed in the substrate (10) in the active region. A P-type body region (51) is disposed in the carrier enhancement region (41). An N-type heavily doped region (61) is disposed in the P-type body region (51). A P-type heavily doped region (71) is disposed in the N-type heavily doped region (61). An inward recessed shallow pit (62) with a depth of 0.15 to 0.3 micrometers is formed on a surface of the P-type heavily doped region (71). By disposing the carrier enhancement region (41), the carrier concentration of a channel can be increased and a forward voltage drop can be reduced; in addition, the shallow pit (62) can make a device obtain good impurity distribution and a large metal contact area, thereby improving the performance of the device.

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