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    • 5. 发明申请
    • DRAIN EXTENDED MOS TRANSISTOR AND METHOD FOR FABRICATING THE SAME
    • 漏极扩展MOS晶体管及其制造方法
    • US20130168766A1
    • 2013-07-04
    • US13543252
    • 2012-07-06
    • Hee Bae LEEChoul Joo Ko
    • Hee Bae LEEChoul Joo Ko
    • H01L29/78H01L21/336
    • H01L29/1083H01L21/266H01L29/66659H01L29/7835
    • A drain extended MOS (DEMOS) transistor including at least one of: (1) A p-type epitaxial layer grown over an n-type semiconductor substrate. (2) An n-type well formed in a portion of the epitaxial layer. (3) A p-type drift region formed in another portion of the epitaxial layer. (4) A p-type source region formed in the well. (5) A p-type drain region formed in the drift region and spaced apart from the source region inside the epitaxial layer. (6) An n-type channel region extending between the drift region and the source region. (7) A gate structure formed over the channel region. (8) An n-type buried layer having a contact surface with the well and the drift region and formed in the epitaxial layer. A region of the buried layer has surface contact with the drift region and has a relatively low dopant concentration compared to other regions.
    • 一种漏极扩展MOS(DEMOS)晶体管,包括以下中的至少一个:(1)在n型半导体衬底上生长的p型外延层。 (2)在外延层的一部分中形成的n型阱。 (3)形成在外延层的另一部分中的p型漂移区。 (4)在井中形成的p型源区。 (5)形成在漂移区中并与外延层内的源极区隔开的p型漏极区。 (6)在漂移区域和源极区域之间延伸的n型沟道区域。 (7)形成在通道区域上的栅极结构。 (8)具有与阱和漂移区的接触面并形成在外延层中的n型掩埋层。 掩埋层的区域与漂移区域具有表面接触,并且与其它区域相比具有相对较低的掺杂剂浓度。
    • 9. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US07687363B2
    • 2010-03-30
    • US11639928
    • 2006-12-15
    • Choul Joo Ko
    • Choul Joo Ko
    • H01L21/336
    • H01L29/6656H01L29/665H01L29/6659H01L29/7836
    • Disclosed is a method of manufacturing a semiconductor device, which includes the steps of: forming a high-voltage well region (e.g., by implanting impurity ions into a semiconductor substrate and then annealing); forming an isolation layer on the semiconductor substrate; implanting impurity ions into the high-voltage well region, thereby forming a low-voltage well region within the high-voltage well region; forming a gate electrode on the semiconductor substrate; and implanting impurity ions using the gate electrode as a mask, thereby forming source/drain regions within the low-voltage well region.
    • 公开了一种制造半导体器件的方法,其包括以下步骤:形成高电压阱区(例如,通过将杂质离子注入到半导体衬底中然后退火); 在所述半导体衬底上形成隔离层; 将杂质离子注入高电压阱区,从而在高电压阱区内形成低电压阱区; 在半导体衬底上形成栅电极; 以及使用栅极电极作为掩模注入杂质离子,从而在低电压阱区域内形成源极/漏极区域。
    • 10. 发明授权
    • Lateral double diffused metal oxide semiconductor device and method for manufacturing the same
    • 横向双扩散金属氧化物半导体器件及其制造方法
    • US09048132B2
    • 2015-06-02
    • US13476583
    • 2012-05-21
    • Choul Joo Ko
    • Choul Joo Ko
    • H01L29/66H01L29/10H01L29/78H01L29/423H01L29/08
    • H01L29/1083H01L29/0847H01L29/1087H01L29/42368H01L29/66659H01L29/7835
    • An LDMOS device includes a second conduction type buried layer, a first conduction type drain extension region configured to be formed on and/or over a region of the second conduction type buried layer, a second conduction type drain extension region configured to be formed in a partial region of the first conduction type drain extension region, a first conduction type body, a first guard ring configured to be formed around the second conduction type drain extension region and configured to include a second conduction type impurity layer, and a second guard ring configured to be formed around the first guard ring and configured to include a high-voltage second conduction type well and a second conduction type impurity layer. Further, the second conduction type impurity layer of the first guard ring and the second conduction type impurity layer of the second guard ring operate as an isolation.
    • LDMOS器件包括第二导电型掩埋层,被配置为形成在第二导电型掩埋层的区域上和/或之上的第一导电型漏极延伸区域,被配置为形成在第二导电型漏极延伸区域中的第二导电型漏极延伸区域 第一导电型漏极延伸区域的部分区域,第一导电型体,被配置为围绕第二导电类型漏极延伸区域形成并被构造为包括第二导电类型杂质层的第一保护环和被配置为包括第二导电型漏极延伸区域的第二保护环 形成在第一保护环周围并被构造成包括高压第二导电型阱和第二导电类型杂质层。 此外,第一保护环的第二导电类型杂质层和第二保护环的第二导电类型杂质层作为隔离来操作。