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    • 5. 发明申请
    • Apparatus for Measuring Electric Characteristics of Semiconductor
    • 用于测量半导体电气特性的装置
    • US20080018323A1
    • 2008-01-24
    • US11661219
    • 2005-08-25
    • Toshiyuki SamejimaHajime Watakabe
    • Toshiyuki SamejimaHajime Watakabe
    • G01R31/26
    • G01R31/2648H02S50/10
    • An apparatus for measuring electric characteristics of a semiconductor includes a light irradiating means for irradiating light to a characteristic measured semiconductor, an alternating-current voltage source, an electric potential measuring means and an impedance regulator wherein impedance is regulated by an impedance regulator in such a manner that electric potential at an electric potential measuring point of the characteristic measured semiconductor may become zero electric potential in the state in which light is not irradiated on the characteristic measured semiconductor by the light irradiating means. Electric characteristics of the characteristic measured semiconductor are measured based on measurement of electric potential obtained with or without irradiation of light onto the characteristic measured semiconductor. With this arrangement, semiconductor electric characteristics can be measured with high accuracy by a simple arrangement.
    • 用于测量半导体的电特性的装置包括用于将光照射到特性测量半导体的光照射装置,交流电压源,电位测量装置和阻抗调节器,其中阻抗由这样的阻抗调节器 在光照射装置不对特征测量半导体照射光的状态下,特性测量半导体的电位测量点的电位可能变为零电位。 基于特性测量半导体的光照射光电位的测定,测定特性测量半导体的电特性。 利用这种布置,可以通过简单的布置以高精度测量半导体电特性。
    • 7. 发明授权
    • Apparatus for measuring electric characteristics of semiconductor
    • 用于测量半导体电气特性的装置
    • US07573271B2
    • 2009-08-11
    • US11661219
    • 2005-08-25
    • Toshiyuki SamejimaHajime Watakabe
    • Toshiyuki SamejimaHajime Watakabe
    • G01R31/00G01R31/302
    • G01R31/2648H02S50/10
    • An apparatus for measuring electric characteristics of a semiconductor includes a light irradiating means for irradiating light to a characteristic measured semiconductor, an alternating-current voltage source, an electric potential measuring means and an impedance regulator wherein impedance is regulated by an impedance regulator in such a manner that electric potential at an electric potential measuring point of the characteristic measured semiconductor may become zero electric potential in the state in which light is not irradiated on the characteristic measured semiconductor by the light irradiating means. Electric characteristics of the characteristic measured semiconductor are measured based on measurement of electric potential obtained with or without irradiation of light onto the characteristic measured semiconductor. With this arrangement, semiconductor electric characteristics can be measured with high accuracy by a simple arrangement.
    • 用于测量半导体的电特性的装置包括用于将光照射到特性测量半导体的光照射装置,交流电压源,电位测量装置和阻抗调节器,其中阻抗由这样的阻抗调节器调节 在光照射装置不对特征测量半导体照射光的状态下,特性测量半导体的电位测量点的电位可能变为零电位。 基于特性测量半导体的光照射光电位的测定,测定特性测量半导体的电特性。 利用这种布置,可以通过简单的布置以高精度测量半导体电特性。