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    • 5. 发明申请
    • NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
    • 非易失性存储器件及其制造方法
    • US20120299087A1
    • 2012-11-29
    • US13334017
    • 2011-12-21
    • Han-Soo JOOYu-Jin PARK
    • Han-Soo JOOYu-Jin PARK
    • H01L29/792H01L21/336
    • H01L29/66833H01L27/11582H01L29/7926
    • A non-volatile memory device includes gate structures including first insulation layers that are alternately stacked with control gate layers over a substrate, wherein the gate structures extend in a first direction, channel lines that each extend over the gate structures in a second direction different from the first direction, a memory layer formed between the gate structures and the channel lines and arranged to trap charges by electrically insulating the gate structures from the channel lines, bit line contacts forming rows that each extend in the first direction and contacting top surfaces of the channel lines, source lines that each extend in the first direction and contact the top surfaces of the channel lines, wherein the source lines alternate with the rows of bit line contacts, and bit lines that are each formed over the bit line contacts and extend in the second direction.
    • 非易失性存储器件包括栅极结构,其包括在衬底上交替层叠有控制栅极层的第一绝缘层,其中栅极结构沿第一方向延伸,沟道线分别在不同于第二方向的第二方向上延伸到栅极结构上 第一方向,形成在栅极结构和沟道线之间的存储层,并被布置成通过将栅极结构与沟道线电绝缘来捕获电荷,位线触点形成行,其各自沿第一方向延伸并接触第一方向的顶表面 通道线,源极线,其各自在第一方向上延伸并接触通道线的顶表面,其中源极线与位线接触行交替,并且位线位于位线上并且在第 第二个方向。