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1. 发明授权

US09190360B2 Photoresist collapse method for forming a physical unclonable function 有权
标题翻译：用于形成物理不可克隆功能的光刻胶折叠法
公开(公告)号：US09190360B2
公开(公告)日：2015-11-17
申请号：US14181960
申请日：2014-02-17
申请人： International Business Machines Corporation
发明人： Kai D. Feng , Wai-Kin Li , Ping-Chuan Wang , Zhijian Yang
IPC分类号： H01L21/66 , H01L23/544 , H01L21/3105 , H01L23/522 , H01L23/538
CPC分类号： H01L21/32139 , G09C1/00 , H01L21/0273 , H01L21/31058 , H01L21/31138 , H01L21/31144 , H01L21/76816 , H01L21/76885 , H01L22/34 , H01L23/522 , H01L23/5221 , H01L23/5226 , H01L23/5228 , H01L23/528 , H01L23/5386 , H01L23/544 , H01L23/57 , H01L2223/54433 , H01L2223/5444 , H01L2223/5448 , H01L2224/05097 , H04L9/3278 , H04L2209/12
摘要： An organic material layer is lithographically patterned to include a linear array portion of lines and spaces. In one embodiment, the organic material layer can be an organic planarization layer that is patterned employing a photoresist layer, which is consumed during patterning of the organic planarization layer. Volume expansion of the organic planarization layer upon exposure to a halogen-including gas causes portions of the linear array to collapse at random locations. In another embodiment, the height of the photoresist layer is selected such that the linear array portion of the photoresist layer is mechanically unstable and produces random photoresist collapses. The pattern including random modifications due to the collapse of the organic material layer is transferred into an underlying layer to generate an array of conductive material lines with random electrical disruption of shorts or opens. The structure with random shorts can be employed as a physical unclonable function.
摘要翻译：有机材料层被光刻图案化以包括线和空间的直线阵列部分。在一个实施例中，有机材料层可以是利用在有机平坦化层的图案化期间消耗的光致抗蚀剂层进行图案化的有机平坦化层。有机平面化层在暴露于含卤素气体时的体积膨胀导致线性阵列的部分在随机位置崩溃。在另一个实施方案中，选择光致抗蚀剂层的高度，使得光致抗蚀剂层的线性阵列部分在机械上不稳定并产生随机光刻胶塌陷。由于有机材料层的崩溃引起的包括随机修饰的图案被转移到下层中，以产生具有短路或开放的随机电气中断的导电材料线的阵列。具有随机短路的结构可用作物理不可克隆功能。

2. 发明授权

US09103855B2 Radiation signal measurement system for millimeter wave transceivers 有权
标题翻译：毫米波收发器辐射信号测量系统
公开(公告)号：US09103855B2
公开(公告)日：2015-08-11
申请号：US13650487
申请日：2012-10-12
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Randall M. Burnett, II , Hanyi Ding , Kai D. Feng , Donald J. Papae , Francis F. Szenher
IPC分类号： G01S7/40 , G01R29/08 , G01S3/02
CPC分类号： G01R29/0821 , G01S3/023 , G01S2007/4086
摘要： A radiation signal measurement system for millimeter wave transceivers is disclosed. Embodiments of the present invention utilize a laser to align the laser with an antenna. The transceiver is then moved into the path of the laser to align the laser with the transceiver. The transceiver or antenna orientation is changed such that the transceiver and antenna face each other, in an aligned position. Millimeter wave absorber material is applied to the inside and outside of the testing chamber to minimize reflections and interference from outside sources.
摘要翻译：公开了一种用于毫米波收发器的辐射信号测量系统。本发明的实施例利用激光将激光与天线对准。然后将收发器移动到激光器的路径中，以将激光器与收发器对准。收发器或天线方向改变，使得收发器和天线在对准的位置彼此面对。将毫米波吸收材料施加到测试室的内部和外部，以最小化来自外部源的反射和干扰。

3. 发明申请

US20140253169A1 BURST NOISE IN LINE TEST 审中-公开
标题翻译：爆发噪音在线测试
公开(公告)号：US20140253169A1
公开(公告)日：2014-09-11
申请号：US13788125
申请日：2013-03-07
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Kai D. Feng , Zhenrong Jin
IPC分类号： G01R31/26
CPC分类号： G01R31/2616
摘要： A type of device (which can be deployed in a semiconductor manufacturing line) determining whether a device-under-test is generating burst noise. A transimpedance amplifier converts a current-based noise signal to a voltage based noise signal to apply the following tests aimed at determining the presence of burst noise: (i) sufficiently wide pulse width in the noise signal; (ii) sufficiently random pulse width in the noise signal; (iii) sufficiently wide pulse separation in the noise signal; (iv) sufficiently random pulse separation in the noise signal; and (v) sufficiently large pulse amplitude (or magnitude) in the noise signal.
摘要翻译：确定被测器件是否产生突发噪声的一种器件（可以部署在半导体生产线中）。跨阻放大器将基于电流的噪声信号转换为基于电压的噪声信号，以应用以下用于确定突发噪声的存在的测试：（i）噪声信号中足够宽的脉冲宽度; （ii）噪声信号中足够随机的脉冲宽度; （iii）噪声信号中足够宽的脉冲间隔; （iv）噪声信号中足够随机的脉冲分离; 和（v）噪声信号中足够大的脉冲振幅（或幅度）。

4. 发明申请

US20140152337A1 STRUCTURE AND METHOD FOR IN-LINE DEFECT NON-CONTACT TESTS 有权
标题翻译：用于在线缺陷非接触测试的结构和方法
公开(公告)号：US20140152337A1
公开(公告)日：2014-06-05
申请号：US13705213
申请日：2012-12-05
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Hanyi Ding , Kai D. Feng , Ping-Chuan Wang , Zhijian Yang
IPC分类号： G01R31/26
CPC分类号： H01L22/14 , G01R31/024 , G01R31/2644 , G01R31/2884 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： A system, method and apparatus may comprise a wafer having a plurality of spiral test structures located on the kerf of the wafer. The spiral test structure may comprise a spiral connected at either end by a capacitor to allow the spiral test structure to resonate. The spiral structures may be located on a first metal layer or on multiple metal layers. The system may further incorporate a test apparatus having a frequency transmitter and a receiver. The test apparatus may be a sensing spiral which may be placed over the spiral test structures. A controller may provide a range of frequencies to the test apparatus and receiving the resonant frequencies from the test apparatus. The resonant frequencies will be seen as reductions in signal response at the test apparatus.
摘要翻译：系统，方法和装置可以包括具有位于晶片的切口上的多个螺旋测试结构的晶片。螺旋测试结构可以包括在任一端由电容器连接的螺旋，以允许螺旋测试结构共振。螺旋结构可以位于第一金属层上或多个金属层上。该系统还可以包括具有频率发射器和接收器的测试装置。测试装置可以是可以放置在螺旋测试结构上方的感测螺旋。控制器可以向测试设备提供一定范围的频率并从测试设备接收谐振频率。谐振频率将被看作是在测试装置处的信号响应的减小。

5. 发明申请

US20140097858A1 RING OSCILLATOR TESTING WITH POWER SENSING RESISTOR 有权
标题翻译：环形振荡器测试与电力传感电阻
公开(公告)号：US20140097858A1
公开(公告)日：2014-04-10
申请号：US13647719
申请日：2012-10-09
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Hanyi Ding , Kai D. Feng , Hailing Wang , Zhijian Yang
IPC分类号： G01R31/00
CPC分类号： G01R31/2824 , H03K3/0315
摘要： A test circuit for a ring oscillator comprising a plurality of inverting stages includes a power supply, the power supply configured to provide a voltage to the plurality of inverting stages of the ring oscillator at a power output; and a power sensing resistor located between the power output of the power supply and direct current (DC) bias inputs of the inverting stages of the ring oscillator, wherein a signal from the power sensing resistor is configured to be monitored to determine a characteristic of the ring oscillator.
摘要翻译：包括多个反相级的环形振荡器的测试电路包括电源，所述电源被配置为在功率输出时向所述环形振荡器的所述多个反相级提供电压; 以及位于电源的功率输出和环形振荡器的反相级的直流（DC）偏置输入之间的功率感测电阻器，其中来自功率感测电阻器的信号被配置为被监视以确定环形振荡器。

6. 发明授权

US08669786B1 Clock phase shift detector 有权
标题翻译：时钟相移检测器
公开(公告)号：US08669786B1
公开(公告)日：2014-03-11
申请号：US13707789
申请日：2012-12-07
申请人： International Business Machines Corporation
发明人： Kai D. Feng , Jong-ru Guo , Trushil N. Shah , Ping-Chuan Wang , Zhijian Yang
IPC分类号： G01R25/00
CPC分类号： H03K5/00 , H03L7/087
摘要： A clock phase shift detector circuit may include a phase detector that receives a first and a second clock signal, whereby the phase detector generates a phase signal based on a phase difference between the first and the second clock signal. A first integrator is coupled to the phase detector, receives the phase signal, and generates an integrated phase signal. A second integrator receives the first clock signal and generates an integrated first clock signal. A comparator is coupled to the first and the second integrator, whereby the comparator receives the integrated phase signal and the integrated first clock signal. The comparator may then generate a control signal that detects a change between the phase difference of the first and the second clock signal and an optimized phase difference based on an amplitude comparison between the integrated phase signal and the integrated first clock signal.
摘要翻译：时钟相移检测器电路可以包括接收第一和第二时钟信号的相位检测器，由此相位检测器基于第一和第二时钟信号之间的相位差产生相位信号。第一积分器耦合到相位检测器，接收相位信号，并产生积分相位信号。第二积分器接收第一时钟信号并产生积分的第一时钟信号。比较器耦合到第一和第二积分器，由此比较器接收积分相位信号和集成的第一时钟信号。然后，比较器可以产生控制信号，该控制信号基于积分相位信号和集成的第一时钟信号之间的幅度比较来检测第一和第二时钟信号的相位差与优化的相位差之间的变化。

7. 发明授权

US08581648B2 High frequency quadrature PLL circuit and method 有权
标题翻译：高频正交PLL电路及方法
公开(公告)号：US08581648B2
公开(公告)日：2013-11-12
申请号：US13761358
申请日：2013-02-07
申请人： International Business Machines Corporation
发明人： Hanyi Ding , Kai D. Feng , Zhenrong Jin , Francis F. Szenher
IPC分类号： H03L7/06
CPC分类号： H03L7/08 , H03L7/22
摘要： A method includes phase-shifting an output signal of a phase lock loop (PLL) circuit by applying an injection current to an output of a charge pump of a the PLL circuit. A circuit includes: a first phase lock loop (PLL) circuit and a second PLL circuit referenced to a same clock; a phase detector circuit that detects a phase difference between an output signal of the first PLL circuit and an output signal of the second PLL circuit; and an adjustable current source that applies an injection current to at least one of the first PLL circuit and the second PLL circuit based on an output of the phase detector circuit.
摘要翻译：一种方法包括通过向PLL电路的电荷泵的输出施加注入电流来相移锁相环（PLL）电路的输出信号。电路包括：第一锁相环（PLL）电路和参考相同时钟的第二PLL电路; 相位检测器电路，检测第一PLL电路的输出信号和第二PLL电路的输出信号之间的相位差; 以及可调电流源，其基于相位检测器电路的输出将注入电流施加到第一PLL电路和第二PLL电路中的至少一个。

8. 发明授权

US09985615B2 On-chip randomness generation 有权
公开(公告)号：US09985615B2
公开(公告)日：2018-05-29
申请号：US15421465
申请日：2017-02-01
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Kai D. Feng , Ping-Chuan Wang , Zhijian Yang , Emmanuel Yashchin
IPC分类号： H03K3/84 , H03K5/01 , H03K3/012
CPC分类号： H03K3/84 , H03K3/012 , H03K3/313 , H03K5/01
摘要： An on-chip true noise generator including an embedded noise source with a low-voltage, high-noise zener diode(s), and an in-situ close-loop zener diode power control circuit. The present invention proposes the use of heavily doped polysilicon and silicon p-n diode(s) structures to minimize the breakdown voltage, increasing noise level and improving reliability. The present invention also proposes an in-situ close-loop zener diode control circuit to safe-guard the zener diode from catastrophic burn-out.

9. 发明申请

US20150235964A1 PHOTORESIST COLLAPSE METHOD FOR FORMING A PHYSICAL UNCLONABLE FUNCTION 有权
标题翻译：用于形成物理不可靠函数的光电聚焦方法
公开(公告)号：US20150235964A1
公开(公告)日：2015-08-20
申请号：US14181960
申请日：2014-02-17
申请人： International Business Machines Corporation
发明人： Kai D. Feng , Wai-Kin Li , Ping-Chuan Wang , Zhijian Yang
IPC分类号： H01L23/544 , H01L21/3105
CPC分类号： H01L21/32139 , G09C1/00 , H01L21/0273 , H01L21/31058 , H01L21/31138 , H01L21/31144 , H01L21/76816 , H01L21/76885 , H01L22/34 , H01L23/522 , H01L23/5221 , H01L23/5226 , H01L23/5228 , H01L23/528 , H01L23/5386 , H01L23/544 , H01L23/57 , H01L2223/54433 , H01L2223/5444 , H01L2223/5448 , H01L2224/05097 , H04L9/3278 , H04L2209/12
摘要： An organic material layer is lithographically patterned to include a linear array portion of lines and spaces. In one embodiment, the organic material layer can be an organic planarization layer that is patterned employing a photoresist layer, which is consumed during patterning of the organic planarization layer. Volume expansion of the organic planarization layer upon exposure to a halogen-including gas causes portions of the linear array to collapse at random locations. In another embodiment, the height of the photoresist layer is selected such that the linear array portion of the photoresist layer is mechanically unstable and produces random photoresist collapses. The pattern including random modifications due to the collapse of the organic material layer is transferred into an underlying layer to generate an array of conductive material lines with random electrical disruption of shorts or opens. The structure with random shorts can be employed as a physical unclonable function.
摘要翻译：有机材料层被光刻图案化以包括线和空间的直线阵列部分。在一个实施例中，有机材料层可以是利用在有机平坦化层的图案化期间消耗的光致抗蚀剂层进行图案化的有机平坦化层。有机平面化层在暴露于含卤素气体时的体积膨胀导致线性阵列的部分在随机位置崩溃。在另一个实施方案中，选择光致抗蚀剂层的高度，使得光致抗蚀剂层的线性阵列部分在机械上不稳定并产生随机光刻胶塌陷。由于有机材料层的崩溃引起的包括随机修饰的图案被转移到下层中，以产生具有短路或开放的随机电气中断的导电材料线的阵列。具有随机短路的结构可用作物理不可克隆功能。

10. 发明授权

US09391014B2 Physical unclonable interconnect function array 有权
标题翻译：物理不可克隆的互连功能阵列
公开(公告)号：US09391014B2
公开(公告)日：2016-07-12
申请号：US14825303
申请日：2015-08-13
申请人： International Business Machines Corporation
发明人： Kai D. Feng , Wai-Kin Li , Ping-Chuan Wang , Zhijian Yang
IPC分类号： H01L23/522 , H01L23/528 , H04L9/32 , H05K1/02
CPC分类号： H01L23/5222 , H01L21/0274 , H01L21/3212 , H01L21/76816 , H01L21/76834 , H01L21/76837 , H01L21/7684 , H01L21/76877 , H01L23/5226 , H01L23/528 , H01L2924/0002 , H04L9/3278 , H04L2209/12 , H05K1/0289 , Y10T29/49117 , Y10T29/49165 , H01L2924/00
摘要： A method for fabricating an interconnect function array includes forming a first plurality of conductive lines on a substrate, forming an insulator layer over the first plurality of conductive lines and the substrate, removing portions of the insulator layer to define cavities in the insulator layer that expose portions of the substrate and the first plurality of conductive lines, wherein the removal of the portions of the insulator layer results in a substantially random arrangement of cavities exposing portions of the substrate and the first plurality of conductive lines, depositing a conductive material in the cavities, and forming a second plurality of conductive lines on portions of the conductive material in the cavities and the insulator layer.
摘要翻译：一种用于制造互连功能阵列的方法包括在衬底上形成第一多条导线，在第一多条导线和衬底之上形成绝缘体层，去除绝缘体层的部分以限定暴露在绝缘体层中的空腔衬底和第一多个导电线的部分，其中去除绝缘体层的部分导致暴露衬底和第一多个导电线的部分的空腔的基本上随机的排列，在腔中沉积导电材料并且在所述空腔和所述绝缘体层中的所述导电材料的部分上形成第二多个导电线。

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