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1. 发明申请

US20180337019A1 Scanning Transmission Electron Microscope and Method of Image Generation 审中-公开
公开(公告)号：US20180337019A1
公开(公告)日：2018-11-22
申请号：US15824047
申请日：2017-11-28
申请人： JEOL Ltd.
发明人： Ryusuke Sagawa
IPC分类号： H01J37/28 , H01J37/26 , H01J37/147 , H01J37/10 , H01J37/244
CPC分类号： H01J37/28 , G01N23/20058 , G01N2223/0565 , G01N2223/102 , G01N2223/3302 , G01N2223/418 , H01J37/10 , H01J37/1475 , H01J37/1477 , H01J37/244 , H01J37/265 , H01J2237/2446 , H01J2237/2802 , H01J2237/2803
摘要： There is provided a scanning transmission electron microscope capable of producing plural types of STEM (scanning transmission electron microscopy) images using a single detector. The electron microscope (100) has an electron source (10) emitting an electron beam, a scanning deflector (13) for scanning the beam over a sample (S), an objective lens (14) for focusing the beam, an imager (22) placed at a back focal plane of the objective lens (14) or at a plane conjugate with the back focal plane, and a scanned image generator (40) for generating scanned images on the basis of images captured by the imager. The scanned image generator (40) operates to form electron diffraction patterns from the electron beam passing through positions on the sample by the scanning of the electron beam, to capture the electron diffraction patterns by the imager so that plural images are produced, to integrate the intensity of each pixel over an integration region that is set based on the size of an image of a transmitted wave in a respective one of the produced images for each of the produced images such that the signal intensity at each position on the sample is found, and to generate the scanned images on the basis of the signal intensities at the positions on the sample.

2. 发明申请

US20220262595A1 Estimation Model Generation Method and Electron Microscope 有权
公开(公告)号：US20220262595A1
公开(公告)日：2022-08-18
申请号：US17671896
申请日：2022-02-15
申请人： JEOL Ltd.
发明人： Ryusuke Sagawa , Shigeyuki Morishita , Fuminori Uematsu , Tomohiro Nakamichi , Keito Aibara
IPC分类号： H01J37/153 , H01J37/28 , H01J37/26
摘要： An aberration value estimator has a learned estimation model for estimating an aberration value set based on a Ronchigram. In a machine learning sub-system, a simulation is repeatedly executed while changing a simulation condition, and calculated Ronchigrams are generated in a wide variety and in a large number. By machine learning using the calculated Ronchigrams, the learned estimation model is generated.

3. 发明授权

US10361061B2 Electron microscope and image acquisition method 有权
公开(公告)号：US10361061B2
公开(公告)日：2019-07-23
申请号：US15620144
申请日：2017-06-12
申请人： JEOL Ltd.
发明人： Yukihito Kondo , Ryusuke Sagawa
IPC分类号： H01J37/22 , H01J37/09 , H01J37/04 , H01J37/147 , H01J37/28 , H01J37/244
摘要： There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).

4. 发明授权

US10340118B2 Scanning transmission electron microscope and method of image generation 有权
公开(公告)号：US10340118B2
公开(公告)日：2019-07-02
申请号：US15824047
申请日：2017-11-28
申请人： JEOL Ltd.
发明人： Ryusuke Sagawa
IPC分类号： H01J37/28 , G01N23/20058 , H01J37/244 , H01J37/10 , H01J37/147 , H01J37/26
摘要： There is provided a scanning transmission electron microscope capable of producing plural types of STEM (scanning transmission electron microscopy) images using a single detector. The electron microscope (100) has an electron source (10) emitting an electron beam, a scanning deflector (13) for scanning the beam over a sample (S), an objective lens (14) for focusing the beam, an imager (22) placed at a back focal plane of the objective lens (14) or at a plane conjugate with the back focal plane, and a scanned image generator (40) for generating scanned images on the basis of images captured by the imager. The scanned image generator (40) operates to form electron diffraction patterns from the electron beam passing through positions on the sample by the scanning of the electron beam, to capture the electron diffraction patterns by the imager so that plural images are produced, to integrate the intensity of each pixel over an integration region that is set based on the size of an image of a transmitted wave in a respective one of the produced images for each of the produced images such that the signal intensity at each position on the sample is found, and to generate the scanned images on the basis of the signal intensities at the positions on the sample.

5. 发明申请

US20180130634A1 Electron Microscope and Image Acquisition Method 审中-公开
公开(公告)号：US20180130634A1
公开(公告)日：2018-05-10
申请号：US15620144
申请日：2017-06-12
申请人： JEOL Ltd.
发明人： Yukihito Kondo , Ryusuke Sagawa
IPC分类号： H01J37/22 , H01J37/147 , H01J37/28 , H01J37/09 , H01J37/04
CPC分类号： H01J37/22 , H01J37/045 , H01J37/09 , H01J37/1474 , H01J37/244 , H01J37/28 , H01J2237/024 , H01J2237/0435 , H01J2237/0453 , H01J2237/2443 , H01J2237/2446 , H01J2237/24475 , H01J2237/2449 , H01J2237/28 , H01J2237/2802 , H01J2237/2803
摘要： There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).

6. 发明申请

US20230026970A1 Electron Microscope and Method of Correcting Aberration 有权
公开(公告)号：US20230026970A1
公开(公告)日：2023-01-26
申请号：US17869117
申请日：2022-07-20
申请人： JEOL Ltd.
发明人： Keito Aibara , Tomohiro Nakamichi , Shigeyuki Morishita , Motofumi Saito , Ryusuke Sagawa , Fuminori Uematsu
IPC分类号： H01J37/153 , H01J37/244 , H01J37/28
摘要： Prior to execution of primary correction, a first centering process, an in-advance correction of a particular aberration, and a second centering process are executed stepwise. In the first centering process and the second centering process, a ronchigram center is identified based on a ronchigram variation image, and is matched with an imaging center. In the in-advance correction and the post correction of the particular aberration, a particular aberration value is estimated based on a ronchigram, and the particular aberration is corrected based on the particular aberration value.

7. 发明授权

US11545337B2 Scanning transmission electron microscope and adjustment method of optical system 有权
公开(公告)号：US11545337B2
公开(公告)日：2023-01-03
申请号：US17236074
申请日：2021-04-21
申请人： JEOL Ltd.
发明人： Ryusuke Sagawa
IPC分类号： H01J37/256 , H01J37/26 , H01J37/28 , H01J37/10 , H01J37/147 , H01J37/22
摘要： A scanning transmission electron microscope that scans a specimen with an electron probe to acquire an image. The scanning transmission electron microscope includes: an optical system which includes a condenser lens and an objective lens; an imaging device which is arranged on a back focal plane or a plane conjugate to the back focal plane of the objective lens and which is capable of photographing a Ronchigram; and a control unit which performs adjustment of the optical system. The control unit is configured or programed to: acquire an image of a change in a Ronchigram that is attributable to a change in a relative positional relationship between the specimen and the electron probe; and determine a center of the Ronchigram based on the image of the change in the Ronchigram.

8. 发明申请

US20220230838A1 Method of Measuring Aberration and Electron Microscope 有权
公开(公告)号：US20220230838A1
公开(公告)日：2022-07-21
申请号：US17576016
申请日：2022-01-14
申请人： JEOL Ltd.
发明人： Shigeyuki Morishita , Ryusuke Sagawa , Fuminori Uematsu , Tomohiro Nakamichi , Keito Aibara
IPC分类号： H01J37/153 , H01J37/26 , H01J37/10
摘要： A method of measuring an aberration in an electron microscope includes: acquiring an image for measuring the aberration in the electron microscope; and measuring the aberration by using the image. In measuring the aberration, a direction of defocusing is specified based on a residual aberration that is uniquely determined by a configuration of an optical system of the electron microscope and an optical condition of the optical system.

9. 发明申请

US20210335570A1 Scanning Transmission Electron Microscope and Adjustment Method of Optical System 有权
公开(公告)号：US20210335570A1
公开(公告)日：2021-10-28
申请号：US17236074
申请日：2021-04-21
申请人： JEOL Ltd.
发明人： Ryusuke Sagawa
IPC分类号： H01J37/28 , H01J37/10 , H01J37/26 , H01J37/22 , H01J37/147
摘要： A scanning transmission electron microscope that scans a specimen with an electron probe to acquire an image. The scanning transmission electron microscope includes: an optical system which includes a condenser lens and an objective lens; an imaging device which is arranged on a back focal plane or a plane conjugate to the back focal plane of the objective lens and which is capable of photographing a Ronchigram; and a control unit which performs adjustment of the optical system. The control unit is configured or programed to: acquire an image of a change in a Ronchigram that is attributable to a change in a relative positional relationship between the specimen and the electron probe; and determine a center of the Ronchigram based on the image of the change in the Ronchigram.

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