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1. 发明授权

US08791414B2 Dynamic focus adjustment with optical height detection apparatus in electron beam system 有权
标题翻译：电子束系统中光学高度检测装置的动态聚焦调整
公开(公告)号：US08791414B2
公开(公告)日：2014-07-29
申请号：US12764902
申请日：2010-04-21
申请人： Joe Wang , Van-Duc Nguyen , Yi-Xiang Wang , Jack Jau , Zhongwei Chen
发明人： Joe Wang , Van-Duc Nguyen , Yi-Xiang Wang , Jack Jau , Zhongwei Chen
IPC分类号： G01N23/00
CPC分类号： G01B11/22 , G01N23/04 , G01N23/20058 , G01N2223/32 , G01N2223/3301 , G01N2223/3302 , G01N2223/646 , H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2482 , H01J2237/2487
摘要： The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.
摘要翻译：本发明一般涉及图像系统的动态聚焦调整。本发明借助于高度检测子系统，提供了一种用于通过改变物镜和样品台之间的静电透镜的场强/或偏置电压来根据样本表面高度变化来微调整图像聚焦的装置和方法应用于样品表面。仅作为示例，本发明已经应用于扫描电子检查系统。但是应当认识到，本发明可以应用于使用带有带电粒子束的其它系统作为具有高度检测装置的观察工具。

2. 发明授权

US07518383B2 Inspection apparatus and inspection method using electron beam 失效
标题翻译：使用电子束的检查装置和检查方法
公开(公告)号：US07518383B2
公开(公告)日：2009-04-14
申请号：US11379463
申请日：2006-04-20
申请人： Yasuhiro Gunji , Hiroshi Miyai , Shigeya Tanaka
发明人： Yasuhiro Gunji , Hiroshi Miyai , Shigeya Tanaka
IPC分类号： G01R31/305
CPC分类号： G01N23/203 , G01N23/2251 , G01N2223/3302 , H01J37/265 , H01J37/28 , H01J2237/2817
摘要： A visual inspection apparatus and method using the scanning electron microscope are disclosed. An electron beam is scanned repeatedly on a sample, and an inspection and a reference image are generated by the secondary electrons generated from the sample or reflected electrons. From the differential image between the inspection image and the reference image, a defect is determined. The number of pixels in the generated image along the direction of repetitive scanning by the electron beam can be changed.
摘要翻译：公开了使用扫描电子显微镜的目视检查装置和方法。在样品上重复扫描电子束，并且由从样品或反射电子产生的二次电子产生检查和参考图像。根据检查图像与参考图像之间的差分图像，确定缺陷。可以改变沿电子束的重复扫描方向产生的图像中的像素数。

3. 发明申请

US20170343488A1 THREE-DIMENSIONAL IMAGE RECONSTRUCTION USING TRANSMISSION AND SCATTER RADIOGRAPHY METHODS 有权
公开(公告)号：US20170343488A1
公开(公告)日：2017-11-30
申请号：US15604530
申请日：2017-05-24
申请人： GEORGETOWN RAIL EQUIPMENT COMPANY
发明人： MICHAEL JOHN LIESENFELT , JAMES EDWARD BACIAK , GREGORY THOMAS GRISSOM
IPC分类号： G01N23/04 , G01N23/203 , G06T7/00
CPC分类号： G01N23/046 , G01N23/203 , G01N2223/3302 , G01N2223/401 , G01N2223/646 , G06T7/0012 , G06T11/006 , G06T2211/424 , G06T2211/436
摘要： A method for image reconstruction includes irradiating an object with a beam of radiation from a radiation source, measuring an attenuated portion of the beam, estimating a density of the object, determining a predicted attenuated portion of the beam using the density estimate, and iteratively adjusting the density estimate of the object. The predicted attenuated portion and the measured attenuated portion are compared to determine a signal difference. The density estimate of each portion of the object is adjusted by scaling the density estimate using the average signal differences of rays that intersect the portion of the object. The density estimate may be repeatedly adjusted until a difference between consecutive density estimates is below a selected threshold or a predetermined number of adjustments have been completed. The attenuated portion of the beam may include a scattered portion and a transmitted portion.

4. 发明授权

US08094776B2 Tomosynthesis radiographing apparatus 有权
标题翻译：骨骼合成放射照相机
公开(公告)号：US08094776B2
公开(公告)日：2012-01-10
申请号：US12585885
申请日：2009-09-28
申请人： Kenji Takahashi
发明人： Kenji Takahashi
IPC分类号： A61B6/02
CPC分类号： A61B6/4291 , A61B6/025 , A61B6/06 , A61B6/484 , G01N23/044 , G01N2223/3302 , G01N2223/419 , G01N2223/612
摘要： Providing a radiation emission unit having multiple radiation sources for emitting radiation onto a subject, in which the multiple radiation sources are distributed such that the radiation emitted from each radiation source and transmitted through the subject forms a part of a projected image of the subject. Each radiation source is a source that emits fan beam radiation and is disposed such that a plane of the fan beam having a wider spread angle intersects with an arrangement direction of the multiple radiation sources and is arranged parallel to each other.
摘要翻译：提供具有多个辐射源的辐射发射单元，用于将辐射发射到对象上，其中分配多个辐射源，使得从每个辐射源发射并透射通过对象的辐射形成被摄体的投影图像的一部分。每个辐射源是发射风扇束辐射的源，并且被布置成使得具有较宽扩展角的扇形光束的平面与多个辐射源的排列方向相交并且彼此平行地布置。

5. 发明申请

US20110260055A1 Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam system 有权
标题翻译：电子束系统中光学高度检测装置的动态聚焦调整
公开(公告)号：US20110260055A1
公开(公告)日：2011-10-27
申请号：US12764902
申请日：2010-04-21
申请人： JOE WANG , VAN-DUC NGUYEN , YI-XIANG WANG , JACK JAU , ZHONGWEI CHEN
发明人： JOE WANG , VAN-DUC NGUYEN , YI-XIANG WANG , JACK JAU , ZHONGWEI CHEN
IPC分类号： H01J37/21 , G01N23/22 , G01B11/24 , H01J37/28
CPC分类号： G01B11/22 , G01N23/04 , G01N23/20058 , G01N2223/32 , G01N2223/3301 , G01N2223/3302 , G01N2223/646 , H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2482 , H01J2237/2487
摘要： The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.
摘要翻译：本发明一般涉及图像系统的动态聚焦调整。本发明借助于高度检测子系统，提供了一种用于通过改变物镜和样品台之间的静电透镜的场强/或偏置电压来根据样本表面高度变化来微调整图像聚焦的装置和方法应用于样品表面。仅作为示例，本发明已经应用于扫描电子检查系统。但是应当认识到，本发明可以应用于使用带有带电粒子束的其它系统作为具有高度检测装置的观察工具。

6. 发明授权

US4578584A Thermal wave microscopy using areal infrared detection 失效
标题翻译：热波显微镜使用面红外探测
公开(公告)号：US4578584A
公开(公告)日：1986-03-25
申请号：US573075
申请日：1984-01-23
申请人： Thomas Baumann , Frank H. Dacol , Robert L. Melcher
发明人： Thomas Baumann , Frank H. Dacol , Robert L. Melcher
IPC分类号： G01J5/02 , G01B15/00 , G01B21/08 , G01N21/88 , G01N23/22 , G01N25/72 , G02B21/00 , G01J1/00
CPC分类号： G01N25/72 , G01N23/22 , G01N2223/07 , G01N2223/073 , G01N2223/102 , G01N2223/306 , G01N2223/3302 , G01N2223/348 , G01N2223/40 , G01N2223/401 , G01N2223/418 , G01N2223/427 , G01N2223/509 , G01N2223/629 , G01N2223/651
摘要： A non-contact thermal imaging system based on infrared radiation detection is described which uses an energy source to provide a beam of energy that strikes a sample to be analyzed. The energy beam produces a thermal wave in the sample, there being infrared radiation emitted from the thermal wave. All of the infrared radiation emitted from the heated area of the sample is collected and directed to an infrared detector, to have a two-dimensional image of the sample. This is used to detect surface and sub-surface structure, defects, etc. The use of a focussed energy beam, such as a laser or electron beam, offers advantages. In this technique, all points of the sample are treated equally and the results are very easily interpreted to know the exact location and type of structure that is imaged in the heated area. An ellipsoidal collector is preferrably used to image the emitted infrared radiation onto the detector, where the sample is located at one focal point of the ellipse, and the detector is located at the other focal point.
摘要翻译：描述了基于红外辐射检测的非接触热成像系统，其使用能量源来提供撞击要分析的样品的能量束。能量束在样品中产生热波，存在从热波发射的红外辐射。将从样品的加热区域发射的所有红外线辐射收集并引导到红外检测器，以获得样品的二维图像。这用于检测表面和亚表面结构，缺陷等。使用诸如激光或电子束的聚焦能量束提供了优点。在这种技术中，样品的所有点被平等对待，结果很容易被解释为知道在加热区域中成像的结构的确切位置和类型。椭圆形收集器优选用于将发射的红外辐射图像到检测器上，其中样品位于椭圆的一个焦点处，并且检测器位于另一焦点。

7. 发明申请

US20180035523A1 SHIFTING MECHANISM FOR DUAL X-RAY TUBE IMAGING SYSTEM 有权
公开(公告)号：US20180035523A1
公开(公告)日：2018-02-01
申请号：US15220851
申请日：2016-07-27
申请人： Avonix Imaging, LLC
发明人： Jeffrey Diehm , Brian Ruether , Joel Ostby
IPC分类号： H05G1/02 , G01N23/04 , A61B6/00
CPC分类号： H05G1/02 , A61B6/4007 , A61B6/54 , G01N23/04 , G01N2223/308 , G01N2223/309 , G01N2223/3302 , G01N2223/423
摘要： A x-ray tube mounting assembly, including a mounting bracket, a first x-ray tube support configured for supporting a first x-ray tube, a second x-ray tube support configured for supporting a second x-ray tube, and a control assembly for moving the first and second x-ray tube supports substantially simultaneously between a first position, wherein the first x-ray tube support is in an operating position and the second x-ray tube support is in a first stowed position not for operation of a second x-ray tube operably supported thereby, and a second position, wherein the second x-ray tube support is in the operating position and the first x-ray tube support is in a second stowed position not for operation of a first x-ray tube operably supported thereby. The first x-ray tube may be of different focus source magnitude than the second x-ray tube.

8. 发明申请

US20140291517A1 Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam System 有权
标题翻译：电子束系统中光学高度检测装置的动态聚焦调整
公开(公告)号：US20140291517A1
公开(公告)日：2014-10-02
申请号：US14306298
申请日：2014-06-17
申请人： Hermes Microvision, Inc.
发明人： JOE WANG , VAN-DUC NGUYEN , YI-XIANG WANG , JACK JAU , ZHONG-WEI CHEN
IPC分类号： H01J37/21 , G01B11/22
CPC分类号： G01B11/22 , G01N23/04 , G01N23/20058 , G01N2223/32 , G01N2223/3301 , G01N2223/3302 , G01N2223/646 , H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/2482 , H01J2237/2487
摘要： The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.
摘要翻译：本发明一般涉及图像系统的动态聚焦调整。本发明借助于高度检测子系统，提供了一种用于通过改变物镜和样品台之间的静电透镜的场强/或偏置电压来根据样本表面高度变化来微调整图像聚焦的装置和方法应用于样品表面。仅作为示例，本发明已经应用于扫描电子检查系统。但是应当认识到，本发明可以应用于使用带有带电粒子束的其它系统作为具有高度检测装置的观察工具。

9. 发明申请

US20100329532A1 X-RAY INSPECTING APPARATUS AND X-RAY INSPECTING METHOD 有权
标题翻译： X射线检测装置和X射线检测方法
公开(公告)号：US20100329532A1
公开(公告)日：2010-12-30
申请号：US12810773
申请日：2008-12-25
申请人： Masayuki Masuda , Noriyuki Kato , Shinji Sugita , Tsuyoshi Matsunami , Yasushi Sasaki
发明人： Masayuki Masuda , Noriyuki Kato , Shinji Sugita , Tsuyoshi Matsunami , Yasushi Sasaki
IPC分类号： G06K9/00 , G01B15/06
CPC分类号： G01N23/046 , A61B6/466 , G01N2223/3302 , G01N2223/419 , G01N2223/6113 , G01T1/2985
摘要： An X-ray inspecting apparatus capable of high-speed inspection of a prescribed inspection area of an object of inspection is provided. The X-ray inspecting apparatus includes: a scanning X-ray source for outputting X-ray; an X-ray detector driving unit on which a plurality of X-ray detectors are mounted, and capable of driving the plurality of X-ray detectors independently; and an image acquisition control mechanism controlling acquisition of image data by X-ray detector driving unit and X-ray detectors. A scanning X-ray source emits X-ray while moving the X-ray focal point of the X-ray source to each of X-ray emission originating positions set for each X-ray detector such that the X-ray passes through a prescribed inspection area of an object of inspection and enters each X-ray detector. Image pick-up by some of the X-ray detectors and movement of other X-ray detectors to an image pick-up position are executed in parallel and alternately. An image acquisition control unit acquires the image data picked-up by X-ray detectors, and a computing unit reconstructs an image in the inspection area based on the image data.
摘要翻译：提供能够高速检查检查对象的规定检查区域的X射线检查装置。 X射线检查装置包括：用于输出X射线的扫描X射线源; X射线检测器驱动单元，其上安装有多个X射线检测器，并且能够独立地驱动多个X射线检测器; 以及控制由X射线检测器驱动单元和X射线检测器获取图像数据的图像获取控制机构。扫描X射线源在将X射线源的X射线焦点移动到为每个X射线检测器设定的X射线发射始发位置的X射线焦点之间发射X射线，使得X射线通过规定的检查对象的检查区域，并进入每个X射线检测器。一些X射线检测器的图像拾取器和其他X射线检测器的移动到图像拾取位置被并行和交替地执行。图像获取控制单元获取由X射线检测器拾取的图像数据，并且计算单元基于图像数据重建检查区域中的图像。

10. 发明申请

US20100080342A1 Tomosynthesis radiographing apparatus 有权
标题翻译：骨骼合成放射照相机
公开(公告)号：US20100080342A1
公开(公告)日：2010-04-01
申请号：US12585885
申请日：2009-09-28
申请人： Kenji Takahashi
发明人： Kenji Takahashi
IPC分类号： A61B6/00 , G01N23/02
CPC分类号： A61B6/4291 , A61B6/025 , A61B6/06 , A61B6/484 , G01N23/044 , G01N2223/3302 , G01N2223/419 , G01N2223/612
摘要： Providing a radiation emission unit having multiple radiation sources for emitting radiation onto a subject, in which the multiple radiation sources are distributed such that the radiation emitted from each radiation source and transmitted through the subject forms a part of a projected image of the subject. Each radiation source is a source that emits fan beam radiation and is disposed such that a plane of the fan beam having a wider spread angle intersects with an arrangement direction of the multiple radiation sources and is arranged parallel to each other.
摘要翻译：提供具有多个辐射源的辐射发射单元，用于将辐射发射到对象上，其中分配多个辐射源，使得从每个辐射源发射并透射通过对象的辐射形成被摄体的投影图像的一部分。每个辐射源是发射风扇束辐射的源，并且被布置成使得具有较宽扩展角的扇形光束的平面与多个辐射源的排列方向相交并且彼此平行地布置。

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