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1. 发明授权

US08310785B1 Perpendicular magnetic recording head 有权
标题翻译：垂直磁记录头
公开(公告)号：US08310785B1
公开(公告)日：2012-11-13
申请号：US13372316
申请日：2012-02-13
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49041
摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PRM head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.
摘要翻译：垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PRM头还包括围绕PMR极的底部和至少一个侧面的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层以及邻近PMR极的硬掩模层 PMR极点的至少一侧的第一部分。

2. 发明授权

US08136225B1 Method and system for providing a perpendicular magnetic recording head 有权
标题翻译：用于提供垂直磁记录头的方法和系统
公开(公告)号：US08136225B1
公开(公告)日：2012-03-20
申请号：US12121624
申请日：2008-05-15
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49041
摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The method further include providing a hard mask layer on the mask and removing the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
摘要翻译：公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。该方法和系统包括在中间层上提供包括线的掩模。该方法还包括在掩模上提供硬掩模层并去除线。因此，提供了对应于该线的硬掩模中的孔。该方法和系统还包括在孔下方的中间层中形成沟槽。沟槽的底部和顶部宽于底部。该方法还包括提供PMR极，其至少一部分位于沟槽中。

3. 发明授权

US08284517B1 Perpendicular magnetic recording head 有权
标题翻译：垂直磁记录头
公开(公告)号：US08284517B1
公开(公告)日：2012-10-09
申请号：US13372775
申请日：2012-02-14
申请人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
发明人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49041
摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PMR head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a planarization stop layer adjacent to the first portion of the at least one side of the PMR pole.
摘要翻译：垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PMR头还包括围绕PMR极的底部和至少一侧的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层和与PMR极的相邻的平坦化停止层 PMR极点的至少一侧的第一部分。

4. 发明授权

US08136224B1 Method and system for providing a perpendicular magnetic recording head utilizing a mask having an undercut line 有权
标题翻译：用于使用具有底切线的掩模来提供垂直磁记录头的方法和系统
公开(公告)号：US08136224B1
公开(公告)日：2012-03-20
申请号：US12121540
申请日：2008-05-15
申请人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
发明人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49041
摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The line has at least one side, a top, and a bottom. The side(s) have an undercut such that the top of the line is wider than the bottom. The method further include providing a hard mask on the PMR transducer. The hard mask includes an aperture corresponding to the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
摘要翻译：公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。该方法和系统包括在中间层上提供包括线的掩模。该线至少有一边，顶部和底部。侧面具有底切，使得线的顶部比底部更宽。该方法还包括在PMR传感器上提供硬掩模。硬掩模包括对应于该线的孔。因此，提供了对应于该线的硬掩模中的孔。该方法和系统还包括在孔下方的中间层中形成沟槽。沟槽的底部和顶部宽于底部。该方法还包括提供PMR极，其至少一部分位于沟槽中。

5. 发明授权

US08793866B1 Method for providing a perpendicular magnetic recording head 有权
标题翻译：提供垂直磁记录头的方法
公开(公告)号：US08793866B1
公开(公告)日：2014-08-05
申请号：US11960596
申请日：2007-12-19
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Yizhong Wang , Hai Sun , Li He
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Yizhong Wang , Hai Sun , Li He
IPC分类号： G11B5/187 , C23C14/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A method provides a PMR transducer. In one aspect, the method includes forming a trench in an intermediate layer using reactive ion etch(es). The trench top is wider than its bottom. In this aspect, the method also includes providing a seed layer using atomic layer deposition and providing a PMR pole on the seed layer. Portion(s) of the seed layer and PMR pole reside in the trench. In another aspect, the method includes providing a mask including a trench having a top wider than its bottom. In this aspect, the method includes providing mask material in the trench, providing an intermediate layer on the mask material and removing the mask material to provide another trench in the intermediate layer. In this aspect, the method also includes providing a PMR pole in the additional trench.
摘要翻译：一种方法提供PMR换能器。一方面，该方法包括使用反应离子蚀刻在中间层中形成沟槽。沟槽顶部比底部宽。在这方面，该方法还包括使用原子层沉积提供种子层并在种子层上提供PMR极点。种子层和PMR极的部分位于沟槽中。在另一方面，该方法包括提供一种掩模，该掩模包括具有比其底部更宽的顶部的沟槽。在这方面，该方法包括在沟槽中提供掩模材料，在掩模材料上提供中间层并去除掩模材料以在中间层中提供另一个沟槽。在这方面，该方法还包括在附加沟槽中提供PMR极点。

6. 发明授权

US08166632B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08166632B1
公开(公告)日：2012-05-01
申请号：US12057611
申请日：2008-03-28
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Donghong Li
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Donghong Li
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for providing a PMR transducer including an intermediate layer. The method and system include providing a hard mask layer on the intermediate layer. The hard mask layer is for a reactive ion etch of the intermediate layer. The method and system also include providing a bottom antireflective coating (BARC) layer on the hard mask layer. The BARC layer is also a masking layer for the hard mask layer. The method and system also include forming a trench in the intermediate layer using at least one reactive ion etch (RIE). The trench has a bottom and a top wider than the bottom. The method and system also include providing a PMR pole. At least a portion of the PMR pole resides in the trench.
摘要翻译：一种用于提供包括中间层的PMR换能器的方法和系统。该方法和系统包括在中间层上提供硬掩模层。硬掩模层用于中间层的反应离子蚀刻。该方法和系统还包括在硬掩模层上提供底部抗反射涂层（BARC）层。 BARC层也是硬掩模层的掩模层。该方法和系统还包括使用至少一个反应离子蚀刻（RIE）在中间层中形成沟槽。沟槽的底部和顶部宽于底部。该方法和系统还包括提供PMR极点。 PMR极的至少一部分位于沟槽中。

7. 发明授权

US08079135B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08079135B1
公开(公告)日：2011-12-20
申请号：US11955667
申请日：2007-12-13
申请人： Yong Shen , Liubo Hong , Guanghong Luo , Honglin Zhu , Lei Wang , Yingjian Chen
发明人： Yong Shen , Liubo Hong , Guanghong Luo , Honglin Zhu , Lei Wang , Yingjian Chen
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing a perpendicular magnetic recording (PMR) transducer is described. The PMR transducer provided includes a PMR pole and yoke structure coupled with the PMR pole. The method includes providing a hard mask and an intermediate layer. A first portion of the hard mask resides on the PMR pole. A second portion of the hard mask resides on another structure. The intermediate layer surrounds at least the PMR pole. The method also includes performing a planarization on at least the intermediate layer, removing the first portion of the hard mask on the PMR pole without completely removing the second portion of the hard mask on the other structure. The method further includes removing a remaining portion of the hard mask on the other structure, providing a write gap on the PMR pole, and providing a shield on the write gap.
摘要翻译：描述了一种用于提供垂直磁记录（PMR）换能器的方法。提供的PMR传感器包括与PMR极耦合的PMR极和轭结构。该方法包括提供硬掩模和中间层。硬掩模的第一部分位于PMR杆上。硬掩模的第二部分位于另一结构上。中间层至少包围PMR极。该方法还包括在至少中间层上执行平面化，在PMR极上去除硬掩模的第一部分，而不必在另一个结构上完全去除硬掩模的第二部分。该方法还包括移除另一结构上的硬掩模的剩余部分，在PMR极上提供写入间隙，并在写入间隙上提供屏蔽。

8. 发明授权

US08015692B1 Method for providing a perpendicular magnetic recording (PMR) head 有权
标题翻译：提供垂直磁记录（PMR）头的方法
公开(公告)号：US08015692B1
公开(公告)日：2011-09-13
申请号：US11936167
申请日：2007-11-07
申请人： Lei Larry Zhang , Yong Shen , Honglin Zhu , Yizhong Wang
发明人： Lei Larry Zhang , Yong Shen , Honglin Zhu , Yizhong Wang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing a perpendicular magnetic recording head includes providing a metal underlayer and forming a trench in the metal underlayer. The trench has a bottom and a top wider than the bottom. The method also includes providing a PMR pole. At least a portion of the PMR pole resides in the trench. The method also includes providing a write gap on the PMR pole and providing a top shield on at least the write gap.
摘要翻译：提供垂直磁记录头的方法包括提供金属底层并在金属底层中形成沟槽。沟槽的底部和顶部宽于底部。该方法还包括提供PMR极点。 PMR极的至少一部分位于沟槽中。该方法还包括在PMR极上提供写入间隙，并在至少写入间隙上提供顶部屏蔽。

9. 发明授权

US08547730B1 Method and system for providing a spin tunneling magnetic element having a crystalline barrier layer 有权
标题翻译：提供具有结晶阻挡层的自旋隧穿磁性元件的方法和系统
公开(公告)号：US08547730B1
公开(公告)日：2013-10-01
申请号：US12712085
申请日：2010-02-24
申请人： Yong Shen , Qunwen Leng
发明人： Yong Shen , Qunwen Leng
IPC分类号： G11C11/00 , H01L29/82
CPC分类号： H01F10/3295 , B82Y10/00 , B82Y25/00 , B82Y40/00 , G01R33/098 , G11B5/3906 , G11B5/3909 , G11C11/161 , H01F10/3254 , H01F10/3268 , H01F41/307 , H01L43/12
摘要： The method and system for providing a spin tunneling element are disclosed. The method and system include depositing a pinned layer, a barrier layer, and a free layer. The barrier layer has a first crystal structure and a texture. The free layer includes a first ferromagnetic layer and a second ferromagnetic layer. The first ferromagnetic is adjacent to the second ferromagnetic layer and between the second ferromagnetic layer and the barrier layer. The first ferromagnetic layer has the first crystal structure and the texture, while the second ferromagnetic layer has a second crystal structure different from the first crystal structure.
摘要翻译：公开了用于提供自旋隧穿元件的方法和系统。该方法和系统包括沉积钉扎层，阻挡层和自由层。阻挡层具有第一晶体结构和纹理。自由层包括第一铁磁层和第二铁磁层。第一铁磁体与第二铁磁层相邻，并且在第二铁磁层与阻挡层之间。第一铁磁层具有第一晶体结构和纹理，而第二铁磁层具有与第一晶体结构不同的第二晶体结构。

10. 发明授权

US08077434B1 Perpendicular magnetic recording head having a recessed magnetic base layer 有权
标题翻译：具有凹陷磁性基底层的垂直磁记录头
公开(公告)号：US08077434B1
公开(公告)日：2011-12-13
申请号：US11942113
申请日：2007-11-19
申请人： Yong Shen , Lei Larry Zhang , Yingjian Chen , Ut Tran
发明人： Yong Shen , Lei Larry Zhang , Yingjian Chen , Ut Tran
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/3116
摘要： A method and system for providing a magnetic transducer having an air-bearing surface (ABS) are described. The magnetic transducer includes a base layer, a perpendicular magnetic recording (PMR) pole on the base layer, an additional pole, a write shield, a write gap between the PMR pole and a portion of the write shield, and coil(s) that energize at least the additional pole. The base layer includes a first portion proximate to the ABS and a second portion recessed from the ABS. The first portion is nonmagnetic, while the second portion is magnetic. The PMR pole has a first front portion proximate to the ABS. The additional pole has a second front portion recessed from the ABS. At least a portion of the additional pole resides between the PMR pole and write shield. At least a portion of the write gap resides on the front portion of the PMR pole.
摘要翻译：描述了一种用于提供具有空气轴承表面（ABS）的磁换能器的方法和系统。磁换能器包括基层，基层上的垂直磁记录（PMR）极，附加极，写屏蔽，PMR极与写屏蔽的一部分之间的写间隙，以及线圈，至少激励附加极点。基层包括靠近ABS的第一部分和从ABS凹陷的第二部分。第一部分是非磁性的，而第二部分是磁性的。 PMR杆具有靠近ABS的第一前部。附加的杆具有从ABS凹入的第二前部。附加极点的至少一部分位于PMR极和写保护罩之间。写入间隙的至少一部分位于PMR极的前部。

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