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    • 1. 发明授权
    • Electrical resistance with at least two contact fields on a ceramic
substrate and process for manufacturing the same
    • 在陶瓷基板上具有至少两个接触场的电阻及其制造方法
    • US6159386A
    • 2000-12-12
    • US329561
    • 1999-06-10
    • Karlheinz WienandKarlheinz UllrichMargit SanderStefan Dietmann
    • Karlheinz WienandKarlheinz UllrichMargit SanderStefan Dietmann
    • G01K7/18H01C1/014H01C7/02H01C7/22H01C13/00H01C17/00H01C17/06
    • G01K7/183H01C17/06H01C7/008H01C7/06H01C7/22H05K1/167H05K2201/0394H05K3/0029
    • A temperature-dependent measuring resistance with rapid response time is at least partially arranged on an electrically insulating surface of a ceramic substrate, wherein a portion of the conductor path spans a recess situated in the substrate in a bridge-like manner, and the remaining portion of the conductor path in the edge area of the substrate adjacent to the recess is provided with connection contact fields. The conductor path comprises a platinum or gold layer, wherein the conductor path is partially provided with a cover layer of glass, and wherein the connection contact fields are exposed. In a further embodiment, the conductor path is arranged together with the connection contact fields either on a screen-printed glass membrane or on a thin film membrane applied in a PVD process, which covers the surface of the ceramic substrate and spans the recess. The cover layer is likewise selectively applied by screen printing in case there is a glass membrane. In the case of a thin film membrane, the cover layer is also applied selectively by a PVD process and can be the same material as the thin film membrane. The ceramic substrate preferably comprises aluminum oxide.
    • 具有快速响应时间的温度依赖测量电阻至少部分地布置在陶瓷衬底的电绝缘表面上,其中导体路径的一部分以桥状方式跨越位于衬底中的凹部,其余部分 在与凹部相邻的基板的边缘区域中的导体路径设置有连接接触区域。 导体路径包括铂或金层,其中导体路径部分地设置有玻璃覆盖层,并且其中暴露连接接触区域。 在另一个实施例中,导体路径与丝网印刷玻璃膜上的连接接触区域或涂覆在PVD工艺中的薄膜上一起布置,该薄膜膜覆盖陶瓷基板的表面并跨越凹部。 在有玻璃膜的情况下,也可以通过丝网印刷选择性地施加覆盖层。 在薄膜膜的情况下,覆盖层也通过PVD工艺选择性地施加,并且可以是与薄膜膜相同的材料。 陶瓷基板优选包含氧化铝。
    • 3. 发明授权
    • High temperature-stable sensor
    • 高温稳定传感器
    • US07893510B2
    • 2011-02-22
    • US11179109
    • 2005-07-12
    • Karlheinz WienandKarlheinz Ullrich
    • Karlheinz WienandKarlheinz Ullrich
    • H01L21/76
    • G01N27/4075
    • A high temperature-stable sensor is provided in which electrodes on a substrate or an insulation layer are in contact with a sensitive layer, wherein the electrodes have platinum, rhodium, or iridium or an electrically conductive oxide layer. For this purpose, an intermediate product is provided as a platform chip, which has a deposited layer made of platinum, rhodium, or iridium or an alloy of platinum, rhodium, or iridium and is covered by an electrically conductive oxide. From the deposited layer, a conductive structure is formed and thus a platform chip is created with an electrically conductive structure subject to external influences. This structure has an electrically conductive oxide and/or its parts have long-term, stable characteristic resistance curves under high-temperature loading above about 500° C., especially between about 600° C. and 950° C. A sensor with a gas-sensitive layer formed as a gas-sensitive sensor is preferred.
    • 提供了一种高温度稳定的传感器,其中基板或绝缘层上的电极与敏感层接触,其中电极具有铂,铑或铱或导电氧化物层。 为此,提供了作为平台芯片的中间产品,其具有由铂,铑或铱制成的沉积层或铂,铑或铱的合金,并被导电氧化物覆盖。 从沉积层形成导电结构,因此产生具有外部影响的导电结构的平台芯片。 该结构具有导电氧化物和/或其部件在高于500℃,特别是约600℃至950℃的高温负载下具有长期稳定的特性电阻曲线。具有气体的传感器 作为气敏传感器形成的敏感层是优选的。
    • 4. 发明申请
    • Film Resistor in Exhaust-gas Pipe
    • 排气管中的膜电阻
    • US20090282909A1
    • 2009-11-19
    • US12307024
    • 2007-06-29
    • Karlheinz WienandKarlheinz UllrichMatthias Muziol
    • Karlheinz WienandKarlheinz UllrichMatthias Muziol
    • G01F1/692H01C17/00
    • G01F1/684G01F1/6845G01F1/692G01F1/6983G01P5/12Y10T29/49082
    • A measurement device, in particular anemometric measurement device of a flow sensor, contains film resistors in one or more opening(s) of a cover or a hollow body. The film resistors are fastened according to the invention in the opening(s). Two film resistors differ with respect to their resistance by one to three orders of magnitude.In an anemometric measurement device of a flow sensor according to the invention, a temperature sensor and a heating capacity sensor are placed in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor as platinum thin-film or thick-film resistors on a ceramic substrate.For self-cleaning of an anemometric measurement device of a flow sensor, in which a temperature-measuring element and a heating element are placed in a carrier element, the temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for temperature measurement and is heated with an additional platinum thin-film resistor.For production of an anemometric measurement device of a flow sensor made of film resistors and a cover or a hollow body, two film resistors differing by one to two orders of magnitude are placed in openings of the cover or hollow body and are fastened in the openings.
    • 测量装置,特别是流量传感器的气流测量装置,在盖或中空体的一个或多个开口中包含薄膜电阻。 薄膜电阻器根据本发明被固定在开口中。 两个薄膜电阻器的电阻相差一到三个数量级。 在根据本发明的流量传感器的风速测量装置中,将温度传感器和加热能力传感器放置在载体元件中。 温度传感器在陶瓷基板上具有温度测量电阻器和作为铂薄膜或厚膜电阻器的导热体。 为了自动清洁温度测量元件和加热元件放置在载体元件中的流量传感器的电流测量装置,该温度测量元件在陶瓷基板上具有用于温度的铂薄膜电阻器 并用附加的铂薄膜电阻加热。 为了制造由薄膜电阻器和盖子或中空体制成的流量传感器的电流测量装置,将两个不同于一个数量级的薄膜电阻器放置在盖子或中空体的开口中并且紧固在开口 。
    • 5. 发明申请
    • High temperature-stable sensor
    • 高温稳定传感器
    • US20060170015A1
    • 2006-08-03
    • US11179109
    • 2005-07-12
    • Karlheinz WienandKarlheinz Ullrich
    • Karlheinz WienandKarlheinz Ullrich
    • H01L27/20
    • G01N27/4075
    • A high temperature-stable sensor is provided in which electrodes on a substrate or an insulation layer are in contact with a sensitive layer, wherein the electrodes have platinum, rhodium, or iridium or an electrically conductive oxide layer. For this purpose, an intermediate product is provided as a platform chip, which has a deposited layer made of platinum, rhodium, or iridium or an alloy of platinum, rhodium, or iridium and is covered by an electrically conductive oxide. From the deposited layer, a conductive structure is formed and thus a platform chip is created with an electrically conductive structure subject to external influences. This structure has an electrically conductive oxide and/or its parts have long-term, stable characteristic resistance curves under high-temperature loading above about 500° C., especially between about 600° C. and 950° C. A sensor with a gas-sensitive layer formed as a gas-sensitive sensor is preferred.
    • 提供了一种高温度稳定的传感器,其中基板或绝缘层上的电极与敏感层接触,其中电极具有铂,铑或铱或导电氧化物层。 为此,提供了作为平台芯片的中间产品,其具有由铂,铑或铱制成的沉积层或铂,铑或铱的合金,并被导电氧化物覆盖。 从沉积层形成导电结构,因此产生具有外部影响的导电结构的平台芯片。 该结构具有导电氧化物和/或其部件在高于500℃,特别是约600℃至950℃的高温负载下具有长期稳定的特性电阻曲线。具有气体的传感器 作为气敏传感器形成的敏感层是优选的。
    • 8. 发明授权
    • Photolithographic structured thick layer sensor
    • 光刻结构厚层传感器
    • US09068913B2
    • 2015-06-30
    • US13319767
    • 2010-05-06
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • G01N15/00G01N15/06
    • G01N15/0656Y10T29/49002
    • A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
    • 提供了一种传感器,特别是阻抗传感器,例如烟灰传感器,其具有两个相互电绝缘的电极,其中至少一个外部电极由金属和无机氧化物的复合物形成,膜厚度为0.5 至20μm。 膜图案的迹线宽度和迹线之间的间距为5〜70μm,导体迹线边缘周围的边界区域变化小于10μm。 两个电极可以彼此相邻地布置为平面中的膜图案。 优选地,传感器具有加热器。 为了大规模生产,电极在电绝缘氧化物基底上作为膜厚度为0.5至20μm的膜图案生产,并且在金属粉末和含氧化物浆料的全表面压印之后,电极被特别精确地构造为痕迹 从印刷电影。 特别地,印刷膜的膜厚减小。
    • 9. 发明申请
    • PHOTOLITHOGRAPHIC STRUCTURED THICK LAYER SENSOR
    • 光刻结构厚层传感器
    • US20120062254A1
    • 2012-03-15
    • US13319767
    • 2010-05-06
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • G01R27/00H01F41/00G01M15/10
    • G01N15/0656Y10T29/49002
    • A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
    • 提供了一种传感器,特别是阻抗传感器,例如烟灰传感器,其具有两个相互电绝缘的电极,其中至少一个外部电极由金属和无机氧化物的复合物形成,膜厚度为0.5 至20μm。 膜图案的迹线宽度和迹线之间的间距为5〜70μm,导体迹线边缘周围的边界区域变化小于10μm。 两个电极可以彼此相邻地布置为平面中的膜图案。 优选地,传感器具有加热器。 为了大规模生产,电极在电绝缘氧化物基底上作为膜厚度为0.5至20μm的膜图案生产,并且在金属粉末和含氧化物浆料的全表面压印之后,电极被特别精确地构造为痕迹 从印刷电影。 特别地,印刷膜的膜厚减小。
    • 10. 发明授权
    • Flow sensor element and its self-cleaning
    • 流量传感器元件及其自洁性
    • US07739908B2
    • 2010-06-22
    • US12108878
    • 2008-04-24
    • Karlheinz WienandKarlheinz UllrichMatthias Muziol
    • Karlheinz WienandKarlheinz UllrichMatthias Muziol
    • G01F1/68
    • G01F1/6983G01F1/6845G01F1/692
    • A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and these elements can form a multiple-part ceramic component. The temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for the temperature measurement and is heated with an additional platinum thin-film resistor. A measurement device, in particular an anemometric measurement device of a flow sensor, contains film resistors mounted in at least one opening of a cover or a hollow body. Two of the film resistors have resistance values differing by one to three orders of magnitude. The anemometric measurement device has a temperature sensor and a heat output sensor set in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor, as platinum thin-film or thick-film resistors, on a ceramic substrate.
    • 提供了流量传感器元件和流量传感器元件的自清洁方法,其中温度测量元件和加热元件布置在载体元件上,并且这些元件可以形成多部件陶瓷部件。 温度测量元件在陶瓷基板上具有用于温度测量的铂薄膜电阻器,并用附加的铂薄膜电阻器加热。 测量装置,特别是流量传感器的气流测量装置包含安装在盖子或中空体的至少一个开口中的薄膜电阻器。 两个薄膜电阻器的电阻值相差一到三个数量级。 风速测量装置具有设置在载体元件中的温度传感器和热输出传感器。 温度传感器在陶瓷基板上具有温度测量电阻和作为铂薄膜或厚膜电阻的导热体。