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1. 发明授权

US09713241B2 Reactive-species supply device and surface treatment apparatus 有权
公开(公告)号：US09713241B2
公开(公告)日：2017-07-18
申请号：US13807249
申请日：2011-06-30
申请人： Masaru Hori , Hiroyuki Kano , Tetsunori Kawasumi , Naofumi Yoshida , Akihiro Kawajiri , Toshimitsu Watanabe , Joji Isozumi
发明人： Masaru Hori , Hiroyuki Kano , Tetsunori Kawasumi , Naofumi Yoshida , Akihiro Kawajiri , Toshimitsu Watanabe , Joji Isozumi
IPC分类号： H05H1/00 , H01J37/00 , H05H1/24 , H01J37/32 , H05H1/48
CPC分类号： H05H1/24 , H01J37/32559 , H01J37/32733 , H05H1/48 , H05H2001/485 , H05H2001/488 , H05H2245/123
摘要： A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.

2. 发明申请

US20130174984A1 REACTIVE-SPECIES SUPPLY DEVICE AND SURFACE TREATMENT APPARATUS 有权
标题翻译：反应物供应装置和表面处理装置
公开(公告)号：US20130174984A1
公开(公告)日：2013-07-11
申请号：US13807249
申请日：2011-06-30
申请人： Masaru Hori , Hiroyuki Kano , Tetsunori Kawasumi , Naofumi Yoshida , Akihiro Kawajiri , Toshimitsu Watanabe , Joji Isozumi
发明人： Masaru Hori , Hiroyuki Kano , Tetsunori Kawasumi , Naofumi Yoshida , Akihiro Kawajiri , Toshimitsu Watanabe , Joji Isozumi
IPC分类号： H05H1/24
CPC分类号： H05H1/24 , H01J37/32559 , H01J37/32733 , H05H1/48 , H05H2001/485 , H05H2001/488 , H05H2245/123
摘要： A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
摘要翻译：反应物质供给装置被配置为将处理气体供应到放电空间，从而至少将形成在等离子体中的反应物质供应到物体。反应物种供应装置包括（a）至少一对电极，其被配置为形成放电空间，（b）电极保护装置，其被配置为保护电极免受处理气体的影响。还公开了包括反应物种供应装置的表面处理装置。

3. 发明申请

US20130168361A1 REACTIVE-SPECIES SUPPLY DEVICE AND SURFACE TREATMENT APPARATUS 有权
标题翻译：反应物供应装置和表面处理装置
公开(公告)号：US20130168361A1
公开(公告)日：2013-07-04
申请号：US13807204
申请日：2011-06-30
申请人： Masaru Hori , Hiroyuki Kano , Kazuaki Mori , Nobuyuki Nakane , Toshimitsu Watanabe , Joji Isozumi
发明人： Masaru Hori , Hiroyuki Kano , Kazuaki Mori , Nobuyuki Nakane , Toshimitsu Watanabe , Joji Isozumi
IPC分类号： B23H1/00
CPC分类号： B23H1/00 , H05H1/48 , H05H2001/485 , H05H2001/488 , H05H2245/123
摘要： A reactive-species supply device is configured to supply a treatment gas to an electric discharge space that is formed by at least one pair of electrodes, for thereby supplying at least a reactive species formed in a plasma, to an object through a reactive-species output port. The reactive-species supply device includes (a) a reactive-species outlet passage disposed between the electric discharge space and the reactive-species output port and (b) an earth ground member disposed in a portion of the reactive-species outlet passage. The portion of the reactive-species outlet passage is distant, by a given distance, from the reactive-species output port. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
摘要翻译：反应物种供应装置被配置为将处理气体供应到由至少一对电极形成的放电空间，从而通过反应物种将至少一种形成在等离子体中的反应性物质供应给物体输出端口反应物种供应装置包括（a）设置在放电空间和反应物种输出端口之间的反应物种出口通道和（b）设置在反应物种出口通道的一部分中的接地构件。反应物种出口通道的部分距离反应物种输出端口相距一定距离。还公开了包括反应物种供应装置的表面处理装置。

4. 发明授权

US09452481B2 Reactive-species supply device and surface treatment apparatus 有权
标题翻译：反应物种供应装置和表面处理装置
公开(公告)号：US09452481B2
公开(公告)日：2016-09-27
申请号：US13807204
申请日：2011-06-30
申请人： Masaru Hori , Hiroyuki Kano , Kazuaki Mori , Nobuyuki Nakane , Toshimitsu Watanabe , Joji Isozumi
发明人： Masaru Hori , Hiroyuki Kano , Kazuaki Mori , Nobuyuki Nakane , Toshimitsu Watanabe , Joji Isozumi
IPC分类号： B23H1/00 , H05H1/48
CPC分类号： B23H1/00 , H05H1/48 , H05H2001/485 , H05H2001/488 , H05H2245/123
摘要： A reactive-species supply device is configured to supply a treatment gas to an electric discharge space that is formed by at least one pair of electrodes, for thereby supplying at least a reactive species formed in a plasma, to an object through a reactive-species output port. The reactive-species supply device includes (a) a reactive-species outlet passage disposed between the electric discharge space and the reactive-species output port and (b) an earth ground member disposed in a portion of the reactive-species outlet passage. The portion of the reactive-species outlet passage is distant, by a given distance, from the reactive-species output port. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
摘要翻译：反应物种供应装置被配置为将处理气体供应到由至少一对电极形成的放电空间，从而通过反应物种将至少一种形成在等离子体中的反应性物质供应给物体输出端口反应物种供应装置包括（a）设置在放电空间和反应物种输出端口之间的反应物种出口通道和（b）设置在反应物种出口通道的一部分中的接地构件。反应物种出口通道的部分距离反应物种输出端口相距一定距离。还公开了包括反应物种供应装置的表面处理装置。

5. 发明申请

US20110042008A1 PLASMA GENERATOR 审中-公开
标题翻译：等离子发生器
公开(公告)号：US20110042008A1
公开(公告)日：2011-02-24
申请号：US12735807
申请日：2009-02-20
申请人： Masaru Hori , Hiroyuki Kano , Kazuo Amano , Tetsuya Koike , Naofumi Yoshida , Toshiyuki Ikedo
发明人： Masaru Hori , Hiroyuki Kano , Kazuo Amano , Tetsuya Koike , Naofumi Yoshida , Toshiyuki Ikedo
IPC分类号： C23F1/08 , H05H1/48
CPC分类号： H05H1/48 , H01J37/3244 , H01J37/32449 , H01J37/32467 , H01J37/3255
摘要： To provide a plasma generator having a plasma-generating zone of an increased volume.A plasma generator 100 has a casing 10 made of a sintered ceramic produced from alumina (Al2O3) as a raw material. The casing 10 has a slit-like gas intake section 12, and a gas discharge section 20 in which a plurality of holes are disposed in a line. From the gas intake section 12 to the top of a plasma-generating zone P, the slits have a width of 1 mm. There is provided a second gas discharge section 22 including holes 24 which have a diameter of 0.5 mm and a length of 16 mm and which are arranged in a line along the longitudinal axis of the plasma-generating zone P. The plasma-generating zone P has a cross-section which is a rectangle having a side of 2 to 5 mm. Electrodes 2a, 2b are provided with hollow portions on the surfaces thereof facing each other. A power sources supplies about 9 kV, which is obtained by boosting 100 V (60 Hz) and is applied to the electrodes 2a, 2b with a current of 20 mA. When argon gas is supplied through a gas intake section 12, a plasma was generated, even when the electrodes 2a, 2b were separated at a maximum spacing of 4 cm. No electric discharge was generated between the tips of the holes 24 and a treatment object.
摘要翻译：提供具有增加体积的等离子体产生区域的等离子体发生器。等离子体发生器100具有由作为原料的氧化铝（Al 2 O 3）制成的烧结陶瓷制成的壳体10。壳体10具有狭缝状的气体吸入部12和排列在多个孔中的气体排出部20。从气体吸入部12到等离子体产生区P的顶部，狭缝的宽度为1mm。设置有第二气体排出部22，该第二气体排出部22具有直径为0.5mm，长度为16mm的孔24，沿着等离子体产生区P的纵轴线排列。等离子体产生区P 具有侧面为2〜5mm的矩形的截面。电极2a，2b在其彼此面对的表面上设置有中空部分。电源提供约9kV，其通过升压100V（60Hz）而获得，并以20mA的电流施加到电极2a，2b。当通过气体进入部分12供应氩气时，即使电极2a，2b以4cm的最大间距分离，也产生等离子体。在孔24的尖端和处理对象物之间不产生放电。

6. 发明授权

US09447518B2 Radical generator and molecular beam epitaxy apparatus 有权
标题翻译：自由基发生器和分子束外延装置
公开(公告)号：US09447518B2
公开(公告)日：2016-09-20
申请号：US13819284
申请日：2011-08-24
申请人： Masaru Hori , Hiroshi Amano , Hiroyuki Kano , Shoji Den , Koji Yamakawa
发明人： Masaru Hori , Hiroshi Amano , Hiroyuki Kano , Shoji Den , Koji Yamakawa
IPC分类号： C23C16/00 , H01L21/326 , C30B23/02 , H05H1/46 , H01J37/32 , C30B23/06 , H05H1/30 , H05H1/24
CPC分类号： H01J37/321 , C30B23/02 , C30B23/066 , C30B25/14 , C30B29/403 , H01J37/3178 , H01J37/32091 , H01J37/32357 , H01J37/3244 , H01J37/32541 , H01J37/3266 , H01J2237/006 , H01J2237/083 , H01J2237/327 , H01J2237/3321 , H05H1/30 , H05H1/46 , H05H2001/2462 , H05H2001/2468
摘要： A radical generator includes a supply tube, a plasma-generating tube, a coil winding about an outer circumference of the plasma-generating tube, for generating an inductively coupled plasma in the plasma-generating tube, an electrode for generating a capacitively coupled plasma in the plasma-generating tube and adding the capacitively coupled plasma to the inductively coupled plasma, and a parasitic-plasma-preventing tube including a dielectric material which extends from a bottom of the plasma-generating tube to an opening of the supply tube in a space between the bottom and the opening, and a tip part thereof is inserted into the supply tube to cover an inner wall of the supply tube for preventing a generation of a parasitic plasma between the electrode and the inner wall of the supply tube.
摘要翻译：自由基发生器包括供给管，等离子体产生管，围绕等离子体产生管的外圆周的线圈绕组，用于在等离子体发生管中产生电感耦合等离子体，用于产生电容耦合等离子体的电极等离子体发生管，并将电容耦合等离子体添加到电感耦合等离子体;以及寄生等离子体防止管，其包括从等离子体产生管的底部延伸到供应管的开口的电介质材料在底部和开口之间，并且其顶端部分插入供应管中以覆盖供应管的内壁，以防止在电极和供应管的内壁之间产生寄生等离子体。

7. 发明申请

US20090140651A1 Discharge Light Source 审中-公开
标题翻译：放电光源
公开(公告)号：US20090140651A1
公开(公告)日：2009-06-04
申请号：US12227434
申请日：2007-05-21
申请人： Masaru Hori , Hiroyuki Kano
发明人： Masaru Hori , Hiroyuki Kano
IPC分类号： H01J17/26 , H01J61/16 , H01J61/06
CPC分类号： H01J61/86 , H01J61/0732 , H01J61/16 , H01J61/28
摘要： [Problem]To provide a light-emitting device as a point light source having a broad emission spectrum by a safe and simple process.[Means for Solving the Problem]The discharge light source shown in FIG. 1 is composed of an insulated pipe 30 and electrodes 31a and 31b. Projections 32a and 32b extend from the electrodes 31a and 31b. When a voltage is applied to the electrodes 31a and 31b in an argon gas flow through the insulated pipe 30 passing between the projections 32a and 32b, a glow discharge is generated thereby emitting light in the area between the projections 32a and 32b. The interval between the projections 32a and 32b is so narrow that the emitting area is small, and thus the light source serves as a point light source. The emission intensity increases with an increase of the gas flow rate, whereby a continuous broad emission spectrum is produced over the ultraviolet to visible region.
摘要翻译：通过安全且简单的工艺，提供具有宽发射光谱的点光源的发光装置。解决问题的手段图1所示的放电光源 1由绝缘管30和电极31a和31b组成。突起32a和32b从电极31a和31b延伸。当通过穿过突起32a和32b之间的绝缘管30的氩气流中向电极31a和31b施加电压时，产生辉光放电，从而在突起32a和32b之间的区域中发光。突起32a和32b之间的间隔非常窄，使得发射面积小，因此光源用作点光源。发射强度随着气体流量的增加而增加，从而在紫外到可见光区域产生连续的宽发射光谱。

8. 发明授权

US08310673B2 Light source 有权
标题翻译：光源
公开(公告)号：US08310673B2
公开(公告)日：2012-11-13
申请号：US12450402
申请日：2008-03-24
申请人： Masaru Hori , Hiroyuki Kano , Shoji Den
发明人： Masaru Hori , Hiroyuki Kano , Shoji Den
IPC分类号： G01J3/30
CPC分类号： H05H1/0025 , G01N21/15 , G01N21/3103 , G01N2021/158 , G01N2201/023 , G01N2201/0233 , G01N2201/061
摘要： To provide a light source which realizes accurate determination of the particle density of a plasma atmosphere without disturbing the state of the plasma atmosphere.The light source of the invention includes a tubular casing 12; a cooling medium passage 30 for causing a cooling medium to flow therethrough, the passage being provided along the inner wall of the casing; a lens 50 provided at a tip end of the casing; a first electrode 44 and a second electrode 45 which are provided in the casing and before the lens so as to be vertical to the axis of the casing and parallel to each other; and an insulating spacer 46 provided between the first electrode and the second electrode. The light source further includes a hole 47 axially penetrating the center portions of the first electrode, the insulating spacer, and the second electrode; and an electric discharge gas passage for introducing an electric discharge gas, along the inner wall of the cooling medium passage, to the back surface of the lens so that the electric discharge gas is reflected by thepslens and flows through the hole.
摘要翻译：提供一种实现等离子体气氛的粒子密度的精确测定而不干扰等离子体气氛的状态的光源。本发明的光源包括管状壳体12; 用于使冷却介质流过其中的冷却介质通道30，所述通道沿着所述壳体的内壁设置; 设置在所述壳体的前端的透镜50; 第一电极44和第二电极45，其设置在壳体内并且在透镜之前垂直于壳体的轴线并且彼此平行; 以及设置在第一电极和第二电极之间的绝缘间隔件46。光源还包括轴向穿过第一电极，绝缘间隔物和第二电极的中心部分的孔47; 以及放电气体通道，用于沿着冷却介质通道的内壁将放电气体引导到透镜的背面，使得放电气体被透镜反射并流过孔。

9. 发明申请

US20120088650A1 MANUFACTURING METHOD FOR CATALYST CARRIER 审中-公开
标题翻译：催化载体的制造方法
公开(公告)号：US20120088650A1
公开(公告)日：2012-04-12
申请号：US13247165
申请日：2011-09-28
申请人： Yuichiro Hama , Masaru Hori , Hiroyuki Kano
发明人： Yuichiro Hama , Masaru Hori , Hiroyuki Kano
IPC分类号： B01J37/08 , B01J21/18 , B82Y30/00
CPC分类号： B01J21/185 , B01J23/42 , B01J37/03 , B01J37/086 , B82Y30/00 , H01M4/9083 , H01M2008/1095
摘要： After placing inside a reactor second container a substrate to which a CNT not yet carrying a catalyst is adhered under a sealed environment of supercritical carbon dioxide through which a Pt catalyst complex is dispersed, a temperature of the supercritical carbon dioxide is maintained below a decomposition temperature of the Pt catalyst complex, and a temperature of the CNT not yet carrying a catalyst is maintained at or above the decomposition temperature of the Pt catalyst complex by heating the substrate. Further, a pressure of the supercritical carbon dioxide is maintained at 7.5 MPa, which is slightly higher than a supercritical pressure (7.38 MPa) of carbon dioxide. The supercritical carbon dioxide is then caused to contact the CNT adhered to the substrate, and as a result, a Pt catalyst is carried on the CNT.
摘要翻译：在反应器第二容器中放置未分散有催化剂的CNT的超临界二氧化碳的密封环境下附着有载体催化剂的载体的基板，将超临界二氧化碳的温度维持在分解温度以下的Pt催化剂配合物的温度，通过加热基板，将Pt催化剂配合物的温度保持在Pt催化剂配合物的分解温度以上。此外，超临界二氧化碳的压力保持在7.5MPa，稍高于二氧化碳的超临界压力（7.38MPa）。然后使超临界二氧化碳与附着在基板上的CNT接触，结果，在CNT上承载Pt催化剂。

10. 发明申请

US20090122317A1 Spectroscopy Method and Spectroscope 失效
标题翻译：光谱法和光谱仪
公开(公告)号：US20090122317A1
公开(公告)日：2009-05-14
申请号：US11991542
申请日：2006-09-06
申请人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
发明人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
IPC分类号： G01N21/31 , G02B6/26
CPC分类号： G01N21/39 , G01J3/02 , G01J3/0218 , G01J3/0224 , G01J3/10 , G01J3/42 , G01J2001/4242 , G01N2201/0697 , G02B6/2861
摘要： To achieve an apparatus capable of measuring a light absorption coefficient f a sample with high sensitivity. A ring down spectroscope uses a wavelength-variable femtosecond soliton pulse light source 1. Pulse light is input to a loop optical fiber 6 through a first light waveguide 4 and a wavelength selective switch 5. Ring down pulse light is input to a homodyne detector through the wavelength selective switch 5. On the other hand, pulse light propagating in the first light waveguide 4 is split and input to light waveguides constituting a second light waveguide 20 through an optical directional coupler 8 and a first optical switching element 12. The pulse light propagating in the second light waveguide 20 is input to the homodyne detector as reference light and used for synchronous detection. The plural light waveguides constituting the second light waveguide 20 differ in optical length in accordance with the length of the optical fiber 6, and can slightly change the optical length.
摘要翻译：实现能够以高灵敏度测量样品的光吸收系数f的装置。环形光谱仪使用波长可变飞秒激光脉冲光源1.脉冲光通过第一光波导4和波长选择开关5输入到环形光纤6中。环形脉冲光通过波长选择开关5.另一方面，在第一光波导4中传播的脉冲光通过光学定向耦合器8和第一光开关元件12被分离并输入到构成第二光波导20的光波导上。脉冲光在第二光波导20中传播的信号被输入到零差检测器作为参考光，并用于同步检测。构成第二光波导路20的多个光波导根据光纤6的长度的光学长度不同，并且可以稍微改变光学长度。

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