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1. 发明申请

US20050254932A1 Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights 失效
标题翻译：使用弹簧和配重的往复旋转运动的晶圆扫描系统
公开(公告)号：US20050254932A1
公开(公告)日：2005-11-17
申请号：US11099022
申请日：2005-04-05
申请人： Peter Kellerman , Victor Benveniste , Kourosh Saadatmand , Mehran Asdigha , Douglas Brown
发明人： Peter Kellerman , Victor Benveniste , Kourosh Saadatmand , Mehran Asdigha , Douglas Brown
IPC分类号： B66F9/00 , H01L21/00
CPC分类号： H01L21/67069 , H01J2237/20228 , H01J2237/31701
摘要： The present invention is directed to a scanning apparatus and method for processing a workpiece, wherein the scanning apparatus comprises a wafer arm and moving arm fixedly coupled to one another, wherein the wafer arm and moving arm are operable to rotate about a first axis. An end effector, whereon the workpiece resides, is coupled to the wafer arm. A rotational shaft couples the wafer arm and moving arm to a first actuator, wherein the first actuator provides a rotational force to the shaft. A momentum balance mechanism is coupled to the shaft and is operable to generally reverse the rotational direction of the shaft. The momentum balance mechanism comprises one or more fixed spring elements operable to provide a force to a moving spring element coupled to the moving arm. A controller is further operable to maintain a generally constant translational velocity of the end effector within a predetermined scanning range.
摘要翻译：本发明涉及一种用于处理工件的扫描装置和方法，其中扫描装置包括彼此固定地连接的晶片臂和移动臂，其中晶片臂和移动臂可操作以围绕第一轴线旋转。工件所在的端部执行器与晶片臂连接。旋转轴将晶片臂和移动臂联接到第一致动器，其中第一致动器向轴提供旋转力。动量平衡机构联接到轴上并且可操作地大体上使轴的旋转方向反转。动量平衡机构包括一个或多个固定弹簧元件，其可操作以向耦合到移动臂的移动弹簧元件提供力。控制器还可操作以将末端执行器的大致恒定的平移速度保持在预定扫描范围内。

2. 发明申请

US20050099758A1 METHOD OF MAKING A MEMS ELECTROSTATIC CHUCK 失效
标题翻译：制造MEMS静电卡盘的方法
公开(公告)号：US20050099758A1
公开(公告)日：2005-05-12
申请号：US10695153
申请日：2003-10-28
申请人： Peter Kellerman , Shu Qin , Ernie Allen , Douglas Brown
发明人： Peter Kellerman , Shu Qin , Ernie Allen , Douglas Brown
IPC分类号： H01L21/683 , H02B1/00
CPC分类号： H01L21/6833
摘要： The present invention is directed to a method of forming a clamping plate for a multi-polar electrostatic chuck. The method comprises forming a first electrically conductive layer over a semiconductor platform and defining a plurality of portions of the first electrically conductive layer which are electrically isolated from one another. A first electrically insulative layer is formed over the first electrically conductive layer, the first electrically insulative layer comprising a top surface having a plurality of MEMS protrusions extending a first distance therefrom. A plurality of poles are furthermore electrically connected to the respective plurality of portions of the first electrically conductive layer, wherein a voltage applied between the plurality of poles is operable to induce an electrostatic force in the clamping plate.
摘要翻译：本发明涉及一种形成多极静电卡盘夹紧板的方法。该方法包括在半导体平台上形成第一导电层，并且限定彼此电隔离的第一导电层的多个部分。第一电绝缘层形成在第一导电层之上，第一电绝缘层包括具有从其延伸第一距离的多个MEMS突起的顶表面。多个极还电连接到第一导电层的相应多个部分，其中施加在多个极之间的电压可操作以在夹持板中引起静电力。

3. 发明申请

US20050079737A1 MEMS BASED CONTACT CONDUCTIVITY ELECTROSTATIC CHUCK 失效
标题翻译：基于MEMS的接触电导率静电卡盘
公开(公告)号：US20050079737A1
公开(公告)日：2005-04-14
申请号：US10683679
申请日：2003-10-10
申请人： Peter Kellerman , Shu Qin , Ernie Allen , Douglas Brown
发明人： Peter Kellerman , Shu Qin , Ernie Allen , Douglas Brown
IPC分类号： H01L21/683 , H01L21/66
CPC分类号： H01L21/6831 , Y10S438/964
摘要： The present invention is directed to a method for clamping and processing a semiconductor substrate using a semiconductor processing apparatus. According to one aspect of the present invention, a multi-polar electrostatic chuck and associated method is disclosed which provides heating or cooling of a substrate by thermal contact conduction between the electrostatic chuck and the substrate. The multi-polar electrostatic chuck includes a semiconductor platform having a plurality of protrusions that define gaps therebetween, wherein a surface roughness of the plurality of protrusions is less than 100 Angstroms. The electrostatic chuck further includes a voltage control system operable to control a voltage applied to the electrostatic chuck to thus control a contact heat transfer coefficient of the electrostatic chuck, wherein the heat transfer coefficient of the electrostatic chuck is primarily a function of a contact pressure between the substrate and the plurality of protrusions.
摘要翻译：本发明涉及使用半导体处理装置夹持和处理半导体衬底的方法。根据本发明的一个方面，公开了一种多极静电卡盘和相关方法，其通过静电卡盘和基板之间的热接触传导来提供加热或冷却基板。多极静电卡盘包括具有多个突起的半导体平台，所述突起在其间形成间隙，其中多个突起的表面粗糙度小于100埃。静电卡盘还包括电压控制系统，其可操作以控制施加到静电卡盘的电压，从而控制静电卡盘的接触传热系数，其中静电卡盘的传热系数主要是介于静电卡盘之间的接触压力的函数基板和多个突起。

4. 发明申请

US20050041364A1 Mems based multi-polar electrostatic chuck 失效
标题翻译：基于Mems的多极静电吸盘
公开(公告)号：US20050041364A1
公开(公告)日：2005-02-24
申请号：US10642939
申请日：2003-08-18
申请人： Peter Kellerman , Shu Oin , Douglas Brown
发明人： Peter Kellerman , Shu Oin , Douglas Brown
IPC分类号： H01L21/683 , H02H1/00
CPC分类号： H01L21/6875 , H01L21/6833
摘要： The present invention is directed to a semiconductor processing apparatus and a method for clamping a semiconductor substrate and controlling a heat transfer associated therewith. According to one aspect of the present invention, a multi-polar electrostatic chuck and associated method is disclosed which provides a controlled and uniform heat transfer coefficient across a surface thereof. The multi-polar electrostatic chuck comprises a semiconductor platform having a plurality of protrusions that define gaps therebetween, wherein a distance or depth of the gaps is uniform and associated with a mean free path of the cooling gas therein. The electrostatic chuck is permits a control of a backside pressure of a cooling gas within the plurality of gaps to thus control a heat transfer coefficient of the cooling gas. The plurality of protrusions further provide a uniform contact surface, wherein a contact conductivity between the plurality of protrusions and the substrate is controllable and significantly uniform across the substrate.
摘要翻译：本发明涉及一种用于夹持半导体衬底并控制与之相关的热传递的半导体处理装置和方法。根据本发明的一个方面，公开了一种多极静电卡盘和相关方法，其提供跨越其表面的受控且均匀的传热系数。多极静电卡盘包括具有限定间隙的多个突起的半导体平台，其中间隙的距离或深度是均匀的，并且与其中的冷却气体的平均自由路径相关联。静电吸盘可以控制多个间隙内的冷却气体的背侧压力，从而控制冷却气体的传热系数。多个突起还提供均匀的接触表面，其中多个突起和基底之间的接触导电性在基底上是可控的和显着均匀的。

5. 发明授权

US08762367B2 Accurate and timely enforcement of system resource allocation rules 有权
标题翻译：准确及时地执行系统资源分配规则
公开(公告)号：US08762367B2
公开(公告)日：2014-06-24
申请号：US12329850
申请日：2008-12-08
申请人： Louis Burger , Thomas Julien , Douglas Brown
发明人： Louis Burger , Thomas Julien , Douglas Brown
IPC分类号： G06F17/30
CPC分类号： G06F17/30463 , G06F17/30469 , G06F17/30474
摘要： A computer-implemented method, apparatus and article of manufacture for optimizing a database query. A query execution plan for the database query is generated using estimated cost information; one or more steps of the query execution plan are executed to retrieve data from a database stored on the computer system. Actual cost information is generated for each of the executed steps, and the estimated cost information is re-calculated using the actual cost information. One or more resource allocation rules defined on one or more steps of the query execution plan are executed, based on the estimated cost information, wherein the resource allocation rules include one or more defined actions. The estimated cost information may be re-calculated using the actual cost information when confidence in the estimated cost information is low, but the estimated cost information may not be re-calculated when confidence in the estimated cost information is high. In addition, the estimated cost information may be re-calculated using the actual cost information, only when the step has one or more resource allocation rules defined thereon.
摘要翻译：用于优化数据库查询的计算机实现的方法，装置和制品。使用估计的成本信息生成数据库查询的查询执行计划; 执行查询执行计划的一个或多个步骤以从存储在计算机系统上的数据库检索数据。为每个执行步骤生成实际成本信息，并且使用实际成本信息重新计算估计成本信息。基于估计成本信息，执行在查询执行计划的一个或多个步骤上定义的一个或多个资源分配规则，其中所述资源分配规则包括一个或多个定义的动作。当对估计成本信息的置信度低时，可以使用实际成本信息重新计算估计成本信息，但是当估计成本信息的置信度高时，估计成本信息可能不被重新计算。此外，仅当步骤具有在其上定义了一个或多个资源分配规则时，可以使用实际成本信息重新计算估计成本信息。

6. 发明授权

US08611523B2 Methods and systems for determining segments of a telephonic communication between a customer and a contact center to classify each segment of the communication, assess negotiations, and automate setup time calculation 有权
公开(公告)号：US08611523B2
公开(公告)日：2013-12-17
申请号：US12286168
申请日：2008-09-29
申请人： Kelly Conway , Douglas Brown , Roger Warford , David Gustafson , Christopher Danson
发明人： Kelly Conway , Douglas Brown , Roger Warford , David Gustafson , Christopher Danson
IPC分类号： H04M3/00
CPC分类号： H04M3/5175 , H04M3/42221
摘要： The invention relates to a method and system for analyzing an electronic communication, more particularly, to analyzing a telephone communication between a customer and a contact center to determine communication objects, forming segments of like communication objects, determining strength of negotiations between the contact center and the customer from the segments, and automate setup time calculation.

7. 发明授权

US08510273B2 System, method, and computer-readable medium to facilitate application of arrival rate qualifications to missed throughput server level goals 有权
标题翻译：系统，方法和计算机可读介质，以便于到达率资格的应用到错过吞吐量服务器级目标
公开(公告)号：US08510273B2
公开(公告)日：2013-08-13
申请号：US12552311
申请日：2009-09-02
申请人： Anita Richards , Douglas Brown
发明人： Anita Richards , Douglas Brown
IPC分类号： G06F17/30
CPC分类号： G06F17/30306
摘要： A system, method, and computer-readable medium that provide mechanisms for tracking the number of queries received for processing for a workload to facilitate arrival rate qualifications to Throughput Service Level Goals are provided. A number of queries counter associated with a particular workload is incremented each time a query assigned to the particular workload is received thereby tracking the arrival rate of workload queries. When a system performance condition comprising a non-compliant system performance level with respect to a Throughput Service Level Goal is identified, the number of queries counter is compared with the Throughput Service Level Goal. If the arrival rate of queries for the workload is greater than the Throughput Service Level Goal of the workload, actions associated with non-compliance of the Throughput Service Level Goal may then be performed. If the number of queries counter is less than or equal to the Throughput Service Level Goal, the preliminary identification of the missed Service Level Goal as a system performance condition event is dismissed or otherwise ignored.
摘要翻译：提供了一种系统，方法和计算机可读介质，其提供用于跟踪接收的用于处理工作负载以便于到达吞吐量服务级别目标的到达率资格的查询的数量的机制。每当接收到分配给特定工作负载的查询从而跟踪工作负载查询的到达速率时，与特定工作负荷相关联的多个查询计数器递增。当识别到包括相对于吞吐量服务级别目标的不符合系统性能级别的系统性能条件时，将查询计数器的数量与吞吐量服务级别目标进行比较。如果工作负载查询的到达率大于工作负载的吞吐量服务级别目标，则可能会执行与“吞吐量服务级别目标”不符合相关的操作。如果查询计数器的数量小于或等于“吞吐量服务级别目标”，则将系统性能条件事件的错过的服务级别目标的初步识别被忽略或以其他方式忽略。

8. 发明授权

US08392461B2 Virtual data maintenance 有权
公开(公告)号：US08392461B2
公开(公告)日：2013-03-05
申请号：US11985909
申请日：2007-11-19
申请人： Douglas Brown , John Mark Morris , Todd Walter
发明人： Douglas Brown , John Mark Morris , Todd Walter
IPC分类号： G06F17/30 , G06F17/00
CPC分类号： G06F17/30306
摘要： A computer-implemented apparatus, method, and article of manufacture manage a plurality of database systems and perform data maintenance tasks in a data warehouse system. A domain includes a plurality of database systems. A virtual regulator manages the domain, detects a request to invoke a data maintenance task on a first system in the domain, routes the data maintenance task, for execution, to a second system in the domain, and applies results from the data maintenance task (executed by the second system) to the first system.

9. 发明申请

US20120265751A1 OPTIMIZING THE EXECUTION OF A QUERY IN A MULTI-DATABASE SYSTEM 有权
标题翻译：优化多数据库系统中查询的执行
公开(公告)号：US20120265751A1
公开(公告)日：2012-10-18
申请号：US13271867
申请日：2011-10-12
申请人： Douglas Brown , John Mark Morris
发明人： Douglas Brown , John Mark Morris
IPC分类号： G06F17/30
CPC分类号： G06F17/30463 , G06F17/30545 , G06F17/30584
摘要： Optimizing the execution of a query in a multi-database system includes identifying a region within a table, the table being referenced in the query. The region is stored on data-storage devices on first and second system databases in the multi-database system. A first access plan for the query is developed, the first access plan comprising accessing the version of the region stored on the first system database. A second access plan for the query is developed, the second access plan comprising accessing the version of the region stored on the second system database. A selection is made between the first access plan and the second access plan to execute the query. The query is executed using the selected access plan to produce a result.
摘要翻译：在多数据库系统中优化查询的执行包括识别表中的区域，该表在查询中引用。该区域存储在多数据库系统中的第一和第二系统数据库上的数据存储设备上。开发了用于查询的第一访问计划，第一访问计划包括访问存储在第一系统数据库上的区域的版本。开发了用于查询的第二访问计划，第二访问计划包括访问存储在第二系统数据库上的区域的版本。在第一访问计划和第二访问计划之间进行选择以执行查询。使用所选访问计划执行查询以产生结果。

10. 发明授权

US08151269B1 Database system having a service level goal responsive regulator 有权
标题翻译：数据库系统具有服务级目标响应调节器
公开(公告)号：US08151269B1
公开(公告)日：2012-04-03
申请号：US12317836
申请日：2008-12-30
申请人： Douglas Brown , Stephen Brobst , Anita Richards , Todd Walter
发明人： Douglas Brown , Stephen Brobst , Anita Richards , Todd Walter
IPC分类号： G06F9/46 , G06F7/00
CPC分类号： G06F17/30306
摘要： A database system includes a regulator subsystem that is configured to attempt to satisfy service level goals of multiple workloads that are executing in the database system. The regulator subsystem is configured to monitor execution of a particular request belonging to a particular workload and to assign, at plural event intervals, corresponding priority levels to the particular request based on the monitored execution.
摘要翻译：数据库系统包括调整器子系统，其被配置为尝试满足在数据库系统中执行的多个工作负载的服务级目标。调节器子系统被配置为监视属于特定工作负载的特定请求的执行，并且基于所监视的执行，以多个事件间隔向特定请求分配相应的优先级。

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