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1. 发明申请

US20170358730A1 ELASTIC WAVE DEVICE 审中-公开
公开(公告)号：US20170358730A1
公开(公告)日：2017-12-14
申请号：US15591216
申请日：2017-05-10
申请人： Murata Manufacturing Co., Ltd.
发明人： Yutaka KISHIMOTO , Tetsuya KIMURA
IPC分类号： H01L41/107 , H01L41/047 , H03H9/17 , H03H9/56
CPC分类号： H01L41/107 , H01L41/0471 , H03H9/02574 , H03H9/02614 , H03H9/172 , H03H9/564
摘要： An elastic wave device in which a recess is provided on an upper side of a support, a piezoelectric thin film covers the recess, and an IDT electrode is provided on an upper surface of the piezoelectric thin film. A plate wave of an S0 mode or SH0 mode is used. A plurality of grooves are provided in the upper surface or lower surface of the piezoelectric thin film at a portion of the piezoelectric thin film that is positioned on a hollow section.

2. 发明授权

US09459156B2 Temperature sensor comprising a high-overtone bulk acoustic resonator 有权
标题翻译：温度传感器包括高泛音体声波谐振器
公开(公告)号：US09459156B2
公开(公告)日：2016-10-04
申请号：US13980421
申请日：2012-01-18
申请人： Sylvain Jean Ballandras
发明人： Sylvain Jean Ballandras
IPC分类号： H03B5/30 , G01K11/26 , H03H9/15
CPC分类号： G01K11/26 , G01K11/265 , H03H9/02078 , H03H9/15 , H03H9/172
摘要： This temperature sensor includes an HBAR resonator, a unit for determining the difference between two distinct resonance frequencies at a temperature T, measured between two electrodes of a same pair of the HBAR resonator and a unit for determining the temperature of the resonator from the difference in frequencies and from a one-to-one function providing the match between the temperature and the frequency difference. The resonator is formed by a stack of a first electrode, a transducer, a second electrode, and acoustic substrate and the cuts of the transducer and of the substrate are selected so as to obtain high electro-acoustic couplings and a difference in frequency temperature sensitivities between two distinct vibration modes co-existing within the resonator, greater than or equal to 1 ppm·K−1.
摘要翻译：该温度传感器包括HBAR谐振器，用于确定在同一对HBAR谐振器对的两个电极之间测量的在温度T处的两个不同谐振频率之间的差异的单元和用于从谐振器的温差确定谐振器的温度的单元频率和一对一功能，提供温度和频率差之间的匹配。谐振器由第一电极，换能器，第二电极和声学基板的叠层形成，并且选择换能器和基板的切口以获得高电声耦合和频率温度敏感度的差异在谐振器内共存的两种不同振动模式之间，大于或等于1ppm·K-1。

3. 发明授权

US09099984B2 HBAR resonator comprising a structure for amplifying the amplitude of at least one resonance of said resonator and methods for producing such a resonator 有权
标题翻译： HBAR谐振器包括用于放大所述谐振器的至少一个谐振的振幅的结构和用于产生这种谐振器的方法
公开(公告)号：US09099984B2
公开(公告)日：2015-08-04
申请号：US13847432
申请日：2013-03-19
申请人： Commissariat A l'Energie Atomique et Aux Energies Alternatives , Centre National de la Recherche Scientifique
发明人： Alexandre Reinhardt , Sylvain Ballandras , Francois Perruchot
IPC分类号： H03H9/00 , H01L41/09 , H03H9/17 , H03H9/02 , H03H3/04
CPC分类号： H03H9/17 , H03H3/04 , H03H9/02078 , H03H9/172 , Y10T29/42
摘要： An HBAR resonator comprises, on a substrate, a piezoelectric transducer, said transducer comprising at least one piezoelectric layer, at least two series of electrodes and exhibiting resonance frequencies Fi corresponding to wavelengths λi, characterized in that it comprises an amplification structure comprising at least one resonant cavity arranged on the substrate between said transducer and said substrate or in said substrate, this amplification structure being suitable for mechanically resonating at least one of the resonance frequencies Fi of said transducer corresponding to said wavelength λi, so as to amplify the amplitude of the electrical resonance generated at said frequency.
摘要翻译： HBAR谐振器在衬底上包括压电换能器，所述换能器包括至少一个压电层，至少两个电极系列，并且具有对应于波长λ1的谐振频率Fi，其特征在于，其包括放大结构，该放大结构包括至少一个谐振腔，其布置在所述传感器和所述衬底之间或所述衬底中的衬底上，该放大结构适用于对应于所述波长λi的所述换能器的谐振频率Fi中的至少一个谐振频率Fi进行机械共振，以便放大在所述频率下产生的电共振。

4. 发明授权

US09035709B2 Vibration element, vibrator, oscillator, electronic apparatus, and moving object 有权
标题翻译：振动元件，振动器，振荡器，电子设备和移动物体
公开(公告)号：US09035709B2
公开(公告)日：2015-05-19
申请号：US14220705
申请日：2014-03-20
申请人： SEIKO EPSON CORPORATION
发明人： Masayuki Kikushima , Masako Tanaka , Naohisa Obata , Yukihiro Unno
IPC分类号： H03B5/32 , H01L41/053 , H03H9/05 , H03H9/17 , H01L41/09 , H03H9/10
CPC分类号： H03H9/177 , H01L41/053 , H01L41/0913 , H01L41/0993 , H03B5/32 , H03H9/0538 , H03H9/0547 , H03H9/1021 , H03H9/172
摘要： A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge, and a third thick section provided along another first outer edge. An inclined outer edge section that intersects with each of an X axis and a Z′ axis is provided in a tip section of the piezoelectric substrate.
摘要翻译：振动元件包括压电基片，其包括振动部分和厚度大于振动部分的厚度的厚部分。厚部分包括沿着振动部分的第一外缘设置的第一厚部分，沿着第二外边缘设置的第二厚部分和沿另一第一外边缘设置的第三厚部分。在压电基板的前端部设置有与X轴和Z'轴各自相交的倾斜外缘部。

5. 发明申请

US20150054386A1 RESONATING ELEMENT, RESONATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOBILE OBJECT 审中-公开
标题翻译：谐振元件，谐振器，电子设备，电子设备和移动对象
公开(公告)号：US20150054386A1
公开(公告)日：2015-02-26
申请号：US14511319
申请日：2014-10-10
申请人： Seiko Epson Corporation
发明人： Osamu ISHII
IPC分类号： H01L41/04 , H01L41/08
CPC分类号： H03H9/0552 , H01L41/04 , H01L41/053 , H01L41/08 , H01L41/0913 , H01L41/094 , H03B5/32 , H03H9/0542 , H03H9/1021 , H03H9/131 , H03H9/172 , H03H9/19
摘要： A piezoelectric resonating element includes a piezoelectric substrate that includes a rectangular vibrating section and a thick section integrally formed with the vibrating section, excitation electrodes, and lead electrodes. The thick section includes a first thick section and a second thick section of which one end is formed continuous to the first thick section. The first thick section includes a first inclined section of which the thickness changes and a first thick section main body of a quadrangle column shape, and at least one slit is provided in the first thick section.
摘要翻译：压电谐振元件包括压电基片，其包括矩形振动部分和与振动部分，激励电极和引线电极一体形成的厚部分。厚部分包括第一厚部分和第二厚部分，其一端形成为与第一厚部分连续。第一厚部包括厚度变化的第一倾斜部和四边形柱状的第一厚壁主体，在第一厚壁部设置有至少一个狭缝。

6. 发明授权

US08922302B2 Acoustic resonator formed on a pedestal 有权
标题翻译：声学谐振器形成在基座上
公开(公告)号：US08922302B2
公开(公告)日：2014-12-30
申请号：US13216633
申请日：2011-08-24
申请人： Richard C. Ruby
发明人： Richard C. Ruby
IPC分类号： H03H9/05 , H03H9/08 , H03H3/02 , H03H3/04 , H03H9/17 , H03H9/02
CPC分类号： H03H3/04 , H03H9/02047 , H03H9/02102 , H03H9/02133 , H03H9/0514 , H03H9/172 , Y10T29/42 , Y10T29/49005 , Y10T29/4908
摘要： An acoustic resonator structure comprises a substrate having a trench, a conductive pattern formed in the trench, a pillar formed within the trench, and an acoustic resonator supported at a central location by the pillar and suspended over the trench.
摘要翻译：声谐振器结构包括具有沟槽的衬底，形成在沟槽中的导电图案，形成在沟槽内的柱状体，以及由中心位置由柱支撑并悬挂在沟槽上的声谐振器。

7. 发明授权

US08810111B2 Acoustic wave device and method for manufacturing same 有权
标题翻译：声波装置及其制造方法
公开(公告)号：US08810111B2
公开(公告)日：2014-08-19
申请号：US13131854
申请日：2009-11-24
申请人： Toru Fukano , Junya Nishii
发明人： Toru Fukano , Junya Nishii
IPC分类号： H03H9/25 , H01L41/09
CPC分类号： H03H9/171 , H01L41/047 , H01L41/0533 , H03H3/08 , H03H9/02897 , H03H9/059 , H03H9/1071 , H03H9/172 , H03H9/25 , Y10T29/49005
摘要： An SAW device (1) has a piezoelectric substrate (3) propagating acoustic waves, and a comb-shaped electrode (6) arranged on a first surface (3a) of the piezoelectric substrate (3). The SAW device (1) has a columnar terminal (15) located on the first surface (3a) and electrically connected to the comb-shaped electrode (6), and a cover member (9) covering a side surface of the terminal (15). The terminal (15) comprises, in a first region in the direction of height thereof, a larger diameter on the side of the first surface (3a) compared with the diameter on the side opposite to the first surface (3a).
摘要翻译： SAW器件（1）具有传播声波的压电基片（3）和布置在压电基片（3）的第一表面（3a）上的梳状电极（6）。 SAW器件（1）具有位于第一表面（3a）上并电连接到梳状电极（6）的柱状端子（15）和覆盖端子（15）的侧表面的盖构件）。端子（15）在与第一表面（3a）的相反侧的直径相比，在其高度方向的第一区域中包括在第一表面（3a）侧的较大直径。

8. 发明授权

US08769802B1 Method of fabrication an ultra-thin quartz resonator 有权
标题翻译：制造超薄石英谐振器的方法
公开(公告)号：US08769802B1
公开(公告)日：2014-07-08
申请号：US12831028
申请日：2010-07-06
申请人： David T. Chang , Randall L. Kubena , Pamela R. Patterson
发明人： David T. Chang , Randall L. Kubena , Pamela R. Patterson
IPC分类号： H04R31/00
CPC分类号： H03H9/172 , H03H3/04
摘要： A method for manufacturing a resonator is presented in the present application. The method includes providing a handle substrate, providing a host substrate, providing a quartz substrate comprising a first surface opposite a second surface, applying interposer film to the first surface of the quartz substrate, bonding the quartz substrate to the handle substrate wherein the interposer film is disposed between the quartz substrate and the handle substrate, thinning the second surface of the quartz substrate, removing a portion of the bonded quartz substrate to expose a portion of the interposer film, bonding the quartz substrate to the host substrate, and removing the handle substrate and the interposer film, thereby releasing the quartz substrate.
摘要翻译：在本申请中提出了一种用于制造谐振器的方法。该方法包括提供处理衬底，提供主体衬底，提供包括与第二表面相对的第一表面的石英衬底，将中介层膜施加到石英衬底的第一表面，将石英衬底接合到处理衬底，其中插入膜设置在石英基板和手柄基板之间，使石英基板的第二表面变薄，去除一部分键合的石英基板以暴露中间层膜的一部分，将石英基板接合到主基板，并且移除手柄基板和内插膜，从而释放石英基板。

9. 发明申请

US20140023109A1 TEMPERATURE SENSOR COMPRISING A HIGH-OVERTONE BULK ACOUSTIC RESONATOR 有权
标题翻译：包含高音质大音量谐振器的温度传感器
公开(公告)号：US20140023109A1
公开(公告)日：2014-01-23
申请号：US13980421
申请日：2012-01-18
申请人： Sylvain, Jean Ballandras
发明人： Sylvain, Jean Ballandras
IPC分类号： G01K11/26
CPC分类号： G01K11/26 , G01K11/265 , H03H9/02078 , H03H9/15 , H03H9/172
摘要： This temperature sensor (2) includes an HBAR resonator (10), a unit (20) for determining the difference between two distinct resonance frequencies at a temperature T, measured between two electrodes of a same pair of the HBAR resonator and a unit (30) for determining the temperature of the resonator from the difference in frequencies and from a one-to-one function providing the match between the temperature and the frequency difference. The resonator (10) is formed by a stack of a first electrode (18), a transducer (12), a second electrode (19), and acoustic substrate (14) and the cuts of the transducer (12) and of the substrate (14) are selected so as to obtain high electro-acoustic couplings and a difference in frequency temperature sensitivities between two distinct vibration modes co-existing within the resonator, greater than or equal to 1 ppm·K−1.
摘要翻译：该温度传感器（2）包括HBAR谐振器（10），用于确定在同一对HBAR谐振器对的两个电极和单元（30）之间测量的在温度T处的两个不同谐振频率之间的差异的单元（20）），用于根据频率差和从提供温度和频率差之间的匹配的一对一功能来确定谐振器的温度。谐振器（10）由第一电极（18），换能器（12），第二电极（19）和声学基板（14）以及换能器（12）的切口和基板（14），以便获得高谐振器内的两个不同振动模式之间的高电感耦合和频率温度敏感度差异，大于或等于1ppm·K-1。

10. 发明授权

US08319584B2 Contour-mode piezoelectric micromechanical resonators 有权
标题翻译：轮廓模式压电微机械谐振器
公开(公告)号：US08319584B2
公开(公告)日：2012-11-27
申请号：US12850556
申请日：2010-08-04
申请人： Gianluca Piazza , Philip J. Stephanou , Albert P. Pisano
发明人： Gianluca Piazza , Philip J. Stephanou , Albert P. Pisano
IPC分类号： H03H9/00 , H03H9/54
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译：轮廓模式微机械压电谐振器。谐振器具有底部电极; 顶电极以及设置在底部电极和顶部电极之间的压电层。压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在底部电极，顶部电极或压电层的平面尺寸。

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