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1. 发明授权

US08083859B2 Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber 有权
标题翻译：从真空镀膜室中除去碱金属或碱土金属的方法和装置
公开(公告)号：US08083859B2
公开(公告)日：2011-12-27
申请号：US12130572
申请日：2008-05-30
申请人： Stefan Bangert , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
发明人： Stefan Bangert , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
IPC分类号： B08B7/00 , B08B5/04
CPC分类号： C23C14/564
摘要： The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber (3) a gas from the group of N2, O2 or air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (3).After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.
摘要翻译：本发明涉及一种清洁方法，其中从用碱性或碱土金属涂覆底物（2）的涂覆装置（1）的真空涂敷室（3），碱金属或碱土金属的残留物被删除。为此，在室（3）中，引入来自N2，O2或空气的气体，其与碱金属或碱土金属反应形成相应的固体化合物。另外可以将水引入真空涂敷室（3）。碱金属或碱土金属与气体反应后，从真空镀膜室中除去相应的固体化合物。

2. 发明申请

US20110304899A1 LAMINATED ELECTRICALLY TINTABLE WINDOWS 审中-公开
标题翻译：层压电动可折叠窗
公开(公告)号：US20110304899A1
公开(公告)日：2011-12-15
申请号：US13139508
申请日：2009-12-01
申请人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna
发明人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna
IPC分类号： G02F1/153 , B32B37/14 , B32B38/10
CPC分类号： B32B17/10981 , B32B17/10045 , B32B17/10055 , B32B17/10513 , B32B17/10761 , B32B17/10788 , E06B3/6722 , E06B9/24 , E06B2009/2464 , G02F1/1533 , Y10S359/90 , Y10T156/1075 , Y10T156/12
摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.
摘要翻译：描述了制造具有各种尺寸和功能性的可着色的窗玻璃的方法。该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个电致可着色件中的每一个与所述多个窗玻璃件中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。层压可能导致可着色的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。电致色装置是电致变色装置。

3. 发明授权

US07710671B1 Laminated electrically tintable windows 有权
标题翻译：层压电光泽的窗户
公开(公告)号：US07710671B1
公开(公告)日：2010-05-04
申请号：US12333676
申请日：2008-12-12
申请人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna , Winfried Hoffmann
发明人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna , Winfried Hoffmann
IPC分类号： G02F1/15 , G02F1/153
CPC分类号： B32B17/10981 , B32B17/10045 , B32B17/10055 , B32B17/10513 , B32B17/10761 , B32B17/10788 , E06B3/6722 , E06B9/24 , E06B2009/2464 , G02F1/1533 , Y10S359/90 , Y10T156/1075 , Y10T156/12
摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.
摘要翻译：描述了制造具有各种尺寸和功能性的可着色的窗玻璃的方法。该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个电致可着色件中的每一个与所述多个窗玻璃件中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。层压可能导致可着色的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。电致色装置是电致变色装置。

4. 发明授权

US08218224B2 Laminated electrically tintable windows 有权
标题翻译：层压电光泽的窗户
公开(公告)号：US08218224B2
公开(公告)日：2012-07-10
申请号：US12772930
申请日：2010-05-03
申请人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna , Winfried Hoffmann
发明人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna , Winfried Hoffmann
IPC分类号： G02F1/15 , G02F1/153
CPC分类号： B32B17/10981 , B32B17/10045 , B32B17/10055 , B32B17/10513 , B32B17/10761 , B32B17/10788 , E06B3/6722 , E06B9/24 , E06B2009/2464 , G02F1/1533 , Y10S359/90 , Y10T156/1075 , Y10T156/12
摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.
摘要翻译：描述了制造具有各种尺寸和功能性的可着色的窗玻璃的方法。该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个电致可着色件中的每一个与所述多个窗玻璃件中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。层压可能导致可着色的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。电致色装置是电致变色装置。

5. 发明授权

US09325007B2 Shadow mask alignment and management system 有权
标题翻译：阴影面具对齐和管理系统
公开(公告)号：US09325007B2
公开(公告)日：2016-04-26
申请号：US12905460
申请日：2010-10-15
申请人： Byung-Sung Leo Kwak , Stefan Bangert , Ralf Hofmann , Michael Koenig
发明人： Byung-Sung Leo Kwak , Stefan Bangert , Ralf Hofmann , Michael Koenig
IPC分类号： C23C16/50 , C23C16/00 , C23F1/00 , H01L21/306 , H01M4/58 , H01M4/13 , H01M4/139 , H01M4/62 , H01M4/66 , C23C14/04 , H01M4/02
CPC分类号： H01M6/40 , C23C14/042 , H01M4/02 , H01M4/13 , H01M4/139 , H01M4/5825 , H01M4/621 , H01M4/623 , H01M4/663 , H01M2004/028 , Y02E60/122 , Y10T29/49002 , Y10T29/5313
摘要： A magnetic handling assembly for thin-film processing of a substrate, a system and method for assembling and disassembling a shadow mask to cover a top of a workpiece for exposure to a processing condition. The assembly may include a magnetic handling carrier and a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier to cover a top of a workpiece that is to be disposed between the shadow mask and the magnetic handling carrier when exposed to a processing condition. A system includes a first chamber with a first support to hold the shadow mask, a second support to hold a handling carrier, and an alignment system to align the shadow mask a workpiece to be disposed between the carrier and shadow mask. The first and second supports are moveable relative to each other.
摘要翻译：用于基板薄膜处理的磁性处理组件，用于组装和拆卸荫罩以覆盖工件顶部以暴露于加工状态的系统和方法。组件可以包括磁性处理载体和荫罩，其设置在磁性处理载体上并且磁耦合到磁性处理载体以覆盖待暴露于加工过程中要设置在荫罩和磁性处理载体之间的工件的顶部条件。系统包括具有用于保持荫罩的第一支撑件的第一室，用于保持处理托架的第二支撑件以及将荫罩对准待设置在承载器和荫罩之间的工件的对准系统。第一和第二支撑件可相对于彼此移动。

6. 发明申请

US20100267191A1 PLASMA ENHANCED THERMAL EVAPORATOR 审中-公开
标题翻译：等离子体增强型热蒸发器
公开(公告)号：US20100267191A1
公开(公告)日：2010-10-21
申请号：US12763856
申请日：2010-04-20
申请人： Byung-Sung Kwak , Kaushal K. Singh , Stefan Bangert , Nety M. Krishna
发明人： Byung-Sung Kwak , Kaushal K. Singh , Stefan Bangert , Nety M. Krishna
IPC分类号： H01L31/18
CPC分类号： H01L31/18 , C23C16/4485 , C23C16/45565 , H01L31/03923
摘要： The present invention generally provides a method for forming a photovoltaic device including evaporating a source material to form a large molecule processing gas and flowing the large molecule processing gas through a gas distribution showerhead and into a processing area of a processing chamber having a substrate therein. The method includes generating a small molecule processing gas, and reacting the small molecule processing gas with a film already deposited on a substrate surface to form a semiconductor film. Additionally, apparatuses that may use the methods are also provided to enable continuous inline CIGS type solar cell formation.
摘要翻译：本发明通常提供一种形成光伏器件的方法，包括蒸发源材料以形成大分子加工气体，并使大分子处理气体通过气体分配喷头流入其中具有衬底的处理室的处理区域。该方法包括生成小分子处理气体，并使小分子处理气体与已沉积在基板表面上的膜反应形成半导体膜。此外，还可以使用可以使用这些方法的装置来实现连续的在线CIGS型太阳能电池的形成。

7. 发明授权

US09353436B2 Coating apparatus with rotation module 有权
标题翻译：带旋转模块的涂装设备
公开(公告)号：US09353436B2
公开(公告)日：2016-05-31
申请号：US12388214
申请日：2009-02-18
申请人： Michael Koenig , Stefan Bangert , Uwe Schuessler , Reiner Gertmann
发明人： Michael Koenig , Stefan Bangert , Uwe Schuessler , Reiner Gertmann
IPC分类号： C23C14/04 , C23C16/04 , C23C14/56 , C23C16/54 , C23C14/50 , C23C14/12 , H01L21/67
CPC分类号： C23C14/56 , C23C14/042 , C23C14/12 , C23C14/50 , C23C14/566 , C23C14/568 , C23C16/54 , H01L21/67155
摘要： The present invention refers to a method for coating a substrate, a coating apparatus for carrying out the method and a handling module for coating apparatuses. The handling module comprises a moveable support for a substrate to be coated the support being movable between at least two positions. Further, a mask arranging device for at least one of attaching and detaching a mask to the substrate, and a mask alignment device for aligning the mask with respect to the substrate are provided for, wherein the mask alignment device is attached to the movable support so as to be movable together with the support. Alternatively, the handling module comprises a vacuum chamber, a moveable support for a substrate to be coated, the support being arranged in the vacuum chamber and being rotatable between at least two positions, wherein a mask arranging device for at least one of attaching and detaching a mask to the substrate is arranged within the vacuum chamber of the handling module.
摘要翻译：本发明涉及一种基材的涂布方法，实施该方法的涂布装置和涂布装置的处理模块。处理模块包括用于待涂覆的基底的可移动支撑件，其可在至少两个位置之间移动。另外，提供了一种用于将掩模附着和分离至基板的掩模布置装置和用于使掩模相对于基板对准的掩模对准装置，其中掩模对准装置附接到可移动支撑件以便与支撑件一起移动。或者，处理模块包括真空室，用于待涂覆的基底的可移动支撑件，所述支撑件布置在真空室中并且可在至少两个位置之间旋转，其中，用于至少一个附着和分离的掩模排列装置在处理模块的真空室内布置有衬底的掩模。

8. 发明申请

US20120152727A1 Alkali Metal Deposition System 审中-公开
标题翻译：碱金属沉积系统
公开(公告)号：US20120152727A1
公开(公告)日：2012-06-21
申请号：US13301718
申请日：2011-11-21
申请人： Byung Sung Kwak , Stefan Bangert , Michael Koenig , Florian Ries , Ralf Hofmann
发明人： Byung Sung Kwak , Stefan Bangert , Michael Koenig , Florian Ries , Ralf Hofmann
IPC分类号： C23C14/34
CPC分类号： C23C14/564 , C23C14/3407 , H01J37/34 , H01J37/3426
摘要： A deposition system for alkali and alkaline earth metals may include a metal sputter target including cooling channels, a substrate holder configured to hold a substrate facing and parallel to the metal sputter target, and multiple power sources configured to apply energy to a plasma ignited between the substrate and the metal sputter target. The target may have a cover configured to fit over the target material, the cover may include a handle for automated removal and replacement of the cover within the deposition system, and a valve for providing access to the volume between the target material and the cover for pumping, purging or pressurizing the gas within the volume. Sputter gas may include noble gas with an atomic weight less than that of the metal target.
摘要翻译：用于碱金属和碱土金属的沉积系统可以包括包括冷却通道的金属溅射靶，被配置为保持面向并平行于金属溅射靶的衬底的衬底保持器，以及被配置为将能量施加到在基板和金属溅射靶。目标物可以具有被配置成装配在目标材料上的盖，盖可以包括用于在沉积系统内自动移除和更换盖的手柄，以及用于提供对目标材料和盖之间的体积的通路的阀，用于泵送，清洗或加压体积内的气体。溅射气体可以包括原子量小于金属靶的原子量的惰性气体。

9. 发明申请

US20100233353A1 EVAPORATOR, COATING INSTALLATION, AND METHOD FOR USE THEREOF 审中-公开
标题翻译：蒸发器，涂装安装及其使用方法
公开(公告)号：US20100233353A1
公开(公告)日：2010-09-16
申请号：US12405049
申请日：2009-03-16
申请人： Marcel Martini , Thomas Gebele , Uwe Hoffmann , Stefan Bangert , Michael Koenig
发明人： Marcel Martini , Thomas Gebele , Uwe Hoffmann , Stefan Bangert , Michael Koenig
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , C23C14/12 , C23C14/543
摘要： An evaporator for applying vapor to a substrate at a coating rate is described. The evaporator includes an evaporator tube having a distribution pipe with at least one nozzle outlet, wherein the evaporator tube includes a pressure measurement device, the pressure measurement device comprising an optical diaphragm gauge.
摘要翻译：描述了以涂布速率将蒸汽施加到基底的蒸发器。蒸发器包括具有至少一个喷嘴出口的分配管的蒸发器管，其中蒸发器管包括压力测量装置，该压力测量装置包括光学膜片。

10. 发明申请

US20090226610A1 COATING APPARATUS WITH ROTATION MODULE 有权
公开(公告)号：US20090226610A1
公开(公告)日：2009-09-10
申请号：US12388214
申请日：2009-02-18
申请人： Michael Koenig , Stefan Bangert , Uwe Schuessler , Reiner Gertmann
发明人： Michael Koenig , Stefan Bangert , Uwe Schuessler , Reiner Gertmann
IPC分类号： C23C16/44 , C23C16/54
CPC分类号： C23C14/56 , C23C14/042 , C23C14/12 , C23C14/50 , C23C14/566 , C23C14/568 , C23C16/54 , H01L21/67155
摘要： The present invention refers to a method for coating a substrate, a coating apparatus for carrying out the method and a handling module for coating apparatuses. The handling module comprises a moveable support for a substrate to be coated the support being movable between at least two positions. Further, a mask arranging device for at least one of attaching and detaching a mask to the substrate, and a mask alignment device for aligning the mask with respect to the substrate are provided for, wherein the mask alignment device is attached to the movable support so as to be movable together with the support. Alternatively, the handling module comprises a vacuum chamber, a moveable support for a substrate to be coated, the support being arranged in the vacuum chamber and being rotatable between at least two positions, wherein a mask arranging device for at least one of attaching and detaching a mask to the substrate is arranged within the vacuum chamber of the handling module.

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