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1. 发明申请

US20090293909A1 ARRANGEMENT AND METHOD FOR REMOVING ALKALI- OR ALKALINE EARTH-METALS FROM A VACUUM COATING CHAMBER 有权
标题翻译：从真空涂料室中除去碱金属或碱土金属的方法和方法
公开(公告)号：US20090293909A1
公开(公告)日：2009-12-03
申请号：US12130572
申请日：2008-05-30
申请人： STEFAN BANGERT , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
发明人： STEFAN BANGERT , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
IPC分类号： B08B7/00 , B08B3/12
CPC分类号： C23C14/564
摘要： The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber (3) a gas from the group of N2, O2 or air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (3).After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.
摘要翻译：本发明涉及一种清洁方法，其中从用碱性或碱土金属涂覆底物（2）的涂覆装置（1）的真空涂敷室（3），碱金属或碱土金属的残留物被删除。为此，在室（3）中，引入来自N2，O2或空气的气体，其与碱金属或碱土金属反应形成相应的固体化合物。另外可以将水引入真空涂敷室（3）。碱金属或碱土金属与气体反应后，从真空镀膜室中除去相应的固体化合物。

2. 发明授权

US08083859B2 Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber 有权
标题翻译：从真空镀膜室中除去碱金属或碱土金属的方法和装置
公开(公告)号：US08083859B2
公开(公告)日：2011-12-27
申请号：US12130572
申请日：2008-05-30
申请人： Stefan Bangert , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
发明人： Stefan Bangert , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
IPC分类号： B08B7/00 , B08B5/04
CPC分类号： C23C14/564
摘要： The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber (3) a gas from the group of N2, O2 or air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (3).After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.
摘要翻译：本发明涉及一种清洁方法，其中从用碱性或碱土金属涂覆底物（2）的涂覆装置（1）的真空涂敷室（3），碱金属或碱土金属的残留物被删除。为此，在室（3）中，引入来自N2，O2或空气的气体，其与碱金属或碱土金属反应形成相应的固体化合物。另外可以将水引入真空涂敷室（3）。碱金属或碱土金属与气体反应后，从真空镀膜室中除去相应的固体化合物。

3. 发明申请

US20090293810A1 ARRANGEMENT FOR COATING A SUBSTRATE 审中-公开
标题翻译：涂层基材的布置
公开(公告)号：US20090293810A1
公开(公告)日：2009-12-03
申请号：US12130118
申请日：2008-05-30
申请人： STEFAN BANGERT , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
发明人： STEFAN BANGERT , Jose Manuel Dieguez-Campo , Michael Koenig , Nety M. Krishna , Byung-Sung Leo Kwak
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , C23C14/246 , H01M4/0421
摘要： The invention relates to an arrangement for coating a substrate (4) by means of a vapor distributor (3). This vapor distributor (3) is connected with a vaporizer crucible (7) via an inlet (5). At least one valve (13) is disposed between the crucible (7) and the inlet (5). The vaporizer crucible (7) is located in a chamber (12) which can be evacuated or flooded by means of a vacuum valve (11).
摘要翻译：本发明涉及一种通过蒸气分配器（3）涂覆基底（4）的装置。该蒸汽分配器（3）通过入口（5）与蒸发器坩埚（7）连接。至少一个阀（13）设置在坩埚（7）和入口（5）之间。蒸发器坩埚（7）位于可以通过真空阀（11）排空或溢流的室（12）中。

4. 发明申请

US20110304899A1 LAMINATED ELECTRICALLY TINTABLE WINDOWS 审中-公开
标题翻译：层压电动可折叠窗
公开(公告)号：US20110304899A1
公开(公告)日：2011-12-15
申请号：US13139508
申请日：2009-12-01
申请人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna
发明人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna
IPC分类号： G02F1/153 , B32B37/14 , B32B38/10
CPC分类号： B32B17/10981 , B32B17/10045 , B32B17/10055 , B32B17/10513 , B32B17/10761 , B32B17/10788 , E06B3/6722 , E06B9/24 , E06B2009/2464 , G02F1/1533 , Y10S359/90 , Y10T156/1075 , Y10T156/12
摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.
摘要翻译：描述了制造具有各种尺寸和功能性的可着色的窗玻璃的方法。该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个电致可着色件中的每一个与所述多个窗玻璃件中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。层压可能导致可着色的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。电致色装置是电致变色装置。

5. 发明授权

US07710671B1 Laminated electrically tintable windows 有权
标题翻译：层压电光泽的窗户
公开(公告)号：US07710671B1
公开(公告)日：2010-05-04
申请号：US12333676
申请日：2008-12-12
申请人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna , Winfried Hoffmann
发明人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna , Winfried Hoffmann
IPC分类号： G02F1/15 , G02F1/153
CPC分类号： B32B17/10981 , B32B17/10045 , B32B17/10055 , B32B17/10513 , B32B17/10761 , B32B17/10788 , E06B3/6722 , E06B9/24 , E06B2009/2464 , G02F1/1533 , Y10S359/90 , Y10T156/1075 , Y10T156/12
摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.
摘要翻译：描述了制造具有各种尺寸和功能性的可着色的窗玻璃的方法。该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个电致可着色件中的每一个与所述多个窗玻璃件中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。层压可能导致可着色的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。电致色装置是电致变色装置。

6. 发明授权

US08218224B2 Laminated electrically tintable windows 有权
标题翻译：层压电光泽的窗户
公开(公告)号：US08218224B2
公开(公告)日：2012-07-10
申请号：US12772930
申请日：2010-05-03
申请人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna , Winfried Hoffmann
发明人： Byung-Sung Leo Kwak , Dieter Haas , Stefan Bangert , Nety M. Krishna , Winfried Hoffmann
IPC分类号： G02F1/15 , G02F1/153
CPC分类号： B32B17/10981 , B32B17/10045 , B32B17/10055 , B32B17/10513 , B32B17/10761 , B32B17/10788 , E06B3/6722 , E06B9/24 , E06B2009/2464 , G02F1/1533 , Y10S359/90 , Y10T156/1075 , Y10T156/12
摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.
摘要翻译：描述了制造具有各种尺寸和功能性的可着色的窗玻璃的方法。该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个电致可着色件中的每一个与所述多个窗玻璃件中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。层压可能导致可着色的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。电致色装置是电致变色装置。

7. 发明授权

US09325007B2 Shadow mask alignment and management system 有权
标题翻译：阴影面具对齐和管理系统
公开(公告)号：US09325007B2
公开(公告)日：2016-04-26
申请号：US12905460
申请日：2010-10-15
申请人： Byung-Sung Leo Kwak , Stefan Bangert , Ralf Hofmann , Michael Koenig
发明人： Byung-Sung Leo Kwak , Stefan Bangert , Ralf Hofmann , Michael Koenig
IPC分类号： C23C16/50 , C23C16/00 , C23F1/00 , H01L21/306 , H01M4/58 , H01M4/13 , H01M4/139 , H01M4/62 , H01M4/66 , C23C14/04 , H01M4/02
CPC分类号： H01M6/40 , C23C14/042 , H01M4/02 , H01M4/13 , H01M4/139 , H01M4/5825 , H01M4/621 , H01M4/623 , H01M4/663 , H01M2004/028 , Y02E60/122 , Y10T29/49002 , Y10T29/5313
摘要： A magnetic handling assembly for thin-film processing of a substrate, a system and method for assembling and disassembling a shadow mask to cover a top of a workpiece for exposure to a processing condition. The assembly may include a magnetic handling carrier and a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier to cover a top of a workpiece that is to be disposed between the shadow mask and the magnetic handling carrier when exposed to a processing condition. A system includes a first chamber with a first support to hold the shadow mask, a second support to hold a handling carrier, and an alignment system to align the shadow mask a workpiece to be disposed between the carrier and shadow mask. The first and second supports are moveable relative to each other.
摘要翻译：用于基板薄膜处理的磁性处理组件，用于组装和拆卸荫罩以覆盖工件顶部以暴露于加工状态的系统和方法。组件可以包括磁性处理载体和荫罩，其设置在磁性处理载体上并且磁耦合到磁性处理载体以覆盖待暴露于加工过程中要设置在荫罩和磁性处理载体之间的工件的顶部条件。系统包括具有用于保持荫罩的第一支撑件的第一室，用于保持处理托架的第二支撑件以及将荫罩对准待设置在承载器和荫罩之间的工件的对准系统。第一和第二支撑件可相对于彼此移动。

8. 发明申请

US20150056744A1 THIN FILM STRUCTURES AND DEVICES WITH INTEGRATED LIGHT AND HEAT BLOCKING LAYERS FOR LASER PATTERNING 有权
公开(公告)号：US20150056744A1
公开(公告)日：2015-02-26
申请号：US13570190
申请日：2012-08-08
申请人： Daoying Song , Chong Jiang , Byung-Sung Leo Kwak , Joseph G. Gordon, II
发明人： Daoying Song , Chong Jiang , Byung-Sung Leo Kwak , Joseph G. Gordon, II
IPC分类号： H01L31/18
CPC分类号： H01L31/1876 , H01L31/02164 , H01L31/02167 , H01L31/024 , H01L31/0463 , H01L31/18 , H01M4/0471 , H01M6/40 , H01M10/0436
摘要： Selective removal of specified layers of thin film structures and devices, such as solar cells, electrochromics, and thin film batteries, by laser direct patterning is achieved by including heat and light blocking layers in the device/structure stack immediately adjacent to the specified layers which are to be removed by laser ablation. The light blocking layer is a layer of metal that absorbs or reflects a portion of the laser energy penetrating through the dielectric/semiconductor layers and the heat blocking layer is a conductive layer with thermal diffusivity low enough to reduce heat flow into underlying metal layer(s), such that the temperature of the underlying metal layer(s) does not reach the melting temperature, Tm, or in some embodiments does not reach (Tm)/3, of the underlying metal layer(s) during laser direct patterning.

9. 发明申请

US20140007418A1 Mask-Less Fabrication of Thin Film Batteries 审中-公开
标题翻译：无薄膜电池的制造
公开(公告)号：US20140007418A1
公开(公告)日：2014-01-09
申请号：US13523797
申请日：2012-06-14
申请人： Daoying Song , Chong Jiang , Byung-Sung Leo Kwak
发明人： Daoying Song , Chong Jiang , Byung-Sung Leo Kwak
IPC分类号： H01M6/00
CPC分类号： H01M6/40 , B01J19/121 , B01J2219/0879 , B01J2219/12 , C01B21/097 , C01G51/42 , C01P2006/40 , H01M2/026 , H01M2/0277 , H01M2/26 , H01M4/04 , H01M4/0426 , H01M4/139 , H01M4/1395 , H01M4/382 , H01M4/525 , H01M6/005 , H01M6/185 , H01M6/186 , H01M10/0404 , H01M10/0436 , H01M10/052 , H01M10/0562 , H01M10/0585 , H01M2220/30 , H01M2300/0068 , Y10T29/49108
摘要： Thin film batteries (TFB) are fabricated by a process which eliminates and/or minimizes the use of shadow masks. A selective laser ablation process, where the laser patterning process removes a layer or stack of layers while leaving layer(s) below intact, is used to meet certain or all of the patterning requirements. For die patterning from the substrate side, where the laser beam passes through the substrate before reaching the deposited layers, a die patterning assistance layer, such as an amorphous silicon layer or a microcrystalline silicon layer, may be used to achieve thermal stress mismatch induced laser ablation, which greatly reduces the laser energy required to remove material.
摘要翻译：薄膜电池（TFB）是通过消除和/或最小化使用荫罩的方法来制造的。选择性激光烧蚀工艺，其中激光图案化工艺去除一层或多层的层，同时使层下面完整，用于满足某些或所有图案化要求。对于从衬底侧进行管芯图案化，其中激光束在到达沉积层之前通过衬底，可以使用诸如非晶硅层或微晶硅层的管芯图案辅助层来实现热应力失配诱导激光器消融，这大大降低了去除材料所需的激光能量。

10. 发明授权

US07179736B2 Method for fabricating planar semiconductor wafers 有权
标题翻译：制造平面半导体晶圆的方法
公开(公告)号：US07179736B2
公开(公告)日：2007-02-20
申请号：US10966074
申请日：2004-10-14
申请人： Byung-Sung Leo Kwak , Peter Burke , Sey-Shing Sun
发明人： Byung-Sung Leo Kwak , Peter Burke , Sey-Shing Sun
IPC分类号： H01L21/4763
CPC分类号： H01L21/76877 , C25D5/18 , C25D7/123 , H01L21/2885 , H01L21/7684
摘要： The present invention relates to a method of fabricating planar semiconductor wafers. The method comprises forming a dielectric layer on a semiconductor wafer surface, the semiconductor wafer surface having vias, trenches and planar regions. A barrier and seed metal layer is then formed on the dielectric layer. The wafer is next place in a plating bath that includes an accelerator, which tends to collect in the vias and trenches to accelerate the rate of plating in these areas relative to the planar regions of the wafer. After the gapfill point is reached, the plating is stopped by removing the plating bias on wafer. An equilibrium period is then introduced into the process, allowing higher concentrations of accelerator additives and other components of the bath)] above the via and trench regions to equilibrate in the plating bath. The bulk plating on the wafer is resumed after equilibration. Over-plating on the wafer in the areas of the vias and trenches is therefore avoided, resulting in a more planar metallization layer on the wafer, without the use of a leveler additive which adversely affects the gapfill capability.
摘要翻译：本发明涉及一种制造平面半导体晶片的方法。该方法包括在半导体晶片表面上形成电介质层，该半导体晶片表面具有通孔，沟槽和平面区域。然后在电介质层上形成阻挡层和种子金属层。晶片是包含加速器的镀液中的下一个位置，该加速器倾向于在通路和沟槽中收集，以加速相对于晶片的平面区域在这些区域中的电镀速率。达到间隙填充点后，通过去除晶片上的电镀偏压来停止电镀。然后在该过程中引入平衡时段，允许较高浓度的促进剂添加剂和浴中的其它组分）]在通孔和沟槽区域上方在电镀浴中平衡。平衡后恢复晶片上的块体电镀。因此避免了在通孔和沟槽区域上的晶片上的过电镀，导致晶片上更平面的金属化层，而不使用不利地影响间隙填充能力的矫直添加剂。

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