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    • 4. 发明授权
    • Fabrication of metal-ferroelectric-metal capacitors with a two step
patterning sequence
    • 金属 - 铁电 - 金属电容器的制造,具有两步图案化顺序
    • US5789323A
    • 1998-08-04
    • US428544
    • 1995-04-25
    • Thomas C. Taylor
    • Thomas C. Taylor
    • H01L21/02H01L21/302
    • H01L28/60
    • A method of fabricating a metal-ferroelectric-metal ("MFM") capacitor includes the steps of depositing a silicon dioxide layer on a silicon or other substrate, a lower platinum or other noble metal electrode, a PZT or other ferroelectric material dielectric layer, and an upper platinum or other noble metal electrode. The upper electrode and ferroelectric dielectric layer are patterned and etched according to a first pattern corresponding to the final dimensions of the ferroelectric dielectric layer. The upper electrode and lower electrode are subsequently patterned and etched according to a second pattern corresponding to the final dimensions of one or more upper electrodes and the final extent of the lower electrode. The second etching step leaves a benign vestigial upper electrode feature. An oxide layer is finally deposited over the entire surface of the MFM capacitor structure, which is etched and metalized over desired upper and lower electrode contacts.
    • 制造金属 - 铁电体(“MFM”)电容器的方法包括以下步骤:在硅或其它基底,下部铂金或其它贵金属电极,PZT或其它铁电材料电介质层上沉积二氧化硅层, 和上铂金或其他贵金属电极。 根据对应于铁电介质层的最终尺寸的第一图案,对上电极和铁电介质层进行图案化和蚀刻。 随后根据对应于一个或多个上电极的最终尺寸和下电极的最终尺寸的第二图案对上电极和下电极进行图案化和蚀刻。 第二蚀刻步骤留下良性残留的上电极特征。 氧化层最终沉积在MFM电容器结构的整个表面上,该MFM电容器结构在所需的上部和下部电极触点上被蚀刻和金属化。
    • 5. 发明授权
    • Process for fabricating transistors using composite nitride structure
    • 使用复合氮化物结构制造晶体管的工艺
    • US5610099A
    • 1997-03-11
    • US267278
    • 1994-06-28
    • E. Henry StevensRichard A. BaileyThomas C. Taylor
    • E. Henry StevensRichard A. BaileyThomas C. Taylor
    • H01L21/285H01L21/336H01L21/283
    • H01L29/6659H01L21/28518
    • In fabricating a source/drain electrode of an integrated circuit transistor and a contact window for it: (1) establishing a structure with a window over the source/drain region next to a gate electrode and isolation structure; (2) establishing a dielectric layer covering the isolation structure, the window, and gate electrode; (3) implanting a moderate concentration of impurities into the source/drain region through said dielectric layer so that the moderate concentration region extends partially under the gate electrode; (4) removing the horizontal portions of the dielectric layer with an anisotropic etch thereby leaving the dielectric on vertical side walls; (5) establishing a region of titanium silicide over the moderately dosed source/drain region and establishing a titanium nitride layer over the isolation structure, windows, and gate electrode; (6) establishing a layer of silicon nitride over the titanium nitride layer; (7) implanting the substrate with a relatively heavier dose of ions through the silicon nitride, titanium nitride, and titanium silicide layers to create a heavier concentration source/drain region intersecting said moderate concentration region, where the heavy concentration region does not underlie the gate electrode; (8) patterning the silicon nitride layer; (9) using the patterned silicon nitride layer as a mask to pattern the titanium nitride layer; (10) adding thick interlevel dielectric over the patterned nitride layers; (11) opening windows over the electrodes; and (12) adding contact material in said windows.
    • 在制造集成电路晶体管的源极/漏极电极及其接触窗口时:(1)在栅极电极和隔离结构旁边的源极/漏极区域上建立具有窗口的结构; (2)建立覆盖隔离结构,窗口和栅电极的电介质层; (3)通过所述电介质层将中等浓度的杂质注入源极/漏极区域,使得中等浓度区域部分地延伸到栅电极下方; (4)用各向异性蚀刻去除电介质层的水平部分,从而将电介质留在垂直侧壁上; (5)在中等剂量的源极/漏极区域上建立硅化钛区域,并在隔离结构,窗口和栅电极上建立氮化钛层; (6)在氮化钛层上建立氮化硅层; (7)通过氮化硅,氮化钛和硅化钛层将相对较重剂量的离子注入衬底以产生与所述中等浓度区域相交的较重的浓度源/漏区,其中重浓度区域不位于栅极 电极; (8)构图氮化硅层; (9)使用图案化的氮化硅层作为掩模来图案化氮化钛层; (10)在图案化的氮化物层上添加厚的层间电介质; (11)在电极上打开窗户; 和(12)在所述窗口中添加接触材料。
    • 7. 发明授权
    • Platform and system for mass storage and transfer in space
    • 空间大容量存储和传输的平台和系统
    • US07370835B2
    • 2008-05-13
    • US11468568
    • 2006-08-30
    • Walter P KistlerRobert A CitronThomas C Taylor
    • Walter P KistlerRobert A CitronThomas C Taylor
    • B64G1/00
    • B64G1/646B64G1/1078
    • A platform for storage and transfer of payloads in space includes a plate for supporting a payload, and a transfer mechanism for transferring the payload to and from the plate. A groove extends diametrically between two edges of the plate for receiving a rail provided on the payload. The rail includes a plurality of teeth, and the transfer mechanism includes a gear which interacts with the teeth for moving the rail. Two platforms may be positioned adjacent to each other for transferring a payload. Docking of the two platforms includes engagement of tapered pins and tapered holes on the platforms. In this manner, the grooves of the platforms are aligned. The rail is passed between the grooves of the platforms for transferring the payload between the platforms.
    • 用于存储和传送空间中的有效载荷的平台包括用于支撑有效载荷的板,以及用于将载荷传递到板的转移机构。 凹槽在板的两个边缘之间径向延伸,用于接收设置在有效载荷上的导轨。 轨道包括多个齿,并且传送机构包括与齿啮合的齿轮,用于移动轨道。 两个平台可以彼此相邻地定位以传送有效载荷。 两个平台的对接包括平台上的锥形销和锥形孔的接合。 以这种方式,平台的凹槽对齐。 轨道在平台的槽之间通过,用于在平台之间传送有效载荷。
    • 8. 发明授权
    • Commercial experiment system in orbit
    • 商业实验系统在轨道上
    • US06945498B2
    • 2005-09-20
    • US10682761
    • 2003-10-09
    • George E. MuellerGary LaiThomas C. Taylor
    • George E. MuellerGary LaiThomas C. Taylor
    • B64G1/00B64G1/10B64G1/14
    • B64G1/105B64G1/002B64G1/14
    • An orbital experiment system with different internal experiment locations within a reusable launch vehicle making daylong delivery trips to space. The experiments get access to the attributes of low earth orbit, the reusable launch vehicle's power and other subsystems. The experimenter utilizes uniform experiment trays having a uniform connector for connection to an experiment management unit mounted on the orbital vehicle. The experiment management unit provides power and data from the orbital vehicle related to the operation of the orbital vehicle and permits an experiment check simulation prior to integration into the launch vehicle. The uniform size and connectivity requirements provide low cost options for the delivery of an experiment into space and the return of the experiment from space. A commercial transportation system to and from orbit delivers a primary payload and provides a 24-hour return cycle for the internal secondary experiments, which provide a quick confirmation of technical experiment exposure to space and quick re-flight opportunities.
    • 一个轨道实验系统,在可重复使用的运载火箭内部具有不同的内部实验位置,使得一天的飞行时间到达空间。 实验可以获得低地球轨道的特性,可重复使用的运载火箭的能量等子系统。 实验者使用具有统一连接器的均匀实验托盘连接到安装在轨道车辆上的实验管理单元。 实验管理单元提供与轨道车辆操作相关的轨道车辆的动力和数据,并且允许在集成到运载火箭中之前进行实验检查模拟。 统一的尺寸和连接要求为实验的空间传递和实验的返回提供了低成本的选择。 往返轨道的商业运输系统提供主要有效载荷,并为内部二次实验提供24小时的返回周期,从而快速确认技术实验暴露于空间和快速重新飞行机会。
    • 10. 发明授权
    • Methods for controlling and/or measuring additive concentration in an electroplating bath
    • 用于控制和/或测量电镀浴中的添加剂浓度的方法
    • US06365033B1
    • 2002-04-02
    • US09387084
    • 1999-08-31
    • Lyndon W. GrahamThomas C. TaylorThomas L. RitzdorfFredrick A. LindbergBradley C. Carpenter
    • Lyndon W. GrahamThomas C. TaylorThomas L. RitzdorfFredrick A. LindbergBradley C. Carpenter
    • G01N2748
    • G01N27/48G01N27/4161
    • A method for measuring a target constituent of an electroplating solution using an electroanalytical technique is set forth in which the electroplating solution includes one or more constituents whose by-products skew an initial electrical response to an energy input of the electroanalytical technique. The method comprises a first step in which an electroanalytical measurement cycle of the target constituent is initiated by providing an energy input to a pair of electrodes disposed in the electroplating solution. The energy input to the pair of electrodes is provided for at least a predetermined time period corresponding to a time period in which the electroanalytical measurement cycle reaches a steady-state condition. In a subsequent step, an electroanalytical measurement of the energy output of the electroanalytical technique is taken after the electroanalytical measurement cycle has reached the steady-state condition. The electroanalytical measurement is then used to determine an amount of the target constituent in the electroplating solution. An automatic dosing system that includes the foregoing method and/or one or more known electroanalytical techniques in a close-loop system is also set forth.
    • 提出了一种使用电分析技术测量电镀溶液的目标成分的方法,其中电镀溶液包括一种或多种成分,其中副产物偏置对电分析技术的能量输入的初始电响应。 该方法包括第一步骤,其中通过向布置在电镀溶液中的一对电极提供能量输入来启动目标成分的电分析测量循环。 输入到该对电极的能量被提供至少一个对应于电分析测量周期达到稳态条件的时间段的预定时间段。 在随后的步骤中,在电分析测量循环达到稳态条件之后,进行电分析技术的能量输出的电分析测量。 然后使用电分析测量来确定电镀溶液中的目标成分的量。 还提出了一种包括前述方法和/或闭环系统中的一种或多种已知电分析技术的自动计量系统。