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1. 发明授权

US06327855B1 Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods 失效
标题翻译：执行器包括交替启动和相对段的蛇形排列和相关方法
公开(公告)号：US06327855B1
公开(公告)日：2001-12-11
申请号：US09498100
申请日：2000-02-04
申请人： Edward A. Hill , Vijayakumar Rudrappa Dhuler
发明人： Edward A. Hill , Vijayakumar Rudrappa Dhuler
IPC分类号： F01B2910
CPC分类号： B81B3/004 , B81B2201/032 , B81B2203/0109 , B81B2203/033 , B81B2203/058 , G02B7/1821 , G02B26/0816 , H01H1/0036 , H01H61/00 , H01H2001/0063 , H01H2061/006
摘要： A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed.
摘要翻译：微机械系统可以包括基板，致动器和致动元件。特别地，致动器可以包括蛇形结构，其交替的致动和相对的段在其第一端锚定到衬底，其中致动段响应于其致动而偏转，使得蛇形结构的第二端相对于衬底移动致动段的偏转。致动元件附接到蛇形结构的第二端，使得致动元件在致动段偏转时相对于基板移动。还讨论了相关方法和执行器。

2. 发明授权

US06445842B1 Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same 失效
标题翻译：微机电光学交叉开关包括机械致动器和操作方法
公开(公告)号：US06445842B1
公开(公告)日：2002-09-03
申请号：US09542170
申请日：2000-04-05
申请人： Vijayakumar Rudrappa Dhuler , Edward A. Hill
发明人： Vijayakumar Rudrappa Dhuler , Edward A. Hill
IPC分类号： G02B626
CPC分类号： G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B26/0833 , G02B26/0841
摘要： Microelectromechanical (MEM) Optical Cross-connect (OXC) switches having mechanical actuators are discussed. In particular, the MEM OXC switches can include a plurality of reflectors, wherein each of the plurality of the reflectors is movable to at least one of a respective first reflector position along a respective optical beam path from an associated input of the MEM OXC switch to an associated output thereof and a respective second reflector position outside the optical beam path. A mechanical actuator moves to at least one of a first mechanical actuator position and a second mechanical actuator position. A selector selects ones of the plurality of reflectors to be coupled to the mechanical actuator and at least one of the plurality of reflectors to be decoupled from the mechanical actuator, wherein the mechanical actuator is coupled to the selected ones of the plurality of reflectors in the first actuator position and wherein the mechanical actuator moves the selected ones of the plurality of reflectors from the respective first reflector positions to the respective second reflector positions when the mechanical actuator moves from the first mechanical actuator position to the second mechanical actuator position. Related methods are also discussed.
摘要翻译：讨论了具有机械致动器的微机电（MEM）光交叉连接（OXC）开关。特别地，MEM OXC开关可以包括多个反射器，其中多个反射器中的每一个可移动到沿着相应的光束路径的相应的第一反射器位置中的至少一个，从MEM OXC开关的相关联的输入到其相关联的输出和相应的第二反射器位置在光束路径外部。机械致动器移动到第一机械致动器位置和第二机械致动器位置中的至少一个。选择器选择要耦合到机械致动器的多个反射器中的一个，并且多个反射器中的至少一个反射器与机械致动器分离，其中机械致动器耦合到多个反射器中的选定的反射器第一致动器位置，并且其中当机械致动器从第一机械致动器位置移动到第二机械致动器位置时，机械致动器将多个反射器中的选定的反射器从相应的第一反射器位置移动到相应的第二反射器位置。还讨论了相关方法。

3. 发明授权

US06351580B1 Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements 失效
标题翻译：其中具有制动组件以控制光学百叶窗和其它可移动元件的运动的微机电装置
公开(公告)号：US06351580B1
公开(公告)日：2002-02-26
申请号：US09536877
申请日：2000-03-27
申请人： Vijayakumar Rudrappa Dhuler , Edward A. Hill
发明人： Vijayakumar Rudrappa Dhuler , Edward A. Hill
IPC分类号： G02B642
CPC分类号： G02B6/3564 , B81B3/0054 , B81B2201/045 , B81B2203/0118 , G02B6/353 , G02B6/3552 , G02B6/357
摘要： Microelectromechanical devices may include a substrate having first and second optical fibers thereon. An optical shutter may also be provided. This optical shutter is mechanically coupled to a first plurality of arched beams that are supported at opposing ends by support structures which may be mounted on the substrate. A second plurality of arched beams are also provided on a first side of the optical shutter. These arched beams are also supported at opposing ends by support structures. A first brake member is provided that is coupled to the second plurality of arched beams. This first brake member contacts and restricts the optical shutter from moving in the ±y-direction when the second plurality of arched beams are relaxed, but releases the optical shutter when the second plurality of arched beams move in the −x direction. This ability to restrict movement of the optical shutter when the second plurality of arched beams are relaxed provides a degree of nonvolatile position retention. A third plurality of arched beams are also preferably provided on a second side of the optical shutter. A second brake member, which is coupled to the third plurality of arched beams, also contacts and restricts the shutter member from moving in the ±y direction when the third plurality of arched beams are relaxed, but releases the optical shutter when the third plurality of arched beams move in the +x direction.
摘要翻译：微机电装置可以包括其上具有第一和第二光纤的基板。还可以提供光学快门。该光学快门机械地联接到第一多个拱形梁，其通过可安装在基板上的支撑结构在相对端被支撑。第二组多个拱形梁也设置在光学快门的第一侧上。这些拱形梁也通过支撑结构支撑在相对端。提供第一制动构件，其联接到第二多个拱形梁。当第二多个拱形梁松弛时，该第一制动构件接触并限制光学快门在±y方向上移动，而当第二组多个拱形梁沿-x方向移动时释放光学快门。当第二多个拱形梁松弛时，限制光学快门的运动的这种能力提供一定程度的非挥发性位置保持。第三组多个拱形梁也优选设置在光学快门的第二侧上。当第三组多个弓形梁松弛时，联接到第三组多个拱形梁的第二制动构件也接触并限制活门构件在±y方向上的移动，而当第三组多个拱形梁在+ x方向移动。

4. 发明申请

US20190122518A1 PERSONAL SAFETY DEVICE 审中-公开
公开(公告)号：US20190122518A1
公开(公告)日：2019-04-25
申请号：US15527305
申请日：2015-11-19
申请人： Vijayakumar Rudrappa Dhuler
发明人： Vijayakumar Rudrappa Dhuler
IPC分类号： G08B21/02 , G06F21/64 , G10L25/51
CPC分类号： G08B21/0208 , G06F21/64 , G08B21/0202 , G08B21/0277 , G10L25/51 , H04B1/385
摘要： A personal safety device is provided. The device is a wearable device. The device includes a voice recording mechanism and an information download mechanism. The device may also include a voice comparison mechanism, an alert mechanism, a photodetector, a camera and/or a scanner. Method of enabling and using the device is also provided. The device may be used as a personal safety device and as a personnel monitoring device.

5. 发明授权

US06677695B2 MEMS electrostatic actuators with reduced actuation voltage 有权
标题翻译：具有降低致动电压的MEMS静电致动器
公开(公告)号：US06677695B2
公开(公告)日：2004-01-13
申请号：US10244630
申请日：2002-09-17
申请人： Vijayakumar Rudrappa Dhuler , Edward Arthur Hill
发明人： Vijayakumar Rudrappa Dhuler , Edward Arthur Hill
IPC分类号： H02N100
CPC分类号： H02N1/006
摘要： A movable microelectromechanical mirror structure for a microelectromechanical structure (MEMS) has an actuator (electrodes) for the moving mirror. The electrodes are situated at a predetermined angle to the horizontal thus improving the relationship between force applied on the mirror and the gap between the mirror and the electrodes. The angular electrode placement is achieved by the provision of a deformable electrode support member mounted on the substrate, with at least one of the electrodes mounted on the electrode support member, and a deforming element mounted against the deformable electrode support member such as to permanently maintain the deformable electrode support member in a deformed state.
摘要翻译：用于微机电结构（MEMS）的可移动微机电镜结构具有用于移动反射镜的致动器（电极）。电极位于与水平面成预定的角度，从而改善了施加在反射镜上的力与反射镜与电极之间的间隙之间的关系。通过提供安装在基板上的可变形电极支撑构件来实现角电极放置，其中安装在电极支撑构件上的至少一个电极和安装在可变形电极支撑构件上的变形元件，以便永久地保持所述可变形电极支撑构件处于变形状态。

6. 发明授权

US06229684B1 Variable capacitor and associated fabrication method 有权
标题翻译：可变电容器及相关制造方法
公开(公告)号：US06229684B1
公开(公告)日：2001-05-08
申请号：US09461247
申请日：1999-12-15
申请人： Allen Bruce Cowen , Vijayakumar Rudrappa Dhuler , Edward Arthur Hill , David Alan Koester , Ramaswamy Mahadevan
发明人： Allen Bruce Cowen , Vijayakumar Rudrappa Dhuler , Edward Arthur Hill , David Alan Koester , Ramaswamy Mahadevan
IPC分类号： H01G501
CPC分类号： H01G5/18 , B81B3/0056 , F03G7/06 , H01G5/16 , H01H1/0036 , H01H59/0009 , H01H61/02 , H01H2059/0063 , H01H2059/0072 , H01H2059/0081 , H01H2061/006
摘要： A variable capacitor having low loss and a correspondingly high Q is provided. In addition to a substrate, the variable capacitor includes at least one substrate electrode and a substrate capacitor plate that are disposed upon the substrate and formed of a low electrical resistance material, such as HTS material or a thick metal layer. The variable capacitor also includes a bimorph member extending outwardly from the substrate and over the at least one substrate electrode. The bimorph member includes first and second layers formed of materials having different coefficients of thermal expansion. The first and second layers of the bimorph member define at least one bimorph electrode and a bimorph capacitor plate such that the establishment of a voltage differential between the substrate electrode and the bimorph electrode moves the bimorph member relative to the substrate electrode, thereby altering the interelectrode spacing as well as the distance between the capacitor plates. As such, the capacitance of the variable capacitor can be controlled based upon the relative spacing between the bimorph member and the underlying substrate. A method is also provided for micromachining or otherwise fabricating a variable capacitor having an electrode and a capacitor plate formed of a low electrical resistance material such that the resulting variable capacitor has low loss and a correspondingly high Q. The variable capacitor can therefore be employed in high frequency applications, such as required by some tunable filters.
摘要翻译：提供具有低损耗和相应高Q的可变电容器。除了基板之外，可变电容器包括至少一个基板电极和基板电容器板，其设置在基板上并且由诸如HTS材料或厚金属层的低电阻材料形成。可变电容器还包括从基板向外延伸并且在至少一个基板电极上方的双压电晶片。双压电晶片构件包括由具有不同热膨胀系数的材料形成的第一和第二层。双压电晶片构件的第一和第二层限定至少一个双压电晶片电极和双压电晶片电容器板，使得在衬底电极和双压电晶片电极之间建立电压差使得双压电晶片相对于衬底电极移动，从而改变电极间间距以及电容器板之间的距离。因此，可以基于双压电晶片构件和下面的衬底之间的相对间隔来控制可变电容器的电容。还提供了一种用于微加工或以其他方式制造具有由低电阻材料形成的电极和电容器板的可变电容器的方法，使得所得到的可变电容器具有低损耗和相应高的Q.因此可变电容器可用于高频应用，如某些可调谐滤波器所要求的。

7. 发明授权

US10529210B2 Personal safety device 有权
公开(公告)号：US10529210B2
公开(公告)日：2020-01-07
申请号：US15527305
申请日：2015-11-19
申请人： Vijayakumar Rudrappa Dhuler
发明人： Vijayakumar Rudrappa Dhuler
IPC分类号： G08B21/02 , G10L25/51 , G06F21/64 , H04B1/3827
摘要： A personal safety device is provided. The device is a wearable device. The device includes a voice recording mechanism and an information download mechanism. The device may also include a voice comparison mechanism, an alert mechanism, a photodetector, a camera and/or a scanner. Method of enabling and using the device is also provided. The device may be used as a personal safety device and as a personnel monitoring device.

8. 发明授权

US06760144B2 Articulated MEMS electrostatic rotary actuator 有权
标题翻译：铰接式MEMS静电旋转执行机构
公开(公告)号：US06760144B2
公开(公告)日：2004-07-06
申请号：US10309800
申请日：2002-12-04
申请人： Edward Hill , Ramaswamy Mahadevan , Vijayakumar Rudrappa Dhuler , Robert Wood
发明人： Edward Hill , Ramaswamy Mahadevan , Vijayakumar Rudrappa Dhuler , Robert Wood
IPC分类号： G02B2600
CPC分类号： B81B3/0062 , G02B26/0841
摘要： A micro-electro-mechanical device designed such that the actuating means are only mechanically coupled to the optical components. The device includes a substrate, a mirror supported above the substrate, and a rotatory actuator also supported above the substrate. The mirror and actuator are mechanically coupled via a torsional coupling hinge such that the mirror can be angled and/or tilted by electrostatically driving the rotatory actuator. Advantageously, the micro-mirrors and actuator are fabricated from the same layer during the micro-machining fabrication process. In one embodiment, the mirror is rotatable about a fixed rotation axis. In another embodiment, the mirror is freely rotatable.
摘要翻译：微机电装置被设计成使得致动装置仅机械地联接到光学部件。该装置包括基板，支撑在基板上方的反射镜，以及也支撑在基板上方的旋转致动器。反射镜和致动器通过扭转联接铰链机械耦合，使得反射镜可以通过静电驱动旋转致动器而成角度和/或倾斜。有利地，微镜和致动器在微加工制造过程期间由相同的层制造。在一个实施例中，镜可围绕固定的旋转轴线旋转。在另一个实施例中，镜子是可自由旋转的。

9. 发明授权

US06367252B1 Microelectromechanical actuators including sinuous beam structures 失效
标题翻译：微机电致动器包括弯曲梁结构
公开(公告)号：US06367252B1
公开(公告)日：2002-04-09
申请号：US09610047
申请日：2000-07-05
申请人： Edward A. Hill , Vijayakumar Rudrappa Dhuler , Allen Cowen , Ramaswamy Mahadevan , Robert L. Wood
发明人： Edward A. Hill , Vijayakumar Rudrappa Dhuler , Allen Cowen , Ramaswamy Mahadevan , Robert L. Wood
IPC分类号： F01B2910
CPC分类号： B81B3/0051 , B81B2201/038 , B81B2203/0109 , B81B2203/056 , H01H1/0036 , H01H61/00 , H01H2061/006
摘要： In embodiments of the present invention, a microelectromechanical actuator includes a beam having respective first and second ends attached to a substrate and a body disposed between the first and second ends having a sinuous shape. The body includes a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam. The sinuous shape may be sinusoidal, e.g., a shape approximating a single period of a cosine curve or a single period of a sine curve. The beam may be thermally actuated or driven by another actuator. In other embodiments, a rotary actuator includes first and second beams, a respective one of which has first and second ends attached to a substrate and a body disposed between the first and second ends. Each body includes first and second oppositely inflected portions. The bodies of the first and second beams intersect one another at points at which the first and second oppositely inflected portions of the first and second bodies meet. The bodies of the first and second beams are operative to engage the object of actuation and rotate the object of actuation around the point of intersection responsive to at least one of compressive force and tensile force on the first and second beams. Related methods are also described.
摘要翻译：在本发明的实施例中，微机电致动器包括具有附接到基板的相应的第一端和第二端的梁，以及设置在具有弯曲形状的第一端和第二端之间的主体。主体包括可操作地接合致动对象的部分，该部分响应于梁上的压缩力和拉力中的至少一个，沿垂直于梁的方向施加力。弯曲形状可以是正弦的，例如，近似于余弦曲线的单个周期或正弦曲线的单个周期的形状。梁可以由另一致动器热致动或驱动。在其他实施例中，旋转致动器包括第一和第二梁，其中相应的一个具有附接到基板的第一和第二端以及设置在第一和第二端之间的主体。每个主体包括第一和第二相对弯曲的部分。第一和第二梁的主体在第一和第二主体的第一和第二相对弯曲部分相交的点处彼此相交。第一和第二梁的主体可操作以接合致动对象，并且响应于第一和第二梁上的压缩力和拉力中的至少一个而使作动点周围的相对点旋转。还描述了相关方法。

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