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1. 发明授权

US08611046B2 PMR writer with graded side shield 有权
标题翻译： PMR作家与分级侧盾
公开(公告)号：US08611046B2
公开(公告)日：2013-12-17
申请号：US12799131
申请日：2010-04-19
申请人： Yan Wu , Zhigang Bai , Moris Dovek , Cherng-Chyi Han , Min Li , Jianing Zhou , Jiun-Ting Lee , Min Zheng
发明人： Yan Wu , Zhigang Bai , Moris Dovek , Cherng-Chyi Han , Min Li , Jianing Zhou , Jiun-Ting Lee , Min Zheng
IPC分类号： G11B5/11 , G11B5/23 , G11B5/31
CPC分类号： G11B5/105 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a graded side shield that is conformal to the shape of the pole tip at an upper portion of the shield but not conformal to the pole tip at a lower portion. The shield includes a trailing shield, that is conformal to the trailing edge of the pole tip and may include a leading edge shield that magnetically connects two bottom ends of the graded side shield.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分级侧屏蔽横向屏蔽的极尖，该平面侧屏蔽保护层在屏蔽的上部处与极尖的形状保持一致，但在下部不与极尖共形。屏蔽件包括后挡板，其与电极尖端的后缘保持一致，并且可以包括磁性连接分级侧屏蔽件的两个底端的前缘屏蔽件。

2. 发明申请

US20110255196A1 PMR writer with graded side shield 有权
标题翻译： PMR作家与分级侧盾
公开(公告)号：US20110255196A1
公开(公告)日：2011-10-20
申请号：US12799131
申请日：2010-04-19
申请人： Yan Wu , Zhigang Bai , Moris Dovek , Cherng-Chyi Han , Min Li , Jianing Zhou , Jiun-Ting Lee , Min Zheng
发明人： Yan Wu , Zhigang Bai , Moris Dovek , Cherng-Chyi Han , Min Li , Jianing Zhou , Jiun-Ting Lee , Min Zheng
IPC分类号： G11B5/10 , G11B21/16
CPC分类号： G11B5/105 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a graded side shield that is conformal to the shape of the pole tip at an upper portion of the shield but not conformal to the pole tip at a lower portion. The shield includes a trailing shield, that is conformal to the trailing edge of the pole tip and may include a leading edge shield that magnetically connects two bottom ends of the graded side shield.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分级侧屏蔽横向屏蔽的极尖，该平面侧屏蔽保护层在屏蔽的上部处与极尖的形状保持一致，但在下部不与极尖共形。屏蔽件包括后挡板，其与电极尖端的后缘保持一致，并且可以包括磁性连接分级侧屏蔽件的两个底端的前缘屏蔽件。

3. 发明授权

US08209848B2 Method of making a PMR writer with seamless shields 有权
标题翻译：制作具有无缝屏蔽的PMR写入器的方法
公开(公告)号：US08209848B2
公开(公告)日：2012-07-03
申请号：US12798560
申请日：2010-04-07
申请人： Zhigang Bai , Moris Dovek , Yan Wu , Cherng-Chyi Han , Jiun-Ting Lee
发明人： Zhigang Bai , Moris Dovek , Yan Wu , Cherng-Chyi Han , Jiun-Ting Lee
IPC分类号： G11B5/17 , G11B5/23
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/4906
摘要： A process (and the structure resulting therefrom) is described for manufacturing a magnetic write head in which there is no physical interface between the first and second trailing shields. This is achieved by laying down a sacrificial layer which is patterned to extend inwards towards the top yoke whereby the dimensions and shapes of the shields are defined.
摘要翻译：描述了一种用于制造其中在第一和第二后挡板之间没有物理接口的磁写头的过程（以及由此产生的结构）。这通过铺设牺牲层来实现，该牺牲层被图案化以朝向顶部轭部向内延伸，由此限定了屏蔽件的尺寸和形状。

4. 发明授权

US08184399B2 Magnetic write head with thin and thick portions for balancing writability and ate 有权
标题翻译：磁性写头，薄而厚的部分，用于平衡书写和吃
公开(公告)号：US08184399B2
公开(公告)日：2012-05-22
申请号：US12924416
申请日：2010-09-27
申请人： Yan Wu , Moris Dovek , Zhigang Bai , Cherng-Chyi Han , Jiun-Ting Lee , Po-Kang Wang
发明人： Yan Wu , Moris Dovek , Zhigang Bai , Cherng-Chyi Han , Jiun-Ting Lee , Po-Kang Wang
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a tapered main pole having a variable thickness. The tapered portion of the pole is at the ABS tip and it can be formed by bevels at the leading or trailing edges or both. The taper terminates to form a region with a maximum thickness, t1, which extends for a certain distance proximally. Beyond this region of maximum thickness t1, the pole is then reduced to a constant minimum thickness t2. A yoke is attached to this region of constant minimum thickness. This pole design requires less flux because of the thinner region of the pole where it attaches to the yoke, but the thicker region just before the tapered ABS provides additional flux to drive the pole just before the ABS, so that high definition and field gain is achieved, yet fringing is significantly reduced.
摘要翻译：制造具有可变厚度的锥形主极的垂直磁记录（PMR）头。极的锥形部分在ABS尖端处，并且其可以由前缘或后缘处的斜面或两者形成。锥形终止形成最大厚度的区域t1，其向近处延伸一定距离。超过该最大厚度的区域t1，然后将极减小到恒定的最小厚度t2。磁轭连接到恒定最小厚度的区域。这个极设计需要更少的通量，因为它附着在磁轭上的磁极的较薄区域，而刚好在锥形ABS之前较厚的区域提供额外的磁通来驱动刚好在ABS之前的极点，因此高清晰度和场增益是实现了，但边缘明显减少。

5. 发明申请

US20120075749A1 Magnetic write head with thin and thick portions for balancing writability and ate 有权
公开(公告)号：US20120075749A1
公开(公告)日：2012-03-29
申请号：US12924416
申请日：2010-09-27
申请人： Yan Wu , Moris Dovek , Zhigang Bai , Cherng Chyi Han , Jiun-Ting Lee , Po-Kang Wang
发明人： Yan Wu , Moris Dovek , Zhigang Bai , Cherng Chyi Han , Jiun-Ting Lee , Po-Kang Wang
IPC分类号： G11B5/127 , G11B5/10
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a tapered main pole having a variable thickness. The tapered portion of the pole is at the ABS tip and it can be formed by bevels at the leading or trailing edges or both. The taper terminates to form a region with a maximum thickness, t1, which extends for a certain distance proximally. Beyond this region of maximum thickness t1, the pole is then reduced to a constant minimum thickness t2. A yoke is attached to this region of constant minimum thickness. This pole design requires less flux because of the thinner region of the pole where it attaches to the yoke, but the thicker region just before the tapered ABS provides additional flux to drive the pole just before the ABS, so that high definition and field gain is achieved, yet fringing is significantly reduced.

6. 发明申请

US20110249364A1 PMR writer with seamless shields and method of making it 有权
标题翻译： PMR作者具有无缝屏障及其制作方法
公开(公告)号：US20110249364A1
公开(公告)日：2011-10-13
申请号：US12798560
申请日：2010-04-07
申请人： Zhigang Bai , Moris Dovek , Yan Wu , Cherng-Chyi Han , Jiun-Ting Lee
发明人： Zhigang Bai , Moris Dovek , Yan Wu , Cherng-Chyi Han , Jiun-Ting Lee
IPC分类号： G11B5/187 , B05D5/00 , C23F1/02
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/4906
摘要： A process (and the structure resulting therefrom) is described for manufacturing a magnetic write head in which there is no physical interface between the first and second trailing shields. This is achieved by the introduction of a sacrificial layer immediately after the top yoke plating has been done and its photoresist mold has been stripped.
摘要翻译：描述了一种用于制造其中在第一和第二后挡板之间没有物理接口的磁写头的过程（以及由此产生的结构）。这是通过在顶部磁轭镀层完成之后立即引入牺牲层并且其光致抗蚀剂模具被剥离来实现的。

7. 发明申请

US20110146060A1 Method to make a perpendicular magnetic recording head with a side write shield 有权
标题翻译：制作具有侧面写入屏蔽层的垂直磁记录头的方法
公开(公告)号：US20110146060A1
公开(公告)日：2011-06-23
申请号：US12932552
申请日：2011-02-28
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分离的一对侧屏蔽横向屏蔽的极尖并且被上屏蔽从上面屏蔽。侧面屏蔽是通过RIE工艺形成的，其使用通过掩模层施加到屏蔽层上的特定气体，该屏蔽层由具有比屏蔽材料更慢的蚀刻速率的材料形成。形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果。蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成将该层分成两个屏蔽层的楔形沟槽。然后将磁极尖端电镀在沟槽内，并且通过沟槽对准，获得沟槽的楔形横截面。然后在侧屏和极上方形成上屏蔽。

8. 发明授权

US07898773B2 Perpendicular magnetic recording head with a side write shield 有权
标题翻译：垂直磁记录头带有侧写屏蔽
公开(公告)号：US07898773B2
公开(公告)日：2011-03-01
申请号：US11345892
申请日：2006-02-02
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分离的一对侧屏蔽横向屏蔽的极尖并且被上屏蔽从上面屏蔽。侧面屏蔽是通过RIE工艺形成的，其使用通过掩模层施加到屏蔽层上的特定气体，该屏蔽层由具有比屏蔽材料更慢的蚀刻速率的材料形成。形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果。蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成将该层分成两个屏蔽层的楔形沟槽。然后将磁极尖端电镀在沟槽内，并且通过沟槽对准，获得沟槽的楔形横截面。然后在侧屏和极上方形成上屏蔽。

9. 发明申请

US20070177301A1 Method to make a perpendicular magnetic recording head with a side write shield 有权
标题翻译：制作具有侧面写入屏蔽层的垂直磁记录头的方法
公开(公告)号：US20070177301A1
公开(公告)日：2007-08-02
申请号：US11345892
申请日：2006-02-02
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.
摘要翻译：垂直磁记录（PMR）头被制造成具有通过分离的一对侧屏蔽横向屏蔽的极尖并且被上屏蔽从上面屏蔽。侧面屏蔽是通过RIE工艺形成的，其使用通过掩模层施加到屏蔽层上的特定气体，该屏蔽层由具有比屏蔽材料更慢的蚀刻速率的材料形成。在NiFe的屏蔽层上形成的Ta，Ru / Ta，TaN或Ti的掩蔽层，并使用CH 3 3 OH，CO或NH 3的RIE气体或它们的组合，产生所需的结果。蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成将该层分成两个屏蔽层的楔形沟槽。然后将磁极尖端电镀在沟槽内，并且通过沟槽对准，获得沟槽的楔形横截面。然后在侧屏和极上方形成上屏蔽。

10. 发明授权

US08117738B2 Method to make a perpendicular magnetic recording head with a side write shield 有权
标题翻译：制作具有侧面写入屏蔽层的垂直磁记录头的方法
公开(公告)号：US08117738B2
公开(公告)日：2012-02-21
申请号：US12932552
申请日：2011-02-28
申请人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
发明人： Cherng-Chyi Han , Min Li , Fenglin Liu , Jiun-Ting Lee
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) head is fabricated with a self-aligned pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed from a shield layer by a RIE process characterized by a mask and gases producing a variety of etch rates. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that then separates the layer into two shields. The pole tip is then plated within the trench and an upper shield is formed above the side shields and pole.
摘要翻译：制造垂直磁记录（PMR）头，其具有由对准的一对侧屏蔽侧向屏蔽的自对准极尖，并由上屏蔽从上面屏蔽。侧屏蔽是通过RIE工艺由屏蔽层形成的，其特征在于产生各种蚀刻速率的掩模和气体。蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成楔形沟槽，然后将该层分成两个屏蔽层。然后将磁极尖端电镀在沟槽内，并且在侧屏蔽和极上方形成上屏蔽。

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