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    • 1. 发明授权
    • Photosensitive resin precursor composition
    • 感光树脂前体组合物
    • US07507518B2
    • 2009-03-24
    • US10885100
    • 2004-07-07
    • Yoji FujitaTomoyuki YubaMitsuhito Suwa
    • Yoji FujitaTomoyuki YubaMitsuhito Suwa
    • G03F7/021G03F7/023G03F7/30
    • G03F7/0233G03F7/0045G03F7/0751
    • The present invention relates to a positive photosensitive resin precursor composition which exhibits good storage stability after exposure.A photosensitive resin precursor composition comprises (a) a polymer essentially composed of a structural unit expressed by formula (1); (b) at least two photo acid generators; and (c) a compound having an alkoxymethyl group: wherein R1 represents an organic group with a valence of 2 to 8, having at least two carbon atoms; R2 represents an organic group with a valence of 2 to 6, having at least two carbon atoms; R3 represents hydrogen or an organic group having a carbon number in the range of 1 to 20; n represents a number ranging from 10 to 100,000; m represents an integer in the range of 0 to 2; and p and q represent integers in the range of 0 to 4 and satisfy p+q>0.
    • 本发明涉及曝光后显示良好的储存稳定性的正型感光性树脂前体组合物。 光敏树脂前体组合物包含(a)基本上由式(1)表示的结构单元组成的聚合物; (b)至少两个光酸产生剂; 和(c)具有烷氧基甲基的化合物:其中R1表示具有至少两个碳原子的价数为2至8的有机基团; R2表示具有至少2个碳原子的2价至6价的有机基团; R3表示氢或碳数为1〜20的有机基团; n表示10〜100,000的数; m表示0〜2的整数, p和q表示0〜4的整数,满足p + q> 0。
    • 2. 发明申请
    • Photosensitive resin precursor composition
    • 感光树脂前体组合物
    • US20050014876A1
    • 2005-01-20
    • US10885100
    • 2004-07-07
    • Yoji FujitaTomoyuki YubaMitsuhito Suwa
    • Yoji FujitaTomoyuki YubaMitsuhito Suwa
    • G03F7/022G03F7/004G03F7/023G03F7/075C08L1/00
    • G03F7/0233G03F7/0045G03F7/0751
    • The present invention relates to a positive photosensitive resin precursor composition which exhibits good storage stability after exposure. A photosensitive resin precursor composition comprises (a) a polymer essentially composed of a structural unit expressed by formula (1); (b) at least two photo acid generators; and (c) a compound having an alkoxymethyl group: wherein R1 represents an organic group with a valence of 2 to 8, having at least two carbon atoms; R2 represents an organic group with a valence of 2 to 6, having at least two carbon atoms; R3 represents hydrogen or an organic group having a carbon number in the range of 1 to 20; n represents a number ranging from 10 to 100,000; m represents an integer in the range of 0 to 2; and p and q represent integers in the range of 0 to 4 and satisfy p+q>0.
    • 本发明涉及曝光后显示良好的储存稳定性的正型感光性树脂前体组合物。 光敏树脂前体组合物包含(a)基本上由式(1)表示的结构单元组成的聚合物; (b)至少两个光酸产生剂; 和(c)具有烷氧基甲基的化合物:其中R 1表示具有至少两个碳原子的价数为2至8的有机基团; R 2表示具有至少两个碳原子的价数为2至6的有机基团; R 3表示氢或碳数为1〜20的有机基团; n表示10〜100,000的数; m表示0〜2的整数, p和q表示0〜4的整数,满足p + q> 0。