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    • 8. 发明授权
    • Compound for resist and radiation-sensitive composition
    • 抗蚀剂和辐射敏感组合物的化合物
    • US08350096B2
    • 2013-01-08
    • US13051155
    • 2011-03-18
    • Masatoshi EchigoDai Oguro
    • Masatoshi EchigoDai Oguro
    • C07C39/12C07C39/16G03F7/004
    • G03F7/0045C07C39/15C07C43/164C07C43/18C07C43/196C07C43/2055C07C43/225C07C43/315C07C49/747C07C69/96C07C2601/14C07C2603/74G03F7/0392Y10S430/106
    • A radiation-sensitive composition containing 1 to 80% by weight of a solid component and 20 to 99% by weight of a solvent. The solid component contains a compound B which has (a) a structure derived from a polyphenol compound A by introducing an acid-dissociating group to at least one phenolic hydroxyl group of the polyphenol compound A which is synthesized by a condensation between a di- to tetrafunctional aromatic ketone or aromatic aldehyde each having 5 to 36 carbon atoms with a compound having 1 to 3 phenolic hydroxyl groups and 6 to 15 carbon atoms, and (b) a molecular weight of 400 to 2000. The composition containing the compound B is useful as an acid-amplified, non-polymeric resist material, because it is highly sensitive to radiation such as KrF excimer lasers, extreme ultraviolet rays, electron beams, and X-rays, and provides resist patterns with a high resolution, high heat resistance, and high etching resistance.
    • 含有1至80重量%固体组分和20至99重量%溶剂的辐射敏感组合物。 固体成分含有化合物B,该化合物B具有(a)由多酚化合物A导入的结构,该酸结合基通过将多元酚化合物A中的至少一个酚羟基引入到通过二 - 具有5至36个碳原子的四官能芳族酮或芳族醛与具有1至3个酚羟基和6至15个碳原子的化合物,和(b)分子量为400至2000.含有化合物B的组合物是有用的 作为酸性扩增的非聚合抗蚀剂材料,因为它对诸如KrF准分子激光器,极紫外线,电子束和X射线的辐射高度敏感,并且提供具有高分辨率,高耐热性的抗蚀剂图案, 耐腐蚀性高。
    • 10. 发明授权
    • Perfluoroalkyl substituted phenol derivatives as surface modifiers
    • 全氟烷基取代酚衍生物作为表面改性剂
    • US08258217B2
    • 2012-09-04
    • US12310259
    • 2007-08-29
    • Michèle GersterManuel Mihalic
    • Michèle GersterManuel Mihalic
    • C08K5/136C08K5/375
    • C07C69/82C07C43/225C07C43/23C07C43/315C07C69/63C07C69/65C07C69/712C07C235/20C07C271/44C07C271/58C07C323/16C08K5/06C08K5/10C08K5/136C08K5/205C08K5/375
    • The instant invention relates to a composition comprising a) an organic material which is susceptible to oxidative, thermal or light-induced degradation, and b) at least one compound of the formula (I) wherein the general symbols are as defined in claim 1; especially wherein at least one of the radicals R2, R3 or R4 is —CH2—CH(CH3)—S(O)p—R12, —CH2—CH2—CH2—S(O)p—R12, —CH2—CH(R11)—CH2—R12 or —CH2—CH═CH—R12, R11 is hydrogen or halogen, R12 is a monovalent perfluorinated alkyl or alkenyl, linear or branched organic radical having four to twenty fully fluorinated carbon atoms; or —CH2CH2(CF2)mCF3, m is 3 to 12, and p is 0, 1 or 2. The compounds of the formula I are useful as reducers of surface energy for organic materials, for example synthetic polymer. Polymers with such a reduced surface energy possess an “easy-to-clean”, “self-cleaning” “antisoiling”, “soil-release” “antigraffiti”, “oil resistance”, “solvent resistance”, “chemical resistance”, “self lubricating”, “scratch resistance”, “low moisture absorption”, “dirt pickup resistance”, “slip properties” and “hydrophobic surface”; and anti-adhesion properties against proteins and against microorganism such as for example bacteria, fungi and algae.
    • 本发明涉及一种组合物,其包含a)对氧化,热或光诱导降解敏感的有机材料,和b)至少一种式(I)化合物,其中一般符号如权利要求1所定义; 特别是其中基团R 2,R 3或R 4中的至少一个为-CH 2 -CH(CH 3)-S(O)p -R 12,-CH 2 -CH 2 -CH 2 -S(O)p -R 12,-CH 2 -CH( R 11)-CH 2 -R 12或-CH 2 -CH = CH-R 12,R 11是氢或卤素,R 12是具有四至二十个完全氟化的碳原子的一价全氟化烷基或链烯基的直链或支链有机基团; 或-CH 2 CH 2(CF 2)m CF 3,m为3至12,p为0,1或2.式I化合物可用作有机材料例如合成聚合物的表面能的还原剂。 具有这种表面能降低的聚合物具有“易清洁”,“自清洁”“防污”,“释放”“防刮涂”,“耐油性”,“耐溶剂性”,“耐化学性” “自润滑”,“耐划伤性”,“低吸湿性”,“抗污性”,“滑爽性”和“疏水性表面”; 和抗蛋白质和抗微生物(例如细菌,真菌和藻类)的抗粘附性。