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1. 发明申请

US20190123214A1 Medium Wave Infrared (MWIR) and Long Wavelength Infrared (LWIR) Operating Microbolometer with Raised Strut Design 审中-公开
公开(公告)号：US20190123214A1
公开(公告)日：2019-04-25
申请号：US15792239
申请日：2017-10-24
申请人： Mukti Rana , Andrew Bodhi Voshell
发明人： Mukti Rana , Andrew Bodhi Voshell
IPC分类号： H01L31/024 , H01L31/0352 , H01L31/18 , H01L31/09
CPC分类号： H01L31/024 , G01J5/0225 , G01J5/20 , H01L31/0352 , H01L31/09 , H01L31/18
摘要： A semiconducting microbolometer sensor for detecting electromagnetic waves in the medium wavelength infrared (MWIR) and long-wavelength infrared (LWIR) is provided. A preferred embodiment provides a substrate layer, a bottom and top support structure with a strut-based mesh design, a meandered electrode layer that follows the top support structure design, a bolometer sensing material with a high TCR, and a disk-shaped absorber on top of the sensing material to maximize the heat flux absorption on the sensor. The bottom support of the sensor suspends the top support mesh, creating an air cavity. This air cavity along with the strut based mesh design and optimized thickness, dimension and shape of the layers contributed towards minimizing the thermal conductance of microbolometer and hence improved the figures of merits—responsivity, detectivity, noise equivalent power and noise equivalent temperature difference of microbolometer.

2. 发明申请

US20180113024A1 OPTICAL DETECTION DEVICE 审中-公开
公开(公告)号：US20180113024A1
公开(公告)日：2018-04-26
申请号：US15569101
申请日：2016-04-19
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Takehiko YASHIRO , Mitsushi MINENO , Shigeru SUZUKI
IPC分类号： G01J3/26 , G01J3/02 , G02B7/00
CPC分类号： G01J3/26 , G01J3/0286 , G01J3/0291 , G01J5/0225 , G01J5/024 , G01J5/045 , G01J5/046 , G01J5/06 , G01J5/0862 , G01J5/10 , G01J2005/068 , G02B5/284 , G02B7/008 , G02B26/001
摘要： A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.

3. 发明申请

US20180003622A1 ELECTROMAGNETIC WAVE DETECTOR AND GAS ANALYSIS DEVICE 审中-公开
公开(公告)号：US20180003622A1
公开(公告)日：2018-01-04
申请号：US15543421
申请日：2016-01-04
申请人： MITSUBISHI ELECTRIC CORPORATION
发明人： Daisuke FUJISAWA , Shimpei OGAWA
IPC分类号： G01N21/31 , G01N33/497 , G01N21/21
CPC分类号： G01N21/314 , G01J5/0225 , G01J5/0862 , G01N21/21 , G01N21/3504 , G01N21/41 , G01N33/4972
摘要： An electromagnetic wave detector including a first electromagnetic wave sensor including a light reception unit held in midair above a substrate by a support leg and a second electromagnetic wave sensor including a light reception unit held in midair above the substrate by a support leg having same structure as the support leg of the first electromagnetic wave sensor and provided adjacent to the first electromagnetic wave sensor. The light reception unit of the first electromagnetic wave sensor includes a reflective film, the light reception unit of the second electromagnetic wave sensor includes an electromagnetic wave absorption body for detecting light of a prescribed wavelength band or a prescribed polarization, and the difference between the output of the second electromagnetic wave sensor and the first electromagnetic wave sensor is output.

4. 发明申请

US20170370776A1 POLARIZATION SELECTIVE, FREQUENCY SELECTIVE, AND WIDE DYNAMIC RANGE DETECTORS, IMAGING ARRAYS, READOUT INTEGRATED CIRCUITS, AND SENSOR SYSTEMS 审中-公开
公开(公告)号：US20170370776A1
公开(公告)日：2017-12-28
申请号：US15542425
申请日：2016-01-08
申请人： Apple Inc.
发明人： Miikka M. KANGAS , Michael J. BISHOP , Robert CHEN , David I. SIMON , Harold L. SONTAG III , George Dee SKIDMORE
IPC分类号： G01J5/08 , G01J4/04 , G01J5/20
CPC分类号： G01J5/0825 , G01J4/04 , G01J5/0225 , G01J5/0846 , G01J5/0853 , G01J5/20 , G01J2005/202
摘要： This relates to sensor systems, detectors, imagers, and readout integrated circuits (ROICs) configured to selectively detect one or more frequencies or polarizations of light, capable of operating with a wide dynamic range, or any combination thereof. In some examples, the detector can include one or more light absorbers; the patterns and/or properties of a light absorber can be configured based on the desired measurement wavelength range and/or polarization direction. In some examples, the detector can comprise a plurality of at least partially overlapping light absorbers for enhanced dynamic range detection. In some examples, the detector can be capable of electrostatic tuning for one or more flux levels by varying the response time or sensitivity to account for various flux levels. In some examples, the ROIC can be capable of dynamically adjusting at least one of the frame rate integrating capacitance, and power of the illumination source.

5. 发明申请

US20170023414A1 PASSIVE DETECTORS FOR IMAGING SYSTEMS 有权
标题翻译：成像系统被动探测器
公开(公告)号：US20170023414A1
公开(公告)日：2017-01-26
申请号：US15099440
申请日：2016-04-14
申请人： DIGITAL DIRECT IR, INC.
发明人： Peter N. Kaufman
IPC分类号： G01J5/40 , G01J5/34 , G01J5/06 , G01J5/20
CPC分类号： G01J5/40 , G01J1/44 , G01J5/0225 , G01J5/023 , G01J5/046 , G01J5/06 , G01J5/0806 , G01J5/10 , G01J5/20 , G01J5/34 , G01J5/44 , G01J2005/0077 , G01J2005/065
摘要： Passive detector structures for imaging systems are provided, which are based on a coefficient of thermal expansion (CTE) framework. With such framework, a CTE-based passive detector structure includes a detector member that is configured to expand or contract in response to thermal heating resulting from photon exposure. The expanding/contracting CTE detector structure is configured to exert mechanical forces on resistor and/or capacitor circuit elements, which are part of an oscillator circuit, to vary the resistance and capacitance of such circuit elements and change a frequency or period of oscillation of an output signal of the oscillator circuit. The change in the frequency or period of oscillation of the output signal of the oscillator circuit is utilized to determine an amount of photon exposure of the CTE-based detector.
摘要翻译：提供了用于成像系统的被动检测器结构，其基于热膨胀系数（CTE）框架。利用这种框架，基于CTE的被动检测器结构包括检测器构件，其被配置为响应于由光子暴露引起的热加热而膨胀或收缩。扩展/收缩CTE检测器结构被配置为对作为振荡器电路的一部分的电阻器和/或电容器电路元件施加机械力，以改变这种电路元件的电阻和电容，并且改变振荡的频率或振荡周期振荡电路的输出信号。振荡器电路的输出信号的频率或振荡周期的变化用于确定基于CTE的检测器的光子曝光量。

6. 发明申请

US20170003172A1 INFRARED THERMAL SENSOR WITH BEAM WITHOUT THERMOCOUPLE 有权
标题翻译：红外热传感器，带有无热电偶的光束
公开(公告)号：US20170003172A1
公开(公告)日：2017-01-05
申请号：US15107065
申请日：2014-12-13
申请人： MELEXIS TECHNOLOGIES NV
发明人： Ben MAES , Carl VAN BUGGENHOUT , Appolonius Jacobus VAN DER WIEL
IPC分类号： G01J5/02 , G01J5/14
CPC分类号： G01J5/023 , G01J5/0225 , G01J5/12 , G01J5/14 , G01J5/16 , G01J2005/123
摘要： An infrared thermal sensor for sensing infrared radiation is disclosed. The infrared thermal sensor comprises a substrate and a cap structure together forming a sealed cavity, a membrane arranged in said cavity for receiving infrared radiation (IR) through a window or aperture and a plurality of beams for suspending the membrane. At least one beam has a thermocouple arranged therein or thereon for measuring a temperature difference (ΔT) between the membrane and the substrate, the plurality of beams. Furthermore at least one beam is mechanically supporting the membrane without a thermocouple being present therein or thereon.
摘要翻译：公开了一种用于感测红外辐射的红外热传感器。红外热敏传感器包括一个基片和盖结构，一起形成一个密封的空腔，一个隔膜，布置在所述空腔中，用于通过窗口或孔口接收红外辐射（IR）和多个用于悬挂膜片的光束。至少一个光束具有布置在其中或其上的热电偶，用于测量膜和基板之间的温度差（ΔT），多个光束。此外，至少一个梁机械地支撑膜，而不存在其中或之上的热电偶。

7. 发明申请

US20160282194A1 THERMOPILE TEMPERATURE SENSOR FIELD OF VIEW NARROWING USING INTEGRATED LIGHT BLOCKING LAYER AND LENS 有权
标题翻译：热敏温度传感器使用集成的光阻挡层和镜头的视野
公开(公告)号：US20160282194A1
公开(公告)日：2016-09-29
申请号：US14865593
申请日：2015-09-25
申请人： Maxim Integrated Products, Inc.
发明人： Stanley Barnett , Cheng-Wei Pei , Arvin Emadi , Jerome C. Bhat
IPC分类号： G01K7/02 , H01L35/34 , H01L35/32
CPC分类号： H01L35/34 , G01J5/022 , G01J5/0225 , G01J5/024 , G01J5/04 , G01J5/0806 , G01J5/12 , G01J2005/065 , H01L35/32
摘要： A sensor device, a sensor package, and method for fabricating a sensor device are described that include an integrated light blocker disposed on the thermopile device and a lens configured to direct light to the thermopile device. In an implementation, the thermopile device includes a substrate; a thermopile membrane disposed on the substrate, the thermopile membrane including at least one passivation layer; a thermopile disposed within the thermopile membrane, the thermopile including at least one thermocouple; and a light blocking layer disposed proximate to the thermopile membrane, the light blocking layer including an aperture disposed proximate to the thermopile.
摘要翻译：描述了一种传感器装置，传感器封装和用于制造传感器装置的方法，其包括设置在热电堆装置上的集成光阻挡器和配置成将光引导到热电堆装置的透镜。在实施例中，热电堆装置包括基板; 设置在所述基板上的热电堆膜，所述热电堆膜包括至少一个钝化层; 设置在热电堆膜内的热电堆，热电堆包括至少一个热电偶; 以及靠近所述热电堆膜设置的遮光层，所述遮光层包括靠近所述热电堆设置的孔。

8. 发明申请

US20160169738A1 IR SENSOR FOR IR SENSING BASED ON POWER CONTROL 有权
标题翻译：基于功率控制的红外感应红外传感器
公开(公告)号：US20160169738A1
公开(公告)日：2016-06-16
申请号：US14964927
申请日：2015-12-10
申请人： MELEXIS TECHNOLOGIES NV
发明人： Appolonius Jacobus VAN DER WIEL
IPC分类号： G01J1/42
CPC分类号： G01J1/4228 , G01J1/1626 , G01J5/0225 , G01J5/024 , G01J5/0285 , G01J5/045 , G01J5/06 , G01J5/061 , G01J5/12 , G01J5/14 , G01J5/20 , G01J2005/0048 , G01J2005/063 , G01J2005/065 , G01J2005/066 , G01J2005/068
摘要： A semiconductor device for measuring IR radiation is disclosed. It comprises a substrate and a cap enclosing a cavity, a sensor pixel in the cavity, comprising a first absorber for receiving said IR radiation, a first heater, first temperature measurement means for measuring a first temperature; a reference pixel in the same cavity, comprising a second absorber shielded from said IR radiation, a second heater, and second temperature measurement means for measuring a second temperature; a control circuit for applying a first/second power to the first/second heater such that the first temperature equals the second temperature; and an output circuit for generating an output signal indicative of the IR radiation based on a difference between the first and second power.
摘要翻译：公开了一种用于测量IR辐射的半导体器件。它包括衬底和封闭空腔的盖，空腔中的传感器像素，包括用于接收所述IR辐射的第一吸收体，第一加热器，用于测量第一温度的第一温度测量装置; 相同空腔中的参考像素，包括屏蔽所述IR辐射的第二吸收体，第二加热器和用于测量第二温度的第二温度测量装置; 控制电路，用于将第一/第二功率施加到第一/第二加热器，使得第一温度等于第二温度; 以及输出电路，用于基于第一和第二功率之间的差产生指示IR辐射的输出信号。

9. 发明授权

US09360382B2 Device for measuring a heat flux 有权
标题翻译：用于测量热通量的装置
公开(公告)号：US09360382B2
公开(公告)日：2016-06-07
申请号：US13808676
申请日：2011-07-06
申请人： Lionel Camberlein , Etienne Gaviot , Frédéric Polet , Bruno Beche , Guillaume Failleau , Ronan Morice , Véronique Le Sant
发明人： Lionel Camberlein , Etienne Gaviot , Frédéric Polet , Bruno Beche , Guillaume Failleau , Ronan Morice , Véronique Le Sant
IPC分类号： G01K17/00 , G01J5/02 , G01J5/04 , G01J5/12 , G01K1/16 , H01L35/34
CPC分类号： G01K17/00 , G01J5/0225 , G01J5/046 , G01J5/12 , G01K1/16 , G01K17/006 , H01L35/34 , Y10T29/49002 , Y10T29/49117 , Y10T29/4998
摘要： The invention relates to a device for measuring a heat flux, comprising a thermopile formed of a plurality of thermojunctions of distributed type. The device is formed of a first and a second ceramic substrate (Ce1, Ce2), a first face of the first substrate (Ce1) is composed of cavities which are separated by ceramic spacers (Ca1, Ca2, Ca3, Ca4), the thermopile is placed on a second planar face of the first substrate which is located opposite the first face, the spacers of the first substrate are arranged beneath one thermojunction (Tj2, Tj4, Tj6, Tj8) in two of the thermopile, a face of the second substrate (Ce2) is composed of cavities which are separated by ceramic spacers (Ca5, Ca6, Ca7, Ca8, Ca9), the spacers of the second substrate rest on a thermojunction (Tj1, Tj3, Tj5, Tj7, Tj9) beneath which a spacer of the first substrate is not arranged.
摘要翻译：本发明涉及一种用于测量热通量的装置，包括由分布式多个热连接器形成的热电堆。该装置由第一和第二陶瓷基板（Ce1，Ce2）形成，第一基板（Ce1）的第一面由陶瓷间隔件（Ca1，Ca2，Ca3，Ca4）分隔的空腔，热电堆放置在与第一面相对的第一基板的第二平面上，第一基板的间隔件布置在两个热电堆中的一个热连接点（Tj2，Tj4，Tj6，Tj8）的下面，第二基板的第二平面衬底（Ce2）由被陶瓷间隔物（Ca5，Ca6，Ca7，Ca8，Ca9）分隔开的空腔组成，第二衬底的间隔物搁置在热连接（Tj1，Tj3，Tj5，Tj7，Tj9）上，不排列第一基板的间隔物。

10. 发明授权

US09297700B2 Photonic sensor and a method of manufacturing such a sensor 有权
标题翻译：光子传感器和制造这种传感器的方法
公开(公告)号：US09297700B2
公开(公告)日：2016-03-29
申请号：US13692748
申请日：2012-12-03
申请人： ANALOG DEVICES, INC.
发明人： Paul Martin Lambkin , William Allan Lane
IPC分类号： G01J5/00 , G01J5/04 , G01J5/02 , G01J5/12 , G01J5/08 , G01K7/02 , H01L31/18
CPC分类号： G01J5/04 , G01J5/0225 , G01J5/0831 , G01J5/0853 , G01J5/12 , G01K7/02 , H01L31/18
摘要： A photonic sensor, comprising: a platform, a temperature sensor on the platform; and a structure formed on or as part of the platform.
摘要翻译：一种光子传感器，包括：平台，平台上的温度传感器; 以及形成在平台上或作为平台的一部分的结构。

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