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1. 发明申请

US20180106682A1 FABRICATION METHOD FOR MICROMECHANICAL SENSORS 审中-公开
公开(公告)号：US20180106682A1
公开(公告)日：2018-04-19
申请号：US15836535
申请日：2017-12-08
申请人： MP High Tech Solutions Pty Ltd
发明人： Marek Steffanson
IPC分类号： G01J5/10 , B81C1/00
CPC分类号： G01J5/10 , B81C1/00142 , B81C1/0019 , B81C2201/0132 , G01J5/045 , G01J5/0806 , G01J5/40
摘要： In one approach, a method of fabricating radiation detection devices includes: forming a structural layer overlying a frontside of a substrate; forming a metallic layer overlying the structural layer; releasing each of a plurality of devices on the substrate by etching a backside of the substrate, wherein each device comprises a plate and legs attached to the plate, the legs comprising at least a portion of the metallic layer; and sealing each of the plurality of devices, the sealing comprising: attaching a transparent cavity cap to the frontside of the substrate; and attaching a radiation-transparent substrate to the backside of the substrate.

2. 发明申请

US20180052056A1 THERMOMECHANICAL DEVICE FOR MEASURING ELECTROMAGNETIC RADIATION 审中-公开
公开(公告)号：US20180052056A1
公开(公告)日：2018-02-22
申请号：US15241742
申请日：2016-08-19
申请人： QUALCOMM Incorporated
发明人： Edward Chan , Bing Wen
IPC分类号： G01J5/02 , G01B11/16
CPC分类号： G01J5/023 , G01J5/024 , G01J5/40
摘要： Methods and devices are disclosed for sensing radiation emitted by an object. For example, one device includes a substrate and a movable layer coupled to the substrate. The movable layer is configured to receive radiation from the object and move relative to the substrate to a position in response to a change in temperature. The device also includes a sensor that is configured to produce a signal responsive to the position of the movable layer. The signal is indicative of the radiation emitted by the object.

3. 发明申请

US20170261377A1 BI-MATERIAL TERAHERTZ SENSOR AND TERAHERTZ EMITTER USING METAMATERIAL STRUCTURES 审中-公开
公开(公告)号：US20170261377A1
公开(公告)日：2017-09-14
申请号：US14978769
申请日：2015-12-22
申请人： United States of America, as represented by the Secretary of the Navy
发明人： Fabio D. ALVES , Dragoslav GRBOVIC , Gamani KARUNASIRI
IPC分类号： G01J5/40 , G01J5/10
CPC分类号： G01J5/40 , G01J5/046 , G01J5/0853
摘要： Bi-material terahertz (THz) sensors with metamaterial structures are described. In one embodiment, MEMS fabrication-friendly SiOx and Al are used to maximize the bi-material effect and metamaterial absorption at 3.8 THz, the frequency of a quantum cascade laser illumination source. Sensors with different configurations were fabricated and the measured absorption is near 100% and responsivity is around 1.2 deg/μW. Fabrication and use of the sensors in focal plane arrays for real time THz imaging is described. In a further embodiment, the metamaterial structure is utilized as a THz emitter when heated by an external source.

4. 发明授权

US09651423B1 MEMS optical device comprising a MEMS magnetic sensing mechansim and MEMS light absorbing structure 有权
公开(公告)号：US09651423B1
公开(公告)日：2017-05-16
申请号：US15206297
申请日：2016-07-10
申请人： Biao Zhang
发明人： Biao Zhang
IPC分类号： G01J3/42 , G02B5/122
CPC分类号： G01J1/0407 , G01D5/16 , G01J1/0204 , G01J1/4204 , G01J3/2803 , G01J3/42 , G01J5/38 , G01J5/40
摘要： A MEMS optical device and an array composed thereof are disclosed herein, wherein the MEMS optical device comprises a light absorbing element, a deforming element, and a magnetic detector, wherein the magnetic detector comprises a magnetic source and a magnetic sensor.

5. 发明申请

US20170023414A1 PASSIVE DETECTORS FOR IMAGING SYSTEMS 有权
标题翻译：成像系统被动探测器
公开(公告)号：US20170023414A1
公开(公告)日：2017-01-26
申请号：US15099440
申请日：2016-04-14
申请人： DIGITAL DIRECT IR, INC.
发明人： Peter N. Kaufman
IPC分类号： G01J5/40 , G01J5/34 , G01J5/06 , G01J5/20
CPC分类号： G01J5/40 , G01J1/44 , G01J5/0225 , G01J5/023 , G01J5/046 , G01J5/06 , G01J5/0806 , G01J5/10 , G01J5/20 , G01J5/34 , G01J5/44 , G01J2005/0077 , G01J2005/065
摘要： Passive detector structures for imaging systems are provided, which are based on a coefficient of thermal expansion (CTE) framework. With such framework, a CTE-based passive detector structure includes a detector member that is configured to expand or contract in response to thermal heating resulting from photon exposure. The expanding/contracting CTE detector structure is configured to exert mechanical forces on resistor and/or capacitor circuit elements, which are part of an oscillator circuit, to vary the resistance and capacitance of such circuit elements and change a frequency or period of oscillation of an output signal of the oscillator circuit. The change in the frequency or period of oscillation of the output signal of the oscillator circuit is utilized to determine an amount of photon exposure of the CTE-based detector.
摘要翻译：提供了用于成像系统的被动检测器结构，其基于热膨胀系数（CTE）框架。利用这种框架，基于CTE的被动检测器结构包括检测器构件，其被配置为响应于由光子暴露引起的热加热而膨胀或收缩。扩展/收缩CTE检测器结构被配置为对作为振荡器电路的一部分的电阻器和/或电容器电路元件施加机械力，以改变这种电路元件的电阻和电容，并且改变振荡的频率或振荡周期振荡电路的输出信号。振荡器电路的输出信号的频率或振荡周期的变化用于确定基于CTE的检测器的光子曝光量。

6. 发明申请

US20150377711A1 APPARATUS AND METHOD FOR ELECTROMAGNETIC RADIATION SENSING 有权
标题翻译：电磁辐射感测装置及方法
公开(公告)号：US20150377711A1
公开(公告)日：2015-12-31
申请号：US14750403
申请日：2015-06-25
申请人： MP High Tech Solutions Pty Ltd
发明人： Marek Steffanson , Donald James Bone
IPC分类号： G01J5/10 , G02B26/08 , G01J5/08
CPC分类号： G01J5/10 , G01J5/0803 , G01J5/0806 , G01J5/0831 , G01J5/0896 , G01J5/40 , G01J2005/0077 , G02B26/085
摘要： Systems, methods, and apparatus for providing electromagnetic radiation sensing. The apparatus includes a radiation detection sensor including a plurality of micromechanical radiation sensing pixels having a reflecting top surface and configured to deflect light incident on the reflective surface as a function of an intensity of sensed radiation. In some implementations, the apparatus has equal sensitivities for at least some of the sensing pixels. In some implementations, the apparatus can provide adjustable sensitivity and measurement range. The apparatus can be utilized for human detection, fire detection, gas detection, temperature measurements, environmental monitoring, energy saving, behavior analysis, surveillance, information gathering and for human-machine interfaces.
摘要翻译：用于提供电磁辐射感测的系统，方法和装置。该装置包括辐射检测传感器，其包括多个具有反射顶表面的微机械辐射感测像素，并被配置为根据感测辐射的强度偏转入射在反射表面上的光。在一些实现中，该装置对于至少一些感测像素的灵敏度相等。在一些实施方案中，该装置可以提供可调的灵敏度和测量范围。该装置可用于人体检测，火灾探测，气体检测，温度测量，环境监测，节能，行为分析，监视，信息收集和人机界面。

7. 发明授权

US08835861B1 Microactuators based on insulator-to-metal transition materials and method of using the same 有权
标题翻译：基于绝缘体 - 金属过渡材料的微型制动器及其使用方法
公开(公告)号：US08835861B1
公开(公告)日：2014-09-16
申请号：US13070506
申请日：2011-03-24
申请人： Rafmag Cabrera , Felix E. Fernandez , Armando Rua , Nelson Sepulveda
发明人： Rafmag Cabrera , Felix E. Fernandez , Armando Rua , Nelson Sepulveda
IPC分类号： H01L29/66 , G01J5/20
CPC分类号： B81B3/0024 , B81B2201/032 , G01J5/40 , G01J2005/0077
摘要： The invention utilizes the changes in physical properties of materials during a solid-solid phase transition in order to actuate microactuators. The substantial changes in properties during insulator-to-metal transitions (IMTs) of some materials are useful for controlling purposes. Methods of using the microactuators are also explained.
摘要翻译：本发明在固 - 固相转变期间利用材料的物理性质的变化，以便致动微致动器。在某些材料的绝缘体 - 金属转变（IMT）期间，性质的实质变化对于控制目的是有用的。还说明了使用微致动器的方法。

8. 发明申请

US20130214158A1 PASSIVE DETECTORS FOR IMAGING SYSTEMS 有权
标题翻译：成像系统被动探测器
公开(公告)号：US20130214158A1
公开(公告)日：2013-08-22
申请号：US13588441
申请日：2012-08-17
申请人： Peter N. Kaufman , Howard E. Carpenter
发明人： Peter N. Kaufman , Howard E. Carpenter
IPC分类号： G01J1/44
CPC分类号： G01J5/40 , G01J1/44 , G01J5/0225 , G01J5/023 , G01J5/046 , G01J5/06 , G01J5/0806 , G01J5/10 , G01J5/34 , G01J5/44 , G01J2005/0077 , G01J2005/065
摘要： Passive detector structures for imaging systems are provided which implement unpowered, passive front-end detector structures with direct-to-digital measurement data output for detecting incident photonic radiation in various portions (e.g., thermal (IR), near IR, UV and visible light) of the electromagnetic spectrum.
摘要翻译：提供了用于成像系统的被动检测器结构，其实现无电源的被动前端检测器结构，其具有用于检测各种部分（例如，热（IR），近红外，紫外和可见光）处的入射光子辐射的直接数字测量数据输出）的电磁频谱。

9. 发明申请

US20120261575A1 Thermal Imager Using Metamaterials 有权
标题翻译：热成像仪使用超材料
公开(公告)号：US20120261575A1
公开(公告)日：2012-10-18
申请号：US13252821
申请日：2011-10-04
申请人： Richard Averitt , Xin Zhang , Hu Tao , Andrew Strikwerda , Willie J. Padilla , Eric Shaner
发明人： Richard Averitt , Xin Zhang , Hu Tao , Andrew Strikwerda , Willie J. Padilla , Eric Shaner
IPC分类号： H01L27/146 , G01J5/08
CPC分类号： H01L27/1446 , G01J3/42 , G01J5/0853 , G01J5/40 , H01L27/14649
摘要： An apparatus and method are disclosed for detecting terahertz radiation at room temperature. A detecting pixel includes a sub-wavelength split-ring resonator, and is mechanically coupled to (but thermally decoupled from) a substrate via a cantilever formed from two materials that have a significant mismatch in their thermal expansion coefficients. Incident radiation causes the split-ring resonator to resonate, thereby generating heat that is transferred to the cantilever, causing the cantilever to flex. An optical readout system includes a secondary light source, such as a laser, that shines on a reflective surface on the pixel, whereby a photodiode detects the reflected light and permits calculation of a relative deflection of the pixel in the nanometer range. An exemplary detector has a noise equivalent power rating of approximately 60 pW/√Hz.
摘要翻译：公开了用于在室温下检测太赫兹辐射的装置和方法。检测像素包括亚波长分离环谐振器，并且通过由两个材料形成的悬臂机械耦合（但是与基板热分解），所述悬臂由热膨胀系数具有显着不匹配的两种材料形成。入射辐射导致开环谐振器谐振，从而产生传递到悬臂的热量，导致悬臂弯曲。光学读出系统包括发光在像素上的反射表面上的诸如激光器的次级光源，由此光电二极管检测反射光并允许像素在纳米范围内的相对偏转的计算。一个示例性的检测器具有大约60pW /√Hz的噪声等效额定功率。

10. 发明授权

US08242446B2 Thermal detector 有权
标题翻译：热检测器
公开(公告)号：US08242446B2
公开(公告)日：2012-08-14
申请号：US12227695
申请日：2007-05-24
申请人： Karl Fleury-Frenette , Serge Habraken , Yvon Renotte , Jurij Hastanin
发明人： Karl Fleury-Frenette , Serge Habraken , Yvon Renotte , Jurij Hastanin
IPC分类号： G01J1/00 , G01J5/00
CPC分类号： G01J5/58 , G01J5/40
摘要： A first object of the invention is a radiation detector comprising an energy absorber (203), for absorbing incident radiation (RAD) and thus undergoing a temperature increase; and optical readout means, for detecting said temperature increase; wherein said optical readout means comprises input coupling means (202) for coupling a light beam (2011) to said energy absorber (203) by exciting surface plasmons resonance, a surface plasmons resonance condition being dependent on the energy absorber (203) temperature, and wherein said energy absorber (203) is separated from said input coupling means (202) by a dielectric layer (2032).A second object of the invention is a micromechanical sensor comprising: a micromechanical oscillator and optical readout means (202) for detecting a displacement of said micromechanical oscillator; wherein said optical readout means comprise input coupling means (202) for coupling a light beam (2011) to a conductive surface (2031) by exciting surface plasmons resonance, a surface plasmons resonance condition being dependent on the displacement of said micromechanical oscillator.
摘要翻译：本发明的第一个目的是一种辐射检测器，其包括用于吸收入射辐射（RAD）并因此经历升温的能量吸收器（203）; 以及用于检测所述温度升高的光学读出装置; 其中所述光学读出装置包括通过激发表面等离子体共振，依赖于能量吸收器（203）温度的表面等离子体共振条件将光束（2011）耦合到所述能量吸收器（203）的输入耦合装置（202）其中所述能量吸收器（203）通过电介质层（2032）与所述输入耦合装置（202）分离。本发明的第二个目的是一种微机械传感器，包括：微机械振荡器和用于检测所述微机械振荡器位移的光学读出装置（202）; 其中所述光读出装置包括用于通过激发表面等离子体共振将光束（2011）耦合到导电表面（2031）的输入耦合装置（202），表面等离子体共振条件取决于所述微机械振荡器的位移。

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