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1. 发明授权

US08594826B2 Method and system for evaluating a machine tool operating characteristics 失效
标题翻译：用于评估机床操作特性的方法和系统
公开(公告)号：US08594826B2
公开(公告)日：2013-11-26
申请号：US13608032
申请日：2012-09-10
申请人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slonim , Hong Lin , Fateh A. Tipu , Adam D. Ticknor , Timothy M. McCormack
发明人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slonim , Hong Lin , Fateh A. Tipu , Adam D. Ticknor , Timothy M. McCormack
IPC分类号： G06F19/00
CPC分类号： G05B23/0216 , G05B23/0229 , G05B2219/32191 , G05B2219/32194 , G05B2219/45031 , G05B2219/50065 , Y02P90/22 , Y02P90/86 , Y10T409/309408
摘要： A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.
摘要翻译：一种适用于制造环境的方法，系统和计算机程序产品，包括多个名义上相同的独立工具。计算设备生成从至少一个独立工具导出的过程跟踪数据的多维阵列，其中，所述阵列包括表示包括制造配方中的步骤列表的第一维度的数据和表示包括列表的第二维度的数据一组传感器从至少一个独立工具产生测量值。为了评估至少一个独立工具的至少一个操作特征，计算设备对多维阵列的至少一个预选子集进行分析。计算设备通过一组分层链接和可浏览的图形呈现分析结果。

2. 发明授权

US08463422B2 Apparatus and method for user-specific monitoring and control of production 有权
标题翻译：用于用户特定监控和生产控制的装置和方法
公开(公告)号：US08463422B2
公开(公告)日：2013-06-11
申请号：US12307462
申请日：2007-06-26
申请人： Markus Betsche , Günther Grimm , Arno Wyrwoll
发明人： Markus Betsche , Günther Grimm , Arno Wyrwoll
IPC分类号： B29B7/00 , B29C39/00 , G06F19/00 , G06F17/00
CPC分类号： B29C45/76 , B29C45/7666 , B29C45/768 , B29C47/0002 , B29C47/0009 , B29C47/0854 , B29C47/92 , B29C2945/76939 , B29C2945/76949 , B29C2947/92019 , B29C2947/92209 , B29C2947/92333 , B29C2947/924 , B29C2947/92409 , B29C2947/92542 , B29C2947/92695 , B29C2947/9279 , B29C2947/92876 , B29C2947/92895 , G05B19/406 , G05B2219/25387 , G05B2219/32234 , G05B2219/35291 , G05B2219/39361 , G05B2219/45244 , G05B2219/50065 , Y02P80/114
摘要： An extruder or injection molding machine with user-specifically monitoring and regulating processing of plastic materials includes a material feed, a plasticizer, and a mold. A process input variable, e.g. cost of the apparatus, raw material, power, and processed quantity, can be inputted with an input device and transmitted to a controller. A process monitoring variable, e.g. the duration of a product cycle, product cost, raw material used/power consumed per product cycle, expected purchase price for a given quantity of a product, and number of product cycles until maintenance, can be determined in real time from a process control variable and/or process input variable. A value of a process monitoring variable, such as the actual desired, or mean value, the value integrated since starting, the history or tendency of this value, can be outputted on an output device in form of a characteristic diagram.
摘要翻译：具有用户专门监测和调节塑料材料的挤出机或注塑机包括材料进料，增塑剂和模具。过程输入变量，例如设备的成本，原材料，功率和处理量可以输入到输入设备并传送到控制器。过程监控变量，例如产品周期的持续时间，产品成本，使用的原材料/每个产品周期的功耗，给定数量的产品的预期购买价格以及直到维护的产品周期数可以从过程控制变量和/或过程输入变量。过程监控变量的值，例如实际期望值或平均值，从开始累积的值，该值的历史或趋势可以以特性图的形式输出到输出设备上。

3. 发明申请

US20130006406A1 METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS 失效
标题翻译：用于评估机床工作特性的方法和系统
公开(公告)号：US20130006406A1
公开(公告)日：2013-01-03
申请号：US13608032
申请日：2012-09-10
申请人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slomin , Hong Lin , Fateh Ali Tipu , Adam Daniel Ticknor , Timothy M. McCormack
发明人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slomin , Hong Lin , Fateh Ali Tipu , Adam Daniel Ticknor , Timothy M. McCormack
IPC分类号： G05B19/18
CPC分类号： G05B23/0216 , G05B23/0229 , G05B2219/32191 , G05B2219/32194 , G05B2219/45031 , G05B2219/50065 , Y02P90/22 , Y02P90/86 , Y10T409/309408
摘要： A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.
摘要翻译：一种适用于制造环境的方法，系统和计算机程序产品，包括多个名义上相同的独立工具。计算设备生成从至少一个独立工具导出的过程跟踪数据的多维阵列，其中，所述阵列包括表示包括制造配方中的步骤列表的第一维度的数据和表示包括列表的第二维度的数据一组传感器从至少一个独立工具产生测量值。为了评估至少一个独立工具的至少一个操作特征，计算设备对多维阵列的至少一个预选子集进行分析。计算设备通过一组分层链接和可浏览的图形呈现分析结果。

4. 发明授权

US08965949B2 System and method for applying computational knowledge to device data 有权
标题翻译：将计算知识应用于设备数据的系统和方法
公开(公告)号：US08965949B2
公开(公告)日：2015-02-24
申请号：US11118813
申请日：2005-04-29
申请人： Tracy E. Thieret
发明人： Tracy E. Thieret
IPC分类号： G06F15/16 , G06F7/38 , G06F17/00 , G06F17/20 , G06F17/21 , G06F17/22 , G06F17/24 , G06F17/25 , G06F17/26 , G06F17/27 , G06F17/28 , G06N5/02 , G09G1/16 , G05B23/02 , G06Q30/02
CPC分类号： G06N5/025 , G05B23/0232 , G05B2219/50065 , G06Q30/02 , G09G1/162
摘要： A system and method are provided for acquiring and processing device usage data and applying a computational knowledge thereto for proactively determining customer state, including inferring device usage patterns, and accordingly proposing at least one action, if any, to be undertaken. In particular, computational knowledge represented by a set of rules is applied to the processed device data for analyzing the processed data and describing at least one feature or characteristic relating to the processed data using keywords. A rules database is accessed and at least one rule is selected from a set of rules. The at least one selected rule includes keywords which substantially match the keywords used to describe the feature or characteristic of the processed data. The at least one selected rule is then correlated to at least one proposed action using the rules database. The at least one determined rule and/or at least one proposed action are then outputted.
摘要翻译：提供了一种系统和方法，用于获取和处理设备使用数据并将其计算知识应用于主动确定客户状态，包括推断设备使用模式，并因此提出要进行的至少一个动作（如果有的话）。特别地，由一组规则表示的计算知识应用于经处理的设备数据，用于分析处理的数据，并使用关键字描述与处理的数据相关的至少一个特征或特征。访问规则数据库，并从一组规则中选择至少一个规则。所述至少一个所选择的规则包括与用于描述所处理的数据的特征或特征的关键字基本匹配的关键字。然后使用规则数据库将至少一个选定的规则与至少一个提出的动作相关联。然后输出至少一个确定的规则和/或至少一个所提出的动作。

5. 发明授权

US07424392B1 Applying a self-adaptive filter to a drifting process 失效
标题翻译：将自适应滤波器应用于漂移过程
公开(公告)号：US07424392B1
公开(公告)日：2008-09-09
申请号：US10323502
申请日：2002-12-18
申请人： Jin Wang , Robert J. Chong , Christopher A. Bode , Si-Zhao J. Qin , Alexander J. Pasadyn
发明人： Jin Wang , Robert J. Chong , Christopher A. Bode , Si-Zhao J. Qin , Alexander J. Pasadyn
IPC分类号： G06F17/18 , G21C17/00
CPC分类号： G05B19/41875 , G05B2219/32135 , G05B2219/32182 , G05B2219/32184 , G05B2219/37224 , G05B2219/41146 , G05B2219/41147 , G05B2219/50065 , Y02P90/22
摘要： A method and an apparatus are provided for applying a self-adaptive filter to a drifting process. The method includes processing a workpiece, measuring an output characteristic of the processed workpiece and modifying a previous estimated process state based at least on the measured output characteristic. The method further includes estimating a next process state based at least on the modified previous estimated process state.
摘要翻译：提供了一种用于将自适应滤波器应用于漂移过程的方法和装置。该方法包括处理工件，测量被处理工件的输出特性，以及至少基于所测量的输出特性修改先前的估计过程状态。该方法还包括至少基于修改的先前估计的处理状态来估计下一处理状态。

6. 发明授权

US06766214B1 Adjusting a sampling rate based on state estimation results 有权
标题翻译：根据状态估计结果调整采样率
公开(公告)号：US06766214B1
公开(公告)日：2004-07-20
申请号：US10406675
申请日：2003-04-03
申请人： Jin Wang , Brian K. Cusson
发明人： Jin Wang , Brian K. Cusson
IPC分类号： G06F1900
CPC分类号： G05B19/41865 , G05B2219/32077 , G05B2219/32078 , G05B2219/32096 , G05B2219/45031 , G05B2219/50065 , Y02P90/14 , Y02P90/20
摘要： A method and an apparatus are provided for adjusting a sampling rate based on a state estimation result. The method comprises receiving metrology data associated with processing of workpieces, estimating a next process state based on at least a portion of the metrology data and determining an error value associated with the estimated next process state. The method further comprises processing a plurality of workpieces based on the estimated next process state and adjusting a sampling protocol of the processed workpieces that are to be measured based on the determined error value.
摘要翻译：提供了一种基于状态估计结果调整采样率的方法和装置。该方法包括接收与工件处理相关联的度量数据，基于至少部分测量数据估计下一个处理状态，并确定与估计的下一个处理状态相关联的误差值。该方法还包括基于所估计的下一个处理状态来处理多个工件，并且基于所确定的误差值来调整待测量的待处理工件的采样协议。

7. 发明授权

US08285414B2 Method and system for evaluating a machine tool operating characteristics 有权
标题翻译：用于评估机床操作特性的方法和系统
公开(公告)号：US08285414B2
公开(公告)日：2012-10-09
申请号：US12415348
申请日：2009-03-31
申请人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slonim , Hong Lin , Fateh A. Tipu , Adam D. Ticknor , Timothy M. McCormack
发明人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slonim , Hong Lin , Fateh A. Tipu , Adam D. Ticknor , Timothy M. McCormack
IPC分类号： G06F19/00
CPC分类号： G05B23/0216 , G05B23/0229 , G05B2219/32191 , G05B2219/32194 , G05B2219/45031 , G05B2219/50065 , Y02P90/22 , Y02P90/86 , Y10T409/309408
摘要： A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.
摘要翻译：公开了一种用于在制造微电子器件的同时评估半导体制造工具的性能的方法和系统。至少根据执行至少一项统计测试生成一份报告。该报告包括至少一个具有与传感器对应的行的热图，对应于配方步骤期间获得的跟踪数据的列，以及行和列的交叉点处的单元格。工具中至少有一个传感器获得配方步骤的痕迹数据，同时制造至少一个微电子器件。计算设备分析所获得的跟踪数据以确定在数据中发现的操作意义的水平，并向指示操作意义水平的跟踪数据分配分数。然后，计算设备将分数放置在热图的相应单元中。用户使用单元格来评估刀具性能。

8. 发明申请

US20100243564A1 SYSTEM AND METHOD FOR MONITORING AN INTEGRATED SYSTEM 有权
标题翻译：用于监控集成系统的系统和方法
公开(公告)号：US20100243564A1
公开(公告)日：2010-09-30
申请号：US12414092
申请日：2009-03-30
申请人： Vijaysai Prasad , Amol Rajaram Kolwalkar , Sunil Shirish Shah , Frederick Liberatore , Rajendra Naik
发明人： Vijaysai Prasad , Amol Rajaram Kolwalkar , Sunil Shirish Shah , Frederick Liberatore , Rajendra Naik
IPC分类号： C02F3/00 , G05B23/02 , C02F9/14
CPC分类号： G05B19/4063 , G05B13/048 , G05B2219/34477 , G05B2219/49181 , G05B2219/50065
摘要： A control system includes an estimator configured to determine a present state of a device and compare the present state of the device with an expected state of the device. The control system further includes a predictor operatively coupled to the estimator, and configured to predict an event for execution by the device to reach the expected state of the device. The control system also includes a supervisory control unit operatively coupled to the predictor and the device, and configured to facilitate execution of the predicted event by the device.
摘要翻译：控制系统包括被配置为确定设备的当前状态并将设备的当前状态与设备的预期状态进行比较的估计器。控制系统还包括可操作地耦合到估计器的预测器，并且被配置为预测由设备执行以达到设备的预期状态的事件。控制系统还包括可操作地耦合到预测器和设备的管理控制单元，并且被配置为便于由设备执行预测的事件。

9. 发明申请

US20060248178A1 System and method for applying computational knowledge to device data 有权
公开(公告)号：US20060248178A1
公开(公告)日：2006-11-02
申请号：US11118813
申请日：2005-04-29
申请人： Tracy Thieret
发明人： Tracy Thieret
IPC分类号： G06F15/173
CPC分类号： G06N5/025 , G05B23/0232 , G05B2219/50065 , G06Q30/02 , G09G1/162
摘要： A system and method are provided for acquiring and processing device usage data and applying a computational knowledge thereto for proactively determining customer state, including inferring device usage patterns, and accordingly proposing at least one action, if any, to be undertaken. In particular, computational knowledge represented by a set of rules is applied to the processed device data for analyzing the processed data and describing at least one feature or characteristic relating to the processed data using keywords. A rules database is accessed and at least one rule is selected from a set of rules. The at least one selected rule includes keywords which substantially match the keywords used to describe the feature or characteristic of the processed data. The at least one selected rule is then correlated to at least one proposed action using the rules database. The at least one determined rule and/or at least one proposed action are then outputted.

10. 发明授权

US3946212A Automatic quality control system 失效
标题翻译：自动质量控制系统
公开(公告)号：US3946212A
公开(公告)日：1976-03-23
申请号：US480361
申请日：1974-06-18
申请人： Hisaji Nakao , Nobuo Fukuma , Hideyuki Matsubara , Tadahiro Takasu , Takao Yoneda
发明人： Hisaji Nakao , Nobuo Fukuma , Hideyuki Matsubara , Tadahiro Takasu , Takao Yoneda
IPC分类号： B23Q15/04 , B24B49/02 , G05B15/02 , G05B19/418 , G05B23/02 , G07C3/14 , G06F15/36 , G06F15/46
CPC分类号： G07C3/14 , G05B19/41875 , G05B2219/50065 , Y02P90/22
摘要： An automatic quality control system for a machine which measures workpieces processed by the machine. An estimated value to be obtained from an unprocessed workpiece depending upon information obtained from previously processed workpieces is calculated and is compared with a predetermined control limit. An instruction signal is generated when the estimated value is beyond the control limit to indicate a need for adjustment of the machine.
摘要翻译：一种用于测量机器处理的工件的机器的自动质量控制系统。计算从未处理的工件获得的估计值，这取决于从先前处理的工件获得的信息，并将其与预定的控制极限进行比较。当估计值超过控制限制时，产生指示信号，表示需要调整机器。

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