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1. 发明申请

US20170358730A1 ELASTIC WAVE DEVICE 审中-公开
公开(公告)号：US20170358730A1
公开(公告)日：2017-12-14
申请号：US15591216
申请日：2017-05-10
申请人： Murata Manufacturing Co., Ltd.
发明人： Yutaka KISHIMOTO , Tetsuya KIMURA
IPC分类号： H01L41/107 , H01L41/047 , H03H9/17 , H03H9/56
CPC分类号： H01L41/107 , H01L41/0471 , H03H9/02574 , H03H9/02614 , H03H9/172 , H03H9/564
摘要： An elastic wave device in which a recess is provided on an upper side of a support, a piezoelectric thin film covers the recess, and an IDT electrode is provided on an upper surface of the piezoelectric thin film. A plate wave of an S0 mode or SH0 mode is used. A plurality of grooves are provided in the upper surface or lower surface of the piezoelectric thin film at a portion of the piezoelectric thin film that is positioned on a hollow section.

2. 发明申请

US20170338796A1 ELASTIC WAVE ELEMENT, FILTER ELEMENT, AND COMMUNICATION DEVICE 审中-公开
公开(公告)号：US20170338796A1
公开(公告)日：2017-11-23
申请号：US15527215
申请日：2015-11-18
申请人： KYOCERA Corporation
发明人： Yusuke MORIMOTO , Masahisa SHIMOZONO
IPC分类号： H03H9/02 , H03H9/00 , H03H3/08
CPC分类号： H03H9/02858 , H03H3/08 , H03H9/0071 , H03H9/0222 , H03H9/02614 , H03H9/02897 , H03H9/14538 , H03H9/725
摘要： An elastic wave element having a piezoelectric substrate equipped with a first main surface, and an excitation electrode arranged on the first main surface and having multiple electrode fingers, wherein, in a cross-sectional view in the direction orthogonal to the first main surface, the width of the electrode fingers at a first height at a distance from the first main surface is greater than the width at a second height located closest to the first main surface.

3. 发明申请

US20170170385A1 COMPOSITE SUBSTRATE AND THICKNESS-TENDENCY ESTIMATING METHOD FOR PIEZOELECTRIC SUBSTRATE 审中-公开
公开(公告)号：US20170170385A1
公开(公告)日：2017-06-15
申请号：US15443023
申请日：2017-02-27
申请人： NGK INSULATORS, LTD.
发明人： Tomoki NAGAE , Ayato KOIZUMI
IPC分类号： H01L41/337 , H01L41/08
CPC分类号： H01L41/337 , H01L41/081 , H01L41/0815 , H01L41/22 , H01L41/313 , H03H9/02047 , H03H9/02574 , H03H9/02614
摘要： A composite substrate according to the present invention includes a support substrate having a diameter of 2 inches or more, and a piezoelectric substrate having a thickness of 20 μm or less and bonded to the support substrate to transmit light. The piezoelectric substrate has a thickness distribution shaped like a fringe. A waveform having an amplitude within a range of 5 to 100 nm in a thickness direction and a pitch within a range of 0.5 to 20 mm in a width direction appears in the thickness distribution of the piezoelectric substrate in a cross section of the composite substrate taken along a line orthogonal to the fringe, and the pitch of the waveform correlates with a width of the fringe. In the piezoelectric substrate, the fringe may include either parallel fringes or spiral or concentric fringes.

4. 发明授权

US07439648B2 Surface acoustic wave device and manufacturing method therefor, and communications equipment 有权
标题翻译：声表面波装置及其制造方法及通信设备
公开(公告)号：US07439648B2
公开(公告)日：2008-10-21
申请号：US11213617
申请日：2005-08-26
申请人： Ikuo Obara , Daisuke Makibuchi , Kunihiko Muraoka , Kiyohiro Iioka
发明人： Ikuo Obara , Daisuke Makibuchi , Kunihiko Muraoka , Kiyohiro Iioka
IPC分类号： H01L41/08
CPC分类号： H03H3/08 , H03H9/02614 , H03H9/02921
摘要： A surface acoustic wave device configured by forming an oxide layer 2 on a piezoelectric substrate 1 composed of a lithium tantalate single crystal or a lithium niobate single crystal and having weak pyroelectric properties having a lower oxygen content than a stoichiometric composition ratio, and forming thereon an IDT electrode 3. There is no static destruction of a minute electrode due to the pyroelectric effect of the piezoelectric substrate having weak pyroelectric properties, and frequency characteristics are not degraded.
摘要翻译：一种表面声波装置，其特征在于，在由钽酸锂单晶或铌酸锂单晶构成的压电基板1上形成氧化物层2，所述氧化物层2具有比化学计量组成比低的氧含量的弱热电性， IDT电极3。由于具有低热电特性的压电基板的热电效应，并且频率特性不降低，因此微电极没有静电破坏。

5. 发明申请

US20050275309A1 Surface acoustic wave device, method of manufacturing the same, and electronic apparatus 失效
标题翻译：声表面波装置及其制造方法以及电子装置
公开(公告)号：US20050275309A1
公开(公告)日：2005-12-15
申请号：US11147220
申请日：2005-06-08
申请人： Masahiro Oshio
发明人： Masahiro Oshio
IPC分类号： H03H3/08 , H03H3/10 , H03H9/02 , H03H9/145 , H03H9/25
CPC分类号： H03H9/1071 , H03H3/10 , H03H9/02559 , H03H9/02614 , H03H9/02818 , H03H9/02984 , H03H9/14538
摘要： A surface acoustic wave device, comprising a lithium-tantalate substrate and an IDT electrode that excites a pseudo-longitudinal wave type leaky surface acoustic wave in the surface of the lithium-tantalate substrate, wherein a normalized substrate thickness t/λ, which is a thickness t of the lithium-tantalate substrate normalized by an IDT wavelength λ, is in a range of 1≦t/λ≦22.
摘要翻译：一种声表面波装置，其特征在于，包括在所述锂钽酸盐基板的表面中激发伪纵波型泄漏表面声波的锂钽酸锂基板和IDT电极，其中，所述正电荷基板厚度t /λ为由IDT波长λ标准化的钽酸锂底物的厚度t在1 <= t /λ<22的范围内。

6. 发明授权

US3903486A Electro-acoustic delay device for high-frequency electric signals 失效
标题翻译：电声延迟装置用于高频电信号
公开(公告)号：US3903486A
公开(公告)日：1975-09-02
申请号：US49185474
申请日：1974-07-25
申请人： THOMSON CSF
发明人： BERT ALAIN , KANTOROWICZ GERARD
IPC分类号： H03H9/02 , H03H9/42 , H03H9/44 , H03H9/26 , H01J31/04 , H03H9/30 , H04R17/10
CPC分类号： H03H9/44 , H03H9/02614 , H03H9/42 , H03H9/423
摘要： In contrast to prior art delay devices using a piezoelectric crystal, wherein the input and output transducers are conductors applied to the piezoelectric crystal, the invention provides for at least one of these transducers (e.g., 123 in FIGS. 2, 3 and 5) to be partly made up of a system of regions (30) of an insulator (10) covering the crystal (2) and which are rendered conductive when bombarded by an electron beam (from gun 20). The invention will find application in the production of variable delays, and in particular to pulse compression and filtering.
摘要翻译：与使用压电晶体的现有技术的延迟装置相比，其中输入和输出换能器是施加到压电晶体的导体，本发明提供了这些换能器中的至少一个（例如，图2,3和5中的123）到部分地由覆盖晶体（2）的绝缘体（10）的区域（30）的系统构成，并且当被电子束（来自枪20）轰击时导致。

7. 发明申请

US20170366165A1 Tunable surface acoustic wave resonators and filters 审中-公开
公开(公告)号：US20170366165A1
公开(公告)日：2017-12-21
申请号：US14999711
申请日：2016-06-20
申请人： Ishiang Shih , Cindy X. Qiu , Chunong Qiu , Andy Shih , Julia Qiu , Yi-Chi Shih
发明人： Ishiang Shih , Cindy X. Qiu , Chunong Qiu , Andy Shih , Julia Qiu , Yi-Chi Shih
IPC分类号： H03H9/64
CPC分类号： H03H9/145 , H03H9/02614 , H03H9/02976 , H03H9/14538 , H03H9/25 , H03H9/64 , H03H2009/02165
摘要： Due to strong needs to reduce the dimensions and the cost of the RF filters and to reduce the number of filters required in an mobile handsets and wireless system covering numbers of operation bands, tunable RF filters which can cover as many bands or frequency ranges as possible are needed so that the number of filters can be reduced in the mobile handsets and wireless systems. This invention provides tunable surface acoustic wave resonators and filters utilizing semiconducting piezoelectric layers having embedded or elevated electrode doped regions. Both metallization ratio and loading mass are changed by varying a DC biasing voltage to effect a change in the resonant frequency of the tunable SAW devices.

8. 发明授权

US09374062B2 Elastic wave filter device and manufacturing method of the same 有权
标题翻译：弹性波滤波装置及其制造方法相同
公开(公告)号：US09374062B2
公开(公告)日：2016-06-21
申请号：US14483194
申请日：2014-09-11
申请人： Murata Manufacturing Co., Ltd.
发明人： Takashi Iwamoto
IPC分类号： H03H9/72 , H03H3/08 , H03H9/02 , H03H9/10 , H01J37/317
CPC分类号： H03H9/725 , H01J37/3171 , H03H3/08 , H03H9/02543 , H03H9/02574 , H03H9/02614 , H03H9/02834 , H03H9/02984 , H03H9/1085
摘要： An elastic wave filter device includes a transmission elastic wave filter chip and a reception elastic wave filter chip. The transmission elastic wave filter chip includes an insulating support substrate, a piezoelectric layer directly or indirectly supported by the support substrate, and an IDT electrode in contact with the piezoelectric layer. The reception elastic wave filter chip includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate. The thermal conductivity of the support substrate is higher than the thermal conductivity of either of the piezoelectric layer and the piezoelectric substrate.
摘要翻译：弹性波滤波器装置包括传输弹性波滤波器芯片和接收弹性波滤波器芯片。透射弹性波滤波芯片包括绝缘支撑基板，由支撑基板直接或间接支撑的压电层和与压电层接触的IDT电极。接收弹性波滤波器芯片包括设置在压电基片上的压电基片和IDT电极。支撑基板的热导率高于压电层和压电基板中的任一个的导热率。

9. 发明授权

US08490260B1 Method of manufacturing SAW device substrates 有权
标题翻译：制造SAW器件衬底的方法
公开(公告)号：US08490260B1
公开(公告)日：2013-07-23
申请号：US11969956
申请日：2008-01-07
申请人： Sergei Zhgoon , Kushal Bhattacharjee
发明人： Sergei Zhgoon , Kushal Bhattacharjee
IPC分类号： H04R17/10 , H01L21/20
CPC分类号： H03H9/02614 , H03H9/02574 , Y10T29/42 , Y10T29/49005
摘要： A method of manufacturing composite structures, or composite substrates, for a Surface Acoustic Wave (SAW) device are provided. In one embodiment of the present disclosure, a piezoelectric substrate is provided. A supporting substrate is formed over a first surface of the piezoelectric substrate. The first surface of the piezoelectric substrate may be unpolished. A second surface of the piezoelectric substrate is then processed to a desired thickness and polished. SAW device components such as, for example, interdigitated transducers (IDTs) and reflectors are then formed on the polished surface of the piezoelectric substrate. The supporting substrate may be formed using any desired type of deposition or growth process.
摘要翻译：提供了一种制造用于表面声波（SAW）器件的复合结构或复合衬底的方法。在本公开的一个实施例中，提供压电基板。在压电基板的第一表面上形成支撑基板。压电基板的第一表面可以是未抛光的。然后将压电基板的第二表面加工成所需的厚度并抛光。然后在压电基板的抛光表面上形成SAW器件部件，例如交叉换能器（IDT）和反射器。可以使用任何所需类型的沉积或生长工艺来形成支撑衬底。

10. 发明授权

US08471434B2 Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus 有权
标题翻译：表面声波装置，表面声波振荡器和电子装置
公开(公告)号：US08471434B2
公开(公告)日：2013-06-25
申请号：US13212725
申请日：2011-08-18
申请人： Takuya Owaki , Kunihito Yamanaka
发明人： Takuya Owaki , Kunihito Yamanaka
IPC分类号： H01L41/08
CPC分类号： H03H9/0542 , H01L2224/05554 , H01L2224/48091 , H01L2224/48227 , H01L2224/49171 , H01L2224/73265 , H01L2924/16195 , H03H9/02551 , H03H9/02614 , H03H9/02834 , H03H9/0585 , H03H9/1071 , H03H9/14538 , H01L2924/00014
摘要： A surface acoustic wave device includes: a quartz substrate with Euler angles of (φ, θ, ψ); and an IDT which excites a surface acoustic wave in an upper mode of a stop band; wherein, the Euler angle φ is −60°≦φ≦60°, and the Euler angle φ determines the ranges of the Euler angles θ and ψ.
摘要翻译：表面声波装置包括：具有（phi，θ，psi）的欧拉角的石英基板; 以及激励停止带的上部模式中的表面声波的IDT; 其中欧拉角φi为-60°@ 60°，欧拉角φi确定欧拉角θ和psi的范围。

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