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1. 发明授权

US09065421B2 Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making 有权
标题翻译：具有多层不同压电材料的薄膜体声共振器及制作方法
公开(公告)号：US09065421B2
公开(公告)日：2015-06-23
申请号：US13362321
申请日：2012-01-31
申请人： Chris Feng , John Choy , Kevin J. Grannen , Phil Nikkel , Tom Yeh
发明人： Chris Feng , John Choy , Kevin J. Grannen , Phil Nikkel , Tom Yeh
IPC分类号： H01L41/09 , H03H9/12 , H03H9/17 , H03H9/02 , H03H9/58
CPC分类号： H03H9/173 , H03H9/02149 , H03H9/171 , H03H9/178 , H03H9/585 , Y10T29/42
摘要： A thin film bulk acoustic resonator (FBAR) includes a first electrode, a first piezoelectric layer having a first c-axis orientation and on the first electrode, a second piezoelectric layer having a second c-axis orientation over the first piezoelectric layer, and a second electrode on the second piezoelectric layer. The first and second piezoelectric layers are made of respective different piezoelectric materials. The FBAR can be set to have different resonance frequencies by selecting the first and second c-axis orientations to be respectively the same or different. The high and low frequency range of the FBAR can thus be extended.
摘要翻译：薄膜体声波谐振器（FBAR）包括第一电极，具有第一c轴取向的第一压电层，在第一电极上具有在第一压电层上具有第二c轴取向的第二压电层，以及在第二压电层上的第二电极。第一和第二压电层由相应的不同的压电材料制成。通过选择第一和第二c轴取向分别相同或不同，可以将FBAR设置为具有不同的谐振频率。因此可以扩展FBAR的高低频范围。

2. 发明申请

US20120274184A1 Piezoelectric resonator with two layers 失效
标题翻译：双层压电谐振器
公开(公告)号：US20120274184A1
公开(公告)日：2012-11-01
申请号：US12456245
申请日：2009-06-11
申请人： Philip J. Stephanou , Justin P. Black
发明人： Philip J. Stephanou , Justin P. Black
IPC分类号： H01L41/047 , H01L41/22
CPC分类号： H03H9/585 , H03H9/0207 , H03H9/02228 , H03H9/178 , Y10T29/42
摘要： A piezoelectric resonator device comprises five layers. A first layer and a fifth layer include one or more metal electrodes. A second layer and a fourth layer comprise a piezoelectric material. A third layer comprises a metal layer. In a first area of the first layer the first layer metal electrodes include a first layer periodic structure along one dimension comprising one of the one or more first layer metal electrodes and a space with no first layer metal electrodes. In a second area of the fifth layer the fifth layer metal electrodes include a fifth layer periodic structure along the one dimension comprising one of the one or more fifth layer metal electrodes and a space with no fifth layer metal electrodes. The first layer periodic structure and the fifth layer periodic structure are aligned so that the one of the one or more fifth layer metal electrodes are centered under the space with no first layer metal electrodes and the one of the one or more first layer metal electrodes are centered over the space with no fifth layer metal electrodes or are aligned so that the one of the one or more fifth layer metal electrodes are centered under the first layer metal electrodes.
摘要翻译：压电谐振器装置包括五层。第一层和第五层包括一个或多个金属电极。第二层和第四层包括压电材料。第三层包括金属层。在第一层的第一区域中，第一层金属电极包括沿着一个维度的第一层周期性结构，其包括一个或多个第一层金属电极之一和没有第一层金属电极的空间。在第五层的第二区域中，第五层金属电极包括沿着一个维度的第五层周期性结构，其包括一个或多个第五层金属电极之一和没有第五层金属电极的空间。第一层周期结构和第五层周期结构被排列成使得一个或多个第五层金属电极中的一个在空间下方居中，没有第一层金属电极，并且一个或多个第一层金属电极中的一个在没有第五层金属电极的空间的中心，或者被排列成使得一个或多个第五层金属电极中的一个位于第一层金属电极下方的中心。

3. 发明申请

US20100192342A1 PIEZOELECTRIC DEVICES AND METHODS FOR MANUFACTURING SAME 失效
标题翻译：压电元件及其制造方法
公开(公告)号：US20100192342A1
公开(公告)日：2010-08-05
申请号：US12761342
申请日：2010-04-15
申请人： Kozo Ono , Takahiro Inoue
发明人： Kozo Ono , Takahiro Inoue
IPC分类号： H01L41/22
CPC分类号： H01L41/277 , H01L41/042 , H01L41/0474 , H01L41/0475 , H01L41/053 , H01L41/083 , H01L41/23 , H01L41/25 , H01L41/293 , H01L41/297 , H03H3/02 , H03H9/0595 , H03H9/1035 , H03H9/178 , H03H9/21 , H03H2003/026 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T29/49798
摘要： Piezoelectric devices and associated fabrication methods are disclosed. An exemplary piezoelectric device includes a piezoelectric vibrating piece having first and second electrodes and first and second surfaces, a glass base having first and second surfaces, and a lid. These three parts also form the device package. The first surface of the piezoelectric vibrating piece is mounted to the base, and the lid is mounted to the second surface of the piezoelectric vibrating piece to seal the package. The glass base includes first and second metal wires having ends that protrude from the surfaces of the base. The side surfaces of the protruding wire ends are connected to the first and the second electrodes, respectively. Manufacture is performed using whole wafers that are processed, sandwiched, bonded, and then cut to produce individual devices.
摘要翻译：公开了压电器件和相关的制造方法。示例性压电装置包括具有第一和第二电极以及第一和第二表面的压电振动片，具有第一和第二表面的玻璃基底和盖。这三个部分也构成了器件封装。将压电振动片的第一表面安装到基座上，并且将盖安装到压电振动片的第二表面以密封封装。玻璃基座包括从底座的表面突出的端部的第一和第二金属线。突出的线端部的侧表面分别连接到第一和第二电极。使用加工，夹层，粘合，然后切割以生产各种装置的整个晶片进行制造。

4. 发明授权

US07750541B2 Piezoelectric ceramic and method for making the same, and piezoelectric resonator and method for making the same 有权
标题翻译：压电陶瓷及其制造方法，以及压电谐振器及其制造方法
公开(公告)号：US07750541B2
公开(公告)日：2010-07-06
申请号：US12147173
申请日：2008-06-26
申请人： Hirozumi Ogawa , Takuya Sawada , Masahiko Kimura , Kosuke Shiratsuyu , Akira Ando
发明人： Hirozumi Ogawa , Takuya Sawada , Masahiko Kimura , Kosuke Shiratsuyu , Akira Ando
IPC分类号： H01L41/187
CPC分类号： H01L41/43 , H01L41/1878 , H03H9/02031 , H03H9/02102 , H03H9/176 , H03H9/178 , Y10T29/42
摘要： A piezoelectric ceramic whose resonance frequency temperature characteristic can be easily adjusted is provided. It contains first and second parts (11 and 12) which can be alternately stacked layers. The first and second parts (11 and 12) are each composed of a compound having a bismuth layer structure, such as a complex oxide containing at least Sr, Bi, and Nb, and have degrees of c-axis orientation different from each other. Since the resonance frequency temperature characteristics change according to the degree of orientation, the first and second parts (11 and 12) having different degrees of orientation are appropriately combined so that the resonance frequency temperature characteristics of the piezoelectric ceramic (2) as a whole is easily adjusted.
摘要翻译：提供了可以容易地调节共振频率温度特性的压电陶瓷。它包含可以交替层叠的第一和第二部分（11和12）。第一和第二部分（11和12）各自由具有铋层结构的化合物组成，例如至少含有Sr，Bi和Nb的复合氧化物，并且具有彼此不同的c轴取向度。由于谐振频率温度特性根据取向度而变化，所以具有不同取向度的第一和第二部分（11和12）被适当组合，使得压电陶瓷（2）整体的谐振频率温度特性为容易调整

5. 发明申请

US20080313874A1 PIEZOELECTRIC VIBRATOR AND FABRICATING METHOD THEREOF 有权
公开(公告)号：US20080313874A1
公开(公告)日：2008-12-25
申请号：US12191986
申请日：2008-08-14
申请人： In Kil Park , Duk Hee KIM
发明人： In Kil Park , Duk Hee KIM
IPC分类号： H01L41/22
CPC分类号： H03H3/02 , H03H9/0207 , H03H9/177 , H03H9/178 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49155 , Y10T29/49163
摘要： The present invention relates to piezoelectric vibrators such as a resonator used as a timing element, discriminator, filter or the like, and fabricating methods thereof. The piezoelectric vibrators of the present invention may be fabricated by forming a piezoelectric body of piezoelectric sheets, of which the thickness is controlled, and simultaneously sintering the sheets along with cover layers, on which grooves are formed. Also, the piezoelectric vibrator of the present invention is fabricated by laminating the piezoelectric sheets, of which the thickness is controlled, providing internal electrodes between the sheets, and forming external electrodes insulated from the internal electrodes.

6. 发明申请

US20070267942A1 PIEZOELECTRIC FILM RESONATOR, RADIO-FREQUENCY FILTER USING THEM, AND RADIO-FREQUENCY MODULE USING THEM 审中-公开
标题翻译：压电薄膜谐振器，使用它们的无线电频率滤波器和使用它们的无线电频率模块
公开(公告)号：US20070267942A1
公开(公告)日：2007-11-22
申请号：US11746955
申请日：2007-05-10
申请人： Hisanori MATSUMOTO , Atsushi ISOBE
发明人： Hisanori MATSUMOTO , Atsushi ISOBE
IPC分类号： H03H9/25
CPC分类号： H03H9/02543 , H03H9/02228 , H03H9/02637 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/178
摘要： A piezoelectric film resonator for a radio-frequency circuit according to an aspect of the present invention includes a substrate and a multilayer film provided on the substrate. The multilayer film has a stacked structure in which at least two piezoelectric layers and at least three electrode layers disposed with each of the piezoelectric layers therebetween are stacked. At least one of the electrode layers is an electrode layer for excitation. The electrode layer for excitation has a structure in which a plurality of unit patterns as elements of the electrode layer for excitation are disposed periodically along a direction substantially perpendicular to a stacked direction of the stacked structure.
摘要翻译：根据本发明的一个方面的用于射频电路的压电膜谐振器包括衬底和设置在衬底上的多层膜。多层膜具有叠层结构，其中至少两个压电层和至少三个设置在它们之间的压电层之间的电极层被堆叠。至少一个电极层是用于激发的电极层。用于激发的电极层具有其中作为用于激发的电极层的元件的多个单元图案沿着与层叠结构的堆叠方向基本垂直的方向周期性地布置的结构。

7. 发明授权

US06717335B2 Composite vibration device 有权
标题翻译：复合振动装置
公开(公告)号：US06717335B2
公开(公告)日：2004-04-06
申请号：US09993963
申请日：2001-11-27
申请人： Toshio Nishimura , Jiro Inoue , Hiroaki Kaida , Akihiro Mitani
发明人： Toshio Nishimura , Jiro Inoue , Hiroaki Kaida , Akihiro Mitani
IPC分类号： H01L4104
CPC分类号： H03H9/0514 , H03H9/178
摘要： A composite vibration device includes a piezoelectric element defining a vibrating member, which is made of a material having a first acoustical impedance, first and second reflecting layers are connected to respective end surfaces of the piezoelectric element, each of the layers are made of a material having a second acoustical impedance lower than the first acoustical impedance, and first and second supporting members. Each of the first and second supporting members is made of a material having an acoustical impedance higher than the second acoustical impedance and is connected to the outer surface of each of the first and second reflecting layers. Vibrations propagated from the piezoelectric element are reflected at the interfaces between the reflecting layers and the supporting members.
摘要翻译：复合振动装置包括限定由具有第一声阻抗的材料制成的振动部件的压电元件，第一和第二反射层连接到压电元件的相应端表面，每个层由材料制成具有低于第一声阻抗的第二声阻抗，以及第一和第二支撑构件。第一和第二支撑构件中的每一个由具有高于第二声阻抗的声阻抗的材料制成，并且连接到第一和第二反射层中的每一个的外表面。从压电元件传播的振动在反射层和支撑构件之间的界面处被反射。

8. 发明申请

US20030042820A1 Piezoelectric device, ladder type filter, and method of producing the piezoelectric device 失效
标题翻译：压电元件，梯型滤波器及压电元件的制造方法
公开(公告)号：US20030042820A1
公开(公告)日：2003-03-06
申请号：US10216377
申请日：2002-08-12
申请人： Murata Manufacturing Co., Ltd.
发明人： Toshihiko Unami , Jiro Inoue
IPC分类号： H01L041/083
CPC分类号： H03H9/178 , H01L41/0471 , H01L41/083 , H01L41/0833 , H01L41/0926 , H03H3/02
摘要： A lamination type piezoelectric device includes a piezoelectric member that is longer in one direction, and a plurality of internal electrodes extending substantially perpendicularly to the longitudinal direction and arranged so as to be opposed to each other via piezoelectric layers, respectively. Bending vibration in which the piezoelectric member is bent substantially perpendicularly to the longitudinal direction thereof is excited using a piezoelectric longitudinal effect.
摘要翻译：叠层型压电元件包括在一个方向上较长的压电元件以及大体上垂直于纵向方向延伸的多个内部电极，并分别经由压电层彼此相对配置。使用压电纵向效应来激励压电元件基本上垂直于其纵向方向弯曲的弯曲振动。

9. 发明申请

US20020135276A1 Piezoelectric element and method of producing the same 审中-公开
标题翻译：压电元件及其制造方法
公开(公告)号：US20020135276A1
公开(公告)日：2002-09-26
申请号：US10104689
申请日：2002-03-21
申请人： Murata Manufacturing Co., Ltd.
发明人： Akira Ando , Koichi Hayashi , Masahiko Kimura
IPC分类号： H01L041/08
CPC分类号： H03H9/178 , H01L41/0471 , H01L41/0472 , H01L41/083 , H01L41/257 , H03H3/02 , Y10T29/42 , Y10T29/49005 , Y10T29/49011 , Y10T29/4902 , Y10T29/4908 , Y10T29/49126 , Y10T29/49155
摘要： A piezoelectric element contains a piezoelectric ceramic body having a layered perovskite structure, and has the C axis selected and oriented in the thickness direction. In the piezoelectric ceramic body, line shaped electrodes are formed perpendicular to the C axis selected and oriented. The electrodes exposed at both of the end faces of the piezoelectric ceramic body are covered with conductive materials and insulation materials. The piezoelectric ceramic body is polarized in the opposite directions on both of the sides of electrodes arranged in the width direction. Moreover, external electrodes are formed on the faces where the conductive materials and the insulation materials are formed, whereby two groups of the electrodes are arranged in an interdigital electrode form.
摘要翻译：压电元件包含具有层状钙钛矿结构的压电陶瓷体，并且具有沿厚度方向选择并取向的C轴。在压电陶瓷体中，线状电极垂直于所选定向的C轴形成。在压电陶瓷体的两个端面上露出的电极被导电材料和绝缘材料覆盖。压电陶瓷体在沿宽度方向布置的电极的两侧沿相反方向极化。此外，在形成导电材料和绝缘材料的表面上形成外部电极，由此两组电极以交叉指型电极形式布置。

10. 发明授权

US6424080B2 Piezoelectric element and method of producing the same 有权
公开(公告)号：US6424080B2
公开(公告)日：2002-07-23
申请号：US77395101
申请日：2001-02-01
申请人： MURATA MANUFACTURING CO
发明人： ANDO AKIRA , HAYASHI KOICHI , KIMURA MASAHIKO
IPC分类号： C04B35/46 , C04B35/462 , H01L41/08 , H01L41/083 , H01L41/187 , H01L41/22 , H01L41/257 , H01L41/297 , H01L41/43 , H03H3/02 , H03H9/17 , H03H9/205 , H03H9/58
CPC分类号： H03H9/178 , H01L41/0471 , H01L41/0472 , H01L41/083 , H01L41/257 , H03H3/02 , Y10T29/42 , Y10T29/49005 , Y10T29/49011 , Y10T29/4902 , Y10T29/4908 , Y10T29/49126 , Y10T29/49155
摘要： A piezoelectric element contains a piezoelectric ceramic body having a layered perovskite structure, and has the C axis selected and oriented in the thickness direction. In the piezoelectric ceramic body, line shaped electrodes are formed perpendicular to the C axis selected and oriented. The electrodes exposed at both of the end faces of the piezoelectric ceramic body are covered with conductive materials and insulation materials. The piezoelectric ceramic body is polarized in the opposite directions on both of the sides of electrodes arranged in the width direction. Moreover, external electrodes are formed on the faces where the conductive materials and the insulation materials are formed, whereby two groups of the electrodes are arranged in an interdigital electrode form.

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