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1. 发明授权

US10718697B2 Method for estimating a stiffness of a deformable part 有权
公开(公告)号：US10718697B2
公开(公告)日：2020-07-21
申请号：US16067578
申请日：2016-12-29
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , ECOLE NORMALE SUPERIEURE DE LYON , UNIVERSITE CLAUDE BERNARD LYON 1
发明人： Ludovic Bellon
IPC分类号： G01N3/20 , G01Q20/02 , G01Q40/00
摘要： A method for estimating a stiffness of a deformable part of a system including a four-photodiode detector for analyzing at least one characteristic of a sample. The method includes receiving the signals recorded by the four photodiodes, calculating the resultant signals from the recorded signals, calculating a cross-correlation of the resultant signals calculated for obtaining an intercorrelated signal, estimating the stiffness of the deformable part depending on the intercorrelated signal.

2. 发明授权

US10663874B2 Alignment system and method 有权
公开(公告)号：US10663874B2
公开(公告)日：2020-05-26
申请号：US15775171
申请日：2016-11-10
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Hamed Sadeghian Marnani
IPC分类号： G03F7/20 , G03F9/00 , G01Q20/02 , G01Q60/24 , G01Q40/00 , G01Q70/06 , G01Q30/02 , G01Q10/06
摘要： An alignment system (100) and method for positioning and/or keeping a first object (1) at a controlled distanced (D1) with respect to a second object (2). An object stage (11) is configured to hold a surface (1a) of the first object (1) at a distance (D1) over a surface (2a) of the second object (2). A sensor device (31) comprising a probe tip (31a) is connected at a predetermined probe level distance (Dp) relative to the surface (1a) of the first object (1). The probe tip (31a) is configured to perform an atomic force measurement (AFM) of a force (F1) exerted via the probe tip (31a) on a surface (2a) of the second object (2). A controller (80) is configured to control an object stage actuator (21) as a function of the probe level distance (Dp) and the measured force (F1) to maintain the controlled distanced (D1).

3. 发明授权

US10578643B2 Determining interaction forces in a dynamic mode AFM during imaging 有权
公开(公告)号：US10578643B2
公开(公告)日：2020-03-03
申请号：US15757704
申请日：2016-08-17
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Hamed Sadeghian Marnani , Mehmet Selman Tamer
IPC分类号： G01Q40/02 , G01Q60/34 , G01Q40/00 , G01Q20/02
摘要： A method and system for calibrating force (F12) in a dynamic mode atomic force microscope (AFM). An AFM tip (11) is disposed on a first cantilever (12). The first cantilever (12) is actuated to oscillate the AFM tip (11) in a dynamic mode. A first sensor (16) is configured to measure a first parameter (A1) of the oscillating AFM tip (11). A second sensor (26) is configured to measure a second parameter (A2) of a resilient element (22). The oscillating AFM tip (11) is moved in proximity to the resilient element (22) while measuring the first parameter (A1) of the AFM tip (11) and the second parameter (A2) of the resilient element (22). A force (F12) between the oscillating AFM tip (11) and the resilient element (22) is calculated based on the measured second parameter (A2) and a calibrated force constant (K2) of the resilient element (22).

4. 发明授权

US10556793B2 Thermal measurements using multiple frequency atomic force microscopy 有权
公开(公告)号：US10556793B2
公开(公告)日：2020-02-11
申请号：US15471283
申请日：2017-03-28
申请人： Asylum Research Corporation
发明人： Roger Proksch , Anil Gannepalli
IPC分类号： G01Q40/00 , G01Q60/32 , B82Y35/00
摘要： Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.

5. 发明申请

US20190154636A1 METHOD OF TUNING PARAMETER SETTINGS FOR PERFORMING ACOUSTIC SCANNING PROBE MICROSCOPY FOR SUBSURFACE IMAGING, SCANNING PROBE MICROSCOPY SYSTEM, AND COMPUTER PROGRAM PRODUCT 审中-公开
公开(公告)号：US20190154636A1
公开(公告)日：2019-05-23
申请号：US16093522
申请日：2017-04-13
申请人： Nederlandse Organisatie voor toegepast-natuurwetep -pelijk Onderzoe TNO
发明人： Hamed Sadeghian Marnani , Rutger Meijer Timmerman Thijssen , Maarten Hubetus van Es
IPC分类号： G01N29/06 , G01Q30/04 , G01Q40/00 , G01N29/24 , G01Q60/32
CPC分类号： G01N29/0681 , G01N29/22 , G01N29/2418 , G01Q30/04 , G01Q40/00 , G01Q60/32
摘要： Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product. This document relates to a method of tuning a scanning probe microscopy system. The method comprises: a) applying an acoustic vibration signal comprising a first frequency and a second frequency to a sample; b) at a first position of the probe tip, sweeping the first frequency across a first frequency range, and obtaining a first signal; c) at a second position of the probe tip, sweeping the first frequency across at least said first frequency range, and obtaining a second signal; d) analyzing the first and second signals to obtain a difference characteristic dependent on the first frequency. The first and second position are selected such that a subsurface structure of the sample at the first and second position is different.

6. 发明申请

US20180292432A1 AM/FM MEASUREMENTS USING MULTIPLE FREQUENCY ATOMIC FORCE MICROSCOPY 审中-公开
公开(公告)号：US20180292432A1
公开(公告)日：2018-10-11
申请号：US15837852
申请日：2017-12-11
申请人： Oxford Instruments Asylum Research, Inc.
发明人： Roger Proksch , Jason Bemis , Aleksander Labuda
IPC分类号： G01Q10/02 , G01Q60/32 , G01Q40/00 , G01Q10/04
CPC分类号： G01Q10/04 , G01Q20/00 , G01Q40/00 , G01Q60/24 , G01Q60/32
摘要： Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.

7. 发明授权

US10006935B2 Scanning electrochemical microscopy 有权
公开(公告)号：US10006935B2
公开(公告)日：2018-06-26
申请号：US14398707
申请日：2013-05-01
申请人： The University of Warwick
发明人： Patrick Robert Unwin , Kim Martin McKelvey
IPC分类号： G01Q60/60 , G01Q40/00 , B82Y35/00
CPC分类号： G01Q60/60 , B82Y35/00
摘要： A method of controlling a scanning electrochemical microscopy probe tip comprising the following steps: oscillating the scanning electrochemical microscopy probe tip relative to the surface of interest; moving the oscillating scanning electrochemical microscopy probe tip towards the surface of interest; detecting damping of an amplitude of the oscillation of the scanning electrochemical microscopy probe tip resulting from the scanning electrochemical microscopy probe tip coming into contact with the surface of interest at the first location; using the detected damping to detect the surface of interest; retracting the scanning electrochemical microscopy probe tip away from the surface of interest without first translating the scanning electrochemical microscopy probe tip along the surface of interest while the scanning electrochemical microscopy probe tip is in intermittent contact with the surface of interest. The method further comprises measuring electrochemical signals produced at the oscillating scanning electrochemical microscopy probe tip while moving the oscillating scanning electrochemical microscopy probe tip towards and/or away from the surface of interest.

8. 发明申请

US20180136252A1 Electrostatic force balance microscopy 审中-公开
公开(公告)号：US20180136252A1
公开(公告)日：2018-05-17
申请号：US15330929
申请日：2016-11-14
申请人： Yemaya Candace Bordain , Ernest Sammann
发明人： Yemaya Candace Bordain , Ernest Sammann
IPC分类号： G01Q60/40 , G01Q40/00
CPC分类号： G01Q60/30
摘要： An apparatus for mapping the topography of a sample, comprising a control electrode, an oscillator adapted to, provide an AC signal to the control electrode and the sample, a cantilever having a tip, wherein the cantilever is positioned between the control electrode and the sample, a deflection monitoring component, a controller connected to the deflection monitoring component, and a transducer, wherein the transducer raises or lowers the sample with respect to the cantilever until force balance is achieved.A method of providing a bias for depletion while sensing the DC potential of buried lines comprises the steps of setting an oscillator frequency, and if tip-sample bias is needed, setting a DC source to set the tip-sample bias, and monitoring a ratio of gains of a first amplifier and a second amplifier wherein if the ratio has changed, adjusting the first amplifier to null the 2ω signal.

9. 发明授权

US09500670B2 Method and device for controlling a scanning probe microscope 有权
标题翻译：用于控制扫描探针显微镜的方法和装置
公开(公告)号：US09500670B2
公开(公告)日：2016-11-22
申请号：US14651233
申请日：2013-12-12
申请人： UNIVERSITAT BASEL
发明人： Roderick Lim , Marija Plodinec , Marko Loparic , Pascal Oehler , Leon Camenzind
IPC分类号： B82Y35/00 , G01Q40/00 , G01Q30/06 , G01Q20/00 , G01Q10/06 , G01Q10/00
CPC分类号： G01Q20/00 , G01Q10/00 , G01Q10/065 , G01Q30/06
摘要： The present invention relates to a method for controlling a scanning probe microscope having a probe (2) with a tip (21) for interacting with a sample (4), and a nanoscanner (1) for retaining the sample (4) or the probe (2), comprising the steps of monitoring the extension of the piezo element (1) along a first direction (R) along which the tip (21) is moved towards the sample (4), and adjusting the level of the probe (2) along the first direction (R) by means of an additional actuator (3), when the nanoscanner (1) exhibits an extension below or above a threshold value. The invention further relates to a device (100) for controlling a scanning probe microscope.
摘要翻译：本发明涉及一种用于控制扫描探针显微镜的方法，所述扫描探针显微镜具有带有用于与样品（4）相互作用的尖端（21）的探针（2）和用于保持样品（4）或探针（2），包括以下步骤：沿尖端（21）朝向样品（4）移动的第一方向（R）监测压电元件（1）的延伸，并且调节探针（2）的水平）当所述纳米扫描仪（1）展现出低于或高于阈值的延伸时，通过附加致动器（3）沿所述第一方向（R）。本发明还涉及一种用于控制扫描探针显微镜的装置（100）。

10. 发明授权

US09383388B2 Automated atomic force microscope and the operation thereof 有权
标题翻译：自动原子力显微镜及其操作
公开(公告)号：US09383388B2
公开(公告)日：2016-07-05
申请号：US14692270
申请日：2015-04-21
申请人： Oxford Instruments Asylum Research, Inc.
发明人： Roger Proksch , Roger C. Callahan , Frank Stetter , Ted Limpoco , Sophia Hohlbach , Jason Bemis , Jason Cleveland
IPC分类号： G01Q60/24 , G01Q70/08 , G01Q40/00 , G01Q60/32 , G01Q10/06
CPC分类号： G01Q60/24 , G01Q10/065 , G01Q40/00 , G01Q60/32 , G01Q70/08
摘要： Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
摘要翻译：公开了快速校准和自动操作扫描探针显微镜的改进。 SPM的中心部件是力传感器，通常是消耗性悬臂元件。通过自动校准传感器特性以及其他仪器参数，可以快速，轻松地优化扫描参数，从而实现高通量，可重复和准确的测量。与动态优化方案相比，这可以在表面接触之前完成，从测量过程开始就避免尖端或样品损坏。

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