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1. 发明公开

US20240096081A1 NEURAL NETWORK TRAINING METHOD 审中-公开
公开(公告)号：US20240096081A1
公开(公告)日：2024-03-21
申请号：US18368151
申请日：2023-09-14
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris , Patrick Hole , Hamish Rogers , Iwan Mitchell
IPC分类号： G06V10/82 , G06T3/40 , G06T3/60 , G06T7/11 , G06T7/62 , G06V10/44 , G06V10/60
CPC分类号： G06V10/82 , G06T3/40 , G06T3/60 , G06T7/11 , G06T7/62 , G06V10/44 , G06V10/60 , G06T2207/20081
摘要： A method of training a neural network for use in surface metrology includes providing height image data comprising a series of height measurements of a sample, the height image data comprising a plurality of features; obtaining, from the height image data, a plurality of height image patches, each height image patch containing at least a portion of a feature. The method also includes applying one or more effects to each of the height image patches to obtain a corresponding modified height image patch for each height image patch and inputting one or more of the modified height image patches into the neural network. The method further includes using the neural network to identify a feature in each of the one or more modified height image patches and training the neural network based on the identification.

2. 发明申请

US20200011893A1 SCANNING PROBE SYSTEM 审中-公开
公开(公告)号：US20200011893A1
公开(公告)日：2020-01-09
申请号：US16513175
申请日：2019-07-16
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q10/06 , G01Q20/02
摘要： A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.

3. 发明授权

US09739798B2 Multiple probe detection and actuation 有权
公开(公告)号：US09739798B2
公开(公告)日：2017-08-22
申请号：US14424642
申请日：2013-08-28
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q20/02 , B82Y35/00 , G01Q10/04 , G01Q70/06 , G11B9/14 , G11B11/00 , G01B9/02 , G03F7/20 , G03F1/82 , G03F7/00
CPC分类号： G01Q20/02 , B82Y35/00 , G01B9/02015 , G01N2291/0256 , G01N2291/106 , G01Q10/045 , G01Q70/06 , G03F1/82 , G03F7/0002 , G03F7/2049 , G11B9/14 , G11B9/1445 , G11B11/002
摘要： A method of detecting the positions of a plurality of probes. An input beam is directed into an optical device and transformed into a plurality of output beamlets which are not parallel with each other. Each output beamlet is split into a sensing beamlet and an associated reference beamlet. Each of the sensing beamlets is directed onto an associated one of the probes with an objective lens to generate a reflected beamlet which is combined with its associated reference beamlet to generate an interferogram. Each interferogram is measured to determine the position of an associated one of the probes. A similar method is used to actuate a plurality of probes. A scanning motion is generated between the probes and the sample. An input beam is directed into an optical device and transformed into a plurality of actuation beamlets which are not parallel with each other.

4. 发明申请

US20170016932A1 PROBE SYSTEM WITH MULTIPLE ACTUATION LOCATIONS 有权
标题翻译：具有多个启动位置的探测系统
公开(公告)号：US20170016932A1
公开(公告)日：2017-01-19
申请号：US15122047
申请日：2015-02-27
申请人： INFINITESIMA LIMITED
发明人： Andrew HUMPHRIS
IPC分类号： G01Q10/04 , G01Q70/10
CPC分类号： G01Q10/045 , G01Q10/065 , G01Q70/10
摘要： A probe system comprising a probe with first and second arms and a probe tip carried by the first and second arms. An illumination system is arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power. An actuation controller is arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe and thus height and lateral position of the tip. The first and second arms are mirror images of each other on opposite sides of a plane of symmetry passing through the probe tip. A detection system is provided which not only measures a height of the probe tip to generate a height signal, but also measures a tilt angle of the probe to generate a tilt signal from which the lateral position of the tip can be determined.
摘要翻译：一种探针系统，包括具有第一和第二臂的探针和由第一和第二臂承载的探针尖端。照明系统被布置成通过在第一致动位置处照亮第一臂而使探针变形，并且第二臂在第二致动位置处各自具有相应的照明功率。致动控制器被布置成独立地控制每个致动位置处的照明功率，以便控制探头的高度和倾斜角以及因此来控制尖端的高度和横向位置。第一和第二臂是通过探针尖端的对称平面的相对侧上的彼此的镜像。提供一种检测系统，其不仅测量探针尖端的高度以产生高度信号，而且还测量探针的倾斜角以产生倾斜信号，从而可以确定尖端的横向位置。

5. 发明申请

US20160154022A1 PROBE MICROSCOPE 有权
标题翻译：探针显微镜
公开(公告)号：US20160154022A1
公开(公告)日：2016-06-02
申请号：US14905378
申请日：2014-07-18
申请人： INFINITESIMA LIMITED
发明人： Andrew HUMPHRIS
IPC分类号： G01Q10/00 , G01Q20/00
CPC分类号： G01Q10/00 , G01Q10/065 , G01Q20/00
摘要： A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.
摘要翻译：一种扫描探针显微镜，包括：信号发生器，用于为致动器提供驱动信号，以使样本重复地朝向和远离样品移动。响应于探测器与样品的相互作用的检测，驱动信号被修改以使探针远离样品。驱动信号包括其中驱动信号的强度增加到最大值的接近阶段; 以及回缩阶段，其中响应于表面位置的检测，驱动信号的强度从最大值减小到最小值。在退回阶段，驱动信号的强度保持在最小值，然后在收回阶段结束时增加。缩回阶段的持续时间取决于接近阶段的最大值。

6. 发明授权

US09222958B2 Beam scanning system 有权
标题翻译：光束扫描系统
公开(公告)号：US09222958B2
公开(公告)日：2015-12-29
申请号：US14375622
申请日：2013-01-29
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris , Bin Zhao
IPC分类号： G01Q20/02 , G01Q10/04 , G01Q10/00
CPC分类号： G01Q20/02 , G01Q10/00 , G01Q10/045
摘要： Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror.
摘要翻译：用于照射探针显微镜的探针的装置。透镜被布置成接收光束并将其聚焦到探头上。随着时间的推移，扫描系统随着光束相对于其光轴进入透镜的入射角而变化。扫描系统通常被布置成移动光束以跟踪探针的移动，从而保持探针上的位置，在该位置上光束被聚焦。扫描系统可以包括将光束反射到透镜的光束转向镜; 以及用于旋转光束导向镜的反射镜致动器。

7. 发明申请

US20150219684A1 PHOTOTHERMAL ACTUATION OF A PROBE FOR SCANNING PROBE MICROSCOPY 有权
标题翻译：用于扫描探针显微镜的探针的光电致动
公开(公告)号：US20150219684A1
公开(公告)日：2015-08-06
申请号：US14424597
申请日：2013-07-30
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris , Bin Zhao
IPC分类号： G01Q10/00 , G01Q20/02
CPC分类号： G01Q10/00 , G01Q10/045 , G01Q20/02
摘要： Various methods of driving a probe of a scanning probe microscope are disclosed. One set of methods distribute the energy of a radiation beam over a wide area of the probe by either scanning the beam or increasing its illumination area. Another method changes the intensity profile of the radiation beam with a diffractive optical element, enabling a more uniform intensity profile across the width of the illumination. Another method uses a diffractive optical element to change the circumferential shape of the radiation beam, and hence the shape of the area illuminated on the probe, in order to match the shape of the probe and hence distribute the energy over a wider area.
摘要翻译：公开了驱动扫描探针显微镜的探针的各种方法。一组方法通过扫描光束或增加其照明面积而将辐射束的能量分布在探测器的宽区域上。另一种方法用衍射光学元件改变辐射束的强度分布，使得能够在整个照明宽度上具有更均匀的强度分布。另一种方法使用衍射光学元件来改变辐射束的圆周形状，并因此改变照射在探针上的区域的形状，以便匹配探针的形状并且因此将能量分布在更宽的区域上。

8. 发明授权

US11733265B2 Method of imaging a surface using a scanning probe microscope 有权
公开(公告)号：US11733265B2
公开(公告)日：2023-08-22
申请号：US17767861
申请日：2020-10-23
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q20/02 , G01Q10/00 , G01Q30/06 , G01Q40/00 , G01Q10/04 , G01Q10/06
CPC分类号： G01Q20/02 , G01Q10/045 , G01Q10/065 , G01Q30/06 , G01Q40/00
摘要： A method includes scanning a probe laterally across a surface so that the probe follows a scanning motion across the surface and steering a detection beam onto the probe via a steering mirror, the detection beam reflecting from the probe in the form of a return beam. The method also includes moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror and using the return beam to obtain image measurements, each indicative of a measured height of a respective point on the surface. An associated height error measurement is obtained for each point on the surface, each measurement being indicative of a respective error in the measured height. The height error measurements are used to correct the image measurements so as to generate corrected image measurements.

9. 发明授权

US10585114B2 Scanning probe system 有权
公开(公告)号：US10585114B2
公开(公告)日：2020-03-10
申请号：US16513175
申请日：2019-07-16
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q10/06 , G01Q20/02
摘要： A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.

10. 发明授权

US10254306B2 Probe calibration or measurement routine 有权
公开(公告)号：US10254306B2
公开(公告)日：2019-04-09
申请号：US14647991
申请日：2013-11-29
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q20/02 , G01Q40/00 , G01B9/02
摘要： A method of performing a measurement routine on a probe, the probe comprising a cantilever extending from a support. An interferometer is operated to reflect a sensing beam with the cantilever thereby generating a reflected sensing beam and combine the reflected sensing beam with a reference beam to generate an interferogram. The interferometer generates a first interference measurement value at a first measurement time by measuring the interferogram and a second interference measurement value at a second measurement time by measuring the interferogram, The cantilever deforms to form a different shape between the measurement times. A change in height of the probe between the measurement times is estimated in accordance with a difference between the first and second interference measurement values, and corrected in accordance with the difference in shape of the cantilever between the measurement times.

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