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1. 发明授权

US11635449B2 Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA) 有权
公开(公告)号：US11635449B2
公开(公告)日：2023-04-25
申请号：US17722603
申请日：2022-04-18
申请人： BRUKER NANO, INC.
发明人： Sergey Osechinskiy , Anthonius Ruiter , Bede Pittenger , Syed-Asif Syed-Amanulla
IPC分类号： G01Q60/38 , G01Q10/04 , G01Q20/04 , G01Q30/04 , B82Y35/00
摘要： An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.

2. 发明申请

US20220026464A1 ATOMIC FORCE MICROSCOPY CANTILEVER, SYSTEM AND METHOD 有权
公开(公告)号：US20220026464A1
公开(公告)日：2022-01-27
申请号：US17493015
申请日：2021-10-04
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Maarten Hubertus Van Es , Hamed Sadeghian Marnani
IPC分类号： G01Q60/38 , G01Q20/04 , G01Q70/10
摘要： The surface of the atomic force microscopy (AFM) cantilever is defined by a main cantilever body and an island. The island is partly separated from the main body by a separating space between facing edges of the main body and the island. At least one bridge connects the island to the main body, along a line around which the island is able to rotate through torsion of the at least one bridge. The island has a probe tip located on the island at a position offset from said line and a reflection area. In an AFM a light source directs light to the reflection area and a light spot position detector detects a displacement of a light spot formed from light reflected by the reflection area, for measuring an effect of forces exerted on the probe tip.

3. 发明授权

US11073535B2 Scanning probe microscope with case and elastic body 有权
公开(公告)号：US11073535B2
公开(公告)日：2021-07-27
申请号：US16728351
申请日：2019-12-27
申请人： Shimadzu Corporation
发明人： Masato Hirade
IPC分类号： G01Q20/04 , G01Q10/06 , G01Q60/02
摘要： A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.

4. 发明申请

US20210140996A1 Scanning Sensor Having a Spin Defect 有权
公开(公告)号：US20210140996A1
公开(公告)日：2021-05-13
申请号：US16492259
申请日：2018-03-14
申请人： ETH Zurich
发明人： Christian Degen , Jens Boss , Kevin Chang , Jan Rhensius
IPC分类号： G01Q20/04 , G01Q60/52 , G01Q70/14
摘要： A sensor device includes a carrier, a force feedback sensor, and a probe containing a spin defect, the probe being connected to the force feedback sensor either directly or indirectly via a handle structure. In order to couple the spin defect to a microwave field in an efficient and robust manner, the sensor device includes an integrated microwave antenna arranged at a distance of less than 500 micrometers from the spin defect. The sensor device can be configured as a self-contained exchangeable cartridge that can easily be mounted in a sensor mount of a scanning probe microscope.

5. 发明申请

US20200341027A1 Scanning Probe Microscope 审中-公开
公开(公告)号：US20200341027A1
公开(公告)日：2020-10-29
申请号：US16728351
申请日：2019-12-27
申请人： Shimadzu Corporation
发明人： Masato HIRADE
IPC分类号： G01Q20/04 , G01Q10/06
摘要： A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.

6. 发明授权

US10261106B2 Photonic probe for atomic force microscopy 有权
公开(公告)号：US10261106B2
公开(公告)日：2019-04-16
申请号：US15799337
申请日：2017-10-31
申请人： The United States of America, as represented by the Secretary of Commerce
发明人： Vladimir Aksyuk , Marcelo Davanco
IPC分类号： G01Q20/02 , G01Q60/38 , G01Q20/04 , G02B6/122 , G02B6/293 , H01J37/317 , H01J37/302 , G02B6/12
摘要： A photonic probe for atomic force microscopy includes: a cantilever including: a tip; a wing in mechanical communication with the tip; an extension interposed between the tip and the wing to synchronously communicate motion of the tip with the wing; an optical resonator disposed proximate to the cantilever and that: receives input light; and produces output light, such that: the cantilever is spaced by a gap distance from the optical resonator, wherein the gap distance varies as the cantilever moves relative to the optical resonator, and the output light differs from the input light in response to movement of the cantilever relative to the optical resonator; an optical waveguide in optical communication with the optical resonator and that: provides the input light to the optical resonator; and receives the output light from the optical resonator.

7. 发明授权

US10126146B2 Piezoelectric actuator and method of measuring motion by using the same 有权
公开(公告)号：US10126146B2
公开(公告)日：2018-11-13
申请号：US14697038
申请日：2015-04-27
申请人： SAMSUNG ELECTRONICS CO., LTD. , KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人： Hwansoo Suh , Insu Jeon , Jhinhwan Lee
IPC分类号： G01D5/12 , G01B7/00 , G01Q10/04 , G01Q20/04
摘要： A piezoelectric actuator and a method of measuring a motion by using the piezoelectric actuator are provided. The piezoelectric actuator includes: a movable member that is disposed to face the fixed member; a piezoelectric element that is disposed between the fixed member and the movable member, and configured to operate in a shear mode based on input voltages applied to the piezoelectric element and move the movable member relative to the fixed member; and a position sensor that is disposed between the piezoelectric element and the movable member, and configured to measure a motion of the movable member.

8. 发明授权

US10060862B2 Microwave impedance microscopy using a tuning fork 有权
公开(公告)号：US10060862B2
公开(公告)日：2018-08-28
申请号：US15479657
申请日：2017-04-05
申请人： Yongtao Cui , Yue Ma , Zhixun Shen
发明人： Yongtao Cui , Yue Ma , Zhixun Shen
IPC分类号： G01N22/00 , G01N27/02 , G01Q10/04 , G01Q20/04 , G01Q60/30
CPC分类号： G01N22/00 , G01N27/02 , G01Q10/045 , G01Q20/04 , G01Q60/30
摘要： A microwave impedance microscope including a tuning fork having a high-aspect ratio etched metal tip electrode extending transversely to one tine of the fork and having a high aspect ratio to thereby reduce parasitic capacitance. The metal tip may be electrochemically etched from a wire, then bonded to the tine. The fork is slightly inclined from the surface of the sample and the tip electrode projects transversely to the fork. A microwave signal is impressed on the tip. Microwave circuitry receives microwave signals reflected from the sample back into the tip and demodulates the reflected signal according to the impressed signal. Further circuitry further demodulates the reflected signal according to the lower-frequency signal causing the fork to oscillate at its mechanically resonant frequency. A multi-wavelength matching circuit interposed between the microwave circuitry and the probe includes a coaxial cable of length half a fundamental microwave wavelength.

9. 发明授权

US10025207B2 Method of aligning a first article relative to a second article 有权
公开(公告)号：US10025207B2
公开(公告)日：2018-07-17
申请号：US13102469
申请日：2011-05-06
申请人： Ivo Rangelow
发明人： Ivo Rangelow
IPC分类号： G03F9/00 , G01Q60/16 , G01Q20/00 , G01Q70/06 , G01Q20/04 , G01Q60/34 , G01N23/046 , B29C64/135 , B82Y10/00 , G01Q80/00
摘要： A method for aligning a first article relative to a second article. The second article is provided with at least one flexible structure fixed to the second article at one point while the first article includes at least one surface relief marking. A detector measures the interaction between the flexible structure and surface relief marking and generates detector signals relative to that interaction to achieve alignment between the first and second articles.

10. 发明申请

US20100017921A1 DEVICE AND METHOD FOR THE MICROMECHANICAL POSITIONING AND HANDLING OF AN OBJECT 失效
标题翻译：用于微机械定位和对象处理的装置和方法
公开(公告)号：US20100017921A1
公开(公告)日：2010-01-21
申请号：US12524936
申请日：2008-01-28
申请人： Ivo W. Rangelow , Stefan Klett , Eishad Guliyev , Tzvetan Ivanov , Burkhard Volland
发明人： Ivo W. Rangelow , Stefan Klett , Eishad Guliyev , Tzvetan Ivanov , Burkhard Volland
IPC分类号： G01Q10/00 , G01Q20/04
CPC分类号： H02N2/028 , G01Q10/04 , H02N2/0095
摘要： The invention relates to a device and a method for the micromechanical positioning and handling of an object. The aim of the invention is to provide a device and an associated method for the micromechanical positioning and handling of objects by means of which the scanning speed can be increased and the positional accuracy be improved so that real time images or video rate images (ca. 25 images per second) having a lateral and vertical resolution in the nanometer range can be achieved. According to the invention, a monolithic component, preferably made of silicon, comprises a support element, an object carrier, a plurality of guide elements and elements for transmitting the movement, the preferably piezoresistive drive elements and the preferably piezoresistive position detectors being integrated into said monolithic component; Said micromechanical positioning device can be used, for example, in scanning probe microscopy and in nanopositioning and nanomanipulation technology.
摘要翻译：本发明涉及用于微机械定位和处理物体的装置和方法。本发明的目的是提供一种用于微机械定位和处理物体的装置和相关方法，通过该方法可以增加扫描速度并提高位置精度，使得实时图像或视频速率图像（约。可以实现在纳米范围内具有横向和垂直分辨率的每秒25个图像。根据本发明，优选由硅制成的整体部件包括支撑元件，物体载体，用于传递运动的多个引导元件和元件，优选压阻驱动元件和优选的压阻位置检测器，其被整合到所述整体成分; 所述微机械定位装置可用于例如扫描探针显微镜和纳米定位和纳米操纵技术。

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