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1. 发明授权

US09963777B2 Methods of forming a thin film resistor 有权
公开(公告)号：US09963777B2
公开(公告)日：2018-05-08
申请号：US13646940
申请日：2012-10-08
申请人： Analog Devices, Inc.
发明人： Michael Noel Morrissey , Bernard Patrick Stenson
IPC分类号： C23C14/00 , C23C14/34 , H01C17/12 , C23C14/16 , C23C14/54 , H01C7/00 , H01C7/06 , H01C17/232 , H01L49/02
CPC分类号： C23C14/34 , C23C14/16 , C23C14/541 , H01C7/006 , H01C7/06 , H01C17/12 , H01C17/232 , H01L28/24
摘要： Methods of forming a thin film are disclosed. One such method can include sputtering a target material to form a first thin film resistor and adjusting a parameter of deposition to modulate a property of a subsequently formed second thin film resistor. For instance, a substrate bias and/or a substrate temperature can be adjusted to modulate a property of the second thin film resistor. A temperature coefficient of resistance (TCR) and/or another property of the second thin film resistor can be modulated by adjusting the parameter of deposition. The target material sputtered onto the substrate can include, for example, a Cr alloy, a Ni alloy, SiCr, NiCr, or the like. A relationship can be established between the substrate bias and/or substrate temperature and the thin film resistor property, and the relationship can be used in selecting deposition conditions for a desired property value.

2. 发明申请

US20150054531A1 RESISTOR WITH TEMPERATURE COEFFICIENT OF RESISTANCE (TCR) COMPENSATION 有权
标题翻译：电阻温度系数（TCR）补偿电阻
公开(公告)号：US20150054531A1
公开(公告)日：2015-02-26
申请号：US14531505
申请日：2014-11-03
申请人： VISHAY DALE ELECTRONICS, INC.
发明人： Clark L. Smith , Thomas L. Bertsch , Todd L. Wyatt , Thomas L. Veik
IPC分类号： G01R19/32 , G01R1/20 , H01C17/28 , G01R19/00
CPC分类号： H01C7/06 , G01R1/203 , G01R19/0092 , G01R19/32 , H01C1/00 , H01C1/148 , H01C17/232 , H01C17/28 , Y10T29/49082 , Y10T29/49101
摘要： A current sense resistor and a method of manufacturing a current sensing resistor with temperature coefficient of resistance (TCR) compensation are disclosed. The resistor has a resistive strip disposed between two conductive strips. A pair of main terminals and a pair of voltage sense terminals are formed in the conductive strips. A pair of rough TCR calibration slots is located between the main terminals and the voltage sense terminals, each of the rough TCR calibration slots have a depth selected to obtain a negative starting TCR value observed at the voltage sense terminals. A fine TCR calibration slot is formed between the pair of voltage sense terminals.
摘要翻译：公开了一种电流检测电阻器和制造具有温度电阻系数（TCR）补偿的电流感测电阻器的方法。电阻器具有设置在两个导电条之间的电阻条。在导电条中形成一对主端子和一对电压检测端子。一对粗糙的TCR校准槽位于主端子和电压检测端子之间，每个粗略的TCR校准槽具有选择的深度，以获得在电压检测端子处观察到的负启动TCR值。在一对电压检测端子之间形成精细的TCR校准槽。

3. 发明授权

US07365632B2 Resistive elements using carbon nanotubes 有权
标题翻译：使用碳纳米管的电阻元件
公开(公告)号：US07365632B2
公开(公告)日：2008-04-29
申请号：US11230876
申请日：2005-09-20
申请人： Claude L. Bertin , Thomas Ruckes , Brent M. Segal , Jonathan W. Ward
发明人： Claude L. Bertin , Thomas Ruckes , Brent M. Segal , Jonathan W. Ward
IPC分类号： H01C10/00
CPC分类号： H01C7/06 , H01C7/003 , H01C7/005 , H01C7/006 , H01C10/306 , H01C17/0652 , H01C17/232 , H01C17/283 , H01L28/22
摘要： Resistive elements include a patterned region of nanofabric having a predetermined area, where the nanofabric has a selected sheet resistance; and first and second electrical contacts contacting the patterned region of nanofabric and in spaced relation to each other. The resistance of the element between the first and second electrical contacts is determined by the selected sheet resistance of the nanofabric, the area of nanofabric, and the spaced relation of the first and second electrical contacts. The bulk resistance is tunable.
摘要翻译：电阻元件包括具有预定面积的纳米纤维的图案化区域，其中纳米纤维具有选定的薄层电阻; 以及第一和第二电触头接触纳米尺寸的图案化区域并且彼此间隔开。元件在第一和第二电触点之间的电阻由所选择的纳米尺寸的薄层电阻，纳米的面积以及第一和第二电触头间隔的关系来确定。体积电阻是可调谐的。

4. 发明申请

US20070236325A1 RESISTIVE ELEMENTS USING CARBON NANOTUBES 有权
标题翻译：使用碳纳米管的电阻元件
公开(公告)号：US20070236325A1
公开(公告)日：2007-10-11
申请号：US11230876
申请日：2005-09-20
申请人： Claude Bertin , Thomas Ruckes , Brent Segal , Jonathan Ward
发明人： Claude Bertin , Thomas Ruckes , Brent Segal , Jonathan Ward
IPC分类号： H01C10/00
CPC分类号： H01C7/06 , H01C7/003 , H01C7/005 , H01C7/006 , H01C10/306 , H01C17/0652 , H01C17/232 , H01C17/283 , H01L28/22
摘要： Resistive elements include a patterned region of nanofabric having a predetermined area, where the nanofabric has a selected sheet resistance; and first and second electrical contacts contacting the patterned region of nanofabric and in spaced relation to each other. The resistance of the element between the first and second electrical contacts is determined by the selected sheet resistance of the nanofabric, the area of nanofabric, and the spaced relation of the first and second electrical contacts. The bulk resistance is tunable.
摘要翻译：电阻元件包括具有预定面积的纳米纤维的图案化区域，其中纳米纤维具有选定的薄层电阻; 以及第一和第二电触头接触纳米尺寸的图案化区域并且彼此间隔开。元件在第一和第二电触点之间的电阻由所选择的纳米尺寸的薄层电阻，纳米的面积以及第一和第二电触头间隔的关系来确定。体积电阻是可调谐的。

5. 发明申请

US20040207507A1 Method for trimming resistors 有权
公开(公告)号：US20040207507A1
公开(公告)日：2004-10-21
申请号：US10796420
申请日：2004-03-10
发明人： Leslie M. Landsberger , Oleg Grudin , Gennadiy Frolov
IPC分类号： H01C010/00
CPC分类号： H01L27/0802 , H01C13/02 , H01C17/232 , H01C17/267 , H01L28/20 , Y10T29/49002 , Y10T29/49004 , Y10T29/49082 , Y10T29/49083 , Y10T29/49085 , Y10T29/4913
摘要： There is provided a method and circuit for trimming a functional resistor on a thermally isolated micro-platform such that a second functional resistor on the same micro-platform remains substantially untrimmed; a method and circuit for providing and trimming a circuit such that at least two circuit elements of the circuit are subjected to a same operating environment and the operating environment is compensated for by distributing heat generated during operation of the circuit among the two circuit elements; a method and circuit for trimming a functional resistor on a thermally-isolated micro-platform such that a constant temperature distribution is obtained across the functional resistor; and a method and circuit for calculating a temperature coefficient of resistance of a functional resistor.

6. 发明授权

US4840494A Calibrated temperature sensor and method of calibrating same 失效
标题翻译：校准温度传感器及其校准方法
公开(公告)号：US4840494A
公开(公告)日：1989-06-20
申请号：US106678
申请日：1987-10-13
申请人： Petr Horn
发明人： Petr Horn
IPC分类号： G01K7/18 , G01K7/22 , H01C17/23 , H01C17/232 , H01C17/24
CPC分类号： H01C17/23 , G01K7/183 , G01K7/223 , H01C17/232
摘要： A process of calibrating a temperature sensor includes bringing the sensor to thermal equilibrium at a selected temperature, measuring the resistance of the sensor, calculating which combination of trimming paths need be interrupted and then separately interrupting those paths apart from the measuring location. A sensor with selectably interruptable trimming paths is disclosed.
摘要翻译：校准温度传感器的过程包括使传感器处于选定温度下的热平衡，测量传感器的电阻，计算修剪路径的组合需要中断，然后分开地中断距离测量位置的那些路径。公开了具有可选择的可中断修剪路径的传感器。

7. 发明授权

US4464646A Controlled temperature coefficient thin-film circuit element 失效
标题翻译：受控温度系数薄膜电路元件
公开(公告)号：US4464646A
公开(公告)日：1984-08-07
申请号：US281169
申请日：1981-07-07
申请人： Kurt Burger , Heinz Friedrich , Heiko Gruner , Karl-Otto Linn , Erich Zabler
发明人： Kurt Burger , Heinz Friedrich , Heiko Gruner , Karl-Otto Linn , Erich Zabler
IPC分类号： H01C17/06 , G01K7/18 , H01C7/06 , H01C17/232 , H01L27/01 , H01C1/12
CPC分类号： G01K7/183 , H01C17/232 , H01C7/06
摘要： To form a temperature sensor, for example suitable in an automotive vehicle, to determine ambient temperatures, or to provide a temperature compensated thin-film circuit, for example for incorporation with an oscillator circuit, two stable thin-film layers are applied to a non-conductive substrate, the layers being capable of being etched. The overall temperature coefficient of resistance can be matched to a predetermined value by selective interconnection of at least two thin-film resistance elements formed by the thin films, of which one thin film resistance element for example comprises a nickel layer over a tantalum base, with a predetermined temperature coefficient of resistance, the other resistance element merely being the tantalum layer with essentially zero temperature coefficient of resistance, the overall temperature coefficient of resistance of the combination being determined by adjustment of the relative resistance values after measurement of the temperature coefficient of resistance of the nickel-tantalum layer to determine its actual temperature coefficient so that, in spite of tolerances in the manufacture of the thin films, interchangeable elements of highly accurate overall resistance and temperature coefficient of resistance values can be obtained.
摘要翻译：为了形成例如适合于机动车辆的温度传感器，以确定环境温度，或者提供温度补偿薄膜电路，例如用于与振荡器电路结合，将两个稳定的薄膜层施加到非 - 导电衬底，这些层能够被蚀刻。电阻的整体温度系数可以通过由薄膜形成的至少两个薄膜电阻元件的选择性互连来匹配，其中一个薄膜电阻元件例如包括在钽基底上的镍层，电阻的预定温度系数，另一个电阻元件仅仅是具有基本上为零的电阻温度系数的钽层，组合的电阻的总体温度系数是通过测量电阻温度系数后的相对电阻值的调整来确定的以确定其实际温度系数，使得尽管制造薄膜的公差尽可能地获得高度精确的总电阻和电阻温度系数的可互换元件。

8. 发明授权

US3788891A Thick film precision resistor for use in an electrical circuit and method of making same 失效
标题翻译：在电路中使用的厚膜精密电阻及其制造方法
公开(公告)号：US3788891A
公开(公告)日：1974-01-29
申请号：US3788891D
申请日：1971-03-02
申请人： HONEYWELL INC
发明人： SCHEBALIN S
IPC分类号： H01C17/065 , H01C17/232 , H01C17/30 , H01C7/00
CPC分类号： H01C17/232 , H01C17/065 , H01C17/0654 , H01C17/30
摘要： A THICK FILM RESISTOR IS FORMED BY #1 FIRING SELECTED MIXTURES OF POSITIVE AND NEGATIVE THICK FILM RESISTOR INK MATERIALS ON A NON-ELECTRICALLY CONDUCTIVE SUBSTRATE AT A SELECTED HIGH TEMPERATURE AND #2 SUBSEQUENTLY JOINTLY FIRING THE RESISTOR AND CONDUCTOR INK MATERIAL ASSOCIATED WITH THIS RESISTOR, AT A TEMPERATURE THAT IS LOWER THAN THE FIRST MENTIONED TEMPERATURE AND WHICH IS AT A LEVEL THAT WILL NOT ALLOW ANY DETRIMENTAL DIFFISION, TO OCCUR BETWEEN THE CONDUCTOR AND RESISTOR MATERIALS. THIS UNIQUE PROCESS OF FIRING ACHIEVES FOR THE FIRST TIME A SUCCESSFUL METHOD OF FIRING A RESISTOR AND CONDUCTOR JOINTLY WITHOUT ALLOWING ANY ADVERSE CHANGE TO OCCUR IN THE VALUE OF THE TEMPERATURE COEFFICIENT OF RESISTIVITY AND THE RESISTIVITY VALUE OF THE RESISTOR.

9. 发明授权

US3517436A Precision resistor of great stability 失效
标题翻译：高稳定精度电阻
公开(公告)号：US3517436A
公开(公告)日：1970-06-30
申请号：US70179467
申请日：1967-11-01
申请人： VISHAY INTERTECHNOLOGY INC
发明人： ZANDMAN FELIX , BOYD BRANIN A
IPC分类号： H01C1/024 , H01C7/06 , H01C17/232 , H01C17/24 , H01C17/245 , H01C1/02 , H01C17/00
CPC分类号： H01C1/024 , H01C7/06 , H01C17/232 , H01C17/2416 , H01C17/245 , Y10T29/49087 , Y10T29/49099

10. 发明授权

US3373486A Method of making film resistors 失效
标题翻译：制造薄膜电阻的方法
公开(公告)号：US3373486A
公开(公告)日：1968-03-19
申请号：US32724463
申请日：1963-12-02
申请人： NAT RES DEV
发明人： MATURIN COX SHAUN
IPC分类号： H01C7/00 , H01C17/232 , H01C17/26
CPC分类号： H01C17/265 , H01C7/00 , H01C17/232 , Y10T29/49082 , Y10T29/49099

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