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11. 发明申请

WO2017074908A1 BROADBAND CATADIOPTRIC MICROSCOPE OBJECTIVE WITH SMALL CENTRAL OBSCURATION 审中-公开
标题翻译：具有小型中心束缚的宽带圆锥形显微镜目标
公开(公告)号：WO2017074908A1
公开(公告)日：2017-05-04
申请号：PCT/US2016/058603
申请日：2016-10-25
申请人： NIKON CORPORATION , WILLIAMSON, David, M.
发明人： WILLIAMSON, David, M.
IPC分类号： G02B17/08
CPC分类号： G02B21/04
摘要： A catadioptric microscope objective color-corrected for any wavelength in 190 nm to 1000 nm operational range and containing primary spherical front-surface mirror devoid of a through-hole and rear-surface plane-parallel mirror, each of which mirrors has a corresponding reflective annular coating defining an aperture formed in such coating coaxially with the optical axis. The objective, devoid of a Mangin element, is configured such that for any optical field with a diameter smaller than about 50 microns the Strehl ratio is no lower than 0.0781, and/or longitudinal spherical aberration is no larger than 0.0008 mm, and/or the astigmatism is smaller than 0.0005 mm, and/or distortion is smaller than 0.012 percent within the operational range.
摘要翻译：对于190nm至1000nm工作范围内的任何波长，并且包含没有通孔和后表面平面平行镜的主球形前表面镜的折反射显微镜物镜进行色彩校正其中反射镜具有相应的反射环形涂层，该反射环形涂层限定了在与光轴同轴的这种涂层中形成的孔。没有Mangin元件的物镜被配置为使得对于直径小于约50微米的任何光场，斯特列尔比不低于0.0781，和/或纵向球差不大于0.0008mm，和/或在操作范围内，散光小于0.0005毫米，和/或畸变小于0.012％。

12. 发明申请

WO2015081991A1 TRANSPARENT THIN FILM, PROCESS FOR MANUFACTURING A FILM AND SPATIAL PHASE MODULATOR 审中-公开
标题翻译：透明薄膜，制造薄膜和空间相位调制器的工艺
公开(公告)号：WO2015081991A1
公开(公告)日：2015-06-11
申请号：PCT/EP2013/075423
申请日：2013-12-03
申请人： ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D'OPTIQUE) , NIKON CORPORATION
发明人： FEUILLADE, Mathieu , GOULET, Alain
IPC分类号： G02F1/1347 , G02F1/1337
CPC分类号： G02F1/13471 , G02F1/133711 , G02F2001/133726 , G02F2001/133738 , G02F2203/01 , G02F2203/06
摘要： The invention concerns a transparent thin liquid crystal alignment film (1) including liquid crystals (2) within a polymerised liquid crystal composition, the film (1) comprising a first main surface (la), a second main surface (lb) and a bulk (lc) comprised between said opposed two main surfaces (la, lb), for which: • in the vicinity of the first main surface (la), the liquid crystals (2a) are aligned along a main first direction, • in the vicinity of the second main surface (lb), the liquid crystals (2b) are aligned along a main second direction, different from the first direction, and in between, the bulk (lc) comprises liquid crystals (2c) maintained in an isotropic orientation. The invention concerns also a process of manufacturing such a liquid crystal alignment film (1) and a polarization-independent spatial phase modulator including such a liquid crystal alignment film (1).
摘要翻译：本发明涉及一种在聚合液晶组合物内包含液晶（2）的透明薄液晶取向膜（1），该膜（1）包括第一主表面（1a），第二主表面（1b）和体（1a）包括在所述相对的两个主表面（1a，1b）之间，其中：•在第一主表面（1a）附近，液晶（2a）沿着主第一方向对准，•在附近在第二主表面（1b）中，液晶（2b）沿着与第一方向不同的主第二方向排列，并且其中，本体（1c）包括保持各向同性取向的液晶（2c）。本发明还涉及制造这种液晶取向膜（1）的方法和包括这种液晶取向膜（1）的偏振无关的空间相位调制器。

13. 发明申请

WO2015017194A1 MULTIPLE PHASE METHOD FOR IMAGE DECONVOLUTION 审中-公开
标题翻译：用于图像解卷积的多相位方法
公开(公告)号：WO2015017194A1
公开(公告)日：2015-02-05
申请号：PCT/US2014/047620
申请日：2014-07-22
申请人： NIKON CORPORATION , TEZAUR, Radka
发明人： TEZAUR, Radka
IPC分类号： G06K9/40
CPC分类号： G06T5/003 , G06T5/20 , G06T5/50 , G06T2207/20192 , G06T2207/20201
摘要： A method for deblurring a blurry image (400) includes the steps of: performing a first phase of deconvolution (202) with a first phase regularization spatial mask (300) to reconstruct the main edges and generate a first phase latent sharp image (404) having reconstructed main edges; and performing a second phase of deconvolution (204) with a second phase regularization spatial mask (304) to reconstruct the texture and generate a second phase latent sharp image (406). The second phase regularization spatial mask (304) can be different from the first phase regularization spatial mask (300).
摘要翻译：去模糊模糊图像（400）的方法包括以下步骤：用第一相位正则化空间掩模（300）执行去卷积（202）的第一阶段，以重构主边缘并产生第一相位潜在清晰图像（404）重建主边缘; 以及用第二相位正则化空间掩模（304）执行去卷积（204）的第二阶段以重建所述纹理并生成第二相位潜在清晰图像（406）。第二相位正则化空间掩模（304）可以不同于第一相位正则化空间掩模（300）。

14. 发明申请

WO2014081043A2 SCAN MIRRORS FOR LASER RADAR 审中-公开
标题翻译：扫射镜用于激光雷达
公开(公告)号：WO2014081043A2
公开(公告)日：2014-05-30
申请号：PCT/JP2013/081827
申请日：2013-11-20
申请人： NIKON CORPORATION , NIKON METROLOGY NV
发明人： GOODWIN, Eric Peter , SMITH, Daniel Gene , COOPER, Alexander , REZK, Mina , SLOTWINSKI, Anthony , HEDGES, Thomas
IPC分类号： G01S7/481 , G01S7/491 , G01S17/32
CPC分类号： G01S17/102 , G01S7/4812 , G01S7/4817 , G01S7/4818 , G01S7/4917 , G01S17/325 , G01S17/66 , G02B26/101 , G02B26/108
摘要： Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
摘要翻译：激光雷达系统包括配置成相对于目标表面扫描测量光束的五棱镜。聚焦光学组件包括用于调节测量光束聚焦的角立方体。基于返回波束和本地振荡器波束之间的外差频率来估计目标距离。本地振荡器束配置成在与返回光束混合之前传播到聚焦光学组件和/或从聚焦光学组件传播。在一些示例中，使用具有固定到铝硅酸锂玻璃 - 陶瓷管的镜子的法布里 - 珀罗干涉仪来校准相对于目标距离的外差频率。

15. 发明申请

WO2014074137A1 POINT SPREAD FUNCTION CLASSIFICATION USING STRUCTURAL PROPERTIES 审中-公开
标题翻译：使用结构特性的点扩展功能分类
公开(公告)号：WO2014074137A1
公开(公告)日：2014-05-15
申请号：PCT/US2013/029609
申请日：2013-03-07
申请人： NIKON CORPORATION , ALI, Gazi , HONG, Li , TEZAUR, Radka , TAKITA, Mark
发明人： ALI, Gazi , HONG, Li , TEZAUR, Radka , TAKITA, Mark
IPC分类号： G06K9/40
CPC分类号： G06K9/626 , G06K9/40 , G06K9/52 , G06K9/525 , G06K9/6201 , G06K9/6256 , G06K9/6286 , G06T5/003 , G06T7/20 , G06T2207/20201
摘要： A method for classifying a test image (16) includes the steps of building a classifier (300), and classifying the test image (16) with the classifier (300). After the test image (16) is classified, the test image (16) can be subsequently processed (e.g. deblurred) with improved accuracy. The classifier (300) can classify and distinguish between PSF features associated with motion blurred images, and PSF features associate with defocus blurred images. The classifier (300) can be built using a plurality of training images (304), and extracting one or more training features from each the training images (304). The PSF features can include image moments of the point spread function, and/or geometric features of the point spread function.
摘要翻译：一种用于分类测试图像（16）的方法包括以下步骤：构建分类器（300），并且用分类器（300）对测试图像（16）进行分类。在测试图像（16）被分类之后，测试图像（16）可以随后以改进的精度进行处理（例如去毛刺）。分类器（300）可以对与运动模糊图像相关联的PSF特征进行分类和区分，并且PSF特征与散焦模糊图像相关联。分类器（300）可以使用多个训练图像（304）构建，并且从每个训练图像（304）提取一个或多个训练特征。 PSF特征可以包括点扩散函数的图像矩，和/或点扩散函数的几何特征。

16. 发明申请

WO2013093633A2 ENHANCEMENTS TO INTEGRATED OPTICAL ASSEMBLY 审中-公开
标题翻译：一体化光学组件的增强
公开(公告)号：WO2013093633A2
公开(公告)日：2013-06-27
申请号：PCT/IB2012/003023
申请日：2012-12-23
申请人： NIKON CORPORATION
发明人： SMITH, Daniel, Gene
CPC分类号： G01B11/24 , G01S7/481 , G01S7/4972 , G02B5/122 , G02B26/10
摘要： An integrated optical assembly is provided, with enhancements that are particularly useful when the integrated optical assembly forms part of a laser radar system. The integrated optical assembly produces a reference beam that is related to the optical characteristics of a scanning reflector, or to changes in position or orientation of the scanning reflector relative to a source. Thus, if the scanning reflector orientation were to shift from its intended orientation (due e.g. to thermal expansion) or if characteristics of the scanning reflector (e.g. the index of refraction of the scanning reflector) were to change on account of temperature changes, the reference beam can be used to provide data that can be used to account for such changes. In addition, if the scanning reflector were to be positioned in an orientation other than the orientation desired, the reference beam can be used in identifying and correcting that positioning.
摘要翻译：提供了一种集成光学组件，其具有在集成光学组件形成激光雷达系统的一部分时特别有用的增强功能。集成光学组件产生与扫描反射器的光学特性相关的参考光束，或者相对于光源的扫描反射器的位置或取向的改变。因此，如果扫描反射器取向从其预期取向（由于例如热膨胀）偏移，或者如果扫描反射器的特性（例如扫描反射器的折射率）由于温度变化而改变，则参考波束可用于提供可用于解释此类更改的数据。此外，如果扫描反射器被定位在除了所需取向以外的方向上，则可以使用参考光束来识别和校正该定位。

17. 发明申请

WO2013090123A1 THERMAL PLATE FOR ENVIRONMENT AND TEMPERATURE CONTROL OF MOTORS USED TO MOVE STAGES IN LITHOGRAPHY TOOLS 审中-公开
标题翻译：电动工具用于移动电机的环境温度控制和温度控制
公开(公告)号：WO2013090123A1
公开(公告)日：2013-06-20
申请号：PCT/US2012/068294
申请日：2012-12-06
申请人： NIKON CORPORATION , BINNARD, Michael B. , PHARAND, Michel , MORIMOTO, Shigeru , POON, Alex Ka Tim , COON, Derek , KHO, Leonard Wai Fung , KESWANI, Gaurav
发明人： BINNARD, Michael B. , PHARAND, Michel , MORIMOTO, Shigeru , POON, Alex Ka Tim , COON, Derek , KHO, Leonard Wai Fung , KESWANI, Gaurav
IPC分类号： H02K9/22
CPC分类号： H02K9/22 , G03F7/70758 , G03F7/70858 , H02K41/031
摘要： A lithography tool having a stage for supporting and positioning a substrate, an array configured to move the stage, and a cover plate positioned between the stage and the array. In various embodiments, the array may be either a magnet or coil array. The cover plate acts as a thermal insulator that helps even out temperature variations across the array. Consequently, thermal disturbances to the array or other parts of the lithography tool are reduced, resulting in a minimization of positioning errors. In addition, the cover plate also protects the array and provides a smooth surface in the event of a "crash" of the substrate stage.
摘要翻译：一种光刻工具，具有用于支撑和定位基板的台架，配置成移动台架的阵列以及位于台架和阵列之间的盖板。在各种实施例中，阵列可以是磁体或线圈阵列。盖板用作有助于均匀排列阵列温度变化的绝热材料。因此，光刻工具的阵列或其他部分的热干扰减少，导致定位误差的最小化。此外，盖板还保护阵列，并且在衬底台的“碰撞”的情况下提供光滑的表面。

18. 发明申请

WO2013025220A1 IMAGE SHARPNESS CLASSIFICATION SYSTEM 审中-公开
标题翻译：图像锐度分类系统
公开(公告)号：WO2013025220A1
公开(公告)日：2013-02-21
申请号：PCT/US2011/048218
申请日：2011-08-18
申请人： NIKON CORPORATION , HONG, Li
发明人： HONG, Li
IPC分类号： H04N5/232 , H04N5/217 , G06T5/00
CPC分类号： G06K9/66 , G06K9/036 , G06K9/40 , G06K9/46 , G06K9/522 , G06K9/527 , G06K9/6267 , G06T7/0002 , G06T2207/20081 , G06T2207/30168 , H04N5/217 , H04N5/23229 , H04N5/23254
摘要： A method for predicting whether a test image (318) is sharp or blurred includes the steps of: training a sharpness classifier (316) to discriminate between sharp and blurred images, the sharpness classifier (316) being trained based on a set of training sharpness features (314) computed from a plurality of training images (306), the set of training sharpness features (314) for each training image (306) being computed by (i) resizing each training image (306) by a first resizing factor; (ii) identifying texture regions (408, 410) in the resized training image; and (iii) computing the set of sharpness features in the training image (412) from the identified texture regions; and applying the trained sharpness classifier (316) to the test image (318) to determine if the test image (318) is sharp or blurred based on a set of test sharpness features (322) computed from the test image (318), the set of test sharpness features (322) for each test image (318) being computed by (i) resizing the test image (318) by a second resizing factor that is different than the first resizing factor; (ii) identifying texture regions (408, 410) in the resized test image; and (iii) computing the set of sharpness features in the test image (412) from the identified texture regions.
摘要翻译：一种用于预测测试图像（318）是否锐利或模糊的方法包括以下步骤：训练锐度分类器（316）以区分锐利和模糊图像，锐度分类器（316）基于一组训练锐度进行训练由多个训练图像（306）计算的特征（314），通过以下步骤计算每个训练图像（306）的训练锐度特征（314）集合：（i）通过第一调整大小因子调整每个训练图像（306）的大小; （ii）识别调整大小的训练图像中的纹理区域（408,410）; 以及（iii）从所识别的纹理区域计算训练图像（412）中的锐度特征集合; 以及将所训练的锐度分类器（316）应用于测试图像（318），以基于从测试图像（318）计算出的一组测试锐度特征（322）来确定测试图像（318）是否是锐利或模糊的，通过以下步骤计算每个测试图像（318）的测试锐度特征（322）：（i）通过与第一调整大小因子不同的第二调整大小因子来调整测试图像（318）的大小; （ii）识别经调整大小的测试图像中的纹理区域（408,410）; 以及（iii）从所识别的纹理区域计算测试图像（412）中的锐度特征的集合。

19. 发明申请

WO2012176941A1 METHOD AND APPARATUS TO ALLOW A PLURALITY OF STAGES TO OPERATE IN CLOSE PROXIMITY 审中-公开
标题翻译：允许多个阶段在近距离操作的方法和装置
公开(公告)号：WO2012176941A1
公开(公告)日：2012-12-27
申请号：PCT/JP2012/066823
申请日：2012-06-25
申请人： NIKON CORPORATION , BINNARD, Mike
发明人： BINNARD, Mike
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , H02K3/47 , H02K41/031 , H02K2201/18 , Y10T428/24479
摘要： According to one aspect of the present invention, a stage apparatus includes a first stage (104), a first magnet arrangement (112a, 112b), and a stator arrangement (120) that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant (112a) and a second quadrant (112b) or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.
摘要翻译：根据本发明的一个方面，一种舞台装置包括第一舞台（104），第一磁铁装置（112a，112b）和包括具有第一宽度的第一线圈的定子装置（120）。第一磁体布置与第一级相关联，并且包括第一象限（112a）和第二象限（112b），或更一般地，第一子阵列和第二子阵列。第一象限具有平行于第一轴布置的至少一个第一磁体，而第二象限具有平行于第二轴布置的至少一个第二磁体。第一象限相对于第一轴相邻于第二象限，并且与第二象限相距一定距离相对于第二轴。定子装置构造成与第一磁体装置配合以驱动第一级。

20. 发明申请

WO2012174273A1 LOW-NOISE FLUID GAUGES 审中-公开
标题翻译：低噪声流体计
公开(公告)号：WO2012174273A1
公开(公告)日：2012-12-20
申请号：PCT/US2012/042506
申请日：2012-06-14
申请人： NIKON CORPORATION , KHO, Leonard, Wai-fung , LEE, Sandy , COON, Derek , SOGARD, Michael
发明人： KHO, Leonard, Wai-fung , LEE, Sandy , COON, Derek , SOGARD, Michael
IPC分类号： G01B13/12 , G05D7/01
CPC分类号： G01B13/02 , G01B13/12 , G03F9/7034 , G03F9/7057
摘要： Fluid gauges are disclosed having first and second gas passageways each conducting a respective flow of gas. A third gas passageway is connected to the first and second gas passageways and conducts a respective flow of gas from the first and/or second gas passageways. The third gas passageway includes a gas sensor flanked in the third gas passageway by a first flow restrictor and a second flow restrictor to reduce noise in an electronic signal produced by the sensor.
摘要翻译：公开了具有第一和第二气体通道的流体计，每个气体通道各自传导各自的气体流。第三气体通道连接到第一和第二气体通道并且导引来自第一和/或第二气体通道的相应气体流。第三气体通道包括通过第一限流器在第三气体通道中侧翼的气体传感器和第二限流器，以减少由传感器产生的电子信号中的噪声。

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