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    • 2. 发明申请
    • CONTROL SYSTEM FOR CONTROLLING A FLUID ACTUATOR
    • 控制流体致动器的控制系统
    • WO2017210450A1
    • 2017-12-07
    • PCT/US2017/035488
    • 2017-06-01
    • NIKON CORPORATIONYANG, Pai-hsueh
    • YANG, Pai-hsuehCHOI, Yeong-junCHANG, Ping-weiSAKATA, KoichiLEE, Sandy
    • F15B9/08F15B11/028
    • F15B11/042F15B13/0442F15B19/007F15B2211/30575F15B2211/327F15B2211/351F15B2211/353F15B2211/665F15B2211/6654
    • A stage assembly (10) for positioning a workpiece (22) includes a stage (14), a base (12), a fluid actuator assembly (24), and a control system (20). The fluid actuator assembly (24) moves the stage (14) along the movement axis (30) relative to the base (12). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34), a piston (36) that is positioned within and moves relative to the piston chamber (34) along a piston axis (36A), and a valve assembly (38) that controls the flow of a piston fluid into the piston chamber (34). The valve assembly (38) includes an inlet valve (38C) having an inlet valve characteristic. The control system (20) controls the valve assembly (38) to control the flow of the piston fluid into the piston chamber (34). The control system (20) can utilize an inverse of the inlet valve characteristic to control the valve assembly (38).
    • 用于定位工件(22)的平台组件(10)包括平台(14),基座(12),流体致动器组件(24)和控制系统(20)。 流体致动器组件(24)使台架(14)沿着移动轴线(30)相对于基座(12)移动。 流体致动器组件(24)包括限定活塞室(34)的活塞壳体(32),位于活塞轴线(36A)内并且相对于活塞室(34)相对于活塞室(34)移动的活塞(36) 和控制活塞流体流入活塞室(34)的阀组件(38)。 阀组件(38)包括具有入口阀特性的入口阀(38C)。 控制系统(20)控制阀组件(38)以控制活塞流体流入活塞室(34)。 控制系统(20)可以利用入口阀特性的倒数来控制阀组件(38)。
    • 5. 发明申请
    • AIR GAUGES COMPRISING DUAL-RANGE DIFFERENTIAL PRESSURE SENSOR
    • 包含双范围差压传感器的空气压力表
    • WO2013063104A1
    • 2013-05-02
    • PCT/US2012/061675
    • 2012-10-24
    • NIKON CORPORATION
    • SOGARD, MichaelLEE, Sandy
    • G01B13/12G03F7/20
    • G03F9/7026G01B13/12G03F7/70641G03F9/7057
    • Position-sensing devices include first and second gas passageways connectable to a source of pressurized gas. A gas-releasing probe is connected to the first passageway. The probe is positionable relative to a surface and configured to release a first flow of the gas, flowing through the first passageway, toward the surface while a second flow of the gas flows through the second passageway. A differential-pressure (DP) sensing device is connected between the first and second passageways. The DP-sensing device has first and second DP sensors connected in parallel. The first DP sensor produces a gas-pressure measurement within a first dynamic -pressure range, and the second DP sensor produces a gas-pressure measurement in a second dynamic-pressure range. The resulting position measurement has greater dynamic range and higher resolution than would otherwise be produced with either the first DP sensor or the second DP sensor alone.
    • 位置检测装置包括可连接到加压气体源的第一和第二气体通道。 气体释放探针连接到第一通道。 探针可相对于表面定位并且构造成释放流过第一通道的气体的第一流向表面,同时气体的第二流动流过第二通道。 差压(DP)感测装置连接在第一和第二通道之间。 DP感测装置具有并联连接的第一和第二DP传感器。 第一DP传感器在第一动态压力范围内产生气体压力测量,第二DP传感器在第二动态压力范围内产生气体压力测量。 所产生的位置测量具有比用第一DP传感器或第二DP传感器单独产生的更大的动态范围和更高的分辨率。