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11. 发明授权

US08609304B2 Method of manufacturing a transfer mask and method of manufacturing a semiconductor device 有权
标题翻译：制造转印掩模的方法和制造半导体器件的方法
公开(公告)号：US08609304B2
公开(公告)日：2013-12-17
申请号：US13436132
申请日：2012-03-30
申请人： Masaru Tanabe , Hideaki Mitsui , Naoki Nishida , Satoshi Iwashita
发明人： Masaru Tanabe , Hideaki Mitsui , Naoki Nishida , Satoshi Iwashita
IPC分类号： G03F1/50
CPC分类号： G03F1/84 , G03F1/70 , G03F1/72
摘要： An internal defect or the like of a transfer mask is detected using transmitted light quantity distribution data of an inspection apparatus. Using a die-to-die comparison inspection method, inspection light is irradiated to a first region of a thin film to obtain a first transmitted light quantity distribution, the inspection light is also irradiated to a second region of the thin film to obtain a second transmitted light quantity distribution, a predetermined-range difference distribution is produced by plotting coordinates at which difference light quantity values calculated from a comparison between the first transmitted light quantity distribution and the second transmitted light quantity distribution are each not less than a first threshold value and less than a second threshold value, and a selection is made of a transfer mask in which a region with high density of plotting is not detected in the predetermined-range difference distribution.
摘要翻译：使用检查装置的透射光量分布数据检测转印掩模的内部缺陷等。使用管芯间的比较检查方法，将检查光照射到薄膜的第一区域以获得第一透射光量分布，也将检查光照射到薄膜的第二区域，以获得第二透射光通过绘制从第一透射光量分布和第二透射光量分布之间的比较计算出的差光量值分别不小于第一阈值的坐标，并产生预定范围的差分布，小于第二阈值，并且选择在预定范围差分布中未检测到具有高密度绘图密度的区域的转印掩模。

12. 发明申请

US20110230623A1 METHOD FOR CONTINUOUSLY PRODUCING ACRYLIC RESIN SHEET TECHNICAL FIELD 审中-公开
标题翻译：连续生产丙烯酸树脂片的方法技术领域
公开(公告)号：US20110230623A1
公开(公告)日：2011-09-22
申请号：US13058430
申请日：2009-08-07
申请人： Takayuki Hirano , Hajime Okutsu , Naoki Nishida , Eita Funami , Hiroshi Okafuji , Hideto Yamazawa , Dalsuke Takayama , Yutaka Ishihara
发明人： Takayuki Hirano , Hajime Okutsu , Naoki Nishida , Eita Funami , Hiroshi Okafuji , Hideto Yamazawa , Dalsuke Takayama , Yutaka Ishihara
IPC分类号： B29C35/10 , C08F265/06
CPC分类号： C08F2/46 , B29C35/10 , B29C39/16 , B29C2035/0827 , B29C2035/0833 , B29C2035/0844 , B29C2035/0877 , B29K2033/08 , B29K2033/12 , C08F265/00 , C08F265/02 , C08F265/04
摘要： Disclosed is a method for continuously producing an acrylic resin sheet containing 50% by mass or more of methyl methacrylate units, which comprises irradiating an active energy ray-polymerizable viscous liquid 2 which contains a polymer, satisfies the following equations (1) and (2), and has a viscosity of 5,000 Pa·s or more with the active energy ray to cure the liquid while transferring the liquid in the state of being held between an endless belt 3 and a film 5 transmissive to the active energy ray or between first and second films transmissive to the active energy ray, 30,000≦Mw≦500,000 (1) 35−(9/200,000)×Mw≦P≦60 (2) wherein, in these equations, Mw represents a weight average molecular weight [−] of the polymer contained in the liquid, and P represents a content [% by mass] of the polymer contained in the liquid.
摘要翻译：公开了一种连续制造含有50质量％以上的甲基丙烯酸甲酯单元的丙烯酸树脂片的方法，其包括照射含有聚合物的活性能量射线聚合性粘性液体2，满足下述式（1）和（2）），并且通过活性能量射线具有5000Pa·s以上的粘度以固化液体，同时在保持在环状带3和透射于活性能量射线的膜5之间的状态下或在第一对于活性能量射线透射的第二膜，30,000和1000; Mw＆lt; 100; 500,000（1）35-（9 / 200,000）×Mw＆nlE; P＆nlE; 60（2）其中，在这些方程式中，Mw表示重均分子量[ ]，P表示包含在液体中的聚合物的含量[质量％]。

13. 发明授权

US07611808B2 Halftone type phase shift mask blank and halftone type phase shift mask 有权
标题翻译：半色调型相移掩模和半色调型相移掩模
公开(公告)号：US07611808B2
公开(公告)日：2009-11-03
申请号：US11642595
申请日：2006-12-21
申请人： Masao Ushida , Minoru Sakamoto , Naoki Nishida
发明人： Masao Ushida , Minoru Sakamoto , Naoki Nishida
IPC分类号： G03F1/00
CPC分类号： G03F1/32 , G03F1/84
摘要： A halftone type phase shift mask having a semitranslucent film pattern and a shielding film pattern provided on a transparent substrate in this order is constituted in such a manner that each of the reflectances of the transparent substrate, the semitranslucent film pattern and the shielding film pattern for an inspecting light represents a difference which can detect the semitranslucent film pattern and the shielding film pattern based on a reflected light generated when the inspecting light is irradiated on the mask.
摘要翻译：以透明基板，半透明膜图案和半透明膜图案和屏蔽膜图案中的每一个反射的方式构成具有半透明膜图案和设置在透明基板上的屏蔽膜图案的半色调型相移掩模检查光表示可以基于在检查光照射在掩模上时产生的反射光来检测半透明膜图案和屏蔽膜图案的差异。

14. 发明申请

US20070230323A1 Recording head and recorder 审中-公开
标题翻译：录音头和录音机
公开(公告)号：US20070230323A1
公开(公告)日：2007-10-04
申请号：US11717573
申请日：2007-03-13
申请人： Naoki Nishida , Hiroaki Ueda , Manami Kuiseko , Koujirou Sekine , Kenji Konno , Masahiro Okitsu , Hiroshi Hatano
发明人： Naoki Nishida , Hiroaki Ueda , Manami Kuiseko , Koujirou Sekine , Kenji Konno , Masahiro Okitsu , Hiroshi Hatano
IPC分类号： G11B7/24
CPC分类号： G11B5/314 , B82Y10/00 , G11B7/00454 , G11B7/124 , G11B7/1359 , G11B7/1378 , G11B7/1387 , G11B11/10532 , G11B11/10554 , G11B2005/0021 , G11B2007/13727
摘要： A recorder has a recording medium for information recording, a light source, an optical system, a slider, and an optical waveguide. To the optical system, light from the light source enters, and the slider moves relative to the recording medium while not in contact therewith. The optical waveguide is arranged at position facing the recording medium in the slider so that light entering from the optical system is irradiated on the recording medium. Where the mode field diameter of the optical waveguide on the light output side is d and the mode field diameter thereof on the light input side is D, the mode field diameter is converted by smoothly changing the diameter of the optical waveguide to satisfy D>d.
摘要翻译：记录器具有用于信息记录的记录介质，光源，光学系统，滑块和光波导。对于光学系统，来自光源的光进入，并且滑块相对于记录介质移动而不与其接触。光波导布置在滑块中面向记录介质的位置，使得从光学系统进入的光被照射在记录介质上。在光输出侧的光波导的模场直径为d，光输入侧的模场直径为D的情况下，通过平滑地改变光波导的直径来转换模场直径，满足D> d 。

15. 发明申请

US20070134568A1 Halftone type phase shift mask blank and halftone type phase shift mask 有权
公开(公告)号：US20070134568A1
公开(公告)日：2007-06-14
申请号：US11642595
申请日：2006-12-21
申请人： Masao Ushida , Minoru Sakamoto , Naoki Nishida
发明人： Masao Ushida , Minoru Sakamoto , Naoki Nishida
IPC分类号： G03F1/00
CPC分类号： G03F1/32 , G03F1/84
摘要： A halftone type phase shift mask having a semitranslucent film pattern and a shielding film pattern provided on a transparent substrate in this order is constituted in such a manner that each of the reflectances of the transparent substrate, the semitranslucent film pattern and the shielding film pattern for an inspecting light represents a difference which can detect the semitranslucent film pattern and the shielding film pattern based on a reflected light generated when the inspecting light is irradiated on the mask.

16. 发明授权

US06654535B2 Polyimide optical waveguide 失效
公开(公告)号：US06654535B2
公开(公告)日：2003-11-25
申请号：US09948043
申请日：2001-09-07
申请人： Miyuki Teramoto , Naoki Nishida , Takuji Hatano
发明人： Miyuki Teramoto , Naoki Nishida , Takuji Hatano
IPC分类号： G02B610
CPC分类号： G02B6/138 , G02B1/046 , C08L79/08
摘要： An optical waveguide is produced by forming on a substrate a waveguide layer and/or a clad layer containing, as their main ingredient, polyimide with a fluorine substitution rate of 30% or higher (thus as a fluorinated polyimide layer), with a primer layer laid in between that contains, as its main ingredient, polyimide with a fluorine substitution rate of 10% or lower (including 0%). This improves adherence of the fluorinated polyimide layer to the substrate and prevents the fluorinated polyimide layer from peeling off the substrate. For more effective prevention of such peeling-off and of warping of the substrate, the primer layer is preferably formed to have a thickness of 0.1 to 20 &mgr;m. The primer layer may contain a coupling agent.

17. 发明授权

US08134893B2 Optical recording head and optical recording apparatus 有权
标题翻译：光记录头和光记录装置
公开(公告)号：US08134893B2
公开(公告)日：2012-03-13
申请号：US12297072
申请日：2007-04-02
申请人： Kenji Konno , Hiroaki Ueda , Manami Kuiseko , Naoki Nishida , Koujirou Sekine , Masahiro Okitsu , Hiroshi Hatano
发明人： Kenji Konno , Hiroaki Ueda , Manami Kuiseko , Naoki Nishida , Koujirou Sekine , Masahiro Okitsu , Hiroshi Hatano
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/4866 , G11B7/1384 , G11B11/1055 , G11B2005/001 , G11B2005/0021
摘要： Provided is an optical recording head in which a light beam from a light source is collected by an optical element and reflected on a reflecting surface to be formed into a spot light. Since a support portion for supporting the light source of the optical element at a predetermined position and the reflection surface for reflecting the light beam are formed integrally with each other, it is not required to perform the positioning thereof, and light can be collected to a very small spot with high efficiency, and an optical recording head and an optical recording apparatus having low heights can be provided.
摘要翻译：提供了一种光学记录头，其中来自光源的光束被光学元件收集并在反射表面上反射以形成点光。由于用于将光学元件的光源支撑在预定位置的支撑部分和用于反射光束的反射表面彼此一体地形成，因此不需要进行定位，并且可以将光收集到可以提供高效率的非常小的斑点，并且可以提供具有低高度的光学记录头和光学记录装置。

18. 发明申请

US20110134740A1 Optical Device, Optical Recording Head and Optical Recording Device 审中-公开
标题翻译：光学设备，光学记录头和光学记录装置
公开(公告)号：US20110134740A1
公开(公告)日：2011-06-09
申请号：US13057666
申请日：2009-07-13
申请人： Koujirou Sekine , Hiroaki Ueda , Manami Kuiseko , Naoki Nishida , Hiroshi Hatano , Kou Osawa
发明人： Koujirou Sekine , Hiroaki Ueda , Manami Kuiseko , Naoki Nishida , Hiroshi Hatano , Kou Osawa
IPC分类号： G11B7/00 , G02B27/44
CPC分类号： G11B5/314 , G11B2005/0005 , G11B2005/0021
摘要： Provided is an optical device configured to makes it possible to enhance use efficiency of light. An optical device is provided with an optical element to deflect incident light and a fixation member on which the optical element is fixed. The optical element includes a reflective surface and a diffraction grating surface that deflects the incident light. The optical element is fixed on the fixation member to restrain displacement in accordance with temperature changes at portions thereof other than the reflective surface and the diffracting grating surface in such a condition that displacement is caused without restraint be temperature changes at the reflective surface and the diffraction grating surface. A change of the incident light in the deflection angle due to an inclination change by the reflective surface and the diffracting grating surface is suppressed by a change in a diffraction angle due to a periodical change in the diffraction grating by the displacement of the diffraction grating surface.
摘要翻译：提供了一种配置成可以提高光的使用效率的光学装置。光学装置设置有用于偏转入射光的光学元件和固定有光学元件的固定构件。光学元件包括反射表面和使入射光偏转的衍射光栅表面。光学元件被固定在固定构件上，以便在反射面和衍射光栅表面以外的部分处的温度变化下抑制位移，使得在不受限制地产生位移的情况下，反射表面的温度变化和衍射光栅表面。通过衍射光栅表面的位移，由于衍射光栅的周期性变化引起的衍射角的变化来抑制由反射表面和衍射光栅表面的倾斜变化引起的偏转角中入射光的变化。

19. 发明申请

US20110075526A1 Optical Element, Arm Mechanism, and Information Recording Device 审中-公开
标题翻译：光学元件，臂机构和信息记录装置
公开(公告)号：US20110075526A1
公开(公告)日：2011-03-31
申请号：US12992496
申请日：2009-04-15
申请人： Koujirou Sekine , Naoki Nishida , Manami Kuiseko , Kou Osawa , Hiroaki Ueda , Hiroshi Oshitani , Hiroshi Hatano
发明人： Koujirou Sekine , Naoki Nishida , Manami Kuiseko , Kou Osawa , Hiroaki Ueda , Hiroshi Oshitani , Hiroshi Hatano
IPC分类号： G11B11/00 , G02B5/18 , G02B5/04
CPC分类号： G11B5/314 , G11B5/4833 , G11B5/4866 , G11B2005/0002 , G11B2005/0021
摘要： Proposed is a technique of guiding light to a waveguide, by which the light use efficiency is increased. In order to achieve the above object, adopted is an optical element comprising, at an outer edge portion thereof, an incident surface on which light from a light source is incident, a diffraction grating surface, and an internal reflection surface which guides light incident from the incident surface to the diffraction grating surface.
摘要翻译：提出了将光引导到波导的技术，通过该技术增加了光的使用效率。为了实现上述目的，采用的是一种光学元件，在其外缘部分包括入射光，光入射的入射表面，衍射光栅表面和内反射表面，其引导从入射面到衍射光栅表面。

20. 发明申请

US20110019510A1 RECORDING HEAD AND RECORDER 审中-公开
标题翻译：记录头和记录
公开(公告)号：US20110019510A1
公开(公告)日：2011-01-27
申请号：US12792506
申请日：2010-06-02
申请人： Naoki Nishida , Hiroaki Ueda , Manami Kuiseko , Koujirou Sekine , Kenji Konno , Masahiro Okitsu , Hiroshi Hatano
发明人： Naoki Nishida , Hiroaki Ueda , Manami Kuiseko , Koujirou Sekine , Kenji Konno , Masahiro Okitsu , Hiroshi Hatano
IPC分类号： G11B7/135 , G11B11/105
CPC分类号： G11B5/314 , B82Y10/00 , G11B7/00454 , G11B7/124 , G11B7/1359 , G11B7/1378 , G11B7/1387 , G11B11/10532 , G11B11/10554 , G11B2005/0021 , G11B2007/13727
摘要： A recorder has a recording medium for information recording, a light source, an optical system, a slider, and an optical waveguide. To the optical system, light from the light source enters, and the slider moves relative to the recording medium while not in contact therewith. The optical waveguide is arranged at position facing the recording medium in the slider so that light entering from the optical system is irradiated on the recording medium. Where the mode field diameter of the optical waveguide on the light output side is d and the mode field diameter thereof on the light input side is D, the mode field diameter is converted by smoothly changing the diameter of the optical waveguide to satisfy D>d.
摘要翻译：记录器具有用于信息记录的记录介质，光源，光学系统，滑块和光波导。对于光学系统，来自光源的光进入，并且滑块相对于记录介质移动而不与其接触。光波导布置在滑块中面向记录介质的位置，使得从光学系统进入的光被照射在记录介质上。在光输出侧的光波导的模场直径为d，光输入侧的模场直径为D的情况下，通过平滑地改变光波导的直径来转换模场直径，满足D> d 。

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