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21. 发明授权

US09305583B1 Method for fabricating a magnetic writer using multiple etches of damascene materials 有权
标题翻译：用多层蚀刻材料制造磁性刻录机的方法
公开(公告)号：US09305583B1
公开(公告)日：2016-04-05
申请号：US14280342
申请日：2014-05-16
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Hongmei Han , Ming Sun , Xiaotian Zhou
IPC分类号： G11B5/31 , G11B5/855 , G11B5/127
CPC分类号： G11B5/855 , G11B5/1278 , G11B5/232 , G11B5/315 , G11B5/3163
摘要： A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer that includes a first sublayer in a side shield region and a second sublayer outside of the side shield region is provided. A trench is formed in the intermediate layer using multiple etches. A first etch removes part of the second sublayer, providing a first portion of the trench having a first sidewall angle. A second etch removes part of the first sublayer, providing a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. A main pole is provided in the trench and has a plurality of sidewalls. The sidewalls have the second sidewall angle in the second portion of the trench and at least one main pole sidewall angle corresponding to the first sidewall angle in the first portion of the trench.
摘要翻译：一种方法提供具有空气轴承表面（ABS）位置的磁换能器。提供了包括侧屏蔽区域中的第一子层和侧屏蔽区域外侧的第二子层的中间层。使用多个蚀刻在中间层中形成沟槽。第一蚀刻移除第二子层的一部分，提供具有第一侧壁角的沟槽的第一部分。第二蚀刻去除第一子层的一部分，提供具有第二侧壁角的沟槽的第二部分。第二侧壁角度大于第一侧壁角度。主极设置在沟槽中并且具有多个侧壁。侧壁在沟槽的第二部分具有第二侧壁角，并且至少一个主极侧壁角对应于沟槽的第一部分中的第一侧壁角。

22. 发明授权

US09275657B1 Process for making PMR writer with non-conformal side gaps 有权
标题翻译：使PMR写入程序具有不一致的侧面空白的过程
公开(公告)号：US09275657B1
公开(公告)日：2016-03-01
申请号：US14046790
申请日：2013-10-04
申请人： Western Digital (Fremont), LLC
发明人： Jinqiu Zhang , Feng Liu , Xiaoyu Yang , Ming Jiang , Xiaotian Zhou , Zeyu Ma , Hai Sun
IPC分类号： G11B5/187 , G11B5/127 , G11B5/23 , G11B5/10 , H01L21/027 , H01L21/3213 , G11B5/147 , G11B5/31
CPC分类号： G11B5/1278 , G11B5/10 , G11B5/11 , G11B5/112 , G11B5/147 , G11B5/187 , G11B5/1878 , G11B5/232 , G11B5/235 , G11B5/3116 , G11B5/313 , G11B5/3146 , G11B5/315 , G11B5/3163 , G11B5/6082 , H01L21/0272 , H01L21/32134 , H01L21/32139 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043
摘要： A process for manufacturing a PMR writer main pole with non-conformal side gaps is provided. The process may include depositing a stitch layer comprising a magnetic material and a second stitch layer material over a substrate, forming an air-bearing surface (ABS) region in a first damascene material, and forming a yoke region in a second damascene material. The first damascene material may include Aluminum Oxide (Al2O3). The second damascene material may include Silicon Dioxide (SiO2). Side gap regions may include SiO2.
摘要翻译：提供了一种用于制造具有非保形侧面间隙的PMR写入器主极的工艺。该方法可以包括在衬底上沉积包括磁性材料和第二缝合层材料的缝合层，在第一镶嵌材料中形成空气轴承表面（ABS）区域，以及在第二镶嵌材料中形成轭铁区域。第一镶嵌材料可以包括氧化铝（Al 2 O 3）。第二镶嵌材料可以包括二氧化硅（SiO 2）。侧隙区域可以包括SiO 2。

23. 发明授权

US09274438B1 Method and system for exposing photoresist in a microelectric device 有权
标题翻译：用于在微电子器件中曝光光致抗蚀剂的方法和系统
公开(公告)号：US09274438B1
公开(公告)日：2016-03-01
申请号：US12146370
申请日：2008-06-25
申请人： Hongping Yuan , Hai Sun , Xianzhong Zeng , Winnie Yu
发明人： Hongping Yuan , Hai Sun , Xianzhong Zeng , Winnie Yu
IPC分类号： G03C5/04 , G03F7/20 , H01L21/027
CPC分类号： G03F7/2022 , G03F7/70466 , H01L21/0274
摘要： A method and system provide microelectric devices on fields on a substrate. Each field includes at least one microelectric device having a critical device feature and remaining device feature(s) distal from the critical device feature. The method and system include providing a photoresist layer for fabricating the microelectric devices and exposing the photoresist layer using a dark field mask. The dark field mask is for defining a critical mask feature corresponding to the critical device feature and exposing a first portion of the fields. The first portion includes not more than five percent of each field. The method and system further include exposing the photoresist layer using a clear field mask. The clear field mask is for defining remaining mask feature(s) corresponding to the remaining device feature(s). The clear field mask exposes a second portion of the fields that is different from the first portion.
摘要翻译：一种方法和系统在衬底上的场上提供微电子器件。每个场包括至少一个具有关键装置特征的微电子装置和远离关键装置特征的剩余装置特征。所述方法和系统包括提供用于制造微电子器件的光致抗蚀剂层并且使用暗场掩模曝光光致抗蚀剂层。暗场掩模用于定义与关键设备特征对应的关键掩模特征并暴露场的第一部分。第一部分不超过每个领域的百分之五。该方法和系统还包括使用清晰的场屏蔽来曝光光致抗蚀剂层。清除场掩模用于定义对应于剩余设备特征的剩余掩模特征。清除场掩模曝光与第一部分不同的场的第二部分。

24. 发明授权

US09263071B1 Flat NFT for heat assisted magnetic recording 有权
标题翻译：平面NFT用于热辅助磁记录
公开(公告)号：US09263071B1
公开(公告)日：2016-02-16
申请号：US14674509
申请日：2015-03-31
申请人： Western Digital (Fremont), LLC
发明人： Jiangrong Cao , Michael V. Morelli , Brad V. Johnson , Peng Zhang
IPC分类号： G11B5/127 , G11B5/48 , G11B5/00
CPC分类号： G11B5/3116 , G11B5/127 , G11B5/1278 , G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： The present disclosure generally relates to an EAMR head having a plasmonic bulk metal plate adjacent thereto. The waveguide core has a trapezoidal shaped cross-section, when viewed from the ABS, and the plasmonic bulk metal plate is disposed adjacent the short side of the trapezoid. The plasmonic bulk metal plate reduces the temperature of the NFT.
摘要翻译：本公开总体上涉及具有与其相邻的等离子体激元体金属板的EAMR头。当从ABS观察时，波导芯具有梯形截面，等离子体激元体金属板邻近梯形的短边设置。等离子体激元体金属板降低了NFT的温度。

25. 发明授权

US09245562B1 Magnetic recording writer with a composite main pole 有权
标题翻译：具有复合主极的磁记录器
公开(公告)号：US09245562B1
公开(公告)日：2016-01-26
申请号：US14673748
申请日：2015-03-30
申请人： Western Digital (Fremont), LLC
发明人： Feng Liu , Zhanjie Li
IPC分类号： G11B5/147 , G11B5/60 , G11B5/11 , G11B5/127
CPC分类号： G11B5/147 , G11B5/1278 , G11B5/3116
摘要： A magnetic transducer with a composite main pole and methods for fabricating the magnetic transducer are provided. The magnetic transducer includes a main pole having at least a first portion and a second portion. The first portion includes a first magnetic material and has a first side forming at least a portion of an air bearing surface (ABS) of the main pole. The second portion includes a second magnetic material that is different from the first magnetic material, and the second portion is spaced apart from the ABS. The main pole may further include a third portion, where the second portion and the third portion are each located at one of the trailing side or the leading side of the main pole, with the third portion made of magnetic material that is different from the first magnetic material, and the third portion being spaced apart from the ABS.
摘要翻译：提供了具有复合主极的磁换能器及其制造方法。磁换能器包括具有至少第一部分和第二部分的主极。第一部分包括第一磁性材料并且具有形成主极的空气轴承表面（ABS）的至少一部分的第一侧。第二部分包括与第一磁性材料不同的第二磁性材料，第二部分与ABS隔开。主极还可以包括第三部分，其中第二部分和第三部分各自位于主极的后侧或前导侧中的一个，第三部分由与第一部分不同的磁性材料制成磁性材料，并且第三部分与ABS隔开。

26. 发明授权

US09245543B1 Method for providing an energy assisted magnetic recording head having a laser integrally mounted to the slider 有权
标题翻译：一种用于提供能量辅助磁记录头的方法，所述能量辅助磁记录头具有一体地安装在滑
公开(公告)号：US09245543B1
公开(公告)日：2016-01-26
申请号：US13861663
申请日：2013-04-12
申请人： Western Digital (Fremont), LLC
发明人： Lei Wang , Shing Lee , Wentao Yan
IPC分类号： G11B5/127 , H04R31/00 , G11B5/02 , G11B5/31 , G11B5/60
CPC分类号： G11B5/127 , G11B5/02 , G11B5/105 , G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A method for providing energy assisted magnetic recording (EAMR) heads are described. The method and system include providing a substrate, at least one EAMR transducer, an overcoat layer and at least one laser. The substrate has a leading edge and a substrate trailing edge. The EAMR transducer(s) reside in a device layer and on the substrate trailing edge. The overcoat layer includes a plurality of contacts. The device layer is between the overcoat layer and the substrate trailing edge. The laser(s) provide energy to the EAMR transducer. The overcoat layer is between the substrate trailing edge and the laser(s). The laser(s) are electrically coupled to at least a first portion of the contacts. The contacts provide thermal connection through the overcoat layer and through the device layer to the substrate. At least a second portion of the contacts is electrically insulated from the substrate.
摘要翻译：描述了一种用于提供能量辅助磁记录（EAMR）头的方法。该方法和系统包括提供衬底，至少一个EAMR换能器，外涂层和至少一个激光器。衬底具有前缘和衬底后缘。 EAMR传感器位于器件层和衬底后缘。外涂层包括多个触点。器件层位于覆盖层和衬底后缘之间。激光器向EAMR传感器提供能量。外涂层位于基板后缘和激光之间。激光器电耦合到触点的至少第一部分。触点提供通过外涂层和穿过器件层到基底的热连接。触点的至少第二部分与基板电绝缘。

27. 发明授权

US09230565B1 Magnetic shield for magnetic recording head 有权
标题翻译：磁记录磁头磁屏
公开(公告)号：US09230565B1
公开(公告)日：2016-01-05
申请号：US14313069
申请日：2014-06-24
申请人： Western Digital (Fremont), LLC
发明人： Rongfu Xiao , Daniele Mauri , Ming Mao , Haiwen Xi
IPC分类号： G11B5/39 , G11B5/11
CPC分类号： G11B5/11 , G11B5/112 , G11B5/3912 , H01L43/02
摘要： A magnetic shield for a magnetic recording head includes a plurality of ferromagnetic layers, a spacer layer, and a buffer layer, wherein the buffer layer includes Co, Fe, B, or a combination thereof and effectively reduces irregular grain growth within the ferromagnetic layers, the spacer layer includes Ru, and the ferromagnetic layers magnetically couple through each of the buffer layer and the spacer layer.
摘要翻译：用于磁记录头的磁屏蔽包括多个铁磁层，间隔层和缓冲层，其中缓冲层包括Co，Fe，B或其组合，并且有效地减少铁磁层内的不规则晶粒生长，间隔层包括Ru，并且铁磁层通过每个缓冲层和间隔层磁耦合。

28. 发明授权

US09214169B1 Magnetic recording read transducer having a laminated free layer 有权
标题翻译：具有层叠自由层的磁记录读取传感器
公开(公告)号：US09214169B1
公开(公告)日：2015-12-15
申请号：US14310222
申请日：2014-06-20
申请人： Western Digital (Fremont), LLC
发明人： Christian Kaiser , Yuankai Zheng , Xin Jiang , Zhitao Diao , Qunwen Leng
IPC分类号： G11B5/33 , G11B5/39
CPC分类号： G11B5/33 , G01R33/098 , G11B5/39 , G11B5/3903 , G11B5/3906 , G11B5/3954 , G11B5/3967
摘要： A method and system provide a magnetic transducer including a first shield, a read sensor, and a second shield. The read sensor is between the first shield and the second shield. The read sensor includes a pinned layer, a nonmagnetic spacer layer and a free layer. The nonmagnetic spacer layer is between the pinned layer and the free layer. The free layer includes a plurality of ferromagnetic layers interleaved with and sandwiching a plurality of nonmagnetic layers. The plurality of ferromagnetic layers are ferromagnetically aligned.
摘要翻译：一种方法和系统提供包括第一屏蔽，读取传感器和第二屏蔽的磁换能器。读取传感器位于第一屏蔽和第二屏蔽之间。读取传感器包括钉扎层，非磁性间隔层和自由层。非磁性间隔层位于被钉扎层和自由层之间。自由层包括与多个非磁性层交错并夹着多个非磁性层的多个铁磁层。多个铁磁层是铁磁对准的。

29. 发明授权

US09190090B1 Multi step lube blocking air bearing area configuration 有权
标题翻译：多级润滑油阻塞空气轴承区域配置
公开(公告)号：US09190090B1
公开(公告)日：2015-11-17
申请号：US14583017
申请日：2014-12-24
申请人： Western Digital (Fremont), LLC
发明人： Shuyu Zhang , Lanshi Zheng
IPC分类号： G11B5/60 , G11B5/40
CPC分类号： G11B5/6082 , G11B5/40
摘要： A disk drive is provided having one or more structural air bearing surface (ABS) features that can block particulate matter, such as lube droplets that may enter the air bearing from the trailing edge or rearward portion of the slider. Moreover, such structural ABS features can influence air flow within or about the air bearing to prevent or at least reduce the accumulation of particles and/or droplets in one or more areas of the air bearing to reduce the reliability problems induced by particle contamination and lube pick-up.
摘要翻译：提供了具有一个或多个结构空气轴承表面（ABS）特征的盘驱动器，其可以阻挡颗粒物质，例如可以从滑块的后缘或后部进入空气轴承的润滑剂液滴。此外，这种结构的ABS特征可以影响空气轴承内或周围的空气流动，以防止或至少减少空气轴承的一个或多个区域中的颗粒和/或液滴的积聚，以减少由颗粒污染和润滑油引起的可靠性问题捡起。

30. 发明授权

US09183854B2 Method to make interferometric taper waveguide for HAMR light delivery 有权
标题翻译：用于HAMR发光的干涉式锥形波导的方法
公开(公告)号：US09183854B2
公开(公告)日：2015-11-10
申请号：US14303876
申请日：2014-06-13
申请人： Western Digital (Fremont), LLC
发明人： Dujiang Wan , Ge Yi , Lijie Zhao , Hai Sun , Yunfei Li
IPC分类号： G11B5/31 , G02B6/122 , G02B6/10 , G02B6/136
CPC分类号： G11B5/314 , G02B6/00 , G02B6/10 , G02B6/122 , G02B6/136 , G11B2005/0021
摘要： A method for making an interferometric taper waveguide (I-TWG) with high critical dimension uniformity and small line edge roughness for a heat assisted magnetic recording (HAMR) head, wherein the method includes creating an I-TWG film stack with two hard mask layers on top of an I-TWG core layer sandwiched between two cladding layers, defining a photoresist pattern over the I-TWG film stack using deep ultraviolet lithography, transferring the pattern to the first hard mask layer using reactive ion etching (RIE), forming a temporary I-TWG pattern on the second hard mask layer using RIE, transferring the temporary pattern to the I-TWG core using RIE, refilling the cladding layer, and planarizing using chemical mechanical planarization (CMP).
摘要翻译：一种用于制造具有高临界尺寸均匀性和用于热辅助磁记录（HAMR）头）的小线边缘粗糙度的干涉式锥形波导（I-TWG）的方法，其中该方法包括产生具有两个硬掩模层的I-TWG膜叠层在夹在两个包覆层之间的I-TWG芯层的顶部，使用深紫外光刻在I-TWG膜堆上限定光致抗蚀剂图案，使用反应离子蚀刻（RIE）将图案转移到第一硬掩模层，形成使用RIE在第二硬掩模层上的临时I-TWG图案，使用RIE将临时图案转移到I-TWG芯，使用化学机械平面化（CMP）进行平面化。

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