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31. 发明授权

US07989905B2 MEMS device having a movable electrode 有权
公开(公告)号：US07989905B2
公开(公告)日：2011-08-02
申请号：US12981747
申请日：2010-12-30
申请人： Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
发明人： Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
IPC分类号： H01L29/84 , H01L27/14 , H01L29/82 , H01L23/48
CPC分类号： B81B3/0086 , B81B2201/0271
摘要： A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

32. 发明申请

US20110148537A1 MEMS OSCILLATOR AND METHOD OF MANUFACTURING THEREOF 有权
标题翻译： MEMS振荡器及其制造方法
公开(公告)号：US20110148537A1
公开(公告)日：2011-06-23
申请号：US12974258
申请日：2010-12-21
申请人： Toru WATANABE , Shogo INABA , Ryuji KIHARA
发明人： Toru WATANABE , Shogo INABA , Ryuji KIHARA
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03H3/0072 , H03H9/2457
摘要： An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.
摘要翻译：振荡器包括：形成在基板上的多个MEMS振动器; 以及连接到所述多个MEMS振动器的振荡器配置电路，其中所述多个MEMS振子各自具有波束结构，并且所述各个波束结构不同，由此它们的谐振频率不同。

33. 发明授权

US07956709B2 MEMS switch and manufacturing method thereof 有权
标题翻译： MEMS开关及其制造方法
公开(公告)号：US07956709B2
公开(公告)日：2011-06-07
申请号：US11832038
申请日：2007-08-01
申请人： Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
发明人： Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01C10/50 , Y10T29/49105
摘要： A micro-electro mechanical system (MEMS) switch includes a fixed electrode formed on a substrate, and a movable electric resistor formed on the substrate, the movable electric resistor serving as an electric resistor that divides an electric potential where the MEMS switch is set to a conduction state.
摘要翻译：微机电系统（MEMS）开关包括形成在基板上的固定电极和形成在基板上的可移动电阻器，可移动电阻器用作将MEMS开关设置为的电位分开的电阻器导通状态。

34. 发明申请

US20110121908A1 Mems Resonator and Manufacturing Method of the Same 有权
标题翻译： Mems谐振器及其制造方法
公开(公告)号：US20110121908A1
公开(公告)日：2011-05-26
申请号：US13012099
申请日：2011-01-24
申请人： Shogo Inaba , Akira Sato , Toru Watanabe , Takeshi Mori
发明人： Shogo Inaba , Akira Sato , Toru Watanabe , Takeshi Mori
IPC分类号： H03K3/36
CPC分类号： H03H3/0073 , H03H9/1057 , Y10S977/721
摘要： A resonator with a microeletromechanical system structure has a transistor with a gate electrode, a capacitor with an upper and lower electrode, a substrate, a first and second structure of the microelectromechanical system structure, a first silicon layer of the first structure and the upper electrode formed above the substrate, a second silicon layer of the second structure and the gate electrode unit formed above the substrate, and an insulating film formed above the capacitor and the transistor, the insulating film having an opening for placement of the second structure.
摘要翻译：具有微机电系统结构的谐振器具有具有栅电极的晶体管，具有上电极和下电极的电容器，基板，微机电系统结构的第一和第二结构，第一结构的第一硅层和上电极形成在基板上方，第二结构的第二硅层和形成在基板上的栅电极单元，以及形成在电容器和晶体管上方的绝缘膜，绝缘膜具有用于放置第二结构的开口。

35. 发明授权

US07892875B2 MEMS resonator and manufacturing method of the same 有权
标题翻译： MEMS谐振器及其制造方法相同
公开(公告)号：US07892875B2
公开(公告)日：2011-02-22
申请号：US12684336
申请日：2010-01-08
申请人： Shogo Inaba , Akira Sato , Toru Watanabe , Takeshi Mori
发明人： Shogo Inaba , Akira Sato , Toru Watanabe , Takeshi Mori
IPC分类号： H01L21/00
CPC分类号： H03H3/0073 , H03H9/1057 , Y10S977/721
摘要： A method is for manufacturing a microelectromechanical system resonator having a semiconductor device and a microelectromechanical system structure unit formed on a substrate. The method includes: forming a lower electrode of an oxide-nitride-oxide capacitor unit included in the semiconductor device using a first silicon layer; forming, using a second silicon layer, a substructure of the microelectromechanical system structure unit and an upper electrode of the oxide-nitride-oxide capacitor unit included in the semiconductor device; and forming, using a third silicon layer, a superstructure of the microelectromechanical system structure unit and a gate electrode of a complementary metal oxide semiconductor circuit unit included in the semiconductor device.
摘要翻译：一种用于制造具有形成在基板上的半导体器件和微机电系统结构单元的微机电系统谐振器的方法。该方法包括：使用第一硅层形成包括在半导体器件中的氧化物 - 氮化物 - 氧化物电容器单元的下电极; 使用第二硅层形成微机电系统结构单元的子结构和包括在半导体器件中的氧化物 - 氮化物 - 氧化物电容器单元的上电极; 以及使用第三硅层形成所述微机电系统结构单元的上部结构和包括在所述半导体器件中的互补金属氧化物半导体电路单元的栅电极。

36. 发明授权

US07709912B2 Electronic device and method for manufacturing thereof 有权
标题翻译：电子装置及其制造方法
公开(公告)号：US07709912B2
公开(公告)日：2010-05-04
申请号：US11875383
申请日：2007-10-19
申请人： Akira Sato , Toru Watanabe , Shogo Inaba , Takeshi Mori
发明人： Akira Sato , Toru Watanabe , Shogo Inaba , Takeshi Mori
IPC分类号： H01L31/00
CPC分类号： B81C1/00246 , B81B2207/015 , B81B2207/07 , B81C2203/0136 , B81C2203/0714 , B81C2203/0735 , H01L21/7682 , H01L24/05 , H01L2924/14 , H01L2924/00
摘要： An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.
摘要翻译：公开了一种电子设备，包括基板，构成在基板上形成的功能元件的功能结构，以及形成其中设置有功能结构的空腔部分的盖结构。在电子设备中，盖结构包括层间绝缘膜和布线层的叠层结构，层叠结构以包围空腔部分的方式形成在基板上，并且盖结构具有上侧盖部分从上方覆盖空腔部分，上侧盖部分形成有设置在功能结构上方的布线层的一部分。

37. 发明申请

US20080035458A1 MEMS SWITCH AND MANUFACTURING METHOD THEREOF 有权
标题翻译： MEMS开关及制造方法
公开(公告)号：US20080035458A1
公开(公告)日：2008-02-14
申请号：US11832038
申请日：2007-08-01
申请人： Toru WATANABE , Akira SATO , Shogo INABA , Takeshi MORI
发明人： Toru WATANABE , Akira SATO , Shogo INABA , Takeshi MORI
IPC分类号： H01H57/00 , H01H11/00
CPC分类号： H01H59/0009 , H01C10/50 , Y10T29/49105
摘要： A micro-electro mechanical system (MEMS) switch includes a fixed electrode formed on a substrate, and a movable electric resistor formed on the substrate, the movable electric resistor serving as an electric resistor that divides an electric potential where the MEMS switch is set to a conduction state.
摘要翻译：微机电系统（MEMS）开关包括形成在基板上的固定电极和形成在基板上的可移动电阻器，可移动电阻器用作将MEMS开关设置为的电位分开的电阻器导通状态。

38. 发明授权

US08525277B2 MEMS device 有权
标题翻译： MEMS器件
公开(公告)号：US08525277B2
公开(公告)日：2013-09-03
申请号：US13079988
申请日：2011-04-05
申请人： Shogo Inaba
发明人： Shogo Inaba
IPC分类号： H01L29/84
CPC分类号： B81B3/0081 , B81B2207/99 , H01L23/5256 , H01L2924/0002 , H01L2924/00
摘要： A MEMS device includes a substrate, an insulating layer section formed above the substrate and having a cavity, a functional element contained in the cavity, and a fuse element contained in the cavity and electrically connected with the functional element. It is preferable that the fuse element is spaced apart from the substrate.
摘要翻译： MEMS器件包括衬底，形成在衬底上方并具有空腔的绝缘层部分，包含在空腔中的功能元件和容纳在腔中并与功能元件电连接的熔丝元件。优选地，熔丝元件与基板间隔开。

39. 发明授权

US08305152B2 MEMS oscillator and method of manufacturing thereof 有权
标题翻译： MEMS振荡器及其制造方法
公开(公告)号：US08305152B2
公开(公告)日：2012-11-06
申请号：US12974258
申请日：2010-12-21
申请人： Toru Watanabe , Shogo Inaba , Ryuji Kihara
发明人： Toru Watanabe , Shogo Inaba , Ryuji Kihara
IPC分类号： H03B5/30 , H03H9/205
CPC分类号： H03B5/30 , H03H3/0072 , H03H9/2457
摘要： An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.
摘要翻译：振荡器包括：形成在基板上的多个MEMS振动器; 以及连接到所述多个MEMS振动器的振荡器配置电路，其中所述多个MEMS振子各自具有波束结构，并且所述各个波束结构不同，由此它们的谐振频率不同。

40. 发明申请

US20120256692A1 OSCILLATOR 审中-公开
标题翻译：振荡器
公开(公告)号：US20120256692A1
公开(公告)日：2012-10-11
申请号：US13439362
申请日：2012-04-04
申请人： Aritsugu YAJIMA , Shogo INABA , Ryuji KIHARA
发明人： Aritsugu YAJIMA , Shogo INABA , Ryuji KIHARA
IPC分类号： H03L7/083
CPC分类号： H03B5/30 , H03B2200/0022 , H03L7/099 , H03L7/183
摘要： An oscillator includes: a substrate; a reference oscillation circuit including a first MEMS oscillator disposed above the substrate, the reference oscillation circuit outputting a first oscillation signal; at least one voltage-controlled oscillation circuit including a second MEMS oscillator disposed above the substrate, the oscillation frequency of the at least one voltage-controlled oscillation circuit being controlled based on a control signal, the at least one voltage-controlled oscillation circuit outputting a second oscillation signal; a frequency division circuit dividing the frequency of the second oscillation signal and outputting a frequency division signal; and a phase-comparison circuit outputting the control signal based on a phase difference between the frequency division signal and the first oscillation signal, wherein the first MEMS oscillator and the second MEMS oscillator each have a first electrode and a second electrode, the second electrode has a movable part disposed so as to face the first electrode.
摘要翻译：振荡器包括：基板; 参考振荡电路，包括设置在所述衬底上方的第一MEMS振荡器，所述参考振荡电路输出第一振荡信号; 至少一个压控振荡电路，其包括设置在所述衬底上方的第二MEMS振荡器，所述至少一个压控振荡电路的振荡频率基于控制信号进行控制，所述至少一个压控振荡电路输出第二振荡信号; 分频电路，分频第二振荡信号的频率并输出分频信号; 以及相位比较电路，其基于所述分频信号和所述第一振荡信号之间的相位差输出所述控制信号，其中，所述第一MEMS振荡器和所述第二MEMS振荡器各自具有第一电极和第二电极，所述第二电极具有以与第一电极相对的方式设置的可动部。

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