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    • 35. 发明授权
    • Light-sensitive composition comprising a diazonium compound and a
macromer as the polymeric binder
    • 包含重氮化合物和大分子单体作为聚合物粘合剂的感光组合物
    • US5300397A
    • 1994-04-05
    • US898330
    • 1992-06-15
    • Keitaro Aoshima
    • Keitaro Aoshima
    • G03F7/00C08F290/04C09D5/00C09D155/00G03F7/021G03F7/027G03F7/038H01L21/027H01L21/30G03F7/016G03C1/77
    • G03F7/021
    • A light-sensitive composition comprising a diazonium compound and a polymer binder wherein the polymer binder comprises structural units represented by the following formula (I); ##STR1## wherein X represents a single bond, an ester bond or an amide bond; and Y represents a polymer group comprising structural units represented by the following formula (II); ##STR2## where Z represents ##STR3## R.sup.1 and R.sup.3 represent hydrogen atom or methyl group; R.sup.2 and R represent a single bond or a divalent bridging group; and R.sup.5 and R.sup.6 represent hydrogen atom or optionally substituted hydrocarbon group having 1 to 15 carbon atoms; and R.sup.7 represents an optionally substituted hydrocarbon group having 1 to 15 carbon atoms. The present light-sensitive composition exhibits extremely enhanced sensitivity and hence gives sufficient image formation with a short light exposure time.
    • 一种包含重氮化合物和聚合物粘合剂的感光组合物,其中所述聚合物粘合剂包含由下式(I)表示的结构单元; (*化学结构*)(I)其中X表示单键,酯键或酰胺键; Y表示由下述式(II)表示的结构单元的聚合物组。 (*化学结构*)(II)其中Z表示(*化学结构*)-SO 3 H或-CONHSO 2 R 7; R1和R3表示氢原子或甲基; R2和R表示单键或二价桥连基团; R5和R6代表氢原子或任选取代的具有1至15个碳原子的烃基; 并且R 7表示具有1至15个碳原子的任选取代的烃基。 本发明的感光组合物显示出极高的灵敏度,因此在短的曝光时间内得到足够的成像。