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    • 53. 发明申请
    • NAND Programming Technique
    • NAND编程技术
    • US20110149654A1
    • 2011-06-23
    • US12644408
    • 2009-12-22
    • Akira GodaAndrew BicklerHaitao LiuTomoharu Tanaka
    • Akira GodaAndrew BicklerHaitao LiuTomoharu Tanaka
    • G11C16/04G11C16/06
    • G11C16/3418G11C16/0408G11C16/06
    • A NAND memory array is programmed applying a programming voltage Vpgm as a double pulse programming pulse if a data pattern associated with memory cells that are to be programmed form a two-sided column-stripe (CS2) data pattern. The CS2 data pattern comprises a memory cell that is not to be programmed directly between two memory cells that are to be programmed, such that a channel associated with the memory cell that is not to be programmed has an applied boost voltage, and the channels associated with the two memory cells that are to be programmed have an applied programming voltage. The first memory cell of the two memory cells is programmed by the first programming voltage pulse and the second memory cell is programmed by the second programming voltage pulse. A programming voltage Vpgm is applied as a single pulse if a CS2 data pattern is not formed.
    • 如果与要编程的存储器单元相关联的数据模式形成双面列条带(CS2)数据模式,则NAND存储器阵列被编程为将编程电压Vpgm应用为双脉冲编程脉冲。 CS2数据模式包括不被直接编程在待编程的两个存储器单元之间的存储器单元,使得与不被编程的存储器单元相关联的通道具有施加的升压电压,并且所述通道相关联 要编程的两个存储单元具有应用的编程电压。 两个存储单元的第一存储单元由第一编程电压脉冲编程,第二存储单元由第二编程电压脉冲编程。 如果没有形成CS2数据模式,则将编程电压Vpgm作为单个脉冲施加。
    • 58. 发明申请
    • SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体存储器件及其制造方法
    • US20090267136A1
    • 2009-10-29
    • US12498149
    • 2009-07-06
    • Akira GodaMitsuhiro Noguchi
    • Akira GodaMitsuhiro Noguchi
    • H01L29/792H01L21/336
    • H01L27/115H01L27/105H01L27/11568H01L27/11573
    • A semiconductor memory device having a memory cell region and a peripheral circuit region, and a method of manufacturing such a semiconductor memory device, are proposed, in which trench grooves are formed to be shallow in the memory cell region in order to improve the yield, and trench grooves are formed to be deep in the high voltage transistor region of the peripheral circuit region, in particular in a high voltage transistor region thereof, in order to improve the element isolation withstand voltage. A plurality of memory cell transistors having an ONO layer 15 serving as a charge accumulating insulating layer are provided in the memory cell region, where element isolation grooves 6 for these memory cell transistors are narrow and shallow. Two types of transistors, one for high voltage and the other for low voltage, having gate insulating layers 16 or 17, which are different from the ONO layer 15 in the memory cell region, are provided in the peripheral circuit region, where at least element isolation grooves 23 for high voltage transistors are wide and deep. In this way, it is possible to improve the degree of integration and yield in the memory cell region, and secure withstand voltage in the peripheral circuit region.
    • 提出了具有存储单元区域和外围电路区域的半导体存储器件以及制造这种半导体存储器件的方法,其中沟槽形成在存储单元区域中较浅以提高产量, 并且在周边电路区域的高电压晶体管区域,特别是在其高压晶体管区域中形成深沟槽,以便提高元件隔离耐受电压。 在存储单元区域中设置有多个具有作为电荷累积绝缘层的ONO层15的存储单元晶体管,其中用于这些存储单元晶体管的元件隔离槽6窄而浅。 在外围电路区域中设置两个类型的晶体管,一个用于高电压,另一个用于低电压,具有与存储单元区域中的ONO层15不同的栅极绝缘层16或17,其中至少元件 用于高压晶体管的隔离槽23宽而深。 以这种方式,可以提高存储单元区域的集成度和产量,并且确保外围电路区域中的耐受电压。