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61. 发明申请

US20050245011A1 Micromachine and method of manufacturing the micromachine 失效
标题翻译：微机械和微机械的制造方法
公开(公告)号：US20050245011A1
公开(公告)日：2005-11-03
申请号：US10522080
申请日：2003-07-14
申请人： Masahiro Tada , Takashi Kinoshita , Takeshi Taniguchi , Koichi Ikeda
发明人： Masahiro Tada , Takashi Kinoshita , Takeshi Taniguchi , Koichi Ikeda
IPC分类号： B81B3/00 , B81C1/00 , H03H3/007 , H03H9/02 , H03H9/24 , H03H9/46 , H01L21/336
CPC分类号： H03H9/2463 , H03H3/0072
摘要： To obtain a micromachine for use as a high frequency filter having a high Q value and a higher frequency band. In a micromachine (20) including: an input electrode (7b), an output electrode (7a), and a support electrode (7c) disposed on a substrate (4); and a band-shaped vibrator electrode (15) formed by laying a beam (vibrating part) (16) over the output electrode (7a) with a space part (A) interposed between the output electrode (7a) and the vibrator electrode (15) in a state in which both end parts of the vibrator electrode (15) are supported on the input electrode (7b) and the substrate (4) with the support electrode (7c) interposed between the substrate (4) and the vibrator electrode (15), the entire surface of both end parts of the vibrator electrode (15) from an edge of the end parts to the beam (16) is completely fixed to the input electrode (7b) and the support electrode (7c).
摘要翻译：为了获得用作具有高Q值和较高频带的高频滤波器的微机械。在微机械（20）中，包括：输入电极（7b），输出电极（7a）和设置在基板（4）上的支撑电极; 以及通过将输入电极（7a）上的光束（振动部分）（16）放置在输出电极（7a）和振动器电极（7a）之间的空间部分（A）而形成的带状振动器电极（15）（15）的两个端部被支撑在输入电极（7b）和基板（4）的状态下，支撑电极（7c）插入在基板（4）和振动电极（15）从振动电极（15）的两端部到端部（16）的边缘的整个表面完全固定到输入电极（7b）和支撑电极 7 c）。

62. 发明申请

US20050212612A1 Tunable filter and portable telephone 失效
标题翻译：可调滤波器和便携式电话
公开(公告)号：US20050212612A1
公开(公告)日：2005-09-29
申请号：US11039872
申请日：2005-01-24
申请人： Takashi Kawakubo , Ryoichi Ohara , Kazuhide Abe , Hiroshi Yoshida , Hiroshi Tsurumi
发明人： Takashi Kawakubo , Ryoichi Ohara , Kazuhide Abe , Hiroshi Yoshida , Hiroshi Tsurumi
IPC分类号： H01G7/06 , H03B5/00 , H03H7/075 , H03H7/12 , H03H9/00 , H03H9/17 , H03H9/46 , H03H9/54 , H03H9/58 , H03H9/60 , H03H9/64 , H03H11/04 , H03J1/00 , H03J3/08
CPC分类号： H03J3/08 , H03H9/542 , H03H9/605 , H03H2210/012 , H03H2210/015 , H03J1/0008
摘要： A tunable filter has a plurality of variable capacitors and a plurality of inductor elements, each being formed on a common substrate, a filter circuit formed by using at least a portion of the plurality of variable capacitors and a portion of the plurality of inductor elements, a monitor circuit formed by using at least a portion of the plurality of variable capacitors and a portion of the plurality of inductor elements, a detecting circuit which detects a prescribed circuit constant of the monitor circuit, a storage which stores information relating to a reference circuit constant of the monitor circuit, and a capacitance control circuit which controls capacitance of the variable capacitors in the monitor circuit and capacitance of the variable capacitors in the filter circuit, based on a result detected by the detecting circuit and information stored in the storage.
摘要翻译：可调谐滤波器具有多个可变电容器和多个电感器元件，每个电感器元件形成在公共基板上，通过使用多个可变电容器的至少一部分和多个电感器元件的一部分形成的滤波器电路，通过使用多个可变电容器的至少一部分和多个电感器元件的一部分形成的监视电路，检测监视电路的规定电路常数的检测电路，存储与参考电路有关的信息的存储器基于由检测电路检测的结果和存储在存储器中的信息，控制监视电路中的可变电容器的电容和滤波器电路中的可变电容器的电容的电容控制电路。

63. 发明授权

US06846691B2 Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby 有权
标题翻译：用于制造具有至少一个横向的小间隙的微机械结构的方法和由此产生的微机械装置
公开(公告)号：US06846691B2
公开(公告)日：2005-01-25
申请号：US10625992
申请日：2003-07-24
申请人： Wan-Thai Hsu , John R. Clark , Clark T. C. Nguyen
发明人： Wan-Thai Hsu , John R. Clark , Clark T. C. Nguyen
IPC分类号： B81B3/00 , H03H3/007 , H03H3/013 , H03H9/02 , H03H9/24 , H03H9/46 , H03H9/50 , H01L21/00
CPC分类号： B81C1/0019 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81B2203/0307 , B81C1/00626 , B81C2201/0109 , H03H3/007 , H03H3/0072 , H03H3/013 , H03H9/02362 , H03H9/2436 , H03H9/46 , H03H9/462 , H03H9/505 , H03H2009/02496
摘要： A method and resulting formed device are disclosed wherein the method combines polysilicon surface-micromachining with metal electroplating technology to achieve a capacitively-driven, lateral micromechanical resonator with submicron electrode-to-resonator capacitor gaps. Briefly, surface-micromachining is used to achieve the structural material for a resonator, while conformal metal-plating is used to implement capacitive transducer electrodes. This technology makes possible a variety of new resonator configurations, including disk resonators and lateral clamped-clamped and free-free flexural resonators, all with significant frequency and Q advantages over vertical resonators. In addition, this technology introduces metal electrodes, which greatly reduces the series resistance in electrode interconnects, thus, minimizing Q-loading effects while increasing the power handling ability of micromechanical resonators.
摘要翻译：公开了一种方法和产生的形成的器件，其中该方法将多晶硅表面微机械加工与金属电镀技术相结合，以实现具有亚微米电极到谐振器的电容器间隙的电容驱动的横向微机械谐振器。简而言之，使用表面微加工来实现谐振器的结构材料，而使用保形金属镀来实现电容式换能器电极。该技术使得各种新的谐振器配置成为可能，包括磁盘谐振器和横向夹紧和自由弯曲谐振器，与垂直谐振器相比具有显着的频率和Q优点。此外，该技术引入了金属电极，这大大降低了电极互连中的串联电阻，从而在增加微机械谐振器的功率处理能力的同时最大限度地减小了Q负载效应。

64. 发明授权

US6150901A Programmable RF/IF bandpass filter utilizing MEM devices 有权
标题翻译：利用MEM器件的可编程RF / IF带通滤波器
公开(公告)号：US6150901A
公开(公告)日：2000-11-21
申请号：US197166
申请日：1998-11-20
申请人： Floyd Van Auken
发明人： Floyd Van Auken
IPC分类号： H03H7/12 , H03H15/02 , H03H9/46
CPC分类号： H03H7/12 , H01G5/40 , H03H15/02
摘要： A programmable high frequency (HF) bandpass filter is disclosed. The programmable filter has a tunable bandwidth and center frequency over a large range of the radio frequency (RF) and intermediate frequency (IF) spectrum. The programmable filter incorporates micro-electro-mechanical switches (MEMS), Acoustic Charge Transport (ACT) devices, or a combination thereof, to provide tunability of the bandpass filter response characteristics.
摘要翻译：公开了一种可编程高频（HF）带通滤波器。可编程滤波器在射频（RF）和中频（IF）频谱的大范围内具有可调谐带宽和中心频率。可编程滤波器包括微机电开关（MEMS），声电荷传输（ACT）器件或其组合，以提供带通滤波器响应特性的可调性。

65. 发明授权

US6046656A Elastic boundary wave device and method of its manufacture 有权
标题翻译：弹性边界波装置及其制造方法
公开(公告)号：US6046656A
公开(公告)日：2000-04-04
申请号：US147485
申请日：1999-01-08
申请人： Naoyuki Mishima
发明人： Naoyuki Mishima
IPC分类号： H03H9/145 , H03H9/02 , H03H9/46 , H03H9/15
CPC分类号： H03H9/0222 , Y10T29/42
摘要： A boundary wave device and a fabrication method thereof that allow the conversion efficiency of a boundary wave excited by electrodes to be improved and prevents the device from being affected by parasitical resistance between the electrodes are provided. interdigital transducers 3 are formed on a main surface of a piezoelectric first substrate 2. A dielectric film 5 is formed on a main surface of the first substrate 2 so that the dielectric film 5 coats the interdigital transducers 3 and has a smooth surface 4. A Si second substrate 6 is layered on the dielectric film 5.
摘要翻译： PCT No.PCT / JP98 / 02008 Sec。 371日期1999年1月8日第 102（e）日期1999年1月8日PCT提交1998年5月6日PCT公布。公开号WO98 / 51011 PCT 日期：1998年11月12日提供允许改善由电极激发的边界波的转换效率的边界波器件及其制造方法，并且防止器件受到电极之间的寄生电阻的影响。叉指换能器3形成在压电第一基板2的主表面上。电介质膜5形成在第一基板2的主表面上，使得电介质膜5涂覆叉指换能器3并具有平滑表面4.A Si第二基板6层叠在电介质膜5上。

66. 发明授权

US5734304A Coaxial dielectric filter having adjacent resonators disposed in opposite directions 失效
公开(公告)号：US5734304A
公开(公告)日：1998-03-31
申请号：US688502
申请日：1996-07-30
申请人： Satoshi Kazama , Tatsuya Imaizumi
发明人： Satoshi Kazama , Tatsuya Imaizumi
IPC分类号： H01P1/205 , H01P1/213 , H03H9/46
CPC分类号： H01P1/2053
摘要： A wave filter having two or more dielectric resonators of substantially tubular shape juxtaposed on a base structure with their longitudinal orientations reversed alternately. The resonator terminals are therefore staggered on both sides of the juxtaposition of the resonators and thus better electrically isolated from one another than if all the resonators are oriented in the same longitudinal direction. The base structure is of ceramic material, having coupling elements, terminals, and all necessary electrical connections formed thereon or embedded therein.

67. 发明授权

US4327341A Electromechanical filter cells 失效
标题翻译：机电滤芯
公开(公告)号：US4327341A
公开(公告)日：1982-04-27
申请号：US167702
申请日：1980-07-11
申请人： Herbert Ernyei
发明人： Herbert Ernyei
IPC分类号： H03H9/46 , H03H9/50 , H03H9/00
CPC分类号： H03H9/46 , H03H9/50
摘要： Each cell includes two longitudinally vibrating cylindrical resonators and a flexurally vibrating coupler connected between the two resonators. The diameter of the coupler is defined by the expression: ##EQU1## wherein: d.sub.r is the diameter of the resonatorsl.sub.c is the length of the coupler.OMEGA..sup.+ =f.sup.+ /f.sub.o is the upper relative of the band of frequencies to be transmitted, f.sup.+ the uper frequency of said band and f.sub.o the tuning frequency of the resonators ##EQU2## with l.sub.o the length of the coupler corresponding to a quarter wave effectd.sub.r.sup.+ =2.pi.n.sub.r m.OMEGA..sup.+where m is the order of the vibration mode of the resonators and n.sub.r =l.sub.r /.lambda..sub.o with l.sub.r the length of the resonators and .lambda..sub.o the wavelength at the tuning frequency of the resonators in longitudinal vibration.
摘要翻译：每个电池包括两个纵向振动的圆柱形谐振器和连接在两个谐振器之间的弯曲振动的耦合器。耦合器的直径由以下表达式定义：dc = + TR 其中：dr是谐振器的直径lc是耦合器的长度OMEGA + = f + / fo是频带的上相对于被发送，f +所述频带的上行频率，并且由谐振器的调谐频率与对应于四分之一波效应的耦合器的长度相对应，其中m是振动模式的顺序的谐振器和nr = lr /λo，其中lr是谐振器的长度，λo是谐振器在纵向振动中的调谐频率处的波长。

68. 发明授权

US4140984A Mechanical filter 失效
标题翻译：机械过滤器
公开(公告)号：US4140984A
公开(公告)日：1979-02-20
申请号：US818019
申请日：1977-07-22
申请人： Ichiro Imaguchi
发明人： Ichiro Imaguchi
IPC分类号： H03H9/00 , H03H9/125 , H03H9/46 , H03H9/50 , H03H9/04 , H01L41/08 , H03H9/26
CPC分类号： H03H9/125 , H03H9/50
摘要： A mechanical filter including resonators, a coupler for longitudinally coupling the resonators, electro-mechanical transducers coupled to the opposite ends of the coupler, and lead wires led out from the transducers. Each of the transducers comprises a piezoelectric ceramic resonator adapted for longitudinal resonance and having electrodes attached to the opposite end faces thereof, and one of the end faces of the piezoelectric ceramic resonator is formed with a coupling hole which is located substantially on the axis thereof and extends lengthwise of the ceramic resonator. Each end of the coupler is inserted into the coupling hole with an electrically conductive adhesive to thereby couple the coupler and ceramic resonators. The aforementioned lead wires may be connected to the electrodes and wound about the piezoelectric ceramic resonators through a predetermined number of turns, and may be secured to the ceramic resonators by an adhesive having rubber-like elasticity.
摘要翻译：包括谐振器的机械滤波器，用于纵向耦合谐振器的耦合器，耦合到耦合器的相对端的机电换能器以及从换能器引出的引线。每个换能器包括适于纵向共振并且具有附接到其相对端面的电极的压电陶瓷谐振器，并且压电陶瓷谐振器的一个端面形成有基本上位于其轴线上的耦合孔，延伸到陶瓷谐振器的纵向。耦合器的每个端部用导电粘合剂插入耦合孔中，从而耦合耦合器和陶瓷谐振器。上述引线可以连接到电极，并以预定数量的匝缠绕在压电陶瓷谐振器周围，并且可以通过具有橡胶状弹性的粘合剂固定到陶瓷谐振器。

69. 发明授权

US4091345A Electromechanical filter having a wide temperature range 失效
标题翻译：具有宽温度范围的机电滤波器
公开(公告)号：US4091345A
公开(公告)日：1978-05-23
申请号：US717824
申请日：1976-08-26
申请人： Takeshi Yano , Seiichiro Kanazawa , Takehiro Futami , Yasuyuki Ishiyama
发明人： Takeshi Yano , Seiichiro Kanazawa , Takehiro Futami , Yasuyuki Ishiyama
IPC分类号： H03H9/46 , H03H9/50 , H03H9/52 , H03H9/04 , H01L41/10 , H03H7/38 , H03H9/26
CPC分类号： H03H9/52 , H03H9/50
摘要： An electromechanical filter comprises a mechanical resonator, a pair of electromechanical transducers mechanically coupled to each other with the resonator interposed, and a pair of external matching circuits electrically connected to the respective transducers. Each matching circuit comprises a coil and a temperature-compensation capacitor connected to form a resonance circuit with the equivalent parallel capacitance of the associated transducer included therein. Resonant frequencies of the respective resonance circuits are rendered different from the passband center frequency of the filter. Preferably, the first-order temperature coefficients of the resonant frequency and the equivalent inductance of each transducer are selected to be (1) both negative and (2) positive and negative as the resonant frequency of the associated resonance circuit is rendered (1) higher and (2) lower than the center frequency.
摘要翻译：机电滤波器包括机械谐振器，一对机电换能器，其机械耦合在一起插入谐振器，以及一对电连接到各个换能器的外部匹配电路。每个匹配电路包括线圈和温度补偿电容器，其连接以形成其中包括的相关联的换能器的等效并联电容的谐振电路。使各个谐振电路的谐振频率与滤波器的通带中心频率不同。优选地，谐振频率的一阶温度系数和每个换能器的等效电感被选择为：（1）相关联的谐振电路的谐振频率呈现（1）为负和（2）正和负（1）较高和（2）低于中心频率。

70. 发明授权

US3808563A Filter and method for its manufacture 失效
标题翻译：过滤器及其制造方法
公开(公告)号：US3808563A
公开(公告)日：1974-04-30
申请号：US28327772
申请日：1972-08-24
申请人： LICENTIA GMBH
发明人： BORNER M , SCHUSSLER H
IPC分类号： H03H9/46 , H03H3/007 , H03H9/50 , H03H9/04 , H03H9/26
CPC分类号： H03H9/50 , H03H3/007 , Y10T29/42
摘要： An electromechanical filter having a first and a second transducer resonator and a plurality of additional resonators, each resonator having first and second end surfaces. The resonators are arranged substantially parallel to one another. Two longitudinally vibrating thin, coupling wires are respectively coupled to the first end surfaces and to the second end surfaces. A plurality of thin, metal mounting strips are fastened to the resonators. The thickness d, and length 1, of each of the mounting elements corresponds approximately to the equation:
摘要翻译：一种具有第一和第二换能器谐振器和多个附加谐振器的机电滤波器，每个谐振器具有第一和第二端面。谐振器被布置成基本上彼此平行。两个纵向振动的薄的耦合线分别耦合到第一端面和第二端面。多个薄的金属安装条被紧固到谐振器。每个安装元件的厚度d和长度1大致对应于以下等式：d / l2 =ω=α2ROOT rho / E这样的机电滤波器通过将每个谐振器固定到安装元件上，并且去除材料根据需要从至少一个谐振器进行调谐。

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