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61. 发明申请

US20210132109A1 METHODS AND DEVICES CONFIGURED TO OPERATED SCANNING TUNNELING MICROSCOPES USING OUT-OF-BANDWIDTH FREQUENCY COMPONENTS ADDED TO BIAS VOLTAGE AND RELATED SOFTWARE 有权
公开(公告)号：US20210132109A1
公开(公告)日：2021-05-06
申请号：US17089214
申请日：2020-11-04
申请人： Board of Regents, The University of Texas System
发明人： Seyed Omid Reza Moheimani , Hamed Alemansour
IPC分类号： G01Q10/06 , H01J37/317 , G01Q80/00 , G01Q60/10 , H01J37/28
摘要： In the system and method disclosed, an ultrahigh vacuum (UHV) scanning tunneling microscope (STM) tip is used to selectively desorb hydrogen atoms from the Si(100)-2X1:H surface by injecting electrons at a negative sample bias voltage. A new lithography method is disclosed that allows the STM to operate under imaging conditions and simultaneously desorb H atoms as required. A high frequency signal is added to the negative sample bias voltage to deliver the required energy for hydrogen removal. The resulted current at this frequency and its harmonics are filtered to minimize their effect on the operation of the STM's feedback loop. This approach offers a significant potential for controlled and precise removal of hydrogen atoms from a hydrogen-terminated silicon surface and thus may be used for the fabrication of practical silicon-based atomic-scale devices.

62. 发明授权

US10989735B2 Atomic force microscopy tips for interconnection 有权
公开(公告)号：US10989735B2
公开(公告)日：2021-04-27
申请号：US16781490
申请日：2020-02-04
申请人： Facebook Technologies, LLC
发明人： Ali Sengül , Oscar Torrents Abad , Zheng Sung Chio , Pooya Saketi , Daniel Brodoceanu
IPC分类号： G01Q60/38 , G01Q60/36 , G01Q60/30
摘要： Embodiments relate to the design of an electronic device capable of preventing a lateral motion between a first body and a second body. The device comprises a first body comprising one or more atomic force microscopy (AFM) tips protruding from a first surface of the first body. The device further comprises a second body comprising one or more electrical contacts on a second surface of the second body. The second surface faces the first surface. The one or more electrical contacts pierced by the AFM tips of the first surface to prevent a lateral motion between the first body and the second body.

63. 发明授权

US10983075B2 Device and method for analysing a defect of a photolithographic mask or of a wafer 有权
公开(公告)号：US10983075B2
公开(公告)日：2021-04-20
申请号：US15481693
申请日：2017-04-07
申请人： Carl Zeiss SMT GmbH
发明人： Gabriel Baralia , Christof Baur , Klaus Edinger , Thorsten Hofmann , Michael Budach
IPC分类号： G01N23/2251 , H01J37/317 , G03F1/84 , G01Q30/04 , G01Q60/38 , G02B21/00 , G03F7/20 , H01J37/28 , H01J37/32 , G01Q80/00 , G01Q70/06
摘要： The present application relates to a scanning probe microscope comprising a probe arrangement for analyzing at least one defect of a photolithographic mask or of a wafer, wherein the scanning probe microscope comprises: (a) at least one first probe embodied to analyze the at least one defect; (b) means for producing at least one mark, by use of which the position of the at least one defect is indicated on the mask or on the wafer; and (c) wherein the mark is embodied in such a way that it may be detected by a scanning particle beam microscope.

64. 发明申请

US20210109128A1 SUBSURFACE ATOMIC FORCE MICROSCOPY WITH GUIDED ULTRASOUND WAVES 有权
公开(公告)号：US20210109128A1
公开(公告)日：2021-04-15
申请号：US16604000
申请日：2018-04-23
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： Daniele Piras , Paul Louis Maria Joseph van Neer , Hamed Sadeghian Marnani
IPC分类号： G01Q60/42 , G01N29/265 , G01N29/06
摘要： Methods and systems for subsurface imaging of nanostructures buried inside a plate shaped substrate are provided. An ultrasonic generator at a side face of the substrate is used to couple ultrasound waves (W) into an interior of the substrate. The interior has or forms a waveguide for propagating the ultrasound waves (W) in a direction (X) along a length of the substrate transverse to the side face. The nanostructures are imaged using an AFM tip to measure an effect (E) at the top surface caused by direct or indirect interaction of the ultrasound waves (W) with the buried nanostructures.

65. 发明授权

US10976344B1 System and method for performing scanning tunneling microscopy on current-carrying samples 有权
公开(公告)号：US10976344B1
公开(公告)日：2021-04-13
申请号：US16706171
申请日：2019-12-06
申请人： UNIVERSITY OF MARYLAND, COLLEGE PARK , Government of the United States as represented by the Director, National Security Agency
发明人： Ting Xie , Michael Dreyer , Isaak D. Mayergoyz , Robert E. Butera , Charles S. Krafft
IPC分类号： G01Q60/14 , G01R33/038 , G01Q10/06 , G01Q60/54
摘要： A scanning tunneling microscopy based potentiometry system and method for the measurements of the local surface electric potential is presented. A voltage compensation circuit based on this potentiometry system and method is developed and employed to maintain a desired tunneling voltage independent of the bias current flow through the film. The application of this potentiometry system and method to the local sensing of the spin Hall effect is outlined herein, along with the experimental results obtained.

66. 发明授权

US10969405B2 Method and apparatus for sub-diffraction infrared imaging and spectroscopy and complementary techniques 有权
$Method and apparatus for sub-diffraction infrared imaging and spectroscopy and complementary techniques$
公开(公告)号：US10969405B2
公开(公告)日：2021-04-06
申请号：US15826147
申请日：2017-11-29
申请人： Photothermal Spectroscopy Corp.
发明人： Roshan Shetty , Kevin Kjoller , Craig Prater
IPC分类号： G01N21/17 , G01N21/31 , G01N21/65 , G01Q30/02 , G01N21/3563
摘要： Methods and apparatus for performing chemical spectroscopy on samples from the scale of nanometers to millimeters or more with a multifunctional platform combining analytical and imaging techniques including atomic force microscopy, infrared spectroscopy, confocal microscopy, Raman spectroscopy and mass spectrometry. For infrared spectroscopy, a sample is illuminated with infrared light and the resulting sample distortion is read out with either a focused UV/visible light beam and/or AFM tip. Using the AFM tip or the UV/visible light beam it is possible to measure the IR absorption characteristics of a sample with spatial resolution ranging from around 1 μm or less to the nanometer scale. The combination of both techniques provides a rapid and large area survey scan with the UV/visible light and a high resolution measurement with the AFM tip. The methods and apparatus also include the ability to analyze light reflected/scattered from the sample via a Raman spectrometer for complementary analysis by Raman spectroscopy. Using a UV/vis source or IR source at higher intensity it is possible to thermally desorb material from a sample for analysis by mass spectrometry. The AFM tip can also be heated to desorb material for mass spec analysis at even higher spatial resolution.

67. 发明授权

US10969404B2 Scanning probe system 有权
公开(公告)号：US10969404B2
公开(公告)日：2021-04-06
申请号：US16603503
申请日：2018-04-06
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q10/06
摘要： A method of scanning a feature with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever. An orientation of the probe is measured relative to a reference surface to generate a probe orientation measurement. The reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis. A shape of the cantilever is changed in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle. A sample surface is scanned with the probe, wherein the sample surface defines a sample surface axis which is normal to the sample surface and the probe tip has a scanning tilt angle relative to the sample surface axis. During the scanning of the sample surface the cantilever mount is moved so that the probe tip is inserted into a feature in the sample surface with the scanning tilt angle below the first reference tilt angle.

68. 发明申请

US20210096152A1 MICRO-OPTOMECHANICAL SYSTEM AND METHOD FOR THE PRODUCTION THEREOF 有权
公开(公告)号：US20210096152A1
公开(公告)日：2021-04-01
申请号：US15733175
申请日：2018-12-04
申请人： Karlsruher Institut für Technologie
发明人： Philipp-Immanuel Dietrich , Gerald Goering , Matthias Blaicher , Mareike Trappen , Hendrik Hölscher , Christian Koos
IPC分类号： G01Q10/04 , H01H1/00 , G02B26/08
摘要： The present invention relates to a micro-optomechanical system (500) and to a method for the production thereof. The micro-optomechanical system (500) comprises at least one optical subsystem (100) configured for emitting at least one optical actuator signal (212) and for receiving at least one optical sensor signal (211); and at least one optomechanical structure (150) which is producible in direct contact with the optical subsystem (100) by means of a direct writing microstructuring method, wherein the optical subsystem (100) comprises at least one optical actuation element (219) and at least one optical sensor element (140), wherein the optical actuator signal (212) in interaction with the optical actuation element (219) is configured for changing a mechanical state of the optomechanical structure (150), and wherein the optical sensor signal (211) in interaction with the optical sensor element (140) is configured for detecting the change in the mechanical state of the optomechanical structure (150) or a variable related thereto. The micro-optomechanical systems (500) provided have virtually any desired shaping in conjunction with very high resolution and are therefore suitable for a wide range of applications.

69. 发明申请

US20210072282A1 SCANNING TUNNELING THERMOMETER 有权
公开(公告)号：US20210072282A1
公开(公告)日：2021-03-11
申请号：US17092722
申请日：2020-11-09
申请人： Arizona Board of Regents on Behalf of the University of Arizona
发明人： Abhay Shankar Chinivaranahalli Shastry , Charles Allen Stafford
IPC分类号： G01Q60/10 , G01K11/00 , G01Q60/58 , G01Q60/14
摘要： Various examples are provided related to scanning tunneling thermometers and scanning tunneling microscopy (STM) techniques. In one example, a method includes simultaneously measuring conductance and thermopower of a nanostructure by toggling between: applying a time modulated voltage to a nanostructure disposed on an interconnect structure, the time modulated voltage applied at a probe tip positioned over the nanostructure, while measuring a resulting current at a contact of the interconnect structure; and applying a time modulated temperature signal to the nanostructure at the probe tip, while measuring current through a calibrated thermoresistor in series with the probe tip. In another example, a device includes an interconnect structure with connections to a first reservoir and a second reservoir; and a scanning tunneling probe in contact with a probe reservoir. Electrical measurements are simultaneously obtained for temperature and voltage applied to a nanostructure between the reservoirs.

70. 发明申请

US20210055326A1 SCANNING PROBE MICROSCOPE AND ANALYSIS METHOD 有权
公开(公告)号：US20210055326A1
公开(公告)日：2021-02-25
申请号：US16959392
申请日：2018-01-29
申请人： Shimadzu Corporation
发明人： Hiroshi ARAI , Masato HIRADE
IPC分类号： G01Q30/06
摘要： A scanning probe microscope 1 is provided with a control unit 15. The control unit 15 includes a signal acquisition processing unit 151, an image acquisition processing unit 152, a scanning condition change processing unit 154, a scanning processing unit 155, and a noise determination processing unit 156. In the scanning probe microscope 1, when removing noise included in a surface image of a sample, the scanning condition change processing unit 154 changes a scanning condition. And, the signal acquisition processing unit 151 acquires an output signal from a detection unit 12. The image acquisition processing unit 152 acquires a surface image of a sample S based on the output signal. The noise determination processing unit 156 determines whether or not noise is inclined in the output signal contains noise based on the change in the output signal or the change in the surface image of the sample S when the scanning condition is changed by the scanning condition change processing unit 154. Therefore, if noise is included in the output signal, it is possible to correctly determinate the fact.

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