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    • 84. 发明授权
    • Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
    • 使用薄金属层制造碳纳米管薄膜,层,织物,丝带,元件和制品的方法
    • US07560136B2
    • 2009-07-14
    • US10341055
    • 2003-01-13
    • Jonathan W. WardThomas RueckesBrent M. Segal
    • Jonathan W. WardThomas RueckesBrent M. Segal
    • C23C16/22C23C16/00
    • H01L21/3146B82Y10/00H01L29/43Y10S977/742Y10S977/75Y10S977/751
    • Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.
    • 公开了使用薄金属层制造碳纳米管薄膜,层,织物,丝带,元件和制品的方法。 将碳纳米管生长催化剂施加到基材的表面,包括一层或多层薄金属层。 对基板进行化学气相沉积的含碳气体以生长碳纳米管的无纺织物。 根据限定的图案选择性地去除无纺织物的部分以产生制品。 碳纳米管的无纺布可以通过将碳纳米管生长催化剂涂覆在晶片基板的表面上来制造催化剂的分散单层。 对基板进行化学气相沉积的含碳气体,使碳纳米管的无纺织物接触并覆盖晶片的表面,其中织物的密度基本上均匀。
    • 88. 发明申请
    • NANOTUBE-BASED SWITCHING ELEMENT
    • 基于NANOTUBE的开关元件
    • US20080290423A1
    • 2008-11-27
    • US11542524
    • 2006-10-03
    • Claude L. BertinThomas RueckesBrent M. Segal
    • Claude L. BertinThomas RueckesBrent M. Segal
    • H01L29/76
    • H01L29/0665B82Y10/00G11C13/025G11C23/00H01H1/0094H01H2001/0005H01L27/28H01L29/0673H01L29/73H01L29/78H01L51/0048H01L51/0508Y10S977/708Y10S977/762
    • Nanotube-based switching elements and logic circuits. Under one aspect, a switching element includes an input node; an output node; a nanotube channel element comprising a ribbon of nanotube fabric; and a control electrode disposed in relation to the nanotube channel element to form an electrically conductive channel between the input node and the output node, wherein the electrically conductive channel at least includes the nanotube channel element. Under another aspect, a switching element includes an input node; an output node; a nanotube channel element comprising at least one electrically conductive nanotube, the nanotube being clamped at both ends by a clamping structure; and a control electrode disposed in relation to the nanotube channel element to form an electrically conductive channel between the input node and the output node, wherein the electrically conductive channel at least includes the nanotube channel element.
    • 基于纳米管的开关元件和逻辑电路。 在一个方面,开关元件包括输入节点; 输出节点; 包括纳米管织物带的纳米管通道元件; 以及控制电极,其相对于所述纳米管通道元件设置,以在所述输入节点和所述输出节点之间形成导电通道,其中所述导电通道至少包括所述纳米管通道元件。 另一方面,开关元件包括输入节点; 输出节点; 包括至少一个导电纳米管的纳米管通道元件,所述纳米管通过夹持结构夹在两端; 以及控制电极,其相对于所述纳米管通道元件设置,以在所述输入节点和所述输出节点之间形成导电通道,其中所述导电通道至少包括所述纳米管通道元件。