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    • 7. 发明授权
    • Ultrasonic membrane transducer for an ultrasonic diagnostic probe
    • 用于超声波诊断探头的超声波换能器
    • US06784600B2
    • 2004-08-31
    • US10137491
    • 2002-05-01
    • Mareike Katharine KleeGeorg SchmitzJohn D. Fraser
    • Mareike Katharine KleeGeorg SchmitzJohn D. Fraser
    • H01L41047
    • H01L27/20B06B1/0688G10K13/00
    • The invention is directed towards structures for use with micro-formed membrane ultrasonic transducers, and methods for fabricating the structures. In one embodiment, the transducer includes a planar member having a piezoelectric material and spaced apart electrodes disposed on the planar member and coupled to the piezoelectric material for applying an electric field to the layer, and an acoustic backing member joined to the electrodes. In another embodiment, the transducer includes a planar member having a piezoelectric material that adjoins a semiconductor material, the semiconductor material having monolithically formed active circuits formed in the layer and coupled to the piezoelectric material. In still another embodiment, the transducer includes a planar member having a piezoelectric material, and an acoustic backing member having an adjoining layer of a semiconductor material having monolithically formed active circuits, the active circuits being coupled to the electrodes.
    • 本发明涉及用于微型薄膜超声换能器的结构,以及制造该结构的方法。 在一个实施例中,换能器包括平面构件,其具有压电材料和间隔开的电极,其设置在平面构件上并且耦合到用于向该层施加电场的压电材料,以及连接到电极的声学背衬构件。 在另一个实施例中,换能器包括具有邻接半导体材料的压电材料的平面构件,该半导体材料在该层中形成并且耦合到压电材料上的单片形式的有源电路。 在另一个实施例中,换能器包括具有压电材料的平面构件,以及具有具有单片形成的有源电路的半导体材料的邻接层的声学背衬构件,所述有源电路耦合到所述电极。