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    • 4. 发明授权
    • Method for manufacturing magnetoresistance element
    • 制造磁阻元件的方法
    • US06482329B1
    • 2002-11-19
    • US09381822
    • 2000-12-18
    • Migaku TakahashiSatoshi MiuraMasakiyo Tsunoda
    • Migaku TakahashiSatoshi MiuraMasakiyo Tsunoda
    • H01F4118
    • B82Y25/00B82Y40/00H01F41/18H01F41/308H01L43/12
    • A method of manufacturing a magnetoresistance element which can reproduce magnetic signals with higher sensitivity. The manufacturing method includes the steps of providing a vacuum below 10−9 Torr in a film forming chamber for forming a nonmagnetic layer and ferromagnetic layer; performing plasma-etching of the surface of a substrate body by using a mixture of a gas (a) containing at least oxygen or water introduced into the chamber and an Ar gas (b) introduced into the chamber in a vacuum, state controlled to higher than 10−9 Torr; and forming the nonmagnetic and ferromagnetic layers on the etched substrate body by sputtering a prescribed target by using the mixture of the gases (a) and (b).
    • 一种制造可以以更高灵敏度再现磁信号的磁阻元件的方法。 该制造方法包括以下步骤:在用于形成非磁性层和铁磁层的成膜室中提供10 -9乇以下的真空; 通过使用至少含有氧气或引入室中的水的气体(a)和在真空中引入室中的Ar气体(b)进行等离子体蚀刻,从而对基体的表面进行等离子体蚀刻,状态被控制到更高 超过10-9乇; 以及通过使用气体(a)和(b)的混合物溅射规定的靶材,在蚀刻的基板主体上形成非磁性和铁磁性层。
    • 5. 发明授权
    • Thermistor
    • 热敏电阻
    • US5534843A
    • 1996-07-09
    • US189163
    • 1994-01-28
    • Masakiyo TsunodaHiroaki NakajimaMasami Koshimura
    • Masakiyo TsunodaHiroaki NakajimaMasami Koshimura
    • H01C1/02H01C1/034H01C1/14H01C7/04H01C17/00H01C7/10
    • H01C7/008H01C1/034H01C1/1406
    • An insulating glass layer covers the surface of a thermistor element except at the two end surfaces. The insulating glass layer is partially or fully composed of crystallized glass. A terminal electrode is integrally formed on both end surfaces. The terminal electrodes include a baked-on electrode layer formed from a conductive paste. Layers of nickel and tin or lead/tin are plated onto the baked-on electrode. The insulating glass layer enhances shape-maintainability of the insulating glass layer and the baked-on electrodes, provides a smoother glass surface, resulting in a more aesthetically pleasing thermistor, prevents resistance variance due to plating of the baked-on electrodes and provides a strong anti-breaking strength thermistor. The coefficient of thermal expansion of the glass layer is less than the coefficient of thermal expansion of the thermistor element. This difference in coefficients of thermal expansion tends to help the thermistor element resist stress breakage.
    • 绝热玻璃层覆盖热敏电阻元件的表面,除了两个端面外。 绝缘玻璃层部分或全部由结晶玻璃组成。 端子电极整体形成在两个端面上。 端子电极包括由导电浆料形成的焙烤电极层。 镍和锡或铅/锡的层被镀在焙烤电极上。 绝缘玻璃层增强了绝缘玻璃层和烘烤电极的形状维持性,提供了更平滑的玻璃表面,从而形成了更美观的热敏电阻,防止了由于焙烤电极的电镀导致的电阻变化,并提供了强烈的 抗断强度热敏电阻。 玻璃层的热膨胀系数小于热敏电阻元件的热膨胀系数。 热膨胀系数的这种差异有助于热敏电阻元件抵抗应力断裂。