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    • 6. 发明申请
    • SUBSTRATE CUTTING DEVICE USING LASER BEAM
    • 使用激光束的基板切割装置
    • US20140353296A1
    • 2014-12-04
    • US14258856
    • 2014-04-22
    • Mitsuboshi Diamond Industrial Co., LTD.
    • Kenji FUKUHARA
    • B23K26/38B23K26/06B23K26/40
    • B23K26/06B23K26/082B23K26/38B23K26/382B23K26/40B23K2103/30B23K2103/50B23K2103/52
    • It is intended to enable a substrate made of a thick plate material with a high laser beam absorption rate to be easily processed by means of boring or so forth in a short time. The present device includes a work table (2) on which a substrate is disposed, a laser beam output section (15), a rotation unit, a beam focusing unit and a scan unit. The laser beam output section (15) is configured to output a laser beam, having a wavelength with an absorption rate of 50% or greater, onto the substrate. The rotation unit is configured to rotate the laser beam emitted from the laser beam output section (15) with a predetermined rotation radius. The beam focusing unit is configured to focus the laser beam from the rotating unit onto a depth position included within the substrate, the depth position is located closer to one substrate surface disposed on a laser beam irradiation side than to the other substrate surface. The scan unit is configured to scan the focused and rotated laser beam along a processing line, and is also configured to repeatedly execute the scanning so as to process the substrate.
    • 旨在使得由具有高激光束吸收速率的厚板材制成的基板能够在短时间内容易地通过镗孔等进行加工。 本装置包括其上设置有基板的工作台(2),激光束输出部(15),旋转单元,光束聚焦单元和扫描单元。 激光束输出部(15)被配置为将具有50%以上的吸收率的波长的激光束输出到基板上。 旋转单元被配置为以预定的旋转半径旋转从激光束输出部(15)发射的激光束。 光束聚焦单元被配置为将来自旋转单元的激光束聚焦到包括在基板内的深度位置,深度位置更靠近设置在激光束照射侧上的一个基板表面而不是另一个基板表面。 扫描单元被配置为沿着处理线扫描聚焦和旋转的激光束,并且还被配置为重复地执行扫描以处理基板。