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    • 3. 发明授权
    • Electron beam apparatus
    • 电子束装置
    • US07960697B2
    • 2011-06-14
    • US12257304
    • 2008-10-23
    • Zhongwei ChenWeiming RenJoe WangXuedong LiuJuying DouFumin HeFeng CaoYan RenXiaoli GuoWei HeQingpo Xi
    • Zhongwei ChenWeiming RenJoe WangXuedong LiuJuying DouFumin HeFeng CaoYan RenXiaoli GuoWei HeQingpo Xi
    • H01J49/44
    • H01J37/073H01J37/244H01J37/28H01J2237/06341H01J2237/24592
    • The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.
    • 本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。 本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案,在阴极和阳极之间的地电位上施加大的加速电压,将光束极限孔定位在聚光透镜之前,利用聚光透镜激发电流 优化图像分辨率,应用高管偏压缩短电子行进时间,采用和修正SORIL物镜,以改善大视野和电漂移下的像差,并减少水冷物镜在操作材料分析时的紧迫性。 本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。