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    • 8. 发明申请
    • Transistor epitaxial wafer and transistor produced by using same
    • 晶体管外延片和使用晶体管制造的晶体管
    • US20070158685A1
    • 2007-07-12
    • US11637112
    • 2006-12-12
    • Yoshihiko Moriya
    • Yoshihiko Moriya
    • H01L31/00
    • H01L29/7371H01L29/0817H01L29/66242H01L29/66462H01L29/7787
    • A transistor epitaxial wafer having: a substrate; an n-type collector layer, a p-type base layer and an n-type emitter layer formed on the substrate in this order; and an n-type InGaAs non-alloy layer having an n-type InGaAs nonuniform composition layer formed on the n-type emitter layer and having an nonuniform indium (In) composition, and an n-type InGaAs uniform composition layer formed on the n-type InGaAs nonuniform composition layer and having a uniform indium (In) composition. The n-type InGaAs nonuniform composition layer has a first layer doped with Si and having a low indium (In) composition, and a second layer formed on the first layer, doped with an n-type dopant except Si, and having an indium (In) composition higher than the first layer.
    • 一种晶体管外延晶片,具有:基板; 依次形成在基板上的n型集电极层,p型基极层和n型发射极层; 以及在n型发射极层上形成具有不均匀的铟(In)组成的n型InGaAs不均匀组成层的n型InGaAs非合金层,以及在n型InGaAs非合金层上形成的n型InGaAs均匀组成层 型InGaAs非均匀组成层,并具有均匀的铟(In)组成。 n型InGaAs非均匀组成层具有掺杂有Si并具有低铟(In)组成的第一层,以及形成在第一层上的第二层,掺杂有Si以外的n型掺杂剂,并且具有铟( In)组成高于第一层。