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    • 1. 发明授权
    • Quantum cascade laser
    • 量子级联激光器
    • US08374208B2
    • 2013-02-12
    • US12919289
    • 2009-02-24
    • Masamichi YamanishiKazuue FujitaTadataka EdamuraNaota Akikusa
    • Masamichi YamanishiKazuue FujitaTadataka EdamuraNaota Akikusa
    • H01S5/00
    • H01S5/3402B82Y20/00H01S5/3406H01S5/3418H01S5/34313
    • A quantum cascade laser is configured so as to include a semiconductor substrate and an active layer which is provided on the substrate and has a cascade structure including multistage-laminated unit laminate structures each including a quantum well emission layer and an injection layer. Moreover, the unit laminate structure has, in its subband level structure, an emission upper level, a lower level, and an injection level 4 of higher energy than the upper level, and light hν is generated by intersubband transition of electrons from the level to the level in the emission layer, and electrons after emission transition are injected into the injection level 4 of the subsequent stage via the injection layer. In addition, the emission layer includes two or more well layers, and the first well layer closest to the injection layer of the preceding stage is used as a well layer for injection level formation.
    • 量子级联激光器被配置为包括半导体衬底和设置在衬底上的有源层,并且具有包括多层叠单元层压结构的级联结构,每个层叠结构均包括量子阱发射层和注入层。 此外,单元层叠结构在其子带层结构中具有比上层更高能量的发射上限,较低水平和注入水平4,以及光h&ngr; 通过电子从发射层中的电平的子带间跃迁产生,并且发射转变后的电子经由注入层注入到后续级的注入级4中。 此外,发射层包括两个或更多个阱层,并且最靠近前一级的注入层的第一阱层用作用于注入电平形成的阱层。
    • 2. 发明申请
    • QUANTUM CASCADE LASER
    • 量子CASCADE激光
    • US20110007768A1
    • 2011-01-13
    • US12919289
    • 2009-02-24
    • Masamichi YamanishiKazuue FujitaTadataka EdamuraNaota Akikusa
    • Masamichi YamanishiKazuue FujitaTadataka EdamuraNaota Akikusa
    • H01S5/34
    • H01S5/3402B82Y20/00H01S5/3406H01S5/3418H01S5/34313
    • A quantum cascade laser is configured so as to include a semiconductor substrate and an active layer which is provided on the substrate and has a cascade structure including multistage-laminated unit laminate structures 16 each including a quantum well emission layer 17 and an injection layer 18. Moreover, the unit laminate structure 16 has, in its subband level structure, an emission upper level 3, a lower level 2, and an injection level 4 of higher energy than the upper level 3, and light hv is generated by intersubband transition of electrons from the level 3 to the level 2 in the emission layer 17, and electrons after emission transition are injected into the injection level 4 of the subsequent stage via the injection layer 18. In addition, the emission layer 17 includes two or more well layers, and the first well layer closest to the injection layer of the preceding stage is used as a well layer for injection level formation. Accordingly, a quantum cascade laser capable of operation with high efficiency at high temperature can be realized.
    • 量子级联激光器被配置为包括半导体衬底和设置在衬底上的有源层,并且具有包括多层叠单元叠层结构16的级联结构,每个包括量子阱发射层17和注入层18。 此外,单元叠层结构16在其子带层结构中具有比上层3更高能量的发射上层3,下层2和注入级4,并且通过电子的子带间转变产生光hv 从发光层17的3级到2级,发射转变后的电子经由注入层18注入后级的注入电平4.此外,发光层17包括两层以上的阱层, 并且最靠近前一级的注入层的第一阱层用作注入层形成的阱层。 因此,可以实现能够在高温下高效率地操作的量子级联激光器。
    • 3. 发明授权
    • Semiconductor light emitting device
    • 半导体发光器件
    • US08330140B2
    • 2012-12-11
    • US12843196
    • 2010-07-26
    • Tadataka EdamuraKazuue FujitaAkira HiguchiNaota AkikusaMasamichi Yamanishi
    • Tadataka EdamuraKazuue FujitaAkira HiguchiNaota AkikusaMasamichi Yamanishi
    • H01L31/00
    • H01L33/06B82Y20/00H01S5/3402
    • A semiconductor light emitting device including a semiconductor substrate and an active layer which is formed on the substrate and has a cascade structure formed by multistage-laminating unit laminate structures 16 each including an emission layer 17 and an injection layer 18 is configured. The unit laminate structure 16 has a first upper level L3, a second upper level L4, and a lower level L2 in the emission layer 17, and an injection level L1 in the injection layer 18, an energy interval between the levels L3 and L4 is set to be smaller than the energy of an LO phonon, the layer thickness of the exit barrier layer is set in a range not less than 70% and not more than 150% of the layer thickness of the injection barrier layer, light is generated by emission transition in the emission layer 17, and electrons after the emission transition are injected from the level L2 into the level L4 of the emission layer of a subsequent stage via the level L1. Accordingly, a semiconductor light emitting device using polaritons, capable of performing a light emitting operation by current injection, is realized.
    • 构成半导体发光器件,其包括半导体衬底和有源层,该有源层形成在衬底上并且具有由包括发射层17和注入层18的多层叠层单元叠层结构16形成的级联结构。 单元层叠结构16在发光层17中具有第一上层L3,第二上层L4和下层L2,以及注入层18中的注入层L1,层L3和L4之间的能量间隔为 设定为小于LO声子的能量,出射阻挡层的层厚度设定在不小于注入阻挡层的层厚度的70%且不大于150%的范围内,光由 发射层17中的发射跃迁以及发射跃迁之后的电子经由电平L1从电平L2注入到后级的发射层的电平L4。 因此,实现了能够通过电流注入进行发光操作的使用极化子的半导体发光器件。
    • 4. 发明授权
    • Quantum cascade laser
    • 量子级联激光器
    • US07843981B2
    • 2010-11-30
    • US11896115
    • 2007-08-29
    • Masamichi YamanishiTadataka EdamuraNaota AkikusaKazuue Fujita
    • Masamichi YamanishiTadataka EdamuraNaota AkikusaKazuue Fujita
    • H01S5/00
    • H01S5/3402B82Y20/00H01S5/22H01S5/3415H01S5/3432H01S2302/02
    • A quantum cascade laser is composed of a semiconductor substrate, and an active layer provided on the semiconductor substrate and having a cascade structure formed by multistage-laminating unit laminate structures 16 each of which includes a quantum well light emitting layer 17 and an injection layer 18. The unit laminate structure 16 has, in its subband level structure, an emission upper level 3, an emission lower level 2, and an injection level 4 as an energy level higher than the emission upper level 3, and light hν is generated by means of intersubband transition of electrons from the level 3 to the level 2 in the light emitting layer 17, and electrons through the intersubband transition are injected into the injection level in a unit laminate structure of the subsequent stage via the injection layer 18, and from this injection level, electrons are supplied to the emission upper level. Thereby, a quantum cascade laser which realizes operation with a high output at a high temperature is realized.
    • 量子级联激光器由半导体衬底和设置在半导体衬底上的有源层组成,并具有通过多级层叠单元层叠结构16形成的级联结构,每个层叠结构16包括量子阱发光层17和注入层18 单元层叠结构16在其子带层结构中具有作为高于排放上层3的能级的发射上限3,排放下限2和喷射水平4,以及光h&ngr; 通过在发光层17中从3级到2级的电子的子带间过渡产生,并且通过子带间跃迁的电子经由注入层18在后级的单元层叠结构中注入注入水平 ,并且从该注入水平,电子被提供给发射上限。 从而实现了在高温下实现高输出的操作的量子级联激光器。
    • 5. 发明授权
    • Quantum cascade laser
    • 量子级联激光器
    • US08654809B2
    • 2014-02-18
    • US12782255
    • 2010-05-18
    • Kazuue FujitaMasamichi YamanishiTadataka EdamuraNaota Akikusa
    • Kazuue FujitaMasamichi YamanishiTadataka EdamuraNaota Akikusa
    • H01S5/00
    • H01S5/3402B82Y20/00H01S5/0014H01S5/3086H01S5/309H01S5/3407
    • A quantum cascade laser is configured to include a semiconductor substrate and an active layer which is provided on the substrate and has a cascade structure formed by multistage-laminating unit laminate structures 16 each including an emission layer 17 and an injection layer 18. The unit laminate structure 16 has, in its subband level structure, a first emission upper level Lup1, a second emission upper level Lup2 of an energy higher than the first emission upper level, an emission lower level Llow, and a relaxation level Lr of an energy lower than the emission lower level, light is generated by intersubband transitions of electrons from the first and second upper levels to the lower level, and electrons after the intersubband transitions are relaxed from the lower level to the relaxation level and injected from the injection layer 18 into an emission layer 17b of a subsequent stage via the relaxation level. Accordingly, a quantum cascade laser capable of preferably obtaining emission in a broad wavelength range is realized.
    • 量子级联激光器被配置为包括半导体衬底和有源层,其设置在衬底上并且具有由包括发射层17和注入层18的多级层压单元层压结构16形成的级联结构。单元层压体 结构16在其子带电平结构中具有第一发射上电平Lup1,高于第一发射上电平的能量的第二发射上电平Lup2,发射较低电平Llow以及低于 发射较低电平,光通过从第一和第二上电平到下电平的电子的子带间跃迁产生,并且子带间跃迁之后的电子从较低电平松弛到弛豫电平,并从注入层18注入到 发光层17b经由弛豫程度。 因此,可以实现能够优选在宽波长范围内获得发射的量子级联激光器。
    • 6. 发明申请
    • QUANTUM CASCADE LASER
    • 量子CASCADE激光
    • US20110026556A1
    • 2011-02-03
    • US12782255
    • 2010-05-18
    • Kazuue FUJITAMasamichi YamanishiTadataka EdamuraNaota Akikusa
    • Kazuue FUJITAMasamichi YamanishiTadataka EdamuraNaota Akikusa
    • H01S5/00
    • H01S5/3402B82Y20/00H01S5/0014H01S5/3086H01S5/309H01S5/3407
    • A quantum cascade laser is configured to include a semiconductor substrate and an active layer which is provided on the substrate and has a cascade structure formed by multistage-laminating unit laminate structures 16 each including an emission layer 17 and an injection layer 18. The unit laminate structure 16 has, in its subband level structure, a first emission upper level Lup1, a second emission upper level Lup2 of an energy higher than the first emission upper level, an emission lower level Llow, and a relaxation level Lr of an energy lower than the emission lower level, light is generated by intersubband transitions of electrons from the first and second upper levels to the lower level, and electrons after the intersubband transitions are relaxed from the lower level to the relaxation level and injected from the injection layer 18 into an emission layer 17b of a subsequent stage via the relaxation level. Accordingly, a quantum cascade laser capable of preferably obtaining emission in a broad wavelength range is realized.
    • 量子级联激光器被配置为包括半导体衬底和有源层,其设置在衬底上并且具有由包括发射层17和注入层18的多级层压单元层压结构16形成的级联结构。单元层压体 结构16在其子带电平结构中具有第一发射上电平Lup1,高于第一发射上电平的能量的第二发射上电平Lup2,发射较低电平Llow以及低于 发射较低电平,光通过从第一和第二上电平到下电平的电子的子带间跃迁产生,并且子带间跃迁之后的电子从较低电平松弛到弛豫电平,并从注入层18注入到 发光层17b经由弛豫程度。 因此,可以实现能够优选在宽波长范围内获得发射的量子级联激光器。
    • 7. 发明申请
    • SEMICONDUCTOR LIGHT EMITTING DEVICE
    • 半导体发光器件
    • US20110024721A1
    • 2011-02-03
    • US12843196
    • 2010-07-26
    • Tadataka EdamuraKazuue FujitaAkira HiguchiNaota AkikusaMasamichi Yamanishi
    • Tadataka EdamuraKazuue FujitaAkira HiguchiNaota AkikusaMasamichi Yamanishi
    • H01L33/04
    • H01L33/06B82Y20/00H01S5/3402
    • A semiconductor light emitting device including a semiconductor substrate and an active layer which is formed on the substrate and has a cascade structure formed by multistage-laminating unit laminate structures 16 each including an emission layer 17 and an injection layer 18 is configured. The unit laminate structure 16 has a first upper level L3, a second upper level L4, and a lower level L2 in the emission layer 17, and an injection level L1 in the injection layer 18, an energy interval between the levels L3 and L4 is set to be smaller than the energy of an LO phonon, the layer thickness of the exit barrier layer is set in a range not less than 70% and not more than 150% of the layer thickness of the injection barrier layer, light is generated by emission transition in the emission layer 17, and electrons after the emission transition are injected from the level L2 into the level L4 of the emission layer of a subsequent stage via the level L1. Accordingly, a semiconductor light emitting device using polaritons, capable of performing a light emitting operation by current injection, is realized.
    • 构成半导体发光器件,其包括半导体衬底和有源层,该有源层形成在衬底上并且具有由包括发射层17和注入层18的多层叠层单元叠层结构16形成的级联结构。 单元层叠结构16在发光层17中具有第一上层L3,第二上层L4和下层L2,以及注入层18中的注入层L1,层L3和L4之间的能量间隔为 设定为小于LO声子的能量,出射阻挡层的层厚度设定在不小于注入阻挡层的层厚度的70%且不大于150%的范围内,光由 发射层17中的发射跃迁以及发射跃迁之后的电子经由电平L1从电平L2注入到后级的发射层的电平L4。 因此,实现了能够通过电流注入进行发光操作的使用极化子的半导体发光器件。
    • 8. 发明申请
    • Quantum cascade laser
    • 量子级联激光器
    • US20080219308A1
    • 2008-09-11
    • US11896115
    • 2007-08-29
    • Masamichi YamanishiTadataka EdamuraNaota AkikusaKazuue Fujita
    • Masamichi YamanishiTadataka EdamuraNaota AkikusaKazuue Fujita
    • H01S5/10
    • H01S5/3402B82Y20/00H01S5/22H01S5/3415H01S5/3432H01S2302/02
    • A quantum cascade laser is composed of a semiconductor substrate, and an active layer provided on the semiconductor substrate and having a cascade structure formed by multistage-laminating unit laminate structures 16 each of which includes a quantum well light emitting layer 17 and an injection layer 18. The unit laminate structure 16 has, in its subband level structure, an emission upper level 3, an emission lower level 2, and an injection level 4 as an energy level higher than the emission upper level 3, and light hν is generated by means of intersubband transition of electrons from the level 3 to the level 2 in the light emitting layer 17, and electrons through the intersubband transition are injected into the injection level in a unit laminate structure of the subsequent stage via the injection layer 18, and from this injection level, electrons are supplied to the emission upper level. Thereby, a quantum cascade laser which realizes operation with a high output at a high temperature is realized.
    • 量子级联激光器由半导体衬底和设置在半导体衬底上的有源层组成,并具有通过多级层叠单元层叠结构16形成的级联结构,每个层叠结构16包括量子阱发光层17和注入层18 。 单元层叠结构16在其子带层结构中具有作为高于发射上层3的能级的发射上限3,发射下限2和喷射等级4,并且光hnu通过 电子从发光层17中的3级到2级的子带间跃迁,并且通过跨带过渡的电子经由注入层18在后级的单元叠层结构中注入注入水平,并且从该注入 电平被提供给发射上限。 从而实现了在高温下实现高输出的操作的量子级联激光器。
    • 9. 发明授权
    • Quantum cascade laser
    • 量子级联激光器
    • US08068528B2
    • 2011-11-29
    • US12523277
    • 2007-06-06
    • Tadataka EdamuraNaota AkikusaKazuue FujitaAtsushi SugiyamaTakahide Ochiai
    • Tadataka EdamuraNaota AkikusaKazuue FujitaAtsushi SugiyamaTakahide Ochiai
    • H01S5/00
    • H01S5/3402B82Y20/00H01S5/3086H01S5/309H01S5/34313
    • A quantum cascade laser includes a semiconductor substrate, and an active layer which is provided on the semiconductor substrate, and has a cascade structure in which unit laminate structures 16 having quantum well emission layers 17 and injection layers 18 are laminated in multiple stages. Further, the quantum cascade laser is configured such that the unit laminate structure 16 has an emission upper level Lup, an emission lower level Llow, and a relaxation miniband MB including an energy level lower than the emission lower level in its subband level structure, and light is generated by an intersubband transition of electrons from the upper level to the lower level, and the electrons after the intersubband transition are relaxed from the lower level Llow to the miniband MB through LO phonon scattering, to be injected from the injection layer 18 to the latter stage emission layer via the miniband MB. Thereby, the quantum cascade laser which is capable of efficiently forming an inverted population in the quantum well emission layer, to improve its laser operation performance, is realized.
    • 量子级联激光器包括半导体衬底和设置在半导体衬底上的有源层,并且具有级联结构,其中具有量子阱发射层17和注入层18的单元叠层结构16多层叠。 此外,量子级联激光器被配置为使得单元层压结构16具有包括其子带级结构中的低于发射较低电平的能级的发射上电平Lup,发射低电平Llow和弛豫微型MB,以及 光通过从上层到下层的电子的子带间跃迁产生,并且子带间过渡之后的电子通过LO声子散射从低层Llow松弛到微型MB,从注入层18注入到 后级发射层通过miniband MB。 由此,可以实现能够在量子阱发射层中有效地形成反向群体的量子级联激光器,以提高其激光器的操作性能。