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1. 发明授权

US08214915B2 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever 有权
标题翻译：悬臂，悬臂系统，扫描探针显微镜，质量传感器装置，粘弹性测量仪器，操纵装置，悬臂位移测定方法，悬臂振动方法及悬臂变形方法
公开(公告)号：US08214915B2
公开(公告)日：2012-07-03
申请号：US12455556
申请日：2009-06-03
申请人： Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
发明人： Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
IPC分类号： G01Q20/00
CPC分类号： G01Q70/14 , G01G3/12 , G01G9/00 , G01Q10/045 , G01Q60/32
摘要： Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
摘要翻译：本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。

2. 发明授权

US07945965B2 Sensor for observations in liquid environments and observation apparatus for use in liquid environments 有权
标题翻译：用于液体环境中观察的传感器和用于液体环境的观察设备
公开(公告)号：US07945965B2
公开(公告)日：2011-05-17
申请号：US12416634
申请日：2009-04-01
申请人： Naoya Watanabe , Masatsugu Shigeno , Masato Iyoki
发明人： Naoya Watanabe , Masatsugu Shigeno , Masato Iyoki
IPC分类号： H01J37/252
CPC分类号： G01Q20/04 , G01Q30/14
摘要： The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.
摘要翻译：传感器具有包括主体部分，细长带状柔性基板，连接部件，树脂部分和形成在柔性基板的端部的外部触点的自检探测器。探头还包括一个悬臂，其基端支撑在主体部分，一个应变阻力元件，其电阻值根据悬臂的位移量而变化，并且与应变电阻元件电连接。探针尖端形成在悬臂的前端。柔性基板具有夹在两个绝缘片之间的互连图案。柔性基板支撑主体部分，而悬臂向外突出。将柔性基板的至少一端从液体中取出。连接构件将互连件与互连图案连接。互连件，连接件以及与互连图形电连接的连接件的部分涂覆有树脂部分。

3. 发明申请

US20100107284A1 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever 有权
标题翻译：悬臂，悬臂系统，扫描探针显微镜，质量传感器装置，粘弹性测量仪器，操纵装置，悬臂位移测定方法，悬臂振动方法及悬臂变形方法
公开(公告)号：US20100107284A1
公开(公告)日：2010-04-29
申请号：US12455556
申请日：2009-06-03
申请人： Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
发明人： Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
IPC分类号： G01Q20/00 , G01Q70/08 , G01G3/16
CPC分类号： G01Q70/14 , G01G3/12 , G01G9/00 , G01Q10/045 , G01Q60/32
摘要： Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
摘要翻译：本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。

4. 发明申请

US20090265819A1 SENSOR FOR OBSERVATIONS IN LIQUID ENVIRONMENTS AND OBSERVATION APPARATUS FOR USE IN LIQUID ENVIRONMENTS 有权
标题翻译：用于液体环境观测的传感器和用于液体环境的观察装置
公开(公告)号：US20090265819A1
公开(公告)日：2009-10-22
申请号：US12416634
申请日：2009-04-01
申请人： Naoya Watanabe , Masatsugu Shigeno , Masato Iyoki
发明人： Naoya Watanabe , Masatsugu Shigeno , Masato Iyoki
IPC分类号： G01N13/10
CPC分类号： G01Q20/04 , G01Q30/14
摘要： The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.
摘要翻译：传感器具有包括主体部分，细长带状柔性基板，连接部件，树脂部分和形成在柔性基板的端部的外部触点的自检探测器。探头还包括一个悬臂，其基端支撑在主体部分，一个应变阻力元件，其电阻值根据悬臂的位移量而变化，并且与应变电阻元件电连接。探针尖端形成在悬臂的前端。柔性基板具有夹在两个绝缘片之间的互连图案。柔性基板支撑主体部分，而悬臂向外突出。将柔性基板的至少一端从液体中取出。连接构件将互连件与互连图案连接。互连件，连接件以及与互连图形电连接的连接件的部分涂覆有树脂部分。

5. 发明申请

US20060043290A1 Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder 有权
标题翻译：使用悬臂支架扫描探针显微镜悬臂支架和扫描探针显微镜
公开(公告)号：US20060043290A1
公开(公告)日：2006-03-02
申请号：US11199290
申请日：2005-08-08
申请人： Masato Iyoki , Masatsugu Shigeno
发明人： Masato Iyoki , Masatsugu Shigeno
IPC分类号： G21K7/00
CPC分类号： G01Q60/34 , G01Q70/02
摘要： A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.
摘要翻译：提供具有悬臂支架的扫描探针显微镜，其通过可在有限空间中配置的小尺寸振动器提供悬臂极大幅度，并且即使在诸如液体的高粘性阻力的环境中也能稳定地操作。悬臂的悬臂底部固定在扫描探针显微镜悬臂支架的固定部分上。振动器安装在固定部分上。当确定前侧是靠近探头的一侧，并且后侧是沿着悬臂的纵向方向靠近固定部分的支撑部分的一侧时，振动器使前侧和后侧将悬臂支架的一部分在与样品表面正交的平面内的相反方向彼此固定，以使悬臂在液体中振动。

6. 发明授权

US07973942B2 Optical displacement detection mechanism and surface information measurement device using the same 有权
标题翻译：光学位移检测机构和表面信息测量装置使用相同
公开(公告)号：US07973942B2
公开(公告)日：2011-07-05
申请号：US11841445
申请日：2007-08-20
申请人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe , Masatsugu Shigeno
发明人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe , Masatsugu Shigeno
IPC分类号： G01B11/14 , G01B11/30 , G01N21/55 , G01N23/00 , G01N21/86 , G21K7/00 , G01V8/00 , G01Q20/02
CPC分类号： G01B11/024 , G01Q20/02
摘要： There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.
摘要翻译：提供了一种光学位移检测机构，其中即使测量对象改变，检测灵敏度和噪声比可以调节，而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性，可以使通过照射光将测量对象的热变形对测量对象的影响减小，并且可以在最佳条件下确保测量精度。在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中，驱动光源的光源驱动电路，从光源照射到悬臂的光接收器，其接收光，从而检测强度以及以预定的放大率放大光检测器的检测信号的放大器，通过提供光强度调节器和放大率调节器，对悬臂的照射光强度和放大率可以使光电检测器变得可变。

7. 发明授权

US07170054B2 Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder 有权
标题翻译：使用悬臂支架扫描探针显微镜悬臂支架和扫描探针显微镜
公开(公告)号：US07170054B2
公开(公告)日：2007-01-30
申请号：US11199290
申请日：2005-08-08
申请人： Masato Iyoki , Masatsugu Shigeno
发明人： Masato Iyoki , Masatsugu Shigeno
IPC分类号： G01N13/16 , G01B5/28
CPC分类号： G01Q60/34 , G01Q70/02
摘要： A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.
摘要翻译：提供具有悬臂支架的扫描探针显微镜，其通过可在有限空间中配置的小尺寸振动器提供悬臂极大幅度，并且即使在诸如液体的高粘性阻力的环境中也能稳定地操作。悬臂的悬臂底部固定在扫描探针显微镜悬臂支架的固定部分上。振动器安装在固定部分上。当确定前侧是靠近探头的一侧，并且后侧是沿着悬臂的纵向方向靠近固定部分的支撑部分的一侧时，振动器使前侧和后侧将悬臂支架的一部分在与样品表面正交的平面内的相反方向彼此固定，以使悬臂在液体中振动。

8. 发明申请

US20080061232A1 Scanning Probe Microscope Fine-Movement Mechanism and Scanning Probe Microscope Using Same 有权
标题翻译：扫描探针显微镜微动机构和扫描探针显微镜使用相同
公开(公告)号：US20080061232A1
公开(公告)日：2008-03-13
申请号：US11842735
申请日：2007-08-21
申请人： Masato Iyoki , Masatsugu Shigeno
发明人： Masato Iyoki , Masatsugu Shigeno
IPC分类号： G01N13/16 , G01B7/34
CPC分类号： G01Q10/04 , G01Q30/025
摘要： An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) (1) having a stage (16) for mounting a sample S, and a probe (20) approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism (26) having the first drive section and inching, by the first drive section, the probe (20) in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism (27) having the second drive section and inching, by the second drive section, the stage (16) in the Z direction perpendicular to the surface of the sample S.
摘要翻译：一种扫描探针显微镜的微动机构，其特征在于，能够高精度地进行测量，同时通过探针增强扫描速度，以及包括该探针显微镜的扫描探针显微镜。提供在具有用于安装样品S的载物台（16）的扫描探针显微镜（SPM）（1）中的扫描探针显微镜的微动机构和靠近或接触样品表面的探针（20） S，其特征在于，所述微动机构包括独立设置的第一驱动部和第二驱动部，具有所述第一驱动部的第一驱动部和所述第一驱动部的所述探针（20）在X 方向Y方向与样品S的表面平行并且彼此交叉，并且具有第二驱动部分的台阶微动机构（27）和由第二驱动部分在Z方向垂直于样品S的表面

9. 发明申请

US20070104079A1 Vibration-type cantilever holder and scanning probe microscope 有权
标题翻译：振动式悬臂支架和扫描探针显微镜
公开(公告)号：US20070104079A1
公开(公告)日：2007-05-10
申请号：US11595184
申请日：2006-11-09
申请人： Masatsugu Shigeno , Masato Iyoki
发明人： Masatsugu Shigeno , Masato Iyoki
IPC分类号： G11B9/00
CPC分类号： G01Q60/32 , G01Q70/04
摘要： The vibration-type cantilever holder for fastening a cantilever opposed to a sample, supported on a main body part at only its base end and having a probe on its leading end. The holder includes: a cantilever-attaching stand on which the main body part is placed and fastened with the cantilever tilted at a predetermined angle with respect to the sample; a first vibration source fastened to the cantilever-attaching stand and vibrating with a phase and an amplitude depending on a predetermined waveform signal; a holder main body to which the first vibration source is fastened; and a second vibration source fastened to at least one location on the holder main body, and generating vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body. The holder allows the cantilever to vibrate according to vibrational characteristics of only the cantilever by counteracting additional vibrations.
摘要翻译：用于紧固与样品相对的悬臂的振动式悬臂支架，仅在其基端支撑在主体部分上，并且在其前端具有探针。所述支架包括：悬臂安装台，所述主体部分放置在所述支架上，并以相对于所述样品以预定角度倾斜的所述悬臂固定; 第一振动源，其紧固到所述悬臂安装台，并且根据预定波形信号以相位和振幅振动; 固定有第一振动源的支架主体; 以及第二振动源，其紧固到所述保持器主体上的至少一个位置，并且产生振动以将从所述第一振动源行进的振动偏移到所述悬臂安装支架和保持器主体。支架允许悬臂根据仅悬臂的振动特性通过抵消额外的振动而振动。

10. 发明授权

US07614288B2 Scanning probe microscope fine-movement mechanism and scanning probe microscope using same 有权
标题翻译：扫描探针显微镜微动机构和扫描探针显微镜使用相同
公开(公告)号：US07614288B2
公开(公告)日：2009-11-10
申请号：US11842735
申请日：2007-08-21
申请人： Masato Iyoki , Masatsugu Shigeno
发明人： Masato Iyoki , Masatsugu Shigeno
IPC分类号： G01B5/28
CPC分类号： G01Q10/04 , G01Q30/025
摘要： An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) (1) having a stage (16) for mounting a sample S, and a probe (20) approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism (26) having the first drive section and inching, by the first drive section, the probe (20) in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism (27) having the second drive section and inching, by the second drive section, the stage (16) in the Z direction perpendicular to the surface of the sample S.
摘要翻译：一种扫描探针显微镜的微动机构，其特征在于，能够高精度地进行测量，同时通过探针增强扫描速度，以及包括该探针显微镜的扫描探针显微镜。提供在具有用于安装样品S的载物台（16）的扫描探针显微镜（SPM）（1）中的扫描探针显微镜的微动机构和靠近或接触样品表面的探针（20） S，其特征在于，所述微动机构包括独立设置的第一驱动部和第二驱动部，具有所述第一驱动部的第一驱动部和所述第一驱动部的所述探针（20）在X 方向Y方向与样品S的表面平行并且彼此交叉，并且具有第二驱动部分的台阶微动机构（27）和由第二驱动部分在Z方向垂直于样品S的表面

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