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1. 发明授权

US11796563B2 Apparatus and method for a scanning probe microscope 有权
公开(公告)号：US11796563B2
公开(公告)日：2023-10-24
申请号：US17583727
申请日：2022-01-25
申请人： Carl Zeiss SMT GmbH
发明人： Ulrich Matejka , Christof Baur
IPC分类号： G01Q20/02 , G01Q10/06 , G01Q40/02 , G01Q10/04 , G01Q70/08
CPC分类号： G01Q20/02 , G01Q10/06 , G01Q10/065 , G01Q40/02 , G01Q10/045 , G01Q70/08
摘要： The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.

2. 发明授权

US10866262B2 Multi-axis positioning device 有权
公开(公告)号：US10866262B2
公开(公告)日：2020-12-15
申请号：US16619752
申请日：2018-06-07
申请人： GETEC MICROSCOPY GMBH
发明人： Peter Ziger , Georg E. Fantner , Jeffrey M. Markakis
IPC分类号： G01Q30/02 , G01Q10/00 , G01Q60/38 , G01Q70/00 , B23Q1/34 , G01Q10/04 , G01Q70/02
CPC分类号： G01Q30/02 , B23Q1/34 , G01Q10/045 , G01Q60/38 , G01Q70/02
摘要： A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.

3. 发明申请

US20180284151A1 Scanning Probe Microscope and Scanning Method Thereof 审中-公开
公开(公告)号：US20180284151A1
公开(公告)日：2018-10-04
申请号：US15937306
申请日：2018-03-27
申请人： Hitachi High-Tech Science Corporation
发明人： Masatsugu Shigeno , Kazutoshi Watanabe , Hiroyoshi Yamamoto
IPC分类号： G01Q10/04
CPC分类号： G01Q10/045 , G01Q60/34
摘要： A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.

4. 发明申请

US20180267081A1 MEASUREMENT SYSTEM 审中-公开
公开(公告)号：US20180267081A1
公开(公告)日：2018-09-20
申请号：US15463699
申请日：2017-03-20
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q20/02 , G01Q70/00 , G01Q40/00
CPC分类号： G01Q20/02 , G01Q10/045 , G01Q30/02 , G01Q40/00
摘要： A measurement system comprising: a radiation source arranged to generated a detection beam; a probe; and a probe positioning system arranged to move the probe from an un-aligned position in which it is not illuminated by the detection beam, to an aligned position in which it is illuminated by the detection beam and the detection beam is reflected by the probe to generate a reflected detection beam. A scanner generates a relative scanning motion between the probe and a sample, the sample being aligned with the probe and interacting with the probe during the relative scanning motion. A sensor detects the reflected detection beam during the relative scanning motion to collect a first data set from the sample. A second device is provided for modifying the sample or obtaining a second data set from the sample. A sample stage is arranged to move the sample in accordance with an offset vector stored in a memory so that it becomes un-aligned from the probe and aligned with the second device.

5. 发明授权

US10060862B2 Microwave impedance microscopy using a tuning fork 有权
公开(公告)号：US10060862B2
公开(公告)日：2018-08-28
申请号：US15479657
申请日：2017-04-05
申请人： Yongtao Cui , Yue Ma , Zhixun Shen
发明人： Yongtao Cui , Yue Ma , Zhixun Shen
IPC分类号： G01N22/00 , G01N27/02 , G01Q10/04 , G01Q20/04 , G01Q60/30
CPC分类号： G01N22/00 , G01N27/02 , G01Q10/045 , G01Q20/04 , G01Q60/30
摘要： A microwave impedance microscope including a tuning fork having a high-aspect ratio etched metal tip electrode extending transversely to one tine of the fork and having a high aspect ratio to thereby reduce parasitic capacitance. The metal tip may be electrochemically etched from a wire, then bonded to the tine. The fork is slightly inclined from the surface of the sample and the tip electrode projects transversely to the fork. A microwave signal is impressed on the tip. Microwave circuitry receives microwave signals reflected from the sample back into the tip and demodulates the reflected signal according to the impressed signal. Further circuitry further demodulates the reflected signal according to the lower-frequency signal causing the fork to oscillate at its mechanically resonant frequency. A multi-wavelength matching circuit interposed between the microwave circuitry and the probe includes a coaxial cable of length half a fundamental microwave wavelength.

6. 发明授权

US09761787B2 Consensus-based multi-piezoelectric microcantilever sensor 有权
公开(公告)号：US09761787B2
公开(公告)日：2017-09-12
申请号：US15171378
申请日：2016-06-02
申请人： The Board of Trustees of The University of Alabama
发明人： Ehsan Omidi , Seyed Nima Mahmoodi
IPC分类号： G01Q10/04 , G01Q70/18 , H01L41/297 , H01L41/18 , H01L41/113
CPC分类号： H01L41/18 , G01Q10/045 , G01Q70/18 , H01L41/1132 , H01L41/1136
摘要： Systems and methods are disclosed that describe a MEMS device and a method of sensing based on a consensus algorithm. The MEMS device is a sensor comprising multiple piezoelectric layers attached to a microcantilever. It can be used to sense deflections or variations in corresponding parameters of systems in micro- and nano-scales. Multiple piezoelectric elements on a microcantilever can provide a more accurate measurement of the microcantilever's deflection. The device can eliminate bulky laser sensors in SPMs and provide additional use as a biosensor, or chemical sensor at the micro- and nano-scale. The consensus sensing algorithm can provide added robustness into the system. If one of the sensing elements or electrodes fails during a sensing process, other elements can compensate and allow for near zero-error measurement.

7. 发明授权

US09671350B2 Test mass compensation of mass measurement drift in a microcantilever resonator 有权
公开(公告)号：US09671350B2
公开(公告)日：2017-06-06
申请号：US14477287
申请日：2014-09-04
申请人： APPLIED INVENTION, LLC
发明人： W. Daniel Hillis
IPC分类号： G01N33/48 , G01N33/50 , G01N21/84 , G01Q10/04 , G02B6/36 , G01N29/02 , G01N5/02 , G01N29/30 , G06F19/00 , G01N15/10 , G01N15/00 , G01N9/00
CPC分类号： G01N21/84 , G01N5/02 , G01N9/002 , G01N29/022 , G01N29/30 , G01N2015/0065 , G01N2015/1087 , G01N2291/0256 , G01N2291/0427 , G01Q10/045 , G02B6/3656 , G06F19/70
摘要： The present disclosure provides methods and mechanisms for measuring small masses attached to a substrate within a microcantilever. Specifically, the disclosure describes the measurement of small particles accumulated at a substrate that cannot be flowed through a microchannel within a microcantilever. A resonance measurement is acquired at a first time. A pair resonance measurements is then acquired at a second point in time—one with the test mass at a first position off or along the microcantilever, the second with the test mass at a second position along the microcantilever. Comparing the resonance frequencies determined for the two test mass positions allows for disambiguation of changes in the mass of the particles from changes in the resonant behavior of the microcantilever itself.

8. 发明授权

US09410982B2 Photothermal actuation of a probe for scanning probe microscopy 有权
标题翻译：用于扫描探针显微镜的探针的光热致动
公开(公告)号：US09410982B2
公开(公告)日：2016-08-09
申请号：US14424597
申请日：2013-07-30
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris , Bin Zhao
IPC分类号： G01Q10/00 , G01Q10/04 , G01Q20/02
CPC分类号： G01Q10/00 , G01Q10/045 , G01Q20/02
摘要： Various methods of driving a probe of a scanning probe microscope are disclosed. One set of methods distribute the energy of a radiation beam over a wide area of the probe by either scanning the beam or increasing its illumination area. Another method changes the intensity profile of the radiation beam with a diffractive optical element, enabling a more uniform intensity profile across the width of the illumination. Another method uses a diffractive optical element to change the circumferential shape of the radiation beam, and hence the shape of the area illuminated on the probe, in order to match the shape of the probe and hence distribute the energy over a wider area.
摘要翻译：公开了驱动扫描探针显微镜的探针的各种方法。一组方法通过扫描光束或增加其照明面积而将辐射束的能量分布在探测器的宽区域上。另一种方法用衍射光学元件改变辐射束的强度分布，使得能够在整个照明宽度上具有更均匀的强度分布。另一种方法使用衍射光学元件来改变辐射束的圆周形状，并因此改变照射在探针上的区域的形状，以便匹配探针的形状并且因此将能量分布在更宽的区域上。

9. 发明授权

US09389243B2 Multiple probe actuation 有权
标题翻译：多探头启动
公开(公告)号：US09389243B2
公开(公告)日：2016-07-12
申请号：US14424618
申请日：2013-08-28
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q10/04 , G01Q70/06 , G11B9/14 , G11B11/00 , G03F7/20
CPC分类号： G01Q10/00 , G01N2291/0256 , G01N2291/106 , G01Q10/045 , G01Q20/02 , G01Q70/06 , G03F1/24 , G03F1/84 , G03F7/2002 , G03F7/2049 , G11B9/1409 , G11B9/1445 , G11B11/002
摘要： A method of actuating a plurality of probes. Each probe may be made of two or more materials with different thermal expansion coefficients which are arranged such that when the probe is illuminated by an actuation beam it deforms to move the probe relative to a sample. Energy is delivered to the probes by sequentially illuminating them with an actuation beam via an objective lens in a series of scan sequences. Two or more of the probes are illuminated by the actuation beam in each scan sequence and the actuation beam enters the objective lens at a different angle to an optical axis of the objective lens for each probe which is illuminated in a scan sequence. The actuation beam is controlled so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences.
摘要翻译：一种致动多个探针的方法。每个探针可以由具有不同热膨胀系数的两种或更多种材料制成，这些材料被布置为使得当探针被致动束照射时，其变形以使探针相对于样品移动。通过一系列扫描序列中的物镜通过致动束依次照射能量来将能量传送到探针。两个或更多个探针在每个扫描序列中由致动束照射，并且致动束以与以扫描序列照亮的每个探针的物镜的光轴成不同的角度进入物镜。控制致动束，使得在至少一个扫描序列期间，通过致动束将不同量的能量传送到至少两个探针。

10. 发明申请

US20150219685A1 MULTIPLE PROBE ACTUATION 有权
标题翻译：多个探针启动
公开(公告)号：US20150219685A1
公开(公告)日：2015-08-06
申请号：US14424618
申请日：2013-08-28
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q10/00 , G01Q20/02
CPC分类号： G01Q10/00 , G01N2291/0256 , G01N2291/106 , G01Q10/045 , G01Q20/02 , G01Q70/06 , G03F1/24 , G03F1/84 , G03F7/2002 , G03F7/2049 , G11B9/1409 , G11B9/1445 , G11B11/002
摘要： A method of actuating a plurality of probes. Each probe may be made of two or more materials with different thermal expansion coefficients which are arranged such that when the probe is illuminated by an actuation beam it deforms to move the probe relative to a sample. Energy is delivered to the probes by sequentially illuminating them with an actuation beam via an objective lens in a series of scan sequences. Two or more of the probes are illuminated by the actuation beam in each scan sequence and the actuation beam enters the objective lens at a different angle to an optical axis of the objective lens for each probe which is illuminated in a scan sequence. The actuation beam is controlled so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences.
摘要翻译：一种致动多个探针的方法。每个探针可以由具有不同热膨胀系数的两种或更多种材料制成，这些材料被布置为使得当探针被致动束照射时，其变形以使探针相对于样品移动。通过一系列扫描序列中的物镜通过致动束依次照射能量来将能量传送到探针。两个或更多个探针在每个扫描序列中由致动束照射，并且致动束以与以扫描序列照亮的每个探针的物镜的光轴成不同的角度进入物镜。控制致动束，使得在至少一个扫描序列期间，通过致动束将不同量的能量传送到至少两个探针。

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