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    • 1. 发明申请
    • Method for Cleaning a Workpiece With the Aid of Halogen Ions
    • 用卤素离子清洗工件的方法
    • US20090223538A1
    • 2009-09-10
    • US11792658
    • 2005-11-29
    • Ursus KrügerUwe PyritzHeike SchieweRaymond Ullrich
    • Ursus KrügerUwe PyritzHeike SchieweRaymond Ullrich
    • B08B6/00H01L21/306
    • G01N21/31B08B7/0035C23G5/00
    • The invention relates to a method for cleaning turbine blades, for example, in a cleaning chamber into which a process gas containing especially fluoride ions is introduced. According to the inventive method, contaminated process gas is directed into an analysis chamber where a plasma is ignited and is analyzed using emission spectroscopy in order to monitor the process, particularly to determine the conditions for stopping the process. The spectrometric measurement can be evaluated in an evaluation unit, the cleaning process being stopped via signal line in case of a characteristic change of the spectrum. Also disclosed is a cleaning device comprising an analysis apparatus with a sample chamber and a plasma generator, an interface being provided for evaluating the result of the analysis.
    • 本发明涉及一种用于清洁涡轮叶片的方法,例如在清洁室中,其中引入了特别是氟离子的工艺气体。 根据本发明的方法,污染的处理气体被引导到分析室中,其中等离子体被点燃,并且使用发射光谱法进行分析,以便监测该过程,特别是确定停止该过程的条件。 光谱测量可以在评估单元中进行评估,在光谱的特征变化的情况下,清洁过程通过信号线停止。 还公开了一种清洁装置,其包括具有样品室和等离子体发生器的分析装置,提供用于评估分析结果的界面。
    • 3. 发明授权
    • Method and device for the cold-gas spraying of particles having different solidities and/or ductilities
    • 用于冷气喷射具有不同固体和/或延展性的颗粒的方法和装置
    • US08197895B2
    • 2012-06-12
    • US12521342
    • 2008-01-07
    • Axel ArndtUwe PyritzHeike SchieweRaymond Ullrich
    • Axel ArndtUwe PyritzHeike SchieweRaymond Ullrich
    • B05D1/12B05B7/14
    • C23C24/04B05B7/1486B05B7/1626
    • In a method for the cold-gas spraying of particles having different solidities and/or ductilities and in a cold-gas spraying device (11) suitable for use in with the method, in order to obtain a comparatively high proportion of particles (23) having higher solidity and/or smaller ductility in comparison to the other particles (22), these particles are fed into an area (21) of the stagnation chamber (15) of the cold-gas spraying device which is very distant from the nozzle (14). Advantageously, the particles (23) have to cover a longer course through the stagnation chamber and are thus preheated. In this way, the deposition of these particles (23) on a substrate (25) is improved. Particularly metals having a transition temperature ranging between brittle and ductile behavior can be provided with ductile properties by the preheating process, thereby simplifying the deposition process.
    • 在用于对具有不同固体和/或延展性的颗粒进行冷气喷射的方法中,在适用于该方法的冷气喷涂装置(11)中,为了获得比例较高的颗粒(23), 与其它颗粒(22)相比,具有更高的坚固性和/或更小的延展性,这些颗粒被馈送到冷却气体喷射装置的与喷嘴非常远的停滞室(15)的区域(21) 14)。 有利地,颗粒(23)必须通过停滞室覆盖较长的路线,并因此被预热。 以这种方式,这些颗粒(23)沉积在基底(25)上得到改善。 特别是具有脆性和延性特性之间的转变温度的金属可以通过预热工艺提供延性,从而简化沉积过程。
    • 6. 发明申请
    • METHOD AND DEVICE FOR THE COLD-GAS SPRAYING OF PARTICLES HAVING DIFFERENT SOLIDITIES AND/OR DUCTILITIES
    • 用于气体喷雾具有不同固体和/或粘度的颗粒的方法和装置
    • US20100040775A1
    • 2010-02-18
    • US12521342
    • 2008-01-07
    • Axel ArndtUwe PyritzHeike SchieweRaymond Ullrich
    • Axel ArndtUwe PyritzHeike SchieweRaymond Ullrich
    • B05D1/12B05C19/02
    • C23C24/04B05B7/1486B05B7/1626
    • In a method for the cold-gas spraying of particles having different solidities and/or ductilities and in a cold-gas spraying device (11) suitable for use in with the method, in order to obtain a comparatively high proportion of particles (23) having higher solidity and/or smaller ductility in comparison to the other particles (22), these particles are fed into an area (21) of the stagnation chamber (15) of the cold-gas spraying device which is very distant from the nozzle (14). Advantageously, the particles (23) have to cover a longer course through the stagnation chamber and are thus preheated. In this way, the deposition of these particles (23) on a substrate (25) is improved. Particularly metals having a transition temperature ranging between brittle and ductile behaviour can be provided with ductile properties by the preheating process, thereby simplifying the deposition process.
    • 在用于对具有不同固体和/或延展性的颗粒进行冷气喷射的方法中,在适用于该方法的冷气喷涂装置(11)中,为了获得比例较高的颗粒(23), 与其它颗粒(22)相比,具有更高的坚固性和/或更小的延展性,这些颗粒被馈送到冷却气体喷射装置的与喷嘴非常远的停滞室(15)的区域(21) 14)。 有利地,颗粒(23)必须通过停滞室覆盖较长的路线,并因此被预热。 以这种方式,这些颗粒(23)沉积在基底(25)上得到改善。 特别是具有脆性和延性特性之间的转变温度的金属可以通过预热工艺提供延性,从而简化沉积过程。