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    • 4. 发明授权
    • Sample preparing device and sample posture shifting method
    • 样品制备装置和样品姿态转换方法
    • US08198603B2
    • 2012-06-12
    • US12290397
    • 2008-10-29
    • Haruo TakahashiIkuko NakataniJunichi Tashiro
    • Haruo TakahashiIkuko NakataniJunichi Tashiro
    • H01J37/20G21K5/10G01N1/28
    • H01J37/20H01J37/023H01J37/3056H01J2237/202H01J2237/204H01J2237/2062H01J2237/208H01J2237/31745H01J2237/31749
    • A sample preparing device has a sample stage that supports a sample and undergoes rotation about a first rotation axis to bring a preselected direction of the sample piece into coincidence with an intersection line between a first plane formed by a surface of the sample piece and a second plane. A manipulator holds sample piece of the sample and undergoes rotation about a second rotation axis independently of the sample stage to rotate the sample piece to a preselected position in the state in which the preselected direction of the sample piece coincides with the intersection line. The manipulator is disposed relative to the sample stage so that an angle between the second rotation axis and the surface of the sample is in the range of 0° to 45°. The second plane corresponds to a plane obtained by rotating around the second rotation axis a line segment which is vertical to the surface of the sample and of which one end corresponds to an intersection between the surface of the sample and the second rotation axis.
    • 样品制备装置具有样品台,其支撑样品并围绕第一旋转轴线旋转以使样品片的预选方向与由样品片的表面形成的第一平面和第二面之间的交线相符, 飞机 操纵器保持样品的样品并且独立于样品台绕第二旋转轴旋转,以在样品的预选方向与交叉线重合的状态下将样品片旋转到预选位置。 操纵器相对于样品台设置,使得第二旋转轴与样品表面之间的角度在0°至45°的范围内。 第二平面对应于通过围绕第二旋转轴旋转垂直于样品表面的线段并且其一端对应于样品表面和第二旋转轴线之间的交叉而获得的平面。
    • 5. 发明授权
    • Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope
    • 制备透射电子显微镜样品的方法和透射电子显微镜的样品片
    • US08191168B2
    • 2012-05-29
    • US12264750
    • 2008-11-04
    • Xin ManKouji IwasakiTatsuya Asahata
    • Xin ManKouji IwasakiTatsuya Asahata
    • G01N13/10
    • H01J37/3056B82Y15/00G01N1/286H01J37/20H01J37/26H01J2237/2007H01J2237/202H01J2237/204H01J2237/206H01J2237/2067H01J2237/2802H01J2237/31745H01J2237/31749
    • Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder.
    • 提供了一种制备透射电子显微镜样品的方法,用于透射电子显微镜的样品片,其包括可透射电子显微镜观察的基本上平面的成品表面,以及微型加工者可以在不接触成品的情况下抓取的抓取部分 表面。 制备透射电子显微镜样品的方法的特征在于包括:第一步骤,利用带电粒子束从样品体Wa切出样品片,样品片以耦合部分 ; 第二步骤是用微型加湿器抓住样品的抓取部分,其中在第一步骤中切出的样品的成品表面被微型加工机覆盖; 第三步骤,通过用保持样品的抓取状态的带电粒子束切割耦合部分,将样品从第二步骤中剥离出来; 以及第四步骤,用微型加工机将第三步骤中拆卸的样品片转移和固定到样品架上。
    • 7. 发明授权
    • Apparatus structure and scanning probe microscope including apparatus structure
    • 仪器结构和扫描探针显微镜,包括装置结构
    • US07945964B2
    • 2011-05-17
    • US12415237
    • 2009-03-31
    • Shigeru WakiyamaKenichi Akamatsu
    • Shigeru WakiyamaKenichi Akamatsu
    • G12B21/08
    • G01Q70/04
    • Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.
    • 提供一种用于分析,检查和测量的装置的结构,其中支撑检测单元的支撑结构抵抗干扰,抑制大样本测量期间的分辨率降低并且具有高刚性,并且使用探针显微镜 装置结构。 支撑检测单元的装置结构具有弓形状,该检测单元与位于能够沿至少一个轴向移动的单元上的样本相对的被检体的形状相对。 在具有拱形形状并支撑检测单元的装置结构中,形成基本上垂直于位于装置结构正下方的样品架的平坦表面部分的表面。 检测单元被支撑在垂直表面上。 拱形装置结构是与悬链线曲线一致的弯曲结构。
    • 8. 发明授权
    • Differential scanning calorimeter
    • 差示扫描量热仪
    • US07802916B2
    • 2010-09-28
    • US11961944
    • 2007-12-20
    • Yoshihiko Teramoto
    • Yoshihiko Teramoto
    • G01K17/08G01N25/20
    • G01N25/20
    • There is provided a differential scanning calorimeter for exactly measuring a calorie variation of the measured sample on the basis of the temperature difference between sample container and the reference container without the influence of the heat irregularity incoming from the surroundings and the noise components. The differential scanning calorimeter includes a heating furnace of an approximately H-shaped section having an approximately drum-shaped wall part and an approximately plate-shaped heat inflow part, a heater disposed outside the wall part so as to heat the heating furnace, a approximately bar-shaped heat-resistance member that is arranged along the center axis L of the wall part, that protrudes from both sides of the heat inflow part by an approximately equal length, that is made of a material heat conductivity lower than that of the material of the heating furnace, a sample container disposed at one end of the heat-resistance member, a reference container disposed at the other end of the heat-resistance member, and a differential heat flow detector measuring a difference between the temperature of the sample container and the temperature of the reference container as a measured value.
    • 提供了差示扫描量热计,用于在不受来自周围环境的热不规则性和噪声成分的影响的情况下,基于样品容器和参考容器之间的温度差来精确测量测量样品的卡路里变化。 差示扫描量热计包括具有大致H形截面的加热炉,具有近似鼓形的壁部分和近似板状的热流入部分,设置在壁部外部以加热加热炉的加热器,大致 所述棒状耐热构件沿着所述壁部的中心轴线L配置,从所述热流入部的两侧突出大致相同的长度,所述长度相当于材料的导热率低于所述材料的导热率 的加热炉,设置在耐热构件的一端的样品容器,设置在耐热构件的另一端的参考容器和测量样品容器的温度之间的差异的差示热量检测器 和参考容器的温度作为测量值。
    • 10. 发明授权
    • Composite charged-particle beam system
    • 复合带电粒子束系统
    • US07718981B2
    • 2010-05-18
    • US12134919
    • 2008-06-06
    • Haruo TakahashiYo YamamotoToshiaki Fujii
    • Haruo TakahashiYo YamamotoToshiaki Fujii
    • G01N23/00
    • H01J37/20H01J37/3056H01J2237/20242H01J2237/31745H01J2237/31749
    • There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel 1, an SEM lens-barrel 2, a gas ion beam lens-barrel 3, and a rotary sample stage 9 having an eucentric tilt mechanism and a rotating shaft 10 orthogonal to an eucentric tilt axis 8. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam 4, an electron beam 5 and a gas ion beam 6 intersect at a single point, an axis of the FIB lens-barrel 1 and an axis of the SEM lens barrel 2 are orthogonal to the eucentric tilt axis 8, respectively, and the axis of the FIB lens-barrel 1, an axis of the gas ion beam lens-barrel 3 and the eucentric tilt axis 8 are in one plane.
    • 提供了一种作为复合带电粒子束系统布置气体离子束装置,FIB和SEM以便有效地制备TEM样品的方法。 复合带电粒子束系统包括FIB透镜镜筒1,SEM透镜镜筒2,气体离子束透镜镜筒3以及具有偏心倾斜机构的旋转样品台9和与其垂直的旋转轴10 在复合带电粒子束系统中,使得聚焦离子束4,电子束5和气体离子束6在单点相交,FIB透镜镜筒的轴线 1并且SEM透镜镜筒2的轴线分别与偏心倾斜轴8正交,并且FIB透镜镜筒1的轴线,气体离子束透镜镜筒3的轴线和偏心倾斜轴线8是 在一架飞机上